KR100593883B1 - Light emission characteristic inspection device of light emitting device - Google Patents

Abstract

An apparatus capable of inspecting light emission characteristics of a light emitting device is disclosed.

This disclosed apparatus comprises: a first optical sensor for receiving light emitted from a light emitting element; A replaceable first band filter for passing light having a first peak wavelength and a first bandwidth corresponding to a standard light emitting device among light emitted from the light emitting device, and a second light receiving light passing through the first band filter A first filter unit having an optical sensor; And a computer for calculating a ratio between the first electrical signal photoelectrically converted by the first optical sensor and the second electrical signal photoelectrically converted by the second optical sensor.

With the above configuration, it is possible to determine whether the light emitting device is good or bad in real time in the mass production line of the light emitting device.

Description

Apparatus for testing lighting device

1 is a schematic diagram of a conventional LED inspection device.

2A is a schematic diagram of an apparatus for inspecting light emission characteristics of a light emitting device according to a first embodiment of the present invention.

2B is an enlarged view of the filter unit employed in the inspection device according to the present invention.

FIG. 3A is a graph showing light intensity according to wavelength for each red LED for each input voltage. FIG.

3B is a graph showing the standardization of FIG. 3A.

FIG. 4A is a graph illustrating light intensity according to wavelength for each blue LED for each input voltage. FIG.

FIG. 4B is a graph in which the peak wavelength shown in FIG. 4A is standardized.

FIG. 5A is a graph showing light intensity according to wavelength for each green LED for each input voltage. FIG.

FIG. 5B is a graph in which the peak wavelength shown in FIG. 5A is standardized.

FIG. 6A is a graph illustrating light intensity according to wavelengths for each input voltage of a white LED. FIG.

6B and 6C are graphs showing the standardization of the first and second peak wavelengths shown in FIG. 6A, respectively.

7 is a part of the structure change of the light emission characteristic inspection apparatus of the light emitting device according to the first embodiment of the present invention.

8 is a schematic diagram of an apparatus for inspecting light emission characteristics of a light emitting device according to a second embodiment of the present invention.

9 is a partial modification of the structure of the light emission characteristic inspection apparatus of the light emitting device according to the second embodiment of the present invention.

25 ... light emitting element, 30,43,62,67,72 ... light sensor

35,73 ... Reverse voltage transformer, 37,75 ... A / D converter

40, 60, 65, 70 ... filter unit, 44 housing

45,77 ... computer, 42,61,66,71 ... band filter

50, 51, 53 ... optical fiber, 54,55,81,82,83 ... beam splitter

The present invention relates to an apparatus for inspecting light emission characteristics of a light emitting device, and more particularly, to an apparatus capable of determining defective products by automatically measuring light emission characteristics in real time during a manufacturing process of a light emitting device.

Conventionally, it was visually discriminated whether the light emission characteristics of a light emitting element such as an LED, an LD, or an organic EL were poor. In particular, LEDs are produced in large quantities at a high speed. Such visual discrimination methods have a problem of inaccuracy, lack of consistency, and inefficiency due to visual differences, physical fatigue, and optical illusion of each individual.

Therefore, a device for automatically checking the LED light emission characteristics has been developed. As shown in FIG. 1, the device receives light emitted from the LED 10 by using a spectroscope 15 to capture the light by the CCD 17. As shown in FIG. The image captured by the CCD 17 is calculated using the computer 20 to obtain coordinate values of a color map.

However, the conventional apparatus has a problem in that the manufacturing cost is very high, and the inspection speed is very slow compared to the LED production speed, which results in the effect of inhibiting the LED manufacturing process.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides a light emitting characteristic inspection apparatus which can inspect the light emitting characteristics of a light emitting element in real time and automatically in the production line of the light emitting element, and whose structure is simple and inexpensive. There is a purpose.

In order to achieve the above object, the light emission characteristic inspection apparatus of the light emitting device according to the present invention, the first light sensor for receiving light emitted from the light emitting device; A replaceable first band filter for passing light having a first peak wavelength and a first bandwidth corresponding to a standard light emitting device among light emitted from the light emitting device, and a second light receiving light passing through the first band filter A first filter unit having an optical sensor; And a computer for calculating a ratio between the first electrical signal photoelectrically converted by the first optical sensor and the second electrical signal photoelectrically converted by the second optical sensor.

The apparatus may further include a second band filter for passing light having a second peak wavelength and a second band width corresponding to a standard light emitting device, and a second filter unit for receiving light passing through the second band filter; And a third filter unit having a third band filter for passing light having a third peak wavelength and a third band width corresponding to a standard light emitting element, and a third optical sensor for receiving light passing through the third band filter. It is characterized by including.

Preferably, the optical fiber is coupled to the first filter unit and the first optical sensor, respectively.

Preferably, the optical fiber is coupled to the first filter unit, the second filter unit, and the third filter unit, respectively.

The first, second and third filter units may further include an openable housing in which the first band filter and the first optical sensor, the second band filter and the second optical sensor, and the third band filter and the third optical sensor are accommodated. And the first to third band filters are detachable from the housing.

Hereinafter, an apparatus for inspecting light emission characteristics of a light emitting device according to an exemplary embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIG. 2A, an apparatus for inspecting light emission characteristics of a light emitting device according to the first exemplary embodiment of the present invention emits light from the first light sensor 30 and the light emitting device 25 that detect light emitted from the light emitting device 25. At least one optical filter unit 40 for filtering the light.

The light emitting element 25 may be, for example, a light emitting diode (LED), an LD, an organic EL, or the like.

As shown in FIG. 2B, the optical filter unit 40 includes a band filter 42 for passing light having a predetermined peak wavelength and a bandwidth among the light emitted from the light emitting element 25, and the band filter 42. It has a second optical sensor 43 for receiving the light passing through). The band filter 42 and the second optical sensor 43 are housed in a housing 44 that can be opened and closed, and the band filter 42 is replaceable.

The first and second optical fibers 50 and 51 for guiding the light emitted from the light emitting element 25 to the first optical sensor 30 and the band filter 40 respectively are the first optical sensor 30. And a band filter 40. The optical fibers 50 and 51 are for transmitting the light emitted from the light emitting device 25 with high efficiency. The optical fibers 50 and 51 may be made of a plastic optical fiber having a large diameter or a bundle of general optical fibers. For example, an optical fiber with a diameter of about 2 mm can be used.

In order to prevent loss of light entering through the optical fibers 30 and 40, it is preferable to polish the surface where the light is incident on the optical fiber.

The light emitted from the light emitting device 25 is first electric signal A photoelectrically converted by the first optical sensor 30 and the light emitted from the light emitting device 25 passes through the band filter 40. The second electric signal B, in which one light is photoelectrically converted by the second optical sensor 43, is input to the computer 45. Reversal for amplifying the first electrical signal A and the second electrical signal B between the first optical sensor 30 and the computer 45 and between the filter unit 40 and the computer 45, respectively. An A / D converter 37 for converting the intensifier 35 and the analog signal into a digital signal is provided. The reverse voltage transformer 35 amplifies the magnitude of the output electrical signal and ensures the linearity of the input electrical signal and the output electrical signal, thereby ensuring the linearity of the electrical signal with respect to the input optical signal.

It is preferable to use a coaxial cable 33 to transmit the electric signal photoelectrically converted by the first optical sensor 30 and the second optical sensor 43 to the computer 45.

The computer 45 calculates the ratio of the first electrical signal A and the second electrical signal B to determine whether the value is within a predetermined range obtained from the standard light emitting device, thereby determining whether the light emitting device is good or bad. Determine whether or not.

The technical background for performing the performance test of the light emitting device by the light emitting device inspection device of the light emitting device according to the present invention will be described as an example as follows.

According to the voltage applied to the LED to obtain the emitted light, the emission luminance (Irradiance or Intensity) value not only varies greatly, but also the emission color (or wavelength) varies slightly.

First, the spectral characteristics of the red LED are examined. Figure 3a is a graph showing the results of the irradiation of the intensity change of the emission spectrum with respect to the wavelength for each input voltage for the red LED. Here, the intensity change of the luminescence brightness was measured while changing the input voltage for the red LED to 1.6-2.2V.

3B is a graph illustrating results of normalizing a change in peak wavelength according to an input voltage. According to this graph, as the LED input voltage increases from 1.6V to 2.2V 0.6V, the position of the peak wavelength is shifted toward the longer wavelength by about 10.7 nm.

In addition, the change of the peak wavelength, the bandwidth, and the light intensity according to the input voltage in the red LED are summarized as follows.

  Voltage (v)   Peak wavelength (nm)   Bandwidth (nm)   Light intensity (a.u.)    1.6   657.7     20    0.01 (a) As the 0.6V increase, the position of the peak wavelength moves toward the long wavelength. (b) As the 0.6V increase, the light intensity increases by about 675 times.    1.8   660.6     20    1.00    2.0   663.0     20    4.29    2.2   668.4     19    6.75

According to Table 1, as the input voltage increased by 0.6V, the position of the peak wavelength was shifted toward the long wavelength by about 10.7 nm, and the light intensity increased by about 675 times. However, there was little change in the bandwidth with the increase of the input voltage.

Next, the emission characteristics of the blue LED will be described. For the blue LED, the light intensity change with wavelength was investigated while changing the input voltage to 2.6-3.2 V. FIG. 4A illustrates a light intensity change graph according to a wavelength for each input voltage, and FIG. 4B illustrates a standardized result of FIG. 4A, and shows a shift of a peak wavelength according to an input voltage.

In the blue LED, the peak wavelength, bandwidth, and light intensity change according to the input voltage are summarized as follows.

  Voltage (v)   Peak wavelength (nm)   Bandwidth (nm)   Light intensity (a.u.)    2.6   474     49    0.08 (a) As the 0.6V increase, the position of the peak wavelength moves toward the short wavelength. (b) As the 0.6V increase, the light intensity increases by about 133 times.    2.8   467     40    1.00    3.0   463     33    2.99    3.2   461     32    10.69

 According to Table 2, as the input voltage increased by about 0.6V, the position of the peak wavelength was shifted toward the short wavelength by about 13 nm, and the light intensity increased by about 133 times. In addition, as the input voltage was increased, the bandwidth of the wavelength was reduced to about 17 nm.

Next, the emission characteristics of the green LED will be described. For the green LED, the change of the light intensity with wavelength was investigated while changing the input voltage to 2.0-3.0V. FIG. 5A illustrates a graph of light intensity changes according to wavelengths for each input voltage, and FIG. 5B illustrates a standardized result of FIG. 5A, and shows a shift of a peak wavelength according to an input voltage.

In the green LED, the peak wavelength, the bandwidth, and the light intensity according to the input voltage are summarized as follows.

  Voltage (v)   Peak wavelength (nm)   Bandwidth (nm)   Light intensity (a.u.)    2.0    556     20    0.61 (a) As the 1.0 V increase, the position of the peak wavelength moves toward the longer wavelength. (b) As the 1.0 V increase, the light intensity increases by about 5.1 times.    2.2    558     20    1.00    2.4    560     20    1.59    2.6    561     20    2.17    3.0    563     20    3.13

According to Table 3, as the input voltage increased by about 1.0V, the position of the peak wavelength was shifted toward the short wavelength by about 7 nm, and the light intensity increased by about 5.1 times. In addition, as the input voltage increases, the bandwidth of the wavelength hardly changes.

Next, the light emission characteristics of the white LED will be described. For white LEDs, the light intensity change with wavelength was investigated while changing the input voltage to 3.0-3.6V. FIG. 6A illustrates a graph of light intensity changes according to wavelengths for each input voltage. FIG. In white LEDs, the peak wavelength appears in two places. FIG. 6B is a graph normalized to the first peak wavelength, and FIG. 6C is a graph normalized to the second peak wavelength. The shift of the peak wavelength according to the input voltage can be seen.

In the white LED, the peak wavelength, bandwidth, and light intensity change according to the input voltage are summarized as follows.

Voltage (v) First peak wavelength (nm) Second peak wavelength (nm) First bandwidth (nm)  Second bandwidth (nm) First light intensity (a.u.) Second light intensity (a.u.) 1st light intensity / 2nd light intensity    3.0   468.7   565.0  34    27 0.16 0.19 1.19 (a) The position of the first peak wavelength shifts toward shorter wavelengths with increasing 0.6 V. (b) The position of the second peak wavelength shifts toward shorter wavelengths with increasing 0.6 V. (c) The light intensity is approximately 24.2 times at the first peak wavelength. Increase, about 23.0 times greater at the second peak wavelength    3.2   465.0  561.6  33    20 1.00 1.22 1.22    3.4   463.6  560.7  30    17 1.86 2.49 1.34    3.6   463.3  557.0  23    23 3.86 4.37 1.13

According to Table 4, as the input voltage increases by about 0.6V, the position of the first peak wavelength is shifted toward the short wavelength by about 5.4 nm, and the position of the second peak wavelength is shifted by about 8.0 nm to the short wavelength. The light intensity of the first peak wavelength increases by about 24.2 times, and the light intensity of the second peak wavelength increases by 23.0 times. As the input voltage increases, the first bandwidth for the first peak wavelength is reduced.

As described above, LEDs have specific values of light intensity, peak wavelength, and bandwidth according to input voltage, and these characteristics are similar to LEDs as well as light emitting devices such as LD or organic EL. Therefore, by analyzing the spectrum according to the input voltage of the standard light emitting device, it is possible to determine the standard light intensity, the standard peak wavelength and the standard bandwidth. The band filter 42 allows light having the standard peak wavelength and the bandwidth to pass.

Then, the first optical sensor 30 receives the light emitted from the light emitting element 25 as it is to measure the light intensity, and the second optical sensor 43 the light of the light passing through the band filter 42 The intensity is measured. More light passing through the band filter 42 may be regarded as having a performance closer to that of the standard light emitting device. On the other hand, when the luminance is large or the peak wavelength is different compared to other products, the amount of light passing by the band filter 42 is reduced.

According to this principle, a process of determining good / failure of the light emitting device by using the light emission characteristic inspection apparatus of the light emitting device according to the first embodiment of the present invention will be described.

For example, LEDs are often used together with a large number of LEDs rather than being used alone. In such a case, when the brightness of a large number of LEDs is relatively low or high compared to other LEDs, the LEDs may be regarded as poor in light emission characteristics. Therefore, the standard LED is determined by sampling in the LED production line, and the light intensity, peak wavelength, and bandwidth for the standard LED are measured by measuring and analyzing the spectrum according to the voltage of the standard LED. Next, a band filter 42 for passing light having a peak wavelength and a bandwidth corresponding to this standard LED is prepared.

Next, the light emitted from the light emitting element, for example, the LED 25 is detected by the first optical sensor 30, and the light passing through the band filter 42 by the second optical sensor 43 Is detected. The first electrical signal A photoelectrically converted by the first optical sensor 30 and the second electrical signal B photoelectrically converted by the second optical sensor 43 are connected to the A / D converter 37. It is converted into a digital signal through the input to the computer (45).

The computer 45 compares and analyzes the first electrical signal A and the second electrical signal B in real time and makes a good decision if these signal ratios are within a predetermined range, and makes a bad decision if it is out of the predetermined range. In particular, when it is determined that the defect is determined, for example, the horn is sounded or a red light comes on to display the defect determination. The first electrical signal A, the second electrical signal B and the ratio thereof are stored in the computer 45 in real time as data.

Meanwhile, the light emitted from the light emitting element 25 is transmitted to the first optical sensor 30 and the filter unit 40. Instead of the optical fibers 50 and 51, the first beam is shown in FIG. It may be replaced by the splitter 54 and the second beam splitter 55. The first beam splitter 54 and the second beam sputter 55 may be installed in the housing 56. The first optical sensor 30 and the filter unit 40 are coupled to the housing 56.

Light emitted from the light emitting element 25 is incident to the first beam splitter 54 through the optical fiber 53. The first beam splitter 54 transmits some light and reflects the remaining light. Light passing through the first beam splitter 54 is transmitted to the first optical sensor 30. Meanwhile, the light reflected by the first beam splitter 54 is reflected by the second beam splitter 55 and transmitted to the filter unit 40. Here, the second beam splitter 55 may be replaced with a total reflection mirror.

The electrical signal photoelectrically converted by the first optical sensor 30 and the second optical sensor 43 of the filter unit 40 is transferred to the computer 45 via the reverse voltage transformer 35 and the A / D converter 37. Is entered. Subsequently, the good / bad determination process for the light emitting device is as described above.

Next, the light emission characteristic inspection apparatus of the light emitting device according to the second embodiment is shown in FIG. This device can be advantageously applied especially when checking the luminescence properties for white light emitting elements, for example white LEDs.

The light emission characteristic inspection apparatus according to the second embodiment includes a first filter unit 60, a second filter unit 65, and a third filter unit 70 for receiving the light emitted from the light emitting element 25. As described with reference to FIG. 2B, the first to third filter units 60, 65 and 70 are respectively the first, second and third band filters 61, 66, 71 and the third to third filters. Fifth optical sensors 62, 67, 72.

Each of the first to third filter units 60 defines a peak wavelength and a bandwidth of a standard light emitting device, and has a band filter for passing light having the peak wavelength and the bandwidth. Here, the standard light emitting device is a white light emitting device, and has a peak wavelength and a bandwidth corresponding to red, green, and blue. For example, the first band filter 61 may pass light having a red wavelength, the second band filter 66 may pass light having a green wavelength, and the third band filter 72 may have light having a blue wavelength. Pass it through. The first to third band filters 61, 66 and 72 measure and analyze the peak wavelength and the bandwidth of the standard light emitting device, and pass only light having a predetermined peak wavelength and bandwidth according to the result. It is equipped to let. Optical fibers 75 are coupled to the first to third filter units 60, 65, 70, respectively, and the signals photoelectrically converted by the third to fifth optical sensors 62, 67, and 72 are An input computer 77 is provided.

A reverse voltage converter 73 and an A / D converter 74 may be further provided between the first to third filter units 60, 65, 70, and the computer 77.

The light emitted from the light emitting device 25 is incident to the first to third filter units 60, 65, 70 through the optical fiber 78. The light passing through the first to third band filters 61, 66 and 71 is photoelectrically converted by the third to fifth optical sensors 62, 67 and 72, respectively. When the photoelectrically converted signals are referred to as A, B, and C, respectively, the electrical signals are amplified by the reverse voltage generator 73, and are converted into digital signals by the A / D converter 75 to the computer 77. Is entered.

)가 표준이 되는 소정의 범위 안에 있는지를 판단하여 발광소자의 양호/불량 판정을 내린다. 더 나아가, 이러한 값들이 표준 범위에서 벗어난 정도에 따라 발광소자의 발광 특성에 대한 등급을 정할 수 있다. 특히, 백색 발광소자에 대해서는 상기 값들을 이용하여 색좌표를 측정할 수 있다. In the computer 77, the ratio of each signal to the sum signal of the signals A, B, and C (

) Is judged whether or not is within a predetermined range, which becomes a standard, to determine whether the light emitting element is good or bad. Furthermore, it is possible to rank the light emitting characteristics of the light emitting device according to the extent to which these values deviate from the standard range. In particular, the color coordinates of the white light emitting device may be measured using the above values.

Meanwhile, in the second embodiment, the first to third filter units 60, 65 and 70 may be selectively used. That is, since the filter unit is openable and detachable and the band filter is detachable from the filter unit, only the necessary band filter can be selected and configured. For example, the first filter unit 60 is used as it is, and the second filter unit 65 removes the second band filter 66 and leaves only the fourth optical sensor 67. In addition, the third filter unit 70 is not used to stop the power supply. As a result, the same operation and function as the structure described with reference to FIG. Only the light passing through the filter 61 is detected through the first filter unit 60, and the light emitted from the light emitting element 25 is detected as it is through the second filter unit 65. Here, the band filter 61 of the first filter unit 60 may be selected as a filter corresponding to the standard light emitting device for the light emitting device to be inspected.

The ratio of the A signal photoelectrically converted through the first filter unit 60 and the B signal photoelectrically converted through the fourth optical sensor 67 of the second filter unit 65 is obtained, and this value is a standard range. The light emitting property of the light emitting device can be inspected depending on whether it is included therein. By doing in this way, the light emission characteristic with respect to the light emitting element of a monochromatic wavelength can be examined.

As described above, the light emission characteristic inspection apparatus of the light emitting device according to the second embodiment of the present invention selectively uses the first to third filter units 60, 65, and 70 to display not only the white light emitting device but also the monochromatic wavelength. The characteristics of the light emitting device can be inspected. One device can be used conveniently and versatile.

9 shows another example of the inspection apparatus according to the second embodiment of the present invention. Here, the first to third beam splitters separating the light emitted from the light emitting element 25 into three paths between the light emitting element 25 and the first to third filter units 60, 65, 70. (81) (82) 83 are provided. In this case, the third beam splitter 83 may be replaced by a total reflection mirror. The first to third beam splitters 81 and 82 and 83 are installed in the housing 85, and the first to third filter units 60 and 65 are disposed on one side wall of the housing 85. 70) are combined.

In addition, the optical fiber 80 for guiding the light emitted from the light emitting element 25 to the first beam splitter 81 may be further provided. The light emitted from the light emitting device 25 is incident on the first beam splitter 81 through the optical fiber 80, and some light is transmitted, and the remaining light is reflected. The light passing through the first beam splitter 81 is incident to the first filter unit 60, and the reflected light is incident to the second beam splitter 82. The partial light reflected by the second beam splitter 82 is incident on the second filter unit 65, and the transmitted light is reflected by the third beam splitter 83 and is incident on the third filter unit 70.

The A, B, and C signals photoelectrically converted through the first to third filter units 60, 65, and 70 are transferred to the computer 77 via the reverse voltage converter 73 and the A / D converter 75. Is entered.

The first to third filter units 60 and 65 and 70 are disposed on a traveling path of each light that passes through the first to third beam splitters 81, 82, 83.

In the present invention, the optical fibers 50, 51, 78, 80 are preferably disposed as close as possible from the light emitting device 25, it is preferably located in the upper direction of the light emitting device. In addition, although not shown, a holder for fixing the optical fibers 50, 51, 78, 80 is provided at a suitable position.

As described above, according to the light emission characteristic inspection apparatus of the light emitting device according to the present invention, it is possible to simply determine whether the light emitting device such as LED, LD, organic EL is defective by using an optical sensor and a band filter. The manufacturing cost is reduced. In addition, according to the present invention, since the inspection speed is very fast, it is possible to determine whether the light emitting device is good or bad in real time in the manufacturing line of the light emitting device. Therefore, the yield of a light emitting element can be improved and a light emitting element of good quality can be provided.

In addition, the inspection device of the present invention is to be able to attach and detach the filter in the filter unit can be more accurate inspection by replacing the filter according to the light emitting device, and by detaching the filter selectively, a single light emitting device with a single inspection device It is very economical because it can inspect the luminescence properties for and the white light emitting device.

Claims (10)

A first optical sensor for receiving light emitted from the light emitting element; A replaceable first band filter for passing light having a first peak wavelength and a first bandwidth corresponding to a standard light emitting device among light emitted from the light emitting device, and a second light receiving light passing through the first band filter A first filter unit having an optical sensor; And a computer for calculating a ratio of the first electrical signal photoelectrically converted by the first optical sensor and the second electrical signal photoelectrically converted by the second optical sensor. . A first band filter for passing the light having a first peak wavelength and a first bandwidth corresponding to the standard light emitting device among the light emitted from the light emitting device, and a first optical sensor for receiving the light passing through the first band filter A first filter unit having a; A second filter unit having a second band filter for passing light having a second peak wavelength and a second band width corresponding to the standard light emitting element, and a second optical sensor for receiving light passing through the second band filter; ; A third filter unit including a third band filter for passing light having a third peak wavelength and a third band width corresponding to the standard light emitting element, and a third optical sensor for receiving light passing through the third band filter ; And a computer for calculating a ratio of each electric signal to the sum of the first, second and third electric signals photoelectrically converted from the first, second and third optical sensors. Characteristic inspection device. The method of claim 1, The light emitting device of claim 1, wherein an optical fiber is coupled to each of the first filter unit and the first optical sensor. The method of claim 2, The light emission characteristic inspection apparatus of a light emitting device, characterized in that the optical fiber is coupled to the first filter unit, the second filter unit and the third filter unit, respectively. The method of claim 2, The first, second and third filter units may further include an openable housing in which the first band filter and the first optical sensor, the second band filter and the second optical sensor, and the third band filter and the third optical sensor are accommodated. And the first to third band filters are detachable from the housing. The method of claim 5, And the first to third filter units are selectively operable by on-off control of the first to third optical sensors. The method of claim 1, And a reverse voltage generator and an A / D converter between the first filter unit and the computer and between the first optical sensor and the computer, respectively. The method according to any one of claims 2, 4, 5 or 6, And a reverse voltage generator and an A / D converter, respectively, between the first to third filter units and the computer. The method of claim 1, A first beam splitter that transmits a part of the light emitted from the light emitting element to the first optical sensor, and a second beam splitter or total reflection mirror that reflects the light reflected from the first beam splitter and sends the reflected light to the first filter unit Apparatus for inspecting luminescence properties of a light emitting device further comprising. The method of claim 2, A first beam splitter that transmits a part of the light emitted from the light emitting element to the first filter unit, a second beam splitter that reflects a part of the light reflected by the first beam stream to the second filter unit; And a third beam splitter or a total reflection mirror which reflects the light transmitted through the second beam sputterer and sends the light to the third filter unit.

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