KR100559523B1 - Cell manufacturing method of flash memory device - Google Patents

Abstract

BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a cell manufacturing method of a flash memory device, and in particular, the present invention provides a tunnel oxide layer on a semiconductor substrate, a floating gate-shaped floating gate formed thereon, and a source / drain overlapping the floating gate edge in the substrate. A junction layer is formed, an inter-gate insulating film is formed on the substrate on which the floating gate is formed, and an inverted-shaped control gate is formed on the inter-gate insulating film to cover the upper side of the floating gate. Therefore, according to the present invention, the floating gate of the gate type and the inverted gate type control gate form a cell forming a stack structure, thereby increasing program efficiency by increasing the coupling ratio between the two gates without increasing the overall cell size. .

Flash memory, ETOX cell, coupling ratio, 凹, 凸

Description

Cell manufacturing method of flash memory device {METHOD FOR MANUFACTURING FLASH MEMORY CELL}

1 is a vertical cross-sectional view showing an ETOX cell structure of a flash memory device according to the prior art,

2 is a vertical sectional view showing an ETOX cell structure of a flash memory device according to the present invention;

3A-3I are process flow diagrams illustrating a method for manufacturing an ETOX cell of a flash memory device in accordance with the present invention.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a flash memory device, and more particularly, to a cell manufacturing method of a flash memory device for increasing a coupling ratio between a floating gate and a control gate in an ETOX (EPROM Thin OXide) cell of a flash memory.

In general, non-volatile memory has the advantage that the stored data is not lost even if the power is interrupted, so it is widely used for data storage of PC Bios, set-top box, printer, and network server. It is used a lot.

Among such nonvolatile memories, an electrically erasable programmable read-only memory (EEPROM) type flash memory device that has a function of electrically erasing data of memory cells in a batch or sector-by-sector is a channel column electronic device on a drain side during programming. The threshold voltage of the cell transistor is increased by forming hot electrons to accumulate electrons in the floating gate. On the other hand, the erase operation of the flash memory device lowers the threshold voltage of the cell transistor by generating a high voltage between the source / substrate and the floating gate to release electrons accumulated in the floating gate.

A typical cell structure of an EEPROM type flash memory device is classified into an ETOX (EPROM Thin OXide) cell having a simple stack structure and a split gate type cell composed of two transistors per cell. The ETOX cell structure is a structure in which a floating gate constituting a gate and a control gate to which a driving power is applied are stacked, whereas a split gate type cell structure includes a selection transistor and two cell transistors. By using one control gate, a part of the control gate overlaps with the floating gate, and the other part of the control gate is disposed on the substrate surface horizontally.

1 is a vertical cross-sectional view showing an ETOX cell structure of a flash memory device according to the prior art. Referring to FIG. 1, the conventional ETOX cell transistor has a structure as follows. A tunnel oxide 12, a floating gate 14, an inter-gate insulating film 16, and a control gate 18 that are sequentially stacked thereon are formed on an active region of the semiconductor substrate 10. The source / drain 20 spaced apart from each other with a channel region under the floating gate 14 in the semiconductor substrate 10 is formed therebetween.

In the flash memory device having the ETOX cell structure, a programming voltage is applied through a word line connected to the control gate 18 and a bit line connected to the drain 20 during programming. Then, the electrons of the drain 20 are injected into the floating gate 14 through the tunnel oxide layer 12 in a hot carrier manner to perform a program of the cell transistor. When erasing data, an erase voltage is applied through a source line connected to the source 20. Then, the electrons injected into the floating gate 14 are again emitted to the channel through the tunnel oxide layer 12, and the erase is performed by lowering the threshold voltage of the cell transistor.

However, in the conventional ETOX cell, since the floating gate 14 and the control gate 18 form a stack structure, the coupling ratio between the two gates 14 and 18 is limited. The coupling ratio refers to the ratio of the voltage applied to the floating gate 14 with respect to the voltage applied to the control gate 18. The larger the ratio, the greater the efficiency of the program.

Therefore, the conventional ETOX cell has a problem that the capacitance of the cell is lowered by the floating gate 14 and the control gate 18 having the same contact area, thereby decreasing program efficiency.

An object of the present invention is to couple the two gates without increasing the overall cell size by forming a cell structure of the stacked structure of the gate-shaped floating gate and the inverted gate-shaped control gate to solve the problems of the prior art as described above A method of manufacturing a cell of a flash memory device capable of increasing program efficiency by increasing a ring ratio is provided.

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In order to achieve the above object, the present invention provides a cell manufacturing method of a flash memory device, the method comprising: forming a tunnel oxide film on a semiconductor substrate, forming a conductive film on the tunnel oxide film, and etching the conductive film using an etching process using a first mask pattern Forming at least one fin groove in the trench, forming a planarization film on the conductive film, and forming a fin-shaped floating gate by an etching process using a second mask pattern on the planarization film and the conductive film of the fin groove. Removing the unetched planarization film, forming a source / drain junction layer overlapping the floating gate edge in the substrate, forming an inter-gate insulating film on the substrate on which the floating gate is formed, An inverted-shape control gate is formed on the insulating film to surround the upper side of the floating gate. It includes the steps:

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

2 is a vertical cross-sectional view showing an ETOX cell structure of a flash memory device according to the present invention. Referring to FIG. 2, the ETOX cell of the present invention is a semiconductor substrate 100, in which a tunnel oxide layer 102 is formed on a silicon substrate and a source / drain junction layer 116 separated from each other on a substrate under the tunnel oxide layer 102. Is formed and a V-shaped floating gate 104 ″ is formed on the tunnel oxide layer 102 so as to overlap the edge of the source / drain junction layer 116. An inter-gate insulating film 118 is formed on the floating gate 104 ″, and the control gate 120 having an inverted X structure surrounding the upper surface of the floating gate 104 ″ with the inter-gate insulating film 118 interposed therebetween. ') Is formed.

Therefore, the present invention does not change the cell size because the control gate 120 'of the ETOX cell wraps around the top surface of the floating gate 104 " while its side is self-aligned. Without increasing the coupling ratio between the gates 120 ', 104' '.

3A to 3I are process flowcharts illustrating a method for manufacturing an ETOX cell of a flash memory device according to the present invention. Referring to these figures, the ETOX cell manufacturing method of the present invention is as follows.

First, as shown in FIG. 3A, a tunnel oxide film 102 is formed over a silicon substrate as a semiconductor substrate 100, and a doped polysilicon film is deposited thereon as a conductive film 104 thereon. The photolithography process is performed to form a mask pattern 106 for the first floating gate on the conductive layer 104.

Next, the conductive layer 104 is etched by a predetermined thickness, for example, 500 ns to 1500 ns by a dry etching process using the first mask pattern 106 to form at least one groove 108 as shown in FIG. 3b. Then, the first mask pattern 106 of FIG. 3A is removed.

Subsequently, as shown in FIG. 3C, a silicon nitride oxide film (SiON) is formed as the planarization film 110 on the conductive film 104 having the trench groove 108. In this case, the planarization film 110 is formed to a thickness sufficient to cover the groove 108 of the conductive film 104. Next, a photolithography process is performed to form a mask pattern 112 for the second floating gate on the planarization layer 110. In this case, the second mask pattern 112 overlaps each of the grooves) and 凸 by 1/2.

As shown in FIG. 3D, the planarization layer 110 and the conductive layer 104 are patterned by a dry etching process using the mask pattern 112 for the second floating gate to form a V-shaped floating gate 104 ′. In this case, the patterned planarization layer is represented as 110 '.

Next, when the second mask pattern 112 and the unetched planarization film 110 ′ are removed, the floating gate 104 ′ in which the conductive film is patterned in the shape of a trench is formed in the tunnel oxide film 102 as shown in FIG. 3E.

Subsequently, as shown in FIG. 3F, a source / drain ion implantation process is performed on the entire surface of the substrate to form a source / drain junction layer 116 overlapping the edge of the floating gate 104 ′ in the substrate. For example, the source / drain ion implantation process ion implants with n + impurities (P, As).

3G, an inter-gate insulating film 118 is formed over the entire substrate. In this case, the inter-gate insulating film 118 is formed of a single insulating film or at least two or more insulating films. In the case of a multilayer insulating film, an oxide Nitride Oxide (ONO) film is used. For example, when the inter-gate insulating film 118 is an ONO film, the lower silicon oxide layer is 80 kV, the silicon nitride layer is 80 kV, and the upper silicon oxide film is 350 kV.

Subsequently, as illustrated in FIG. 3H, doped polysilicon is deposited as a conductive film 120 on the inter-gate insulating film 118 as 5000 kPa to 6000 kPa, and then the surface is planarized by a chemical mechanical polishing (CMP) process. The photo process is performed to form the control gate mask pattern 122 on the conductive layer 120.

Then, a dry etching process using the control gate mask pattern 122 is performed to pattern the conductive layer 120 to cover the upper side of the floating gate 104 ′ with the inter-gate insulating layer 118 therebetween. Forming the control gate 120 'and then patterning the inter-gate insulating film 118 and the floating gate 104' sequentially self-aligned (118 ', 104 ") sequentially, as shown in FIG. 3I. The ETOX cell is complete.

As described above, the present invention forms an ETOX cell in which the floating type gate and the inverted X-type control gate form a stacked structure, thereby increasing the inter-gate coupling ratio without increasing the overall cell size, thereby increasing the capacitance of the cell. Can be greatly increased, thereby improving the program efficiency.

On the other hand, the present invention is not limited to the above-described embodiment, various modifications are possible by those skilled in the art within the spirit and scope of the present invention described in the claims to be described later.

Claims (4)

delete delete In the cell manufacturing method of a flash memory device, Forming a tunnel oxide film on the semiconductor substrate; Forming a conductive film on the tunnel oxide film and forming at least one fin groove in the conductive film by an etching process using a first mask pattern; Forming a planarization layer on the conductive layer; Forming a gate-shaped floating gate in an etching process using a second mask pattern on the planarization film and the conductive film of the trench groove; Removing the unetched planarization layer; Forming a source / drain junction layer in said substrate, said source / drain junction layer overlapping said floating gate edge; Forming an inter-gate insulating film on the substrate on which the floating gate is formed; Forming a V-shaped control gate inverted to surround the upper side of the floating gate on the inter-gate insulating layer Cell manufacturing method of a flash memory device comprising a. delete

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