KR100456342B1 - 반도체 칩의 수냉식 냉각 블록 - Google Patents
반도체 칩의 수냉식 냉각 블록 Download PDFInfo
- Publication number
- KR100456342B1 KR100456342B1 KR10-2002-0007428A KR20020007428A KR100456342B1 KR 100456342 B1 KR100456342 B1 KR 100456342B1 KR 20020007428 A KR20020007428 A KR 20020007428A KR 100456342 B1 KR100456342 B1 KR 100456342B1
- Authority
- KR
- South Korea
- Prior art keywords
- heat transfer
- semiconductor chip
- refrigerant
- cooling block
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/16—Constructional details or arrangements
- G06F1/20—Cooling means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D2015/0291—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes comprising internal rotor means, e.g. turbine driven by the working fluid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
Claims (5)
- 반도체 칩과 접촉되는 열전달판과, 상기 열전달판과 결합되어 상기 열전달판의 열을 식히는 냉매를 수용하고, 상기 냉매의 유동이 가능하도록 일측에 냉매 투입구와 타측에 냉매 배출구가 형성되는 케이스 및 상기 열전달판과 케이스를 밀봉시키는 밀봉수단을 구비하여 이루어지는 반도체 칩의 수냉식 냉각 블록에 있어서,상기 열전달판은, 열전도율이 우수한 금속재질로 제작되고, 전체적으로 평평한 판형상이며, 반도체 칩과 접촉하는 접촉면의 반대측 표면에 냉매와의 열전달면적을 높이고, 냉매의 난류흐름을 유발하며, 유속이 느려지더라도 열전달계수가 떨어지지 않도록 냉매와 접촉되는 표면에 다수개의 돌기가 돌출되어 형성되는 것을 특징으로 하는 반도체 칩의 수냉식 냉각 블록.
- 제 1항에 있어서, 상기 열전달판은,반도체 칩과 접촉하는 접촉면에 단열재로 둘러싸인온도센서를 설치하고, 상측 전반에 균일하게돌기를 돌출 형성하며, 상기 돌기의 일측에 형성하여 냉매의 흐름을 "U"형 곡선을 이루어 흐르도록 안내하는가이드부재를 형성하는 것을 특징으로 하는 반도체 칩의 수냉식 냉각 블록.
- 제 1항에 있어서,상기 케이스는, 사용자가 육안으로 내부 상황을 확인할 수 있도록 투명재질로 제작되는 것을 특징으로 하는 반도체 칩의 수냉식 냉각 블록.
- 제 1항에 있어서,상기 케이스 내부에는, 흐르는 냉매와 충돌에 의해 회전하도록 하여 그 회전정도를 인지하여 냉매의 흐름량을 측정할 수 있도록 하는 임펠러를 더 포함하여 이루어지는 것을 특징으로 하는 반도체 칩의 수냉식 냉각 블록.
- 제 1항에 있어서,상기 케이스를 반도체 칩에 밀착시키도록 반도체 칩 안착판의 걸림돌기에 걸리는 좌우 걸림판;상기 좌우 걸림판의 슬라이딩 운동이 자유로워서 상기 좌우 걸림판의 폭이 조절되도록 양측에 레일이 형성되는 가이드판; 및상기 가이드판의 중심을 관통하여 상기 가이드판을 반도체 칩방향으로 가압하는 조임나사;를 더 포함하여 이루어지는 것을 특징으로 하는 반도체 칩의 수냉식 냉각 블록.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0007428A KR100456342B1 (ko) | 2002-02-08 | 2002-02-08 | 반도체 칩의 수냉식 냉각 블록 |
US10/241,132 US6664627B2 (en) | 2002-02-08 | 2002-09-11 | Water cooling type cooling block for semiconductor chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0007428A KR100456342B1 (ko) | 2002-02-08 | 2002-02-08 | 반도체 칩의 수냉식 냉각 블록 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030067309A KR20030067309A (ko) | 2003-08-14 |
KR100456342B1 true KR100456342B1 (ko) | 2004-11-12 |
Family
ID=27656422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2002-0007428A Expired - Fee Related KR100456342B1 (ko) | 2002-02-08 | 2002-02-08 | 반도체 칩의 수냉식 냉각 블록 |
Country Status (2)
Country | Link |
---|---|
US (1) | US6664627B2 (ko) |
KR (1) | KR100456342B1 (ko) |
Cited By (1)
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---|---|---|---|---|
WO2014181984A3 (ko) * | 2013-05-10 | 2015-04-09 | 박동식 | 발열체 냉각장치 |
Families Citing this family (45)
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JP4244703B2 (ja) * | 2003-05-26 | 2009-03-25 | パナソニック株式会社 | 冷却装置 |
WO2007032056A1 (ja) * | 2005-09-13 | 2007-03-22 | Mitsubishi Denki Kabushiki Kaisha | ヒートシンク |
US7515418B2 (en) * | 2005-09-26 | 2009-04-07 | Curtiss-Wright Controls, Inc. | Adjustable height liquid cooler in liquid flow through plate |
US7414845B2 (en) * | 2006-05-16 | 2008-08-19 | Hardcore Computer, Inc. | Circuit board assembly for a liquid submersion cooled electronic device |
US20080017355A1 (en) * | 2006-05-16 | 2008-01-24 | Hardcore Computer, Inc. | Case for a liquid submersion cooled electronic device |
US7403392B2 (en) * | 2006-05-16 | 2008-07-22 | Hardcore Computer, Inc. | Liquid submersion cooling system |
US9453691B2 (en) * | 2007-08-09 | 2016-09-27 | Coolit Systems, Inc. | Fluid heat exchange systems |
US8746330B2 (en) | 2007-08-09 | 2014-06-10 | Coolit Systems Inc. | Fluid heat exchanger configured to provide a split flow |
US7688589B2 (en) * | 2007-11-01 | 2010-03-30 | Asia Vital Components Co., Ltd. | Water cooled heat dissipation module for electronic device |
KR100906186B1 (ko) * | 2009-03-31 | 2009-07-06 | 지성수 | 수냉식 방열장치 및 이의 제조방법 |
DE102010029869A1 (de) * | 2010-06-09 | 2011-12-15 | Zf Friedrichshafen Ag | Kühlvorrichtung |
US9139931B2 (en) | 2011-05-11 | 2015-09-22 | Memc Singapore Pte. Ltd. | Directional solidification furnace heat exchanger |
US10365667B2 (en) | 2011-08-11 | 2019-07-30 | Coolit Systems, Inc. | Flow-path controllers and related systems |
DE102011052707A1 (de) * | 2011-08-15 | 2013-02-21 | Pierburg Gmbh | Kühlvorrichtung für ein thermisch belastetes Bauteil |
JP5953206B2 (ja) * | 2011-11-11 | 2016-07-20 | 昭和電工株式会社 | 液冷式冷却装置およびその製造方法 |
US9164388B2 (en) | 2012-04-10 | 2015-10-20 | Kla-Tencor Corporation | Temperature control in EUV reticle inspection tool |
US12366870B2 (en) | 2013-03-15 | 2025-07-22 | Coolit Systems, Inc. | Flow-path controllers and related systems |
TWI531795B (zh) | 2013-03-15 | 2016-05-01 | 水冷系統公司 | 感測器、多工通信技術及相關系統 |
JP6244646B2 (ja) * | 2013-04-04 | 2017-12-13 | 睦月電機株式会社 | 熱交換器 |
CN103426841A (zh) * | 2013-07-02 | 2013-12-04 | 北京睿德昂林新能源技术有限公司 | 一种功率半导体器件冷却装置 |
US10415597B2 (en) | 2014-10-27 | 2019-09-17 | Coolit Systems, Inc. | Fluid heat exchange systems |
JP6482955B2 (ja) * | 2015-06-02 | 2019-03-13 | 昭和電工株式会社 | 液冷式冷却装置 |
AU2017244041B2 (en) | 2016-03-30 | 2022-12-01 | Marine Canada Acquisition Inc. | Vehicle heater and controls therefor |
WO2017221230A1 (en) * | 2016-06-23 | 2017-12-28 | Celem Passive Components Ltd | Capacitor onto cooling device mounting system |
JP7130434B2 (ja) * | 2018-05-24 | 2022-09-05 | 三井化学株式会社 | 冷却ジャケット |
US11101193B2 (en) * | 2018-11-13 | 2021-08-24 | Toyota Motor Engineering & Manufacturing North America, Inc. | Power electronics modules including integrated jet cooling |
US11662037B2 (en) | 2019-01-18 | 2023-05-30 | Coolit Systems, Inc. | Fluid flow control valve for fluid flow systems, and methods |
JP7193730B2 (ja) * | 2019-03-26 | 2022-12-21 | 三菱電機株式会社 | 半導体装置 |
US11473860B2 (en) | 2019-04-25 | 2022-10-18 | Coolit Systems, Inc. | Cooling module with leak detector and related systems |
GB2584991B (en) | 2019-05-21 | 2022-01-26 | Iceotope Group Ltd | Cold plate |
US10966338B1 (en) | 2020-03-11 | 2021-03-30 | Peter C. Salmon | Densely packed electronic systems |
US11393807B2 (en) | 2020-03-11 | 2022-07-19 | Peter C. Salmon | Densely packed electronic systems |
US12302497B2 (en) | 2020-03-11 | 2025-05-13 | Peter C. Salmon | Densely packed electronic systems |
US11546991B2 (en) | 2020-03-11 | 2023-01-03 | Peter C. Salmon | Densely packed electronic systems |
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CN116075111A (zh) * | 2021-11-04 | 2023-05-05 | 英业达科技有限公司 | 冷却液流量控制装置 |
EP4188043B1 (en) | 2021-11-29 | 2025-04-02 | Ovh | Method for assembling a liquid cooling assembly of a family of liquid cooling assemblies |
CN114258259B (zh) * | 2021-12-01 | 2024-08-20 | 武汉船用电力推进装置研究所(中国船舶重工集团公司第七一二研究所) | 一种水冷组件的安装工艺 |
US12200914B2 (en) | 2022-01-24 | 2025-01-14 | Coolit Systems, Inc. | Smart components, systems and methods for transferring heat |
US11523543B1 (en) | 2022-02-25 | 2022-12-06 | Peter C. Salmon | Water cooled server |
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- 2002-09-11 US US10/241,132 patent/US6664627B2/en not_active Expired - Fee Related
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JPH0730027A (ja) * | 1993-07-12 | 1995-01-31 | Dainippon Screen Mfg Co Ltd | 基板の冷却装置 |
US6166907A (en) * | 1999-11-26 | 2000-12-26 | Chien; Chuan-Fu | CPU cooling system |
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WO2014181984A3 (ko) * | 2013-05-10 | 2015-04-09 | 박동식 | 발열체 냉각장치 |
Also Published As
Publication number | Publication date |
---|---|
KR20030067309A (ko) | 2003-08-14 |
US6664627B2 (en) | 2003-12-16 |
US20030151130A1 (en) | 2003-08-14 |
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