KR100423879B1 - Method for Access to The Status-information of Producing devices by means of Internet and The System - Google Patents

Abstract

The present invention relates to a method and a system for accessing status information of a production facility using the Internet. More particularly, the present invention relates to a method for allowing a user to obtain various status information including the operation status of various facilities in real time from the outside through the Internet. will be. According to the present invention, the user can easily access the state information of various production equipment from the outside, as well as the user has the advantage of obtaining the state information of the various equipment desired by the user defined form.

Description

Method for Access to The Status-information of Producing devices by means of Internet and The System}

The present invention relates to a method and a system for accessing status information of a production facility using the Internet. More particularly, the present invention relates to a method for allowing a user to obtain various status information including the operation status of various facilities in real time from the outside through the Internet. will be.

1 shows a communication method by various facilities 101 to 103 and a host computer 105 constituting a production line of a conventional factory. The host computer has been used to assign a proper operation command to a plurality of facilities and to manage a simple operation state, such as whether each lot is processed. However, such communication alone cannot be expected to actively use the requirements of the current production plant, that is, the various situations occurring in the production process and the use of past operational data. The above various situations are state information originating from various production facilities, such as equipment failures occurring during the production process, dosage and concentration of raw materials, various environmental conditions (including temperature and pressure), operating conditions of the carriers in the production facilities, Information about the abnormality of the auxiliary equipment in the facility and the usage time for determining the time point of the future cycle information, etc., can not accommodate the user's requirements for the information based on the processing speed and data storage capacity of the existing host. . In addition, the conventional communication method has been inconvenient in that the user cannot access the state information data from the outside and must move directly to the space where the host computer exists. However, there are no reported examples regarding a system supporting external access to various facilities of a factory. Furthermore, a technology for easily accessing information of a desired type from the outside using the Internet is disclosed in the present invention. First time.

The inventors of the present invention have been searching for solutions to the problems of the conventional communication method as described above, and can easily access the state information on various production facilities from the outside by using the current popularized Internet network. The present invention was completed by finding out that the web management server can be installed inside the production facility or outside the production facility to overcome the limitations of the processing speed and capacity of the host.

Accordingly, an object of the present invention is to provide a method for accessing status information of a production facility using the Internet.

In addition, another object of the present invention is a user system for requesting the status information of the production facility, the web server is interconnected by the user system and the communication network, and provides the status information of the various production facilities at the request of the user, and production Provides the status information access system of the production equipment using the Internet, including various production equipment systems that are provided on the line and interconnected to the web server and the communication network and transmit their status information to the web server at the request of the web server. It's there.

1 is a communication method between a conventional host and each production facility.

Figure 2a is a system configuration having a web server outside the production facility of the system of the present invention.

Figure 2b is a system configuration having a web server inside the production facility of the system of the present invention.

3 is a flowchart illustrating a method of accessing status information of a production facility using the Internet of the present invention.

4 is a block diagram of a web server of the present invention.

Figure 5a is an embodiment of the present invention in one aspect of the present invention for semiconductor production equipment.

Figure 5b is another embodiment of the present invention for semiconductor production equipment.

The present invention includes a method and system for accessing status information of a production facility using the Internet.

The method for accessing status information of a production facility using the Internet of the present invention discloses a method of accessing data on current, past, or future status information of various facilities arranged on a production line of a factory from the outside using the Internet network. .

The method of the present invention comprises the steps of a user connecting to a web server in a computer communication network interconnected with a web server (hereinafter simply referred to as a "web server") and a user system for providing status information about a production facility, and various production facilities. Displaying, by the web server, a screen having a user request definition item so as to request status information data of the user; defining the user request for at least one production facility and requesting the web server; Requesting the status information data requested by the user to the at least one production facility, and the web server is transmitted from the production facility to transmit the status information data stored in the database management unit to the user system in a user-defined form. It includes a step.

The production facilities are not limited to any of the facilities that are arranged on the production line of various products, but is not particularly limited, but it is particularly preferred that the production equipment related to the semiconductor or LCD / TFT.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

2a and 2b show the overall configuration of the present invention.

The state information access system of a production facility using the Internet of the present invention is connected to the user system requesting the status information of the production facility, and the user system and the communication network, and to provide the status information of various production facilities at the request of the user It is characterized in that it comprises a web server, a variety of production equipment system that is provided to the production line and interconnected to the web server and the communication network, and transmits its status information to the web server at the request of the web server.

The production facilities 201 and 220 composed of at least one are connected to the web servers 205 and 225 through an intranet 203 or an internal direct connection 221, respectively, for communication for exchanging status information with the web server. It is desirable to have a built-in program.

In addition, the host computers 207 and 227 are generally arranged to give a proper operation command to various equipments of the factory system and to manage a simple operation state such as whether or not each production unit is processed. The host computer is connected to the web server and the intranet so that the data about each facility is transmitted via the web server.

The communication between the production facility and the web server generally follows the protocol established at the time of manufacture according to the nature of the facility deployed in the factory. For example, with regard to semiconductor production equipment, SECS-I / II (SEMI E4 / SEMI E5 standard) or HSMS / GEM (SEMI E37 (E37.1) / SEMI E30), a protocol mainly defined by SEMI (Semiconductor Equipment and Materials International). communication using standard).

The user systems 210 and 230 are connected to a web server through the Internet network 209 and 229. By the connection, the user requests data of status information about various facilities, and in response, the web server requests various facilities. Inquire the data requested by the user from the data that is obtained as a format that can be seen on the user system and transmits.

3 is a process block diagram showing a step-by-step method of accessing status information of a production facility using the Internet of the present invention.

In order to access a web server, a user runs a web browser by using a conventional method such as explorer or netscape (301), and the user's connection to the web server (302) is by request of HTTP, and typically a web browser. This is performed by inputting a URL of the web server or clicking a corresponding URL link.

The web server may be provided in a plural number by arranging one for each batch of production facilities for each process (FIG. 2A), and also installed inside each production facility (FIG. 2B), which is preferable for implementation of the present invention. Independently enter the URL of the web server provided for each batch unit of each process, it is also possible to connect to each web server by a hyperlink using the homepage provided by one web server.

After the user connects to the web server, the web server displays 303 a screen with user requirements definition items on the user system so as to request status information data of various production facilities. In this case, the user request definition item preferably includes an item to be inquired of a specific facility, information on the time and number of times, and an item about a transmission form of the status information data from a web server. Through the above items, the user can request 304 to define the status information of the desired equipment to the web server, and can also access the data in the desired format by defining the transmission form of the status information data from the web server. In this case, it is preferable that the transmission form includes a form of on-screen document output based on HTML or an e-mail transmission based on SMTP.

When the user requests status information data for one or more production facilities for the web server, the web server searches for the status information data transmitted from the production facility and stored in the database management unit to determine whether the data already exists. It is preferable to include the process (305). This is because it is possible to operate the system efficiently because there is no need to contact the production facility for the existing data. If the data is already stored in the database of the web server in this step, the data may be transmitted to the user system (308). In contrast, if the data is not currently stored, the data regarding the status information is inquired to the corresponding facility. 306). The data transmitted from the facility in response to the inquiry is stored in the data storage unit (307) and then transmitted to the user system in the form defined by the user (308).

When the status information transmitted from the production facility to the web server changes in real time, the status information data is required to be updated in real time. In this case, it is preferable to update the data using CGI or JavaScript. This enables dynamic data updates for data that changes in real time.

4 shows the internal structure of the web server.

The web server 400 of the present invention is a network connection interface unit 402 in charge of the transmission and reception of data between the external production facility 401 and the web server, and the data transmitted from the interface unit to analyze the data The data analysis unit 403, which requests the network connection interface unit to transmit data to the base management unit or host computer and is required to transmit to the facility, and allocates the data transmitted from the data analysis unit to the facility. A database management unit 404 for storing the data stored in the allocated area according to the user's request, and managing the user's requirements for each production facility, and the user system 406 with the web server. It characterized in that it comprises a user request management unit 405 for providing an interface with.

The network interface unit 402 converts the data into a data interpreting unit 40 3 according to a protocol using data transmitted through the physical layer from the production facility, and transmits the data to the data analyzing unit 40 3. The data requested to be transmitted to the facility is converted through the physical layer by converting the message according to the communication method defined in the protocol.

In addition, the data analysis unit 403 analyzes the header of the transmitted data and judges the equipment number and equipment byte and transmits it to the data storage unit 4204 when it is determined that it is required by the user. If it is determined that it is not, it plays a role of requesting transmission to the host computer from the network access interface unit. By the above configuration, the web server is involved in the communication between the existing facilities and the host. In this case, the web server passes the data transmitted from the host computer to each facility without any modification as it passes through the host computer without modification. It makes it possible to use the communication method and the materials used accordingly without modification or addition.

In addition, the database management unit 404 analyzes the data coming from the data analysis unit, it is to open the database through the attached equipment address (open) to classify and record the received data in the fields defined in the record desirable. In addition, the database storage unit provides the items and conditions requested by the user request management unit through an existing database, and if a user's request is desired for a new database, the database storage unit creates a record that implements the field. Play a role.

In addition, the user request management unit 405 receives the data requested by the user from the database and converts the document into a form that can be read by the user. The user requirement management layer is composed of two functional parts in detail, and one is a part for managing items and condition tables defined by the user to inquire the facility, and the user is to inquire the specific facility, the time and the number of times. This information is managed by the corresponding production facilities, and when defined, the information is transmitted to the database management unit and data collection starts. The other function is to provide a user interface that allows users to access a web server using a web browser. It is typically responsible for HTML document generation and access to the LAN management layer. It shows the list of and shows the contents of the item selected by the user in any list in the form of a chart or a graph.

Figure 5 shows an example applied to the semiconductor production equipment as a preferred embodiment of the present invention.

The above embodiment is the SEMI defined communication protocols SECS-I / II and HSMS (SEMI Equipment Communications Standard 1 Message Transfer; E4, SEMI Equipment Comm unications Standard 2 Message Transfer; E5, High speed message service, SEMI E-37, E The overall system diagram for a production facility in accordance with -37.1) is shown.

SECS-I is a serial data exchange method using RS-232C as a physical layer, and is commonly used for communication between host computers, which are external control devices, in semiconductor production equipment or LCD production equipment. In addition, SECS-II is a form of message that defines SECS-Ⅰ as a physical basis. The production facility or control device converts the desired data into a message form defined by SECS-II and transmits it to the other party in the manner of SECS-Ⅰ, which is a lower layer. do. In addition, the HSMS is a transmission method that improves the transmission speed of the SECS-I has recently replaced the SECS-I, the facility may use the SECS-I or HSMS.

FIG. 5A illustrates a system for accessing status information of a semiconductor production facility using the Internet as a preferred embodiment of the present invention. The system includes a user system 510 for requesting status information of each production facility 501, and the user system. A web server 505 interconnected by a communication network 503 and providing status information of various production facilities according to a user's request, and which is provided to a production line, interconnected to the web server and a communication network, and in response to a request of the web server. Accordingly, it includes various production equipment systems for transmitting its status information to a web server.

FIG. 5B shows a state information access system of a semiconductor production facility using the Internet as a preferred embodiment of the present invention. The user system 530 requests status information data of each production facility 520, and the user system. And a web server 525 interconnected by an internal communication network 523 and providing status information of various production facilities according to a user's request, and are provided to a production line, interconnected by the web server and a communication network, It includes various production equipment systems that transmit their status information to a web server upon request.

In the above, the status information data refers to the trouble content of the equipment generated in the production process, the dosage of various gases, the pressure inside the production chamber, the operating status of the transporting material (robot, etc.) in the equipment of the production material, This includes information on the supply and concentration of various chemicals, the presence or absence of various sub-modules in the installation, and the time of use for later timing of periodic maintenance.

The storage space of the data is basically stored in the operating software in the facility when the production facilities are designed to comply with the SEMI standard, updated and stored in real time when the facility is in operation, and provided externally in a manner that is compatible with the SEMI protocol. Therefore, in order to receive the data from each facility, it is required to request the facility in the form of the aforementioned SECS-I / II / HSMS through the communication network 503, 523.

Except when the server 525 is built in each production facility as shown in Figure 5b, when installed outside the facility, as shown in Figure 5a the web server 505 is a batch unit (bay) of production facilities for each process It is preferable to provide a plurality in each case. The batch unit may group similar things into about 10 to 20 units according to the functions of the equipments, but the batch unit is not necessarily limited to these values and should be judged as a whole in consideration of server efficiency. Therefore, in some cases, it is also suitable for the practice of the present invention that the number of facilities in each batch unit exceeds the above range.

In the figure, the web server is connected to a facility using SECS-Ⅰ / II or HSMS as an external communication method by RS-232C or TCP / IP and requests data from the facilities in the form of SECS-Ⅰ / Ⅱ or HSMS in real time. Each facility sends the data to the web server in the form of SECS-I / II or HSMS. At this time, since the web server is dealing with a plurality of facilities, the incoming data are classified by facility ID in each header of SECS-I / II or HSMS method and recorded in each database.

The list of data required by the web server for each facility is that the user selects the required items (SVID, status variable ID) and each request point that can be supported at each facility before the request. After storing the data in the storage device, the required items (SVIDs) are inquired at the corresponding facility. The facility transmits the data items to the web server in SECS-I / II or HSMS format and the web server records the incoming data in response to the request in a predetermined area of the database assigned to each facility. When a user requests data of interest through a web browser on his or her personal computer, the web server retrieves the data from the database and displays the data obtained from the search results through the Internet (509, 529) for display in the user's web browser. Converts HTML document and sends it to TCP / IP. The web server continues the above operation based on each property file set by the user and accumulates each database. In addition, the user may define the data on the web server in a schedule report format through a web browser. In this case, the web server can send the user an e-mail in a report format defined by the user at a predetermined time.

As described above, the web server intervenes in communication between each facility and the host computer, and passes the data transmitted from the host computer to the corresponding device without modification. Therefore, the device and the host computer cannot find any difference between the existing host-centric method and the software because the web server passes the data received to the user as it is.

The RS-232C interface unit, which is a network connection unit, is physically connected to the production equipment in the form of RS-232C and is responsible for the communication of SECS-I. If the facility is HSMS and not SECS-I, it is responsible for TCP / IP communication. The interface unit performs a function of requesting whether a received signal is received according to a scheme defined by SEMI, and requesting detection and retransmission of various physical errors. In addition, it converts SECS-II type data required to be transmitted from data analysis part into SECS-I (or HSMS) type and transmits it to the corresponding output terminal, and performs physical error detection and retransmission if necessary. In addition, if there is more than one production equipment to be connected and SECS-I, the terminal is connected by a multi-port supporting RS-232C. The multi-terminal pair is composed of an input terminal and an output terminal corresponding thereto. It consists of a set of pairs. If there is no problem in receiving the RS-232C signal received at the input terminal, the interface unit is attached to the address of the terminal receiving the received data and the address of the transmitting equipment, and converted to the data format of SECS-II. Sent to wealth.

The data analysis unit analyzes the data coming from the RS-232C interface unit (or HSMS) (S ECS-II message parsing) to determine the actual meaning, and the error detection of the message layer and retransmission when necessary, the RS-232C interface unit (or HSMS). To request. If there is no problem in the process, the data analysis unit determines whether the data is sent from the production facility to the web server through a system byte among the tokens generated after the data analysis. If the received data is not sent to the web server, the data interpreter requests transmission by attaching the address of the transmitting terminal directly to the RS-232C interface (or HSMS) without distorting the data. On the contrary, if the data corresponds to the web server, the data is sent to the database management unit. In addition, the database management unit transmits the data required for the specific production equipment to the RS-232C interface unit (or HSMS) by attaching the corresponding equipment address and the transmission terminal address.

The database management unit analyzes the data coming from the data analysis unit, and it is preferable to open the database through the attached equipment address and classify and record the received data in the fields defined in the record. Do. In addition, the database management unit performs a function of providing an item and condition (query) requested by the user request management unit through the existing database. In addition, the database management unit creates a record constituting the field by creating a new database if the user needs a new database.

The user request management section consists of two functional parts. One is the item and query management table that the user defines to contact the facility. The user defines an item to be inquired into a specific facility, the timing and the number of times. The information is managed by the user request management unit for each production facility. When the defined time is reached, the information is transmitted to the database management unit and the data collection collec t ion) begins, and this process is repeated continuously. The user may classify specific items among the defined items as report items, and the items may be sent to the user in an e-mail format at the defined time. The other is responsible for generating HTML documents and accessing the LAN management layer and sending the required data from higher layers.

The HTML document generation and LAN management layer provides an interface for the user to access using a web browser (Web Server), showing a list of interests defined by the current user and their production facilities, and selecting from any list. Display the contents of the item in a chart or graph. The user can also define a new point of interest and point of inquiry, which is managed at a lower level and referred to the production facility at that point.

According to the configuration of the present invention as described above it is possible for the user to receive the various state information of the desired production equipment in the form defined by the user using the Internet.

According to the present invention, the user can easily access the state information of various production equipment from the outside, as well as the user has the advantage of obtaining the state information of the various equipment desired by the user defined form.

Claims (18)

In the method of externally accessing status information data provided by various production facilities, In step 302, a user accesses the web server 400 in a computer communication network where the web server 400 and the user system are interconnected. Displaying (303) the web server 400 displaying a screen having items of user requirements so as to request status information data of various production facilities; Defining the user request for at least one production facility and making a request to the web server 400; Requesting, by the web server 400, the status information data requested by the user to the one or more production facilities (306); And transmitting the web server 400 from the production facility to the user system 406 by converting the state information data stored in the database manager 404 into a form defined by the user, and transmitting it to the user system 406. The web server 400 is involved in the communication between the production facility system and the host computer which gives an operation command for the production facility system, and the various status information data obtained by the web server 400 by requesting the production facility. When it is determined that the user requested by the equipment number and equipment byte existing in the header area, it is stored in the area allocated to the corresponding equipment in the data storage unit. Access method for status information of a production facility using the Internet, characterized in that. delete delete The method of claim 1, wherein when the status information transmitted from the production facility to the web server changes in real time, the status information data transmitted from the web server to the user system is updated in real time using CGI or JavaScript. Method of accessing status information of production equipment using internet. delete delete delete delete A user system for requesting status information of the production facility, A web server interconnected by the user system and a communication network and providing status information of various production facilities at the request of the user; The host computer is provided to the production line and interconnected to the web server and the communication network, and the host computer to give the operation command to the various production equipment system and production equipment system to transmit its status information to the web server at the request of the web server. Including, When the web server is involved in the communication between the production facility system and the host computer, and the various status information data requested by the production facility are judged by the facility number and facility byte in the header area, Access to the status information of the production facility using the Internet, characterized in that the data storage unit is stored in the area assigned to the facility, and if the data is usually transmitted to the host computer without transmitting to the host computer without modification delete delete delete delete delete delete delete delete delete