KR100320287B1 - Piezoelectric/electrostrictive micro actuator using a mixture of ceramic powder and polyvinylidene fluoride and manufacturing method thereof - Google Patents

Abstract

The present invention is prepared by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ℃, the particle size is 5㎛ or less, and the piezoelectric ceramic powder and molding excellent in lead (Pb), titanium (Ti) as a basic element The present invention relates to a piezoelectric / electric distortion microactuator manufactured by forming a piezoelectric / electric distortion film using a mixture of polyvinylidene fluoride having excellent properties, and to a method of manufacturing such piezoelectric / electric distortion microactuator. It is possible to obtain a piezoelectric / electric distortion micro-actuator in which the mechanical strength is tuned, and by using a low-temperature fired ceramic powder, the process can be reduced in temperature and simplified, resulting in lower energy and lower cost.

Description

Piezoelectric / electrostrictive micro actuator using a mixture of ceramic powder and polyvinylidene fluoride and manufacturing method

The present invention relates to a piezoelectric / electric distortion micro actuator and a method for manufacturing the same, and more particularly, to a piezoelectric / electric distortion micro actuator using a mixture of ceramic powder and polyvinylidene fluoride, and a method of manufacturing the piezoelectric / electric distortion micro actuator. will be.

An actuator of an inkjet printer head using a piezoelectric body generally includes a lower structure consisting of a diaphragm and a chamber, a piezoelectric body coupled to an upper portion of the diaphragm to cause mechanical deformation when power is applied, and an electrode (s) for transmitting power to the piezoelectric body. .

The piezoelectric body of the actuator has a property of being polled when an electric field is applied (directivity is formed in the piezoelectric body when an electric field is applied). When power is applied to the upper and lower electrodes formed on the top and bottom of the polled piezoelectric material, the piezoelectric elements located between the electrodes vibrate or deform while repeating deformation and restoration.

In the inkjet printer head, when the piezoelectric body of the actuator vibrates, the diaphragm causes mechanical deformation in the thickness direction, and ink is injected onto the recording medium.

Background Art Conventionally, ceramic powders prepared by the solid-phase method have been used to produce piezoelectric / electrical distortion films used as piezoelectric elements in piezoelectric / electrical distortion actuators.

The solid phase method, also called an oxide method, is a method of preparing a ceramic powder by mixing an oxide or a molten salt which is a raw material in powder form, followed by heat treatment at 1000-1200 ° C, followed by grinding and sintering.

The particle size of the ceramic powder produced by the solid phase method varies depending on the size of the raw material powder, and the particle size of the powder to be produced is 0.2-2 μm, which is a disadvantage of requiring heat treatment at a high temperature of 1000 ° C. or higher due to the characteristics of the process. have.

In manufacturing various film-type devices using ceramics, a method of manufacturing a ceramic paste using ceramic powder, printing it on a diaphragm or filling it into a mold, and then performing heat treatment has been mainly used.

In order to manufacture a ceramic paste, conventionally, a method in which a binder, a vehicle, a plasticizer, a dispersant, or the like is added to a solution in which a ceramic particle having an average particle diameter of 1 µm or more prepared by a solid phase method is added, followed by mixing and stirring.

In order to manufacture the piezoelectric / electric warp film using the ceramic paste prepared by the above method, the ceramic paste is printed on a diaphragm, dried at 130 ° C. and heat treated at 1000 ° C. or higher. There is a problem that a separate additional heat treatment must be performed at 500 ° C. or higher for the removal binder work for removal.

In addition, since the ceramic paste prepared by this method cannot be molded at a low temperature and needs to be heat treated at 1000 ° C. or more, the range of the selectable diaphragm is limited to a material that can withstand heat treatment at 1000 ° C. or more.

In addition, there is no plasticity of the material (plasticity) at all there is a problem that various applications are limited.

For various applications of piezoelectric / electrical distortion ceramic devices, there is a need for a technology that provides flexibility to ceramic devices without affecting piezoelectric properties.

Polyvinylidene fluoride (PVDF) is a polymer material with piezoelectric properties as a raw material for the production of composites, which is widely applied to electrode forming of secondary batteries, and also a product using the piezoelectric properties of polyvinylidene fluoride itself. It is released.

However, polyvinylidene fluoride is very excellent in formability, but the piezoelectric properties are lower than those of ceramic powder.

Therefore, a method of manufacturing a ceramic device by mixing a ceramic powder having excellent piezoelectric properties and a polyvinylidene fluoride having excellent moldability has been developed.

In this method, ceramic powder, polyvinylidene fluoride and a small amount of binder are added to an organic solvent such as toluene and hexanol, and the mixture is mixed by reflux or stirring, and then the solvent is evaporated and dried to obtain a mixture.

The obtained mixture is processed into a thick film by a rolling process, wherein the thickness of the thick film is determined according to the processability and rolling conditions of the mixture.

At this time, the workability is different depending on the content ratio of the ceramic powder and polyvinylidene fluoride. Increasing the content of polyvinylidene fluoride improves the workability but is accompanied by a loss of piezoelectricity due to the decrease in the content of the ceramic powder, while reducing the content of polyvinylidene fluoride improves the piezoelectricity but decreases the workability.

The formed thick film is electrodelized according to the application purpose and then deviced through a process such as polling.

Minimizing voids in mixing ceramic powder and polyvinylidene fluoride is advantageous for uniform mixing, and uniform mixing improves the mechanical properties of the formed film.

In order to minimize voids in the mixture of ceramic powder and polyvinylidene fluoride in a certain content ratio, it is preferable to use a finer ceramic powder.

However, the conventional ceramic powder has a problem that it is difficult to achieve effective mixing due to the large particle size as described above.

In addition, due to the nature of the ceramic powder requires a heat treatment at a high temperature of 1000 ℃ or more there is a problem that the range of the diaphragm can be used.

In order to solve the above problems, the present invention provides a piezoelectric / electric distortion micro-actuator with improved connectivity and mechanical strength by forming a piezoelectric / electric distortion film by mixing polyvinylidene fluoride, a piezoelectric material having excellent moldability, with fine low-temperature plastic ceramic powder. It is an object to provide a method of manufacturing piezoelectric / electric distortion micro actuators.

1 is a cross-sectional view showing an embodiment of the actuator of the present invention,

2 is a cross-sectional view showing another embodiment of the actuator of the present invention.

<Description of the symbols for the main parts of the drawings>

10, 20: chamber plate 12, 22: vibration plate

24: lower electrode 16, 26: piezoelectric / distortion film

18, 28: upper electrode

The present invention for achieving the above object comprises the steps of providing a metal vibrating plate; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements Preparing a; Forming a piezoelectric / electric distortion film by using a mixture of ceramic powder and polyvinylidene fluoride on top of the metal vibrating plate; Heat-treating the piezoelectric / distortion film at 100-300 ° C .; The piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride, which includes forming an upper electrode on the piezoelectric / electric distortion film, has a characteristic thereof.

The present invention also provides a metal vibration plate; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements Preparing a; Separately forming a piezoelectric / electric distortion film using a mixture of the ceramic powder and polyvinylidene fluoride; Bonding the piezoelectric / electric distortion film and the metal vibrating plate to each other; The piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride, which includes forming an upper electrode on the piezoelectric / electric distortion film, has a characteristic thereof.

The present invention also provides a diaphragm; Forming a lower electrode on the diaphragm; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements Preparing a; Forming a piezoelectric / electric distortion film on the lower electrode by using a mixture of the ceramic powder and polyvinylidene fluoride; Heat-treating the piezoelectric / distortion film at 100-300 ° C .; The piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride, which includes forming an upper electrode on the piezoelectric / electric distortion film, has a characteristic thereof.

The present invention also provides a diaphragm; Forming a lower electrode on the diaphragm; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and containing lead (Pb) and titanium (Ti) as basic elements. Preparing a; Separately forming a piezoelectric / electric distortion film using a mixture of the ceramic powder and polyvinylidene fluoride; Bonding the piezoelectric / electric distortion film and the upper electrode to each other; The piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride, which includes forming an upper electrode on the piezoelectric / electric distortion film, has a characteristic thereof.

In addition, the present invention is a metal vibration plate; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements A piezoelectric / electric distortion film formed on the upper portion of the metal vibrating plate; The piezoelectric / electric distortion micro-actuator using a mixture of a ceramic powder and a polyvinylidene fluoride including an upper electrode formed on the piezoelectric / distortion film has a feature.

In addition, the present invention and the diaphragm; A lower electrode formed on the diaphragm; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements A piezoelectric / distortion layer formed on the lower electrode; The piezoelectric / electric distortion micro-actuator using a mixture of a ceramic powder and a polyvinylidene fluoride including an upper electrode formed on the piezoelectric / distortion film has a feature.

Hereinafter, the present invention will be described in detail.

As the diaphragm, all materials of a general diaphragm such as a high molecular organic compound of metals, ceramics and resins can be used.

When using metal as a diaphragm, there is no need to form a separate lower electrode. However, when using a non-conductive material such as a polymer or organic polymer of ceramics as a diaphragm, a separate lower electrode is formed on the upper part of the diaphragm. shall.

The lower electrode is formed by evaporation, sputtering or screen printing using gold (Au), silver (Ag), aluminum (Al), nickel (Ni), platinum (Pt), or the like as a material.

As a piezoelectric / distortion film, a mixture of ceramic powder and polyvinylidene fluoride is used.

In order to consider the reactivity of the ceramic powder itself and to secure a system capable of low temperature molding, the ceramic powder is effective to use fine powder. Therefore, the ceramic powder manufactured by the following method is used.

The raw material containing the ceramic component is selected from a ceramic component such as an oxide, carbonate or nitrate of the ceramic component, a salt of an organic or inorganic substance, or a complex of ceramic components.

As the ceramic component, it is preferable to use a piezoelectric / electrically distorted ceramic element having lead (Pb) and titanium (Ti) as a basic component, and in particular, the ceramic component may include lead (Pb), zirconium (Zr), or titanium (Ti). ) Or a component composed of lead (Pb), magnesium (Mg) and niobium (Nb).

As a solvent or dispersion medium for dissolving or dispersing the ceramic component raw material, one or more selected from among those capable of dissolving or dispersing the raw material containing the ceramic component in water or an organic solvent is used. Among the organic solvents, dimethyl formamide, methoxyethanol, acetic acid, alcohols and glycols are mainly used.

As a combustion aid, citric acid, an organic compound that can cause a combustion reaction, is used. In the conventional method, citric acid has been used to impart homogeneity of the reaction as a complexing agent, not as a combustion aid, and has been applied in processes such as the Pechini process. By using can cause a controlled combustion reaction rate.

Citric acid is added to a solution or dispersion mixture in which ceramic components are dissolved or dispersed to prepare a mixed solution. The amount of citric acid to be added is added to the amount or more necessary to cause an oxidation-reduction combustion reaction with the anion of the ceramic element. The rate of progress of the reaction can be controlled depending on the amount of citric acid added.

The mixed solution mixed with citric acid is heat-treated at 100-500 ° C. As the temperature of the heat treatment increases, the crystallinity of the ceramic phase increases, but when the heat treatment temperature is 100 ° C. or higher, the combustion reaction of citric acid can be sufficiently initiated. The reaction may occur even when the heat treatment is performed above 500 ° C., but the heat treatment is performed at a higher temperature. Is meaningless compared to conventional methods.

More preferably, the heat treatment is carried out at 150-300 ° C., and the temperature range can adequately secure the crystallinity of the ceramic phase even at a very low temperature.

Citric acid is removed during the combustion reaction, and ceramic oxide is formed without scattering by the heat of reaction of citric acid generated at this time.

In this reaction, components other than the ceramic component are removed by a combustion reaction for a sufficient time, thereby forming a pure ceramic powder in which impurities do not remain.

Ceramic powder prepared by the above method is an extremely fine and uniform particle size distribution having a particle size of 5 μm or less, especially 0.5 μm or less, and the primary particles are in the form of an individual or a soft aggregate. Present, it is a fully burned ceramic phase and does not lose weight by further heat treatment.

In addition, since the surface is excellent in reactivity and can be formed only by heat treatment at low temperature, the degree of freedom of the diaphragm is high, and various methods of printing or coating the diaphragm can be applied.

In order to increase the crystallinity of the ceramic powder produced, the ceramic powder may be further heat-treated at 700-900 ° C.

The polyvinylidene fluoride is mixed with the ceramic powder prepared by the above method.

The mixing of the ceramic powder and polyvinylidene fluoride is carried out by adding the ceramic powder and polyvinylidene fluoride to an organic solvent and refluxing or stirring the mixture. It is preferable to use toluene or hexanol as the organic solvent.

The mixing ratio of ceramic powder and polyvinylidene fluoride is appropriately determined in consideration of the piezoelectric properties and workability of the ceramic device to be applied. In order to improve processability, the content of polyvinylidene fluoride is increased, and in order to improve piezoelectricity, the content of ceramic powder is increased.

When the ceramic powder and the polyvinylidene fluoride are mixed, a small amount of a coupling agent may be added to strongly bond the interface between the polyvinylidene fluoride and the ceramic powder so that the mixture is well mixed. In this case, as the binder, inorganic substances such as nitrate, sulfate, phosphate, and oxalate are used.

When mixing the ceramic powder and the polyvinylidene fluoride, a ceramic sol solution having the same or similar composition as that of the ceramic powder may be used instead of the organic solvent and the binder.

Ceramic sol solutions are prepared by dissolving ceramic components based on water or organic solvents. Various organic solvents can be used as the base, but it is preferable to use mainly selected from acetic acid, dimethylformamide, methoxyethanol, alcohols, and glycols.

The ceramic component used in the manufacture of the ceramic sol solution is preferably a component containing lead (Pb), zirconium (Zr), titanium (Ti), the concentration of the ceramic sol solution to be used is 0.1-5M It is preferable.

When the ceramic sol solution is mixed with the ceramic powder and the polyvinylidene fluoride, the content of the ceramic sol solution is preferably 1-200 parts by weight based on the ceramic powder and the polyvinylidene fluoride. This is because the viscosity of the mixture is low when the content of the ceramic sol solution is 200 parts by weight or more, and the viscosity of the mixture is too high when it is less than 1 part by weight.

The use of the ceramic sol solution modifies the surface properties of the ceramic particles and improves the dispersibility of the system, thereby further increasing the bonding strength between the particles and obtaining a uniform film quality.

A mixture of ceramic powder and polyvinylidene fluoride that has been mixed is applied to form a piezoelectric / electric strain film.

The mixture of ceramic powder and polyvinylidene fluoride may be used as it is or partially dried depending on the viscosity required, and a small amount of viscosity modifier may be added if necessary. At this time, some drying is preferably performed at 70-120 ℃.

Using a mixture of ceramic powder and polyvinylidene fluoride, a piezoelectric / electric distortion film is formed directly on a metal vibrating plate or a polymer organic compound vibrating plate formed of a metal vibrating plate or a lower electrode by a screen printing method, a molding method, or a coating method. Heat treatment at -300 ° C, more preferably 150-250 ° C.

In addition, a piezoelectric / electric distortion film of a desired thickness may be separately formed and then bonded to a ceramic vibrating plate of ceramic or resin having a metal vibrating plate or a lower electrode formed thereon. For bonding, heat treatment at 100-300 ° C., more preferably 150-250 ° C., or bonding using an adhesive layer.

An upper electrode is formed on the formed piezoelectric / distortion film. The upper electrode is also formed using gold, silver, aluminum, nickel, platinum, or the like as a material by evaporation, sputtering, or screen printing.

When using polled polyvinylidene fluoride, it is not necessary to poll separately, but when using polyvinylidene fluoride in an unpolled state, it is used after polling after forming the upper electrode.

Hereinafter, the present invention will be described in more detail with reference to the following examples. The following examples, however, illustrate the invention and do not limit the scope of the invention.

(Example 1)

Fine piezoelectric / electrically warped ceramic powder and polyvinylidene fluoride having a particle size of 0.5 μm or less prepared by non-explosive redox combustion were refluxed and mixed under hexanol at a volume ratio of 60:40.

The solvent was partially dried at 100 deg. C, and the resulting slurry mixture was filled in a mold.

The mold filled with the mixture of ceramic powder and polyvinylidene fluoride was heat-treated at 200 ° C., and the upper electrode was molded and then polled to complete a piezoelectric / electric distortion actuator.

Example 2

A volumetric ratio of 40:40:20 containing a fine piezoelectric / electric distortion ceramic powder having a particle diameter of 0.5 µm or less, a methoxyethanol-based ceramic sol solution and a polyvinylidene fluoride of the same / similar component as the ceramic powder prepared by the non-explosive oxidation-reduction combustion method The mixture was stirred and stirred in an autoclave.

The resulting mixture was transferred by screen printing onto a substrate. Heat treatment at 150 ℃ and the upper electrode was formed and then polled to complete the piezoelectric / electrostrictive actuator.

As described above, the method of the present invention uses an admixture of polyvinylidene fluoride having excellent moldability and a low-temperature fired ceramic powder having excellent piezoelectric properties with fine particle sizes, thereby improving inter-particle connectivity and mechanical properties. It is possible to obtain a piezoelectric / electric distortion micro-actuator whose intensity is tuned.

In addition, by using a low-temperature fired ceramic powder, the process can be lowered and simplified, resulting in lower energy and lower cost.

In addition, the mixture of the present invention can be easily handled by improving the degree of freedom of molding, and can be applied to various ceramic devices other than piezoelectric / electric distortion micro actuators by adjusting the workability according to the tuning of the mixing ratio.

Claims (54)

Providing a metal vibrating plate; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements Preparing a; Forming a piezoelectric / electric distortion film by using a mixture of ceramic powder and polyvinylidene fluoride on top of the metal vibrating plate; Heat-treating the piezoelectric / distortion film at 100-300 ° C .; A method of manufacturing a piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride, including forming an upper electrode on the piezoelectric / electric distortion film. The method according to claim 1, further comprising the step of partially drying the mixture of ceramic powder and polyvinylidene fluoride before forming the piezoelectric / electric strain film. All-weather micro actuator manufacturing method. The method of manufacturing a piezoelectric / electric warp micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 2, wherein the partial drying is performed at 70-120 ° C. The method of manufacturing a piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 1, further comprising: forming a top electrode and then polling. [Claim 2] The mixture of ceramic powder and polyvinylidene fluoride according to claim 1, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by uniformly mixing the ceramic powder, polyvinylidene fluoride and an organic solvent. Method of manufacturing piezoelectric / electric distortion micro actuators used. The method of manufacturing a piezoelectric / electric distortion micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 5, wherein toluene or hexanol is used as the organic solvent. The method of manufacturing a piezoelectric / electric warp micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 5, wherein a small amount of binder is added when the ceramic powder and polyvinylidene fluoride are mixed. [Claim 9] The piezoelectric / electric warp using a mixture of ceramic powder and polyvinylidene fluoride according to claim 7, wherein the binder is nitrate, sulfate, phosphate or oxalate. Method of manufacturing a micro actuator. 2. The ceramic powder and poly according to claim 1, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by mixing ceramic powder, polyvinylidene fluoride and ceramic sol solution having the same or similar composition as the ceramic powder. A method for producing piezoelectric / electric distortion microactuator using a mixture of vinylidene fluoride. The method of manufacturing a piezoelectric / electric distortion micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 1, wherein the piezoelectric / electric distortion film is thermally treated at 150 to 250 캜. Providing a metal vibrating plate; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements Preparing a; Separately forming a piezoelectric / electric distortion film using a mixture of the ceramic powder and polyvinylidene fluoride; Bonding the piezoelectric / electric distortion film and the metal vibrating plate to each other; A method of manufacturing a piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride, including forming an upper electrode on the piezoelectric / electric distortion film. The method of claim 11, further comprising the step of partially drying the mixture of the ceramic powder and polyvinylidene fluoride before forming the piezoelectric / electric strain film piezoelectric / using a mixture of ceramic powder and polyvinylidene fluoride. All-weather micro actuator manufacturing method. The method of manufacturing a piezoelectric / electric warp micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 12, wherein the partial drying is performed at 70-120 ° C. 12. The method of claim 11, further comprising: forming a top electrode and then polling the same. The method of claim 11, further comprising a step of polling the ceramic powder and polyvinylidene fluoride. 12. The mixture of ceramic powder and polyvinylidene fluoride according to claim 11, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by uniformly mixing ceramic powder, polyvinylidene fluoride, and an organic solvent. Method of manufacturing piezoelectric / electric distortion micro actuators using 16. The method of manufacturing a piezoelectric / electric distortion micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 15, wherein toluene or hexanol is used as the organic solvent. 16. The method of manufacturing a piezoelectric / electric distortion microactuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 15, wherein a small amount of binder is added when the ceramic powder and polyvinylidene fluoride are mixed. 18. The piezoelectric / electric distortion using a mixture of ceramic powder and polyvinylidene fluoride according to claim 17, wherein the binder is nitrate, sulfate, phosphate or oxalate. Method of manufacturing a micro actuator. 12. The ceramic powder and poly according to claim 11, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by mixing ceramic powder, polyvinylidene fluoride and ceramic sol solution having the same or similar composition as the ceramic powder. A method for producing piezoelectric / electric distortion microactuator using a mixture of vinylidene fluoride. 12. The method of claim 11, wherein the piezoelectric / electric warp film and the diaphragm are bonded to each other by heat treatment at 100 to 300 DEG C to produce a piezoelectric / electric warp micro actuator using a mixture of ceramic powder and polyvinylidene fluoride. Providing a diaphragm; Forming a lower electrode on the diaphragm; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements Preparing a; Forming a piezoelectric / electric distortion film on the lower electrode by using a mixture of the ceramic powder and polyvinylidene fluoride; Heat-treating the piezoelectric / distortion film at 100-300 ° C .; A method of manufacturing a piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride, including forming an upper electrode on the piezoelectric / electric distortion film. 22. The method of manufacturing a piezoelectric / electric strain microactuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 21, wherein a diaphragm is a ceramic or resin high molecular organic compound. 22. The piezoelectric / using the mixture of ceramic powder and polyvinylidene fluoride according to claim 21, further comprising the step of partially drying the mixture of ceramic powder and polyvinylidene fluoride before forming the piezoelectric / distortion film. All-weather micro actuator manufacturing method. 24. The method of manufacturing a piezoelectric / electric warp microactuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 23, wherein the partial drying is performed at 70-120 ° C. 22. The method of manufacturing the piezoelectric / electric warp micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 21, further comprising: polling after forming the upper electrode. 22. The mixture of ceramic powder and polyvinylidene fluoride according to claim 21, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by uniformly mixing ceramic powder, polyvinylidene fluoride and an organic solvent. Method of manufacturing piezoelectric / electric distortion micro actuators used. 27. The method of claim 26, wherein the organic solvent comprises toluene or hexanol. The piezoelectric / electric warp micro actuator manufacturing method using a mixture of ceramic powder and polyvinylidene fluoride is used. 27. The method of claim 26, wherein a small amount of a binder is added when the ceramic powder and the polyvinylidene fluoride are mixed. 29. The piezoelectric / electric warp using a mixture of ceramic powder and polyvinylidene fluoride according to claim 28, wherein the binder is nitrate, sulfate, phosphate or oxalate. Method of manufacturing a micro actuator. 22. The ceramic powder and poly according to claim 21, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by mixing ceramic powder, polyvinylidene fluoride and ceramic sol solution having the same or similar composition as the ceramic powder. A method for producing piezoelectric / electric distortion microactuator using a mixture of vinylidene fluoride. 22. The method of claim 21, wherein the formed piezoelectric / distortion film is heat-treated at 150-250 ° C. Providing a diaphragm; Forming a lower electrode on the diaphragm; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements Preparing a; Separately forming a piezoelectric / electric distortion film using a mixture of the ceramic powder and polyvinylidene fluoride; Bonding the piezoelectric / electric distortion film and the upper electrode to each other; A method of manufacturing a piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride, including forming an upper electrode on the piezoelectric / electric distortion film. 33. The method of manufacturing a piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 32, wherein a diaphragm is a ceramic or resin-based high molecular organic compound. 33. The method of claim 32, further comprising the step of partially drying the mixture of ceramic powder and polyvinylidene fluoride before forming the piezoelectric / distortion film. All-weather micro actuator manufacturing method. 35. The method of claim 34, wherein the partial drying is carried out at 70-120 ° C. 33. The method of manufacturing a piezoelectric / electric warp micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 32, further comprising: polling after forming the upper electrode. 33. The mixture of ceramic powder and polyvinylidene fluoride according to claim 32, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by uniformly mixing ceramic powder, polyvinylidene fluoride and an organic solvent. Method of manufacturing piezoelectric / electric distortion micro actuators used. 38. The method of manufacturing a piezoelectric / electric distortion micro actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 37, wherein toluene or hexanol is used as the organic solvent. 38. The method of claim 37, wherein a small amount of binder is added when the ceramic powder and the polyvinylidene fluoride are mixed. 40. The piezoelectric / electrical distortion using a mixture of ceramic powder and polyvinylidene fluoride according to claim 39, wherein the binder is nitrate, sulfate, phosphate or oxalate. Method of manufacturing a micro actuator. 33. The ceramic powder and poly according to claim 32, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by mixing ceramic powder, polyvinylidene fluoride and ceramic sol solution having the same or similar composition as the ceramic powder. A method for producing piezoelectric / electric distortion microactuator using a mixture of vinylidene fluoride. 33. The method of claim 32, wherein the piezoelectric / electric warp film and the diaphragm are bonded to each other by heat treatment at 100 to 300 DEG C. A metal vibrating plate; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements A piezoelectric / electric distortion film formed on the upper portion of the metal vibrating plate; A piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride including an upper electrode formed on the piezoelectric / electric distortion film. 45. The mixture of ceramic powder and polyvinylidene fluoride according to claim 43, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by uniformly mixing ceramic powder, polyvinylidene fluoride and an organic solvent. Piezoelectric / electric distortion micro actuator. 45. The piezoelectric / electric warp microactuator according to claim 44, wherein the organic solvent is a mixture of ceramic powder and polyvinylidene fluoride, characterized in that it is toluene or hexanol. 45. The piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 44, wherein a small amount of binder is added to the mixture of ceramic powder and polyvinylidene fluoride. 47. The piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 46, wherein the binder is nitrate, sulfate, phosphate or oxalate. 45. The ceramic powder and poly according to claim 43, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by mixing ceramic powder, polyvinylidene fluoride and ceramic sol solution having the same or similar composition as the ceramic powder. Piezoelectric / Distortion Microactuator Using a Mixture of Vinylidene Fluoride. A diaphragm; A lower electrode formed on the diaphragm; A mixture of ceramic powder and polyvinylidene fluoride, manufactured by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements A piezoelectric / distortion layer formed on the lower electrode; A piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride including an upper electrode formed on the piezoelectric / electric distortion film. 50. The mixture of ceramic powder and polyvinylidene fluoride according to claim 49, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by uniformly mixing ceramic powder, polyvinylidene fluoride and an organic solvent. Piezoelectric / electric distortion micro actuator. 51. The piezoelectric / electric strain microactuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 50, wherein the organic solvent is toluene or hexanol. 51. The piezoelectric / electric distortion micro-actuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 50, wherein a small amount of binder is added to the mixture of ceramic powder and polyvinylidene fluoride. 53. The piezoelectric / electric distortion microactuator using a mixture of ceramic powder and polyvinylidene fluoride according to claim 52, wherein the binder is nitrate, sulfate, phosphate or oxalate. 50. The ceramic powder and poly according to claim 49, wherein the mixture of ceramic powder and polyvinylidene fluoride is prepared by mixing ceramic powder, polyvinylidene fluoride and ceramic sol solution having the same or similar composition as the ceramic powder. Piezoelectric / Distortion Microactuator Using a Mixture of Vinylidene Fluoride.