KR100306301B1 - 모듈아이씨핸들러에서고객트레이내의모듈아이씨픽킹방법및그장치 - Google Patents
모듈아이씨핸들러에서고객트레이내의모듈아이씨픽킹방법및그장치 Download PDFInfo
- Publication number
- KR100306301B1 KR100306301B1 KR1019980049289A KR19980049289A KR100306301B1 KR 100306301 B1 KR100306301 B1 KR 100306301B1 KR 1019980049289 A KR1019980049289 A KR 1019980049289A KR 19980049289 A KR19980049289 A KR 19980049289A KR 100306301 B1 KR100306301 B1 KR 100306301B1
- Authority
- KR
- South Korea
- Prior art keywords
- module
- customer tray
- picking
- tray
- handler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/02—Feeding of components
- H05K13/022—Feeding of components with orientation of the elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
- Y10S414/138—Wafers positioned vertically within cassette
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
Claims (5)
- 테스트할 모듈 IC가 담겨진 고객 트레이를 로딩 포지션의 회동테이블에 위치시키는 단계와, 상기 고객 트레이가 얹혀진 회동테이블을 그 일측 저면에 설치된 편심캠의 회전에 의해 일측으로 기울여 고객 트레이에 담겨진 모듈 IC가 동일방향으로 가지런히 기울여지도록 하는 단계와, 상기 고객 트레이내에 담겨진 모듈 IC를 픽킹하는 픽업수단을 그 상부에 설치된 스퍼어 기어의 회전에 의해 모듈 IC의 기울기와 일치되게 회동시켜 고객 트레이로부터 모듈 IC를 픽킹한 다음 초기상태로 환원하여 픽킹된 모듈 IC를 캐리어 또는 테스트 소켓내에 로딩하는 단계를 반복적으로 진행함을 특징으로 하는 모듈 아이씨 핸들러에서 고객 트레이내의 모듈 아이씨 픽킹방법.
- 제 1 항에 있어서,로딩 포지션에서 모듈 IC를 전부 로딩하고 난 빈 고객 트레이를 언로딩 포지션으로 이송시켜 상기 빈 고객 트레이내에 테스트 완료된 모듈 IC가 담겨지도록 함을 특징으로 하는 모듈 아이씨 핸들러에서 고객 트레이내의 모듈 아이씨 픽킹방법.
- 로딩 포지션에 회동가능하게 설치되어 고객 트레이가 얹혀지는 회동테이블과, 상기 회동테이블의 일측 저면에 접속되게 설치되어 상기 회동테이블을 일측으로 기울이는 편심캠과, 상기 고객 트레이내의 모듈 IC를 픽킹하는 픽업수단의 상부에 설치되고 회전에 의해 픽업수단이 회동테이블의 기울기와 일치되게 기울어지도록 하여주는 스퍼어 기어와, 상기 스퍼어 기어를 회전시키는 구동수단으로 구성된 것을 특징으로 하는 모듈 아이씨 핸들러에서 고객 트레이내의 모듈 아이씨 픽킹장치.
- 제 3 항에 있어서,구동수단은 상기 스퍼어 기어에 맞물리게 설치되어 모터의 구동에 따라 회전하는 구동기어로 구성된 것을 특징으로 하는 모듈 아이씨 핸들러에서 고객 트레이내의 모듈 아이씨 픽킹장치.
- 제 3 항에 있어서,구동수단은 상기 스퍼어 기어에 맞물리게 설치되어 실린더의 구동에 따라 진퇴운동하는 랙으로 구성된 것을 특징으로 하는 모듈 아이씨 핸들러에서 고객 트레이내의 모듈 아이씨 픽킹장치.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019980049289A KR100306301B1 (ko) | 1998-11-17 | 1998-11-17 | 모듈아이씨핸들러에서고객트레이내의모듈아이씨픽킹방법및그장치 |
US09/437,745 US6634847B1 (en) | 1998-11-17 | 1999-11-10 | Method and an apparatus for picking up a module IC in a customer tray of a module IC handler |
JP32582099A JP3190910B2 (ja) | 1998-11-17 | 1999-11-16 | Icモジュールハンドラにおけるカストマトレイ内のicモジュールピッキング方法及びその装置 |
CNB991238907A CN1187246C (zh) | 1998-11-17 | 1999-11-17 | 从ic模块输送装置的常规托盘内取出ic模块的方法和装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019980049289A KR100306301B1 (ko) | 1998-11-17 | 1998-11-17 | 모듈아이씨핸들러에서고객트레이내의모듈아이씨픽킹방법및그장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000032735A KR20000032735A (ko) | 2000-06-15 |
KR100306301B1 true KR100306301B1 (ko) | 2001-10-20 |
Family
ID=19558670
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019980049289A Expired - Fee Related KR100306301B1 (ko) | 1998-11-17 | 1998-11-17 | 모듈아이씨핸들러에서고객트레이내의모듈아이씨픽킹방법및그장치 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6634847B1 (ko) |
JP (1) | JP3190910B2 (ko) |
KR (1) | KR100306301B1 (ko) |
CN (1) | CN1187246C (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7202693B1 (en) | 2006-03-01 | 2007-04-10 | Intel Corporation | Combined pick, place, and press apparatus |
US8500384B2 (en) * | 2008-08-19 | 2013-08-06 | Tld (Canada) Inc. | Cargo loader for an aircraft with an articulate scissor assembly |
JP5539019B2 (ja) * | 2010-05-19 | 2014-07-02 | キヤノンアネルバ株式会社 | 基板支持装置及び真空処理装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4568234A (en) * | 1983-05-23 | 1986-02-04 | Asq Boats, Inc. | Wafer transfer apparatus |
SE8502400L (sv) * | 1984-05-16 | 1985-11-17 | Walter Sticht | Sett och anordning for tillforsel av montagedelar |
JPS6339778A (ja) * | 1986-07-30 | 1988-02-20 | マツダ株式会社 | 部品取出し装置 |
US5009053A (en) * | 1987-03-26 | 1991-04-23 | Keith A. Langenbeck | Storage and transport tray and tray packing system |
JPS63258037A (ja) * | 1987-04-15 | 1988-10-25 | Mitsubishi Electric Corp | 半導体ウエハの移し替え装置 |
JPS6457730A (en) * | 1987-08-28 | 1989-03-06 | Tel Sagami Ltd | Wafer shifting method |
JP2983993B2 (ja) * | 1988-09-02 | 1999-11-29 | 日本テトラパック株式会社 | シート状物品の自動供給・入換装置 |
DE4417806C2 (de) * | 1994-05-20 | 2000-06-21 | Roland Man Druckmasch | Verfahren und Vorrichtung zur automatischen Bereitstellung eines Bogenstapels für eine Druckmaschine |
TW287235B (ko) * | 1994-06-30 | 1996-10-01 | Zenshin Test Co | |
JP3063602B2 (ja) * | 1995-12-22 | 2000-07-12 | 日立電子エンジニアリング株式会社 | Icデバイスの移載装置 |
US5779203A (en) * | 1996-06-28 | 1998-07-14 | Edlinger; Erich | Adjustable wafer cassette stand |
JPH10139159A (ja) * | 1996-11-13 | 1998-05-26 | Tokyo Electron Ltd | カセットチャンバ及びカセット搬入搬出機構 |
US6033521A (en) * | 1997-06-04 | 2000-03-07 | Speedfam-Ipec Corporation | Tilt mechanism for wafer cassette |
US6152680A (en) * | 1997-08-26 | 2000-11-28 | Daitron, Inc. | Wafer cassette rotation mechanism |
US6062799A (en) * | 1998-06-23 | 2000-05-16 | Samsung Electronics Co., Ltd. | Apparatus and method for automatically loading or unloading printed circuit boards for semiconductor modules |
US6241449B1 (en) * | 1999-02-16 | 2001-06-05 | Robert J. Krooss | Apparatus and method for unloading plastic containers stored in stacks of tiers |
US6264415B1 (en) * | 1999-09-30 | 2001-07-24 | Advanced Micro Devices, Inc. | Mechanism for accurately transferring a predetermined number of integrated circuit packages from tube to tube |
-
1998
- 1998-11-17 KR KR1019980049289A patent/KR100306301B1/ko not_active Expired - Fee Related
-
1999
- 1999-11-10 US US09/437,745 patent/US6634847B1/en not_active Expired - Fee Related
- 1999-11-16 JP JP32582099A patent/JP3190910B2/ja not_active Expired - Fee Related
- 1999-11-17 CN CNB991238907A patent/CN1187246C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1187246C (zh) | 2005-02-02 |
KR20000032735A (ko) | 2000-06-15 |
US6634847B1 (en) | 2003-10-21 |
JP3190910B2 (ja) | 2001-07-23 |
JP2000180507A (ja) | 2000-06-30 |
CN1260318A (zh) | 2000-07-19 |
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