KR100284325B1 - Waste gas treatment system for atmospheric pressure equipment - Google Patents

Abstract

The present invention relates to a waste gas treatment apparatus for an atmospheric pressure equipment that processes waste gas generated in an atmospheric pressure process equipment at which the process is performed at atmospheric pressure. According to the present invention, a waste gas treatment apparatus for an atmospheric pressure equipment is capable of adjusting pressure in a process equipment. The waste gas can be treated with high flow rate and large capacity, and the process of the atmospheric process equipment is not interrupted even if a part of the waste gas treatment device for the atmospheric pressure equipment fails.

Description

Waste gas treatment system for atmospheric pressure equipment

The present invention relates to a waste gas treatment apparatus, and more particularly, to a waste gas treatment apparatus for an atmospheric pressure facility for treating waste gas generated in an atmospheric pressure process facility in which a process is performed at atmospheric pressure.

In general, the semiconductor industry has a great influence on related industries such as the electric industry, the electronics industry, the information and communication industry, and the computer industry. In order to manufacture a semiconductor device having a great influence on other industries, the semiconductor industry has a very high precision on a pure silicon substrate. However, there is a need for a semiconductor thin film manufacturing process that is repeatedly performed.

Various facilities have been developed as a facility for manufacturing such a semiconductor thin film, but the desired chemical gas is reacted on a pure silicon substrate to form a desired thin film material, and then a chemical vapor layer is deposited on the pure silicon substrate as if it were stacked with snowflakes. Chemical vapor deposition (CVD) is commonly used.

Such chemical vapor deposition methods can be divided into atmospheric pressure chemical vapor deposition method, low pressure chemical vapor deposition method, and plasma chemical vapor deposition method. Atmospheric pressure chemical vapor deposition involves the reaction of chemical gases at atmospheric pressure. At the same time fast gas flow is required.

On the other hand, in the low pressure chemical vapor deposition method, the reaction of chemical gases is performed at a low pressure (0.1-10torr; low pressure) lower than the pressure in the atmospheric pressure chemical vapor deposition method, and a uniform film quality can be obtained as compared with the atmospheric pressure chemical vapor deposition method. . At this time, the reaction gas and the unreacted gas generated during the process are forced out by the vacuum pump at low flow rate, low pressure and flow rate.

In addition, as one of the low pressure chemical vapor deposition methods, electrons having high energy in a low pressure state (0.1 to 5 torr) collide with gas molecules in a neutral state, and gas molecules are decomposed into ionized atoms, and the reaction of the decomposed gas on the silicon wafer is performed. There is a PE Enhanced Plasma Enhanced CVD (PE CVD) method.

Such process facilities use chemical gases that are very harmful to human body and ecosystem, so that the reaction gases and unreacted gases generated during the process cannot be released into the air without being released into the air. do.

Conventional waste gas treatment device is a waste gas, inert gas and the air for oxidation exhausted from the process equipment by a waste gas-air-inert gas mixing device called a manifold (manifolder) is mixed to form a mixer, the mixer is a waste gas Waste gas and air are chemically reacted after being fed into a heating chamber in which a high temperature environment suitable for oxidation is formed. At this time, the inert gas serves to suppress the rapid oxidation reaction of the waste gas and air.

As the waste gas is oxidized in the heating chamber as described above, the secondary product is separated into the polymer and the purification gas, and then the purification gas / polymer mixture is transferred to the collection unit to separate the polymer and the purification gas. The collection unit is in turn composed of a cooling chamber in communication with the heating chamber to deposit the polymer, a collection chamber to seal the cooling chamber, and a scraper unit to scrape off and remove the polymer deposited on the cooling chamber / collection chamber.

The polymer in the form of a lump scraped off by the scraper unit is collected by a polymer container, and the waste gas mixed with a trace amount in the purified gas is transferred to the dust collecting unit along a gas pipe connected to a predetermined portion of the collection chamber.

At this time, the dust collection unit is provided with a multi-stage cyclone separation unit for separating the polymer in multiple stages, and at the end of the multi-stage cyclone separation unit, a filter member for finally filtering the polymer is installed so that only the harmless gas passing through the filter member is post-treated. Transferred to the process.

However, such a collection chamber conventional waste gas treatment device is particularly suitable for low pressure chemical vapor deposition equipment that discharges a small amount of waste gas at a low flow rate and small flow rate, but for example, a large flow rate and There is a problem that it is difficult to apply to atmospheric pressure chemical vapor deposition equipment, such as a large amount of waste gas discharged at high speed.

Accordingly, the present invention has been made in view of such a conventional problem, and an object of the present invention is to provide a waste gas treatment apparatus for atmospheric pressure equipment suitable for treatment of a large amount of waste gas issued by the atmospheric pressure process equipment.

Other objects of the present invention will become more apparent from the detailed description of the invention.

1 is a conceptual diagram showing a waste gas treatment apparatus for atmospheric pressure process equipment according to the present invention.

Figure 2 is an enlarged cross-sectional view of the manifold and the heating chamber according to the present invention.

Waste gas treatment apparatus for atmospheric pressure equipment for achieving the object of the present invention is supplied to the waste gas from the exhaust pipe of the atmospheric pressure process equipment, the mixer generating unit for mixing the inert gas, air to produce a mixer, the mixer generating unit is in communication with the Waste gas oxidizing unit for heating purified gas to a predetermined temperature to produce a refined gas and a secondary product, a refined gas secondary product conveying pipe connected to an outlet of the waste gas oxidizing unit, and a refined gas secondary product conveying pipe connected Secondary product separation means for separating only the product from the purified gas and a blower connected to the secondary product separation means so that the waste gas flows from the atmospheric pressure processing equipment into the mixer generating unit and the internal pressure of the atmospheric pressure processing equipment is kept constant. Include.

Hereinafter, the waste gas treatment apparatus for atmospheric pressure installation of the present invention will be described with reference to FIG. 1.

Referring to FIG. 1, the waste gas treatment apparatus 600 for atmospheric pressure equipment includes a manifold 100, a heating chamber 200, a purified gas / polymer transfer pipe 300, a dust collecting equipment 400, and a plurality of blowers ( 500).

More specifically, referring to the accompanying FIG. 2, the manifold 100 includes a housing 110, a mixer forming hole 120, an air supply hole (not shown), and an inert gas supply hole 130.

More specifically, the cylindrical housing 110 penetrates both ends to form a mixer forming hole 120, the outer peripheral surface of the housing 110 to communicate with the mixer forming hole 120, the air supply hole and the inert gas supply hole 130 Is formed.

In addition, a male screw portion is formed at the bottom of the outer circumferential surface of the housing 110 to couple the flange 140 coupled to the heating chamber 200 to be described later.

A cylindrical connecting pipe 10 is installed through the inner diameter upper end of the mixer forming hole 120 of the manifold 100 configured as described above, and the first inner tube to be described later through the lower inner diameter of the mixer forming hole 120 ( 210 is installed.

At this time, the connection pipe 10 is coupled to the exhaust pipe 20 of the atmospheric pressure processing equipment (not shown), the connection pipe 10 is formed with a through hole to communicate with the aforementioned inert gas supply hole 130 and the first inner The tube 210 has a through hole communicating with the air supply hole.

In this way, the air supply hole formed to penetrate the connection pipe 10 and the housing 110 is provided with an air injection nozzle 150 for injecting air at a predetermined pressure into the mixer formation hole 120, and the first inner tube ( The inert gas supply hole 130 formed to penetrate the 210 and the housing 110 is provided with an inert gas injection nozzle 135 for injecting inert gas at a predetermined pressure into the mixer formation hole 120.

In this case, an air supply unit (not shown) communicates with an air supply hole formed through the housing 110 of the manifold 100, and an inert gas is provided in the inert gas injection nozzle 135 formed through the outer circumferential surface of the housing 110. The supply part (not shown) is in communication.

On the other hand, the heating chamber 200 is in communication with the lower end of the manifold 100, the heating chamber 200 is the first, the second inner tube (210, 220), the first, the second inner tube (210, 220) as a whole Cylindrical heater 230 inserted to surround the first and second inner tubes 210 and 220 to be heated, an outer tube 240 into which the heater 230 is inserted, and a cooling tube 250 for cooling the outer tube 240. It is composed.

More specifically, the first inner tube 210 is installed at the lower end of the inner diameter of the mixer forming hole 120 of the manifold 100, and the end of the first inner tube 210 is the second inner tube. Butt joint with one end of the (220).

At the other end of the second inner tube 220 butt-coupled with the first inner tube 210, the purified gas / polymer transfer pipe 300 having a diameter that is forcibly fitted to the outer diameter surface of the second inner tube 220. One end is coupled.

In this case, a flange 310 is formed on the outer circumferential surface of the purified gas / polymer transfer pipe 300, and the flange 310 is hermetically coupled to the flange 245 of the outer tube 240.

At this time, care should be taken not to narrow the diameter of the purified gas / polymer delivery pipe 300 compared to the second inner tube 220, which is the flow rate of the polymer / purified gas passing through the purified gas / polymer delivery pipe 300 This is to ensure that no change occurs.

At this time, the other end of the purified gas / polymer transfer pipe 300 is in communication with the first cyclone dust collector 410, the first cyclone dust collector 410 is in communication with the second cyclone dust collector 420 again.

More specifically, the first cyclone dust collector 410 has a cylindrical shape with an upper end blocked and an open lower end thereof, and the purified gas / polymer transport pipe 300 communicates with the outer circumferential surface tangentially to the outer circumferential surface of the first cyclone dust collector 410. Then, one open end of the exhaust pipe 415 is inserted deeply through the upper end of the first cyclone dust collector 410. In this case, the polymer container 417 is coupled to the opened lower end of the first cyclone dust collector 410.

The other end of the exhaust pipe 415 communicates again in the tangential direction of the outer circumferential surface of the second cyclone dust collector 420, and the exhaust pipe 425 also communicates with the upper end of the second cyclone dust collector 420. 425 is deeply inserted into the second cyclone dust collector 420 similarly to the connection pipe 415 of the first cyclone dust collector 410.

The first blower 510 and the second blower are respectively disposed between the exhaust pipe 425 installed at the end of the second cyclone dust collector 420 installed in this way, and the atmospheric pressure process equipment exhaust pipe 20 and the connection pipe 20 described above. 520 is installed.

The second blower 520 of the first blower 510 and the second blower 520 allows the waste gas to be forced into the manifold 100 from the atmospheric pressure processing equipment and at the same time, the polymer generated in the heating chamber 200 is purified. The gas / polymer transport pipe 300 is stacked to prevent the purification gas / polymer transport pipe 300 from being clogged and to maintain a constant pressure in the atmospheric process equipment so that process defects do not occur. .

The first blower 510 serves to reinforce the second blower 520. That is, the first blower 510 has a long length of the refinery gas / polymer conveying pipe 300 so that a large head loss occurs in the refinery gas / polymer conveying pipe 300. Prevents the build up of If the length of the refinery gas / polymer conveying pipe 300 is short enough so that the water loss in the refinery gas / polymer conveying pipe 300 is negligible, the first blower 510 stops operation and the second blower is stopped. 520 may be used.

On the other hand, when both the first blower 510 or the second blower 520, the first blower 510 and the second blower 520 causes equipment failure, the waste gas treatment apparatus 600 for the atmospheric pressure equipment as a whole is down. Occurs in this case, the waste gas is not smoothly exhausted from the atmospheric pressure process equipment, causing a process failure in the atmospheric pressure process equipment.

In order to prevent this, a branch pipe 350 having the same diameter as the purified gas / polymer transport pipe 300 is formed in a part of the purified gas / polymer transport pipe 300, and a third end of the branch pipe 350 is formed in the third pipe. The blower 530 is preferably installed.

At this time, the solenoid valve 370 is automatically opened and at the same time when the solenoid valve 370 is installed in a part of the branch pipe 350 so that equipment failure occurs in the first blower 510 and the second blower 520. In conjunction with this, it is preferable to operate the third blower 530.

Referring to the accompanying drawings, the operation of the waste gas treatment apparatus for atmospheric pressure equipment of the present invention configured as described above is as follows.

First, the waste gas composed of a large amount of unreacted gas and reactant gas generated while the process is performed by the atmospheric pressure process equipment is forced by the negative pressure (−) generated by the first and second blowers 510 and 520. It is introduced into the mixer formation hole (120).

Subsequently, the inert gas is injected into the mixer formation hole 120 of the manifold 100 through the inert gas supply unit-inert gas supply hole 130-inert gas injection nozzle 135 so that the waste gas and the inert gas are primarily Are mixed.

Subsequently, the waste gas-inert gas mixer is secondarily mixed with the air injected through the air supply unit-air supply hole-air injection nozzle 150, and the mixer consisting of waste gas, inert gas, and air is used for the heating chamber 200. It is injected into the first and second inner tubes (210, 220).

As the mixer is injected into the inlet of the first inner tube 210 heated to a predetermined temperature by the high temperature heat generated by the heater 230 of the heating chamber 200 and transferred to the outlet of the second inner tube 220, the cold The mixer is gradually heated by the high temperature heat generated by the heater 230 of the heating chamber 200.

Then, at a predetermined position of the second inner tube 220, the waste gas and air cause a chemical reaction, and the waste gas becomes a purified gas and a polymer that is a secondary product.

Thereafter, the purified gas and the polymer formed by the oxidation of the waste gas flow into the first and second cyclone dust collectors 410 and 420 along the purified gas / polymer transfer pipe 300 communicating with the outlet of the second inner tube 220. After that, only the polymer in the purified gas and the polymer is collected by the first and second cyclone dust collectors 410 and 420, and the purified gas is exhausted through the first blower 510 to the aftertreatment process.

On the other hand, if any one or both of the first and second blowers (510, 520) that inhale waste gas from the atmospheric pressure process equipment into the waste gas treatment device has failed, the waste gas may not be smoothly exhausted from the atmospheric pressure process equipment, causing process abnormalities. The first and second blowers 510 and 520 may be temporarily exhausted by temporarily exhausting the purified gas / polymer mixture through the third blower 530 installed in the branch pipe 350 connected to the purified gas / polymer transport pipe 300. By securing time for repair, the abnormality of the waste gas treatment device prevents the abnormal process of the atmospheric pressure process equipment and the process interruption of the atmospheric pressure process equipment.

As described in detail above, the waste gas treatment apparatus for atmospheric pressure equipment can treat waste gas having a high flow rate and large capacity, and the process of the atmospheric pressure treatment equipment is not interrupted even if a part of the waste gas treatment equipment for the atmospheric pressure equipment fails. At the same time, there is an effect of preventing a process defect from occurring in the atmospheric pressure facility by making the pressure inside the atmospheric pressure facility constant at all times.

Claims (12)

A mixer forming unit configured to receive a waste gas from an exhaust pipe of an atmospheric pressure processing facility and mix an inert gas and air to form a mixer; A waste gas oxidizing unit in communication with the mixer forming unit and forming a purified gas and a secondary product by heating and reacting the mixer to a predetermined temperature; A purified gas / secondary product conveying pipe connected to an outlet of the waste gas oxidation unit; Secondary product separation means communicating with the purified gas / secondary product conveying pipe to separate only the secondary product from the purified gas; The mixer forming unit, the waste oxidation unit, the purified gas / secondary product separation means, such that the waste gas is introduced into the mixer generating unit from the atmospheric pressure processing facility and the internal pressure of the atmospheric pressure processing facility is kept constant. And a main blower for forming a vacuum pressure in the secondary product separation means. The method of claim 1, wherein the mixer forming unit A housing in which a through hole having a predetermined diameter is formed; A connection pipe installed at one end of the housing to receive the waste gas from the exhaust pipe; An air supply hole and an inert gas supply hole communicating with the through hole of the housing; Installed in the inner surface of the through hole and the waste gas treatment apparatus for an atmospheric pressure equipment, characterized in that it comprises an air injection nozzle and an inert gas injection nozzle in communication with the air supply hole and the inert gas supply hole. The method of claim 2, wherein the waste gas oxidation unit An inner tube including a first inner tube communicating with the other end of the through hole and a second inner tube butt-coupled with the first inner tube; A heater into which the inner tube is inserted; The heater is inserted, waste gas treatment apparatus for an atmospheric pressure facility, characterized in that it comprises an outer tube wound around the cooling water tube on the outer circumferential surface. According to claim 3, The second inner tube waste gas treatment apparatus for atmospheric pressure equipment, characterized in that the purified gas / secondary product conveying pipe is fitted in communication. The waste gas treatment system for atmospheric pressure installation according to claim 4, wherein the diameters of the second inner tube and the purified gas / secondary product delivery pipe are the same. According to claim 1, wherein the secondary product separation means is the purified gas / secondary product conveying pipe is in tangential communication with the outer circumferential surface, the exhaust pipe is inserted and sealed at one end, the other end is secondary product Waste gas treatment apparatus for atmospheric pressure equipment characterized in that the cylindrical cyclone dust collector in communication with the container. The waste gas treatment system according to claim 6, wherein at least one cyclone dust collector is in communication with the purified gas / secondary product conveying pipe. The method of claim 1, wherein the branch pipe is communicated to a predetermined position of the purified gas / polymer transfer pipe, the end of the branch pipe is a branch pipe blower and a solenoid valve for opening and closing the branch pipe is installed waste gas for the atmospheric pressure facility. Processing unit. The waste gas treatment apparatus for atmospheric pressure installation according to claim 1, wherein the blower is communicated between the exhaust pipe and the mixer forming unit. The waste gas treating apparatus for atmospheric pressure installation according to claim 1, wherein the blower is in communication with the secondary product separation means. The waste gas treating apparatus for atmospheric pressure installation according to claim 1, wherein a first blower is communicated between the exhaust pipe and the mixer forming unit, and a second blower is connected to the secondary product separation means. 12. The method of claim 11, wherein if the pressure loss occurs a lot inside the waste gas treatment system for the atmospheric pressure equipment, both the first blower and the second blower is operated, and if the pressure loss occurs less inside the waste gas treatment device for the atmospheric pressure equipment. The waste gas treatment apparatus for atmospheric pressure installation, characterized in that only the second blower is operated.