KR100226474B1 - Rising and falling apparatus for cleaning - Google Patents
Rising and falling apparatus for cleaning Download PDFInfo
- Publication number
- KR100226474B1 KR100226474B1 KR1019960026671A KR19960026671A KR100226474B1 KR 100226474 B1 KR100226474 B1 KR 100226474B1 KR 1019960026671 A KR1019960026671 A KR 1019960026671A KR 19960026671 A KR19960026671 A KR 19960026671A KR 100226474 B1 KR100226474 B1 KR 100226474B1
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- Prior art keywords
- case
- pulley
- dust
- screw rod
- guide groove
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- 238000004140 cleaning Methods 0.000 title 1
- 230000000630 rising effect Effects 0.000 title 1
- 239000000428 dust Substances 0.000 claims abstract description 44
- 230000000903 blocking effect Effects 0.000 claims abstract description 7
- 230000005540 biological transmission Effects 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 10
- 238000011109 contamination Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 210000004185 liver Anatomy 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
본 발명은 반도체 제조실과 같이 청정상태가 요구되는 작업실에서 사용되는 청정승강장치에 관한 것으로써, 일측에 받침부연결부 안내홈을 구비하며, 받침부연결부안내홈을 차단시키는 차단막이 형성되어 내부가 비교적 밀폐되는 케이스와, 케이스의 내부에 설치되어 이송물을 상, 하로 이동시키기 위한 이동수단과, 받침부연결부안내홈을 통해 이동수단과 연결되게 케이스 외부에 설티되어 이동시키고자 하는 이송물이 얹혀지는 받침부와, 케이스에 설치되어 이동수단의 구동시 발생되는 분진 및 케이스 외부의 분진을 케이스 내부로 집진하여 제거하는 분진 배출부를 포함하여 이루어진다.The present invention relates to a clean lifting apparatus used in a work room requiring a clean state, such as a semiconductor manufacturing room, having a supporting portion guide groove on one side, a blocking film is formed to block the supporting portion guide groove is relatively inside. The case is sealed, a moving means installed inside the case to move the conveying material up and down, and the conveying material to be installed and moved outside the case to be connected to the moving means through the supporting portion guide groove And a dust discharge part installed in the case and collecting dust and dust generated during driving of the moving means and dust outside the case into the case.
Description
제1도는 체인을 동력전달수단으로 이용한 종래의 승강장치.1 is a conventional lifting device using a chain as a power transmission means.
제2도는 나사를 동력전달수단으로 이용한 종래의 승강장치.2 is a conventional lift apparatus using a screw as a power transmission means.
제3도는 본 발명에 따른 청정 승강장치의 바람직한 일실시예를 도시한 개략적인 사시도.Figure 3 is a schematic perspective view showing a preferred embodiment of the clean lifting apparatus according to the present invention.
제4도는 제3도의 평단면도.4 is a cross-sectional view of FIG.
제5도는 제3도의 저면도.5 is a bottom view of FIG.
제6도는 본 발명에 따른 청정 승강장치의 다른 실시예를 도시한 사시도.6 is a perspective view showing another embodiment of a clean lifting apparatus according to the present invention.
도면의 주요부분에 대한 부호의 설명Explanation of symbols for main parts of the drawings
310, 610 : 이동수단 311, 611 : 모터310, 610: moving means 311, 611: motor
312 : 도르래 313 : 로프312 pulley 313 rope
314-1, 314-2, 316, 616 : 타이밍벨트 315-1 : 제 1 폴리314-1, 314-2, 316, 616: timing belt 315-1: first pulley
316-2 : 제 2 폴리 315-3 : 제 3 폴리316-2: Second Poly 315-3: Third Poly
315-4 : 제 4 폴리 360, 660 : 케이스315-4: Fourth Poly 360, 660: Case
360-1, 660-1 : 받침부연결부 안내홈 360-2, 660-2 : 차단막360-1, 660-1: guide connection guide groove 360-2, 660-2: blocking film
340, 640 : 받침부 400, 700 : 송풍팬340, 640: support portion 400, 700: blowing fan
410,710 : 받침부연결부 420 : 프레임410,710: support portion 420: frame
본 발명은 청정 승강장치에 관한 것으로, 특히 반도체 제조용 청정실 내에서 물건을 상하로 반송할 대 사용되는 승강장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a clean lifting device, and more particularly, to a lifting device used for conveying an object up and down in a clean room for semiconductor manufacturing.
반도체 디바이스 제조 공정이 진행되는 작업실은, 제품 특성상의 요구에 의해 대부분이 청정 상태를 유지하고 있다. 따라서, 공정장치는 물론 공정장치 간 또는 저장장치에서 공정장치 및 공정장치에서 저장장치로의 제품이송 수단도 오염물질 발생을 최소화해야 할 필요가 있다.Most of the work chambers in which the semiconductor device manufacturing process proceeds maintain a clean state due to demands on product characteristics. Therefore, there is a need for minimizing the generation of pollutants, as well as means for transferring products from processing equipment to storage equipment or from processing equipment to storage equipment.
제 1 도와 제 2 도는 종래의 승강장치를 도시한 도면으로써, 제 1 도는 체인을 동력전달수단으로 이용한 승강장치이고, 제 2 도는 나사를 동력전달수단으로 이용한 승강장치이다.1 and 2 are views showing a conventional lifting device, wherein FIG. 1 is a lifting device using a chain as a power transmission means, and FIG. 2 is a lifting device using a screw as a power transmission means.
제 1 도에서 알 수 있는 바와 같이, 체인을 동력전달수단으로 사용하는 종래의 승강장치는, 상부에 형성된 모터(11)에 의해 회전하는 스프로켓(Sprocket wheel)(12)과, 스프로켓(12)에 감기고 한쪽 단에는 받침대(14)가 고정되며 또다른 단에는 균형추(15)가 고정된 체인(Chain)(15)과, 케이스(16)로 구성되어 있다.As can be seen in FIG. 1, a conventional hoisting apparatus using a chain as a power transmission means is wound on a sprocket 12 and a sprocket 12 that are rotated by a motor 11 formed thereon. A pedestal 14 is fixed to one end and a chain 15 and a case 16 to which the counterweight 15 is fixed.
균형추(15)는, 받침대(14) 또는 얹혀진 이송물의 무게를 포함한 받침대의 무게와 거의 같은 무게를 갖게 하여, 받침대(14)의 하중에 의한 모터(11)의 부하를 상쇄하는 기능을 한다.The counterweight 15 has a weight substantially equal to the weight of the pedestal including the weight of the pedestal 14 or the conveyed object, and functions to offset the load of the motor 11 by the load of the pedestal 14.
받침대(14)에 웨이퍼 카세트 등의 이송물이 얹힌 상태에서 모터(11)에 의해 스프로켓(12)이 회전하면 체인(13)에 매달린 받침대(14)가 위 또는 아래로 이동하게 된다. 받침대(14)가 원하는 높이 또는 정해진 높이 만큼 이동된 후 그 높이에 설치된 선반 또는 다른 공정장치 등으로 이송물이 언로딩(Unloading)되는 것으로 반송동작이 수행된다.When the sprocket 12 is rotated by the motor 11 in a state in which a conveyer such as a wafer cassette is placed on the pedestal 14, the pedestal 14 suspended from the chain 13 is moved up or down. After the pedestal 14 is moved to a desired height or a predetermined height, the conveying operation is performed by unloading the conveyed material to a shelf or other processing equipment installed at the height.
상술한 구조와 동작을 갖는 종래의 장치는 스프로켓(12)을 구동시키는 구동용 모터(11)가 상부에 위치함으로써, 모터(11)에서 발생하는 1 미크론 이하의 미세분진이 쉽게, 청정이 요구되는 반도체 웨이퍼 등과 같은, 이송중인 물건 및 주위의 물건들을 오엽시키게 되는 문제점이 있다. 이러한 미세분진을 회전하는 모터(11)의 모터축에서 많이 발생되는데, 그 발생위치가 이송물보다 높기 때문에 낙하하면서 주변의 물건들을 오엽시키게 되는 것이다. 더욱이 스프로켓(12)과 체인(13)이 구동되면서 마모 분진이 발생되므로써 오염을 가중시키고 있기 때문에, 고도의 청정상태가 필요한, 반도체장치를 제조하는 청정실의 승강장치로는 적합하지 못하다.In the conventional apparatus having the above-described structure and operation, since the driving motor 11 for driving the sprocket 12 is located at the top, fine dust of 1 micron or less generated in the motor 11 is easily cleaned. There is a problem of fouling objects in transport and surrounding objects, such as semiconductor wafers. The fine dust is generated a lot in the motor shaft of the rotating motor 11, because the generation position is higher than the conveyed object is to fall around while falling. Moreover, since the sprockets 12 and the chain 13 are driven to increase the contamination by generating wear dust, they are not suitable as the lifting device of the clean room for manufacturing a semiconductor device, which requires a high clean state.
제 2 도에 도시한 바와 같이, 나사를 동력전달수단으로 이용한 종래의 장치는, 일정길이를 갖는 나사봉(27-1)과 그와 나사 대우된 암나사(27-2)를 구비하고 있다. 이 암나사(27-2)에는 받침대(24)가 고정되어 있다. 나사봉(27-1)은 하부에 설치된 모터(21)에 벨트(28) 전동되어 모터(21)의 구동시에 회전하고, 나사봉(27-1)의 회전에 따라 나사 대우된 암나사(27-2)가 위 또는 아래로 이동한다.As shown in FIG. 2, the conventional apparatus using a screw as a power transmission means is provided with the screw rod 27-1 which has a predetermined length, and the female screw 27-2 treated with the screw. A pedestal 24 is fixed to the female screw 27-2. The screw rod 27-1 is rotated when the motor 21 is driven by being driven by the belt 28 to the motor 21 provided in the lower portion, and the female screw 27- treated with screws according to the rotation of the screw rod 27-1. 2) moves up or down.
도면부호(26)은 케이스를 나타내는 것이다.Reference numeral 26 denotes a case.
이러한 나사를 동력전달수단으로 이용하는 종래 장치는, 미세분진의 주발생원인 모터(21)가 하부에 형성되어 있으므로 미세분진의 오염 위험은 상술한 체인 구동방식보다 적으로, 구조적으로 안정감이 떨어지는 문제가 있다. 즉, 정전 시에는 받침대(24)가 흘러내리기가 쉽고, 이송동작 중 진동이 발생한다. 진동은 이송거리가 길 경우 쉽게 발생하는데, 이 역시 미세분진의 발생원인이 되기도 한다.In the conventional apparatus using such a screw as a power transmission means, since the motor 21, which is the main source of fine dust, is formed in the lower portion, the risk of contamination of fine dust is less than that of the above-described chain driving method, resulting in a less structural stability. have. That is, during the power outage, the pedestal 24 easily flows down, and vibration occurs during the transfer operation. Vibration is easily generated when the conveying distance is long, which can also cause fine dust.
본 발명은 상술한 종래 장치들의 문제점을 개선하기 위해 안출된 것으로써, 미세 분진에 의한 오엽을 방지하고 안정감 있는 청정 승강장치를 제공하고자 한다.The present invention has been made in order to improve the problems of the above-described conventional devices, and to provide a clean lifting device that prevents contamination by fine dust and has a stable feeling.
본 발명의 청정 승강장치는, 일측에 받침부연결부 안내홈을 구비하며, 받침부연결부 안내홈을 차단시키는 차단막이 형성되어 내부가 비교적 밀폐되는 케이스와, 케이스의 내부에 설치되어 이송물을 상, 하로 이동시키기 위한 이동수단과, 받침부연결부 안내홈을 통해 이동수단가과 연결되게 케이스 외부에 설치되어 이동시키고자하는 이송물이 얹혀지는 받침부와, 케이스에 설치되어 이동수단의 구동시 발생되는 분진 및 케이스 외부의 분진을 케이스 내부로 집진하여 제거하는 분진 배출부를 포함하여 이루어진다.The clean elevator apparatus of the present invention includes a support connecting portion guide groove on one side, and a blocking film is formed to block the support connecting portion guide groove, and the case is relatively sealed inside, and is installed inside the case to convey the conveyance up and down. A moving part for moving, a supporting part installed on the outside of the case so as to be connected to the moving means through the supporting part guide groove, and a conveying part to be moved thereon; It comprises a dust discharge unit for collecting the dust outside the dust inside the case.
여기서, 분진 배출부는, 케이스의 하부에 형성된 것이 특징이다.Here, the dust discharge portion is characterized in that formed in the lower portion of the case.
그리고, 좀더 자세히 상술하면 이동수단은, 도르래와, 도르래에 감기고, 한쪽단이 받침부와 연결되며, 또 다른 단이 받침부 또는 얹혀진 이송물의 무게를 포함한 받침부의 무게와 비교적 같은 정도 무게의 균형추와 연결되어 비교적 무게 균형이 잡힌 로프(Rope)와, 사이 거리가 세로방향으로 일정거리인 제 1 및 제 2 풀리와, 받침부가 소정위치에 받침부연결부에 의해 고정되고, 제 1 풀리와 제 2 풀리 간을 전동시키는 동력전달수단과, 하부에서 제 1 또는 제 2 풀리와 전동된 풀리 구동부를 구비하여 이루어져, 케이스 외부의 받침부가 받침부연결부 안내홈을 통과하는 받침부연결부에 의해 케이스 내부의 동력전달수단에 고정되고, 풀리구동부에 전동된 제 1 또는 제 2 풀리의 회전에 의해, 동력전달수단에 고정된 받침부가 위 또는 아래로 이동하도록 한다.And, in more detail, the moving means, the pulley and the pulley is wound on the pulley, one end is connected to the support portion, the other end is a balance weight of the weight of the same relative to the weight of the support portion, including the weight of the support portion or the conveyed load Rope connected and relatively balanced, first and second pulleys having a predetermined distance in the longitudinal direction, and a supporting part fixed at a predetermined position by the supporting part connecting part, and the first pulley and the second pulley Power transmission means for transmitting the liver and the pulley drive unit which is electrically driven with the first or second pulley in the lower portion, the power transmission inside the case by the support portion connecting portion through the support portion connecting portion guide grooves By means of the rotation of the first or second pulley fixed to the means and driven by the pulley drive, the support fixed to the power transmission means moves up or down. .
동력전달수단과 제 1 및 제 2 풀리는, 타이밍 벨트와 타이밍 벨트풀리인 것이 특징이다.The power transmission means and the first and second pulleys are characterized in that they are a timing belt and a timing belt pulley.
또 다른 이동수단으로, 일정길이를 갖고 나사홈이 형성된 나사봉과, 받침부가 받침부연결부에 의해 연결되고, 나사봉과 나사 대우되는 암나사와, 하부에서 나사봉을 회전시키는 나사봉구동부를 구비하여 이루어져, 케이스 외부의 받침부가 받침부 연결부 안내홈을 통과하는 받침부연결부에 의해 케이스 내부의 암나사에 고정되고, 나사봉구동부에 전동된 나사봉의 회전에 의해 암나사에 고정된 받침부가 위 또는 아래로 이동하도록 한다.As another moving means, comprising a screw rod having a predetermined length and formed with a screw groove, the supporting portion is connected by the supporting portion connecting portion, the female thread is treated with the screw rod and the screw, and the screw rod driving portion for rotating the screw rod at the bottom, The supporting part on the outside of the case is fixed to the female screw inside the case by the supporting part connecting part passing through the supporting part guide groove, and the supporting part fixed to the female screw is moved up or down by the rotation of the screw rod motorized to the screw driving part. .
이하, 첨부한 도면을 참조하여 본 발명에 따른 실시예들을 상세히 설명하면 다음과 같다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
제 3 도는 본 발명에 따른 청정 승강장치의 바람직한 일실시예를 도시한 개략적인 사시도, 제 4 도는 제 3 도의 평단면도, 그리고 제 5 도는 제 3 도의 저면도이다.3 is a schematic perspective view showing a preferred embodiment of the clean lifting apparatus according to the present invention, FIG. 4 is a plan sectional view of FIG. 3, and FIG. 5 is a bottom view of FIG.
제 3 도 내지 제 5 도에 도시한 바와 같이, 본 발명의 청정 승강장치는, 크게 봐서 받침부(340)과, 받침부(340)를 상하로 이동시키는 이동수단(310)과, 이동수단(310)을 둘러싸고 형성되는 케이스(360)와, 케이스 내부의, 또는 외부에서 내부로 유입된, 분진을 배출시키는 분진 배출부(400)를 포함하고 있다.As shown in FIGS. 3 to 5, the clean lifting device of the present invention includes a support part 340, a moving means 310 for moving the support part 340 up and down, and a moving means 310. ) And a case 360 formed around the dust, and a dust discharge part 400 for discharging dust, which is introduced into the case from inside or outside.
이동수단(310)은 도르래(312)와 도르래에 감긴 로프(Rope)(313)를 구비하고 있다. 이 로프(313)에는 받침부(340)와, 받침부(340) 또는 얹혀진 이송물의 무게를 포함한 받침부의 무게와 비교적 같은 정도 무게의 균형추(350)가 각각 한쪽 단에 매달려 있다. 또한, 서로 세로방향으로 일정거리를 두고 있고, 동력전달수단인 타이밍벨트(314-1)로 전동되는 제 1(315-1) 및 제 2 타이밍 풀리(315-2)가, 하부에 설치된 풀리구동부 예로써 모터(311)에 타이밍벨트(316)로 전동되어 회전하도록 형성되어 있다. 이렇게 타이밍벨트(314-1)를 동력전달수단으로 사용하면 미끄럼 발생없이 확실한 동력이 전달되고 또한 체인, 나사, 기어 등을 이용한 전동방법보다 마모분진 및 소음의 발생이 적게 되어 바람직하다. 제 1 및 제 2 풀리(315-1, 2)간을 전동하는 타이밍벨트(314-1)에는 받침부연결부(410)에 의해 받침부(340)가 고정 연결되어 풀리(315-1, 2)의 회전시 받침부(340)가 위 또는 아래로 이동하게 된다. 본실시예의 도면에서는 제 1, 2 풀리(315-1, 2) 외에 제 1, 2 풀리와 같은 형태의 제 3, 제 4풀리(315-3, 4)와 그들 간을 전동시키는 타이밍벨트(314-2)를 사용하고 있는데, 구동시 받침부(340)의 안정감을 주기 위해 다수개의 풀리 및 벨트를 사용할 수도 있다.The vehicle 310 has a pulley 312 and a rope 313 wound around the pulley. The rope 313 is suspended from one end of the support portion 340, and the balance weight 350 of the weight of the support portion 340, including the weight of the support portion 340 or the conveyed material to be relatively the same. In addition, the pulley driving unit provided at a lower portion of the first 315-1 and the second timing pulley 315-2, which are spaced in the longitudinal direction from each other, and which are driven by the timing belt 314-1, which is a power transmission means. For example, the motor 311 is formed to rotate by being driven by the timing belt 316. When the timing belt 314-1 is used as the power transmission means, it is preferable that the power is transmitted without slipping, and less wear dust and noise are generated than the transmission method using chains, screws, gears, and the like. The support part 340 is fixedly connected to the timing belt 314-1 by which the first and second pulleys 315-1 and 2 are driven by the support part connection part 410, thereby the pulleys 315-1 and 2. When the support portion 340 is moved up or down. In the drawing of the present embodiment, in addition to the first and second pulleys 315-1 and 2, the third and fourth pulleys 315-3 and 4 having the same shape as the first and second pulleys and the timing belt 314 for transmitting them therebetween. -2), a plurality of pulleys and belts may be used to give stability of the support 340 during driving.
여기서, 도르래(312), 로프(313) 및 균형추(350)의 역할은 타이밍 벨트(314-1, 2)에 걸리는 받침부(340) 중량의 대부분을 담당하여 타이밍 벨트(314-1, 2) 및 모터(311)는 동작시의 하중만을 담당하여 처짐 및 진동의 원인인 과부하를 없애는 것이다.Here, the role of the pulley 312, the rope 313 and the balance weight 350 is responsible for most of the weight of the support portion 340 is applied to the timing belt (314-1, 2) timing belt (314-1, 2) And the motor 311 is responsible for only the load during operation to eliminate the overload which is the cause of sag and vibration.
케이스(360)는, 세로방향으로 형성되는 받침부연결부 안내홈(360-1)이 형성되어 있고, 그 안내홈을 가리는 차단막(360-2)을 구비하고 있어서 내부를 외부와 차단하고 있다. 받침부연결부 안내홈(360-1)으로는 받침부연결부(410)가 통과하여 받침부(340)를 타이밍벨트(314-1, 2)에 고정한다. 따라서 받침부(340)는 상술한 케이스(360)외부로 노출된다.The case 360 has a supporting portion connecting portion guide groove 360-1 formed in the longitudinal direction, and is provided with a blocking film 360-2 covering the guide groove to block the inside from the outside. The supporting part connecting part 410 passes through the supporting part connecting part guide groove 360-1 to fix the supporting part 340 to the timing belts 314-1 and 2. Therefore, the support 340 is exposed to the outside of the case 360 described above.
제 4 도에서 알 수 있는 바와 같이, 도르래(321)와 풀리(제 4 도에서는 안보임)들은 프레임(420)에 의해 지지되고 있는데, 그 외 케이스(360)에 연결시켜 케이스에 의해 지지되도록 형성하여도 된다.As can be seen in FIG. 4, the pulley 321 and the pulleys (not shown in FIG. 4) are supported by the frame 420. The pulley 321 and the pulleys (not shown in FIG. 4) are connected to the case 360 to be supported by the case. You may also
제 3 도와 제 5 도에서 도시한 바와 같이, 케이스(360)의 하부 쪽에는 분진 배출부인 송풍팬(400)이 설치된다. 이 송풍팬(400)은 하부에 설치됨으로써, 상부 쪽에서 발생한 미세분진들을 하부로 배출시키게 되어 부유의 기회를 박탈하게 된다. 분진배출부로써는 송풍팬(400)외에 케이스(360) 내부의 공기를 외부로 배출시킬 수 있는 펌프류의 수단들이 사용될 수 있다. 이렇게 송풍팬(400) 등과 같은 분진배출부로써 케이스 내부의 압력을 낮춤으로써 공기의 흐름이 케이스 밖에서 안으로 향하게 되고, 승강장치 내에서 발생한 분진들이 외부로 유출되는 것을 방지하거나, 유출되었던 장치 주위의 분진들을 빨아들이게 된다. 분진배출부에는 도시하지는 않았지만 청정실 밖으로 연결된 배출관 그리고 필터 등을 설치하여서 배출되는 분진을 처리할 수 있다.As shown in FIG. 3 and FIG. 5, a blower fan 400, which is a dust discharge part, is installed at a lower side of the case 360. The blower fan 400 is installed at the lower part to discharge the fine dust generated at the upper part to the lower part, thereby depriving the floating opportunity. As the dust discharge part, a pump-like means capable of discharging the air inside the case 360 to the outside in addition to the blowing fan 400 may be used. By lowering the pressure inside the case with the dust discharge part such as the blower fan 400, the air flow is directed in from the outside of the case, preventing the dust generated in the elevating device from leaking to the outside, or the dust around the device that has been leaked. You will suck them. Although not shown in the dust discharge unit, it is possible to treat the discharged dust by installing a discharge pipe and a filter connected to the outside of the clean room.
따라서 본 발명의 청정 승강장치는 받침부(340)에 웨이퍼 카세트 등의 이송물이 얹힌 상태에서, 모터(311)에 의해 풀리(315-1, 2, 3, 4)가 회전하고, 그에 따라 타이밍벨트(316-1, 2)에 고정된 받침부(340)가 위 또는 아래로 이동하게 된다.Accordingly, in the clean elevator apparatus of the present invention, the pulleys 315-1, 2, 3, and 4 rotate by the motor 311 in a state where a conveying material such as a wafer cassette is placed on the support 340, and thus the timing belt. Support portion 340 fixed to (316-1, 2) is to move up or down.
이때, 상술한 바와 같이 모터(311)와 같이 미세분진의 주발생원이 하부에 형성되어 있으므로 장치의 동작 중에 발생한 분진들의 부유가 억제되고, 차단막(360-2)을 포함한 케이스(360) 및 송풍팬(400)에 의해 케이스 외부로의 유출이 억제된다. 또한 하부 쪽에서 송풍팬(400)이 작동하면서 케이스 내부에 있거나, 승강장치의 주변에서 유입된 분진들을 배출시킴으로써 반도체 웨이퍼 등과 같이 청정상태가 요구되는 이송물의 오염을 최대한 방지할 수 있다.At this time, since the main source of fine dust, such as the motor 311 is formed at the bottom as described above, the floating of the dust generated during the operation of the device is suppressed, the case 360 and the blowing fan including the blocking film 360-2 Outflow to the outside of the case is suppressed by the 400. In addition, by operating the blower fan 400 at the lower side, the dust inside the case or the dust flowing in from the periphery of the lifting device may be discharged to prevent contamination of the conveyed material which requires a clean state, such as a semiconductor wafer.
받침부(340)가 이동하여 원하는 높이 또는 정해진 높이 만큼 이동되면, 그 높이에 설치된 선반 또는 공정장치 등으로 이송물이 언로딩(Unloding)되는 것으로 이송동작을 수행하게 된다.When the supporting part 340 is moved to a desired height or a predetermined height, the conveying operation is performed by unloading the conveyed material to a shelf or a processing apparatus installed at the height.
제 6 도는 본 발명에 따른 청정 승강장치의 다른 실시예를 도시한 사시도이다.6 is a perspective view showing another embodiment of a clean lifting apparatus according to the present invention.
제 6 도에서 알 수 있는 바와같이. 본 발명의 청정 승강장치의 다른 실시예는, 나사를 동력전달수단으로 하는 형태이다.As can be seen in FIG. Another embodiment of the clean lifting apparatus of the present invention is a form in which a screw is used as a power transmission means.
즉, 이동수단(610)이 일정길이를 갖고 나사홈이 형성된 나사봉(614-1)과, 나사봉과 나사 대우된 암나사(614-2)와, 하부에서 나사봉(614-1)을 회전시키는 나사봉구동부인 모터(611)를 포함하여 이루어진 것이다. 이때 암나사(614-2)에는 받침부(640)가 받침부연결부(710)으로 고정된다. 그리고 케이스(660)는, 상술한 타이밍벨트를 전동수단으로 이용하는 일실시예와 마찬가지고, 세로방향으로 형성되는 받침부 연결부 안내홈(660-1)을 구비하여서, 받침부연결부(710)가 받침부연결부 안내홈(660-1)을 통과하에 되고, 받침부연결부 안내홈(660-1)은 차단막(660-2)으로 가려진다.That is, the moving means 610 is a screw rod 614-1 having a predetermined length and formed with a screw groove, a female screw 614-2 treated with a screw rod, and a screw rod 614-1 rotated at a lower portion thereof. It comprises a motor 611 that is a screw rod drive. At this time, the supporting portion 640 is fixed to the supporting portion 710 to the female screw 614-2. And the case 660 is the same as the embodiment using the above-described timing belt as a transmission means, and provided with a supporting portion connecting portion guide groove 660-1 formed in the longitudinal direction, the supporting portion connecting portion 710 is the supporting portion The connection part guide groove 660-1 passes through, and the support part connection guide groove 660-1 is covered by the blocking film 660-2.
도면부호(616)은 모터(611)의 회전력을 나사봉(614-1)에 전하기 위한 타이밍벨트이다.Reference numeral 616 denotes a timing belt for transmitting the rotational force of the motor 611 to the screw rod 614-1.
나사봉구동부인 모터(611)에 의해 나사봉(614-1)이 회전하면 이동하는 암나사(614-2)에 고정된 받침대(640)가 위 또는 아래로 이동하게 된다. 이때 송풍팬(700)이 작동하여 케이스(660) 내부의 압력을 외부보다 낮춤으로써 분진이 내부에서 외부로 유출되는 것을 방지함과 동시에 승강장치 주변에 있는 분진들을 빨아들여 배출시키게 된다.When the screw rod 614-1 is rotated by the motor 611, which is a screw rod driving unit, the pedestal 640 fixed to the moving female screw 614-2 is moved up or down. At this time, the blower fan 700 operates to lower the pressure inside the case 660 than the outside to prevent dust from leaking from the inside to the outside and at the same time sucks and discharges the dust around the lifting device.
이미 언급한 바와 같이, 본 발명은 미세분진의 주발생원인 모터가 장치의 하부에 위치함으로써, 모터에서 발생한 분진의 부유를 억제하고, 또한 모터와 가까은 부위에 분진배출수단이 위치하여 즉각적으로 배출된다. 또한 차단막을 케이스에 추가로 설치하고 분진배출수단이 케이스 내부의 압력을 외부보다 낮추므로 분진이 외부로 유출되는 것을 억제할 뿐만이 아니라, 장치 주변의 오염물질을 빨아들여 배출시키므로, 반도체 웨이퍼와 같이 청정상태를 요구하는 이송물의 오염을 최대한 방지할 수 있는 개선효과가 있다. 또한 동력전달수단으로써 타이밍벨트를 이용하므로써 여타 동력전달수단을 사용하는 것보다 마모분진이 덜 발생하고, 소음 발생이 적다.As already mentioned, in the present invention, since the motor which is the main source of fine dust is located in the lower part of the apparatus, it suppresses the floating of dust generated in the motor, and also the dust discharge means is located near the motor and is immediately discharged. . In addition, since the barrier film is additionally installed in the case and the dust discharge means lowers the pressure inside the case, it not only prevents dust from leaking out, but also sucks and discharges contaminants around the device. There is an improvement effect that can prevent the contamination of the conveyed material which requires a state as much as possible. In addition, the use of timing belts as power transmission means less wear dust and less noise than other power transmission means.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960026671A KR100226474B1 (en) | 1996-07-02 | 1996-07-02 | Rising and falling apparatus for cleaning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960026671A KR100226474B1 (en) | 1996-07-02 | 1996-07-02 | Rising and falling apparatus for cleaning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR980009071A KR980009071A (en) | 1998-04-30 |
| KR100226474B1 true KR100226474B1 (en) | 1999-10-15 |
Family
ID=19465296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960026671A Expired - Fee Related KR100226474B1 (en) | 1996-07-02 | 1996-07-02 | Rising and falling apparatus for cleaning |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR100226474B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130056752A (en) * | 2011-11-22 | 2013-05-30 | 세메스 주식회사 | Conveying robot |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100787001B1 (en) * | 2006-07-31 | 2007-12-18 | (주)다사로봇 | Dust removal system inside semiconductor equipment |
| KR101885434B1 (en) * | 2016-10-31 | 2018-09-10 | 세메스 주식회사 | Driving module and tower lift including the same |
-
1996
- 1996-07-02 KR KR1019960026671A patent/KR100226474B1/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130056752A (en) * | 2011-11-22 | 2013-05-30 | 세메스 주식회사 | Conveying robot |
| KR101895403B1 (en) * | 2011-11-22 | 2018-09-06 | 세메스 주식회사 | Transfer robot and Apparatus for treating substrate with the robot |
Also Published As
| Publication number | Publication date |
|---|---|
| KR980009071A (en) | 1998-04-30 |
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