KR0164734B1 - 공기 베어링 제조 방법 - Google Patents
공기 베어링 제조 방법 Download PDFInfo
- Publication number
- KR0164734B1 KR0164734B1 KR1019960019791A KR19960019791A KR0164734B1 KR 0164734 B1 KR0164734 B1 KR 0164734B1 KR 1019960019791 A KR1019960019791 A KR 1019960019791A KR 19960019791 A KR19960019791 A KR 19960019791A KR 0164734 B1 KR0164734 B1 KR 0164734B1
- Authority
- KR
- South Korea
- Prior art keywords
- lapping
- air bearing
- manufacturing
- tin
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Sliding-Contact Bearings (AREA)
Abstract
Description
Claims (5)
- 소요의 형상으로 가공된 소재를 형상 정밀도 및 표면 거칠기를 향상시킬 수 있도록 가공하는 래핑 및 폴리싱 단계와, 상기 래핑 및 폴리싱 단계를 거친 소재의 표면에 나선형의 공기홈을 습식 에칭 방법으로 가공하는 에칭 단계와, 소재의 표면에 내마모성이 향상되도록 소정 두께의 TiN 막을 형성시키는 TiN 코팅 단계와, 상기 코팅 단계를 거친 소재의 표면을 윤활성이 향상되도록 소정 두께의 DLC 코팅막을 형성시키는 DLC 코팅 단계로 이루어지는 것을 특징으로 하는 공기 베어링 제조 방법.
- 제1항에 있어서, 상기 래핑 및 폴리싱 단계에서 가공되는 소재는 분말 소결에 의하여 하나의 부품으로 완성 제조된 것을 특징으로 하는 공기 베어링 제조 방법.
- 제1항에 있어서, 상기 에칭 단계 및 DLC 코팅 단계에서 가공되는 소재는 부상 부재인 것을 특징으로 하는 공기 베어링 제조 방법.
- 제1항에 있어서, 상기 TiN 코팅 단계의 TiN 코팅막의 두께는 1 ~ 2 ㎛ 정도인 것을 특징으로 하는 공기 베어링 제조 방법.
- 제1항에 있어서, 상기 래핑 및 폴리싱 단계와 TiN 코팅 단계에서 가공되는 소재는 부상 부재 및 부시인 것을 특징으로 하는 공기 베어링 제조 방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960019791A KR0164734B1 (ko) | 1996-06-04 | 1996-06-04 | 공기 베어링 제조 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960019791A KR0164734B1 (ko) | 1996-06-04 | 1996-06-04 | 공기 베어링 제조 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR0164734B1 true KR0164734B1 (ko) | 1999-03-30 |
Family
ID=19460763
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960019791A Expired - Fee Related KR0164734B1 (ko) | 1996-06-04 | 1996-06-04 | 공기 베어링 제조 방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0164734B1 (ko) |
-
1996
- 1996-06-04 KR KR1019960019791A patent/KR0164734B1/ko not_active Expired - Fee Related
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