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KR0111321Y1 - Shield for a sputtering target - Google Patents

Shield for a sputtering target

Info

Publication number
KR0111321Y1
KR0111321Y1 KR94033959U KR19940033959U KR0111321Y1 KR 0111321 Y1 KR0111321 Y1 KR 0111321Y1 KR 94033959 U KR94033959 U KR 94033959U KR 19940033959 U KR19940033959 U KR 19940033959U KR 0111321 Y1 KR0111321 Y1 KR 0111321Y1
Authority
KR
South Korea
Prior art keywords
shield
sputtering target
sputtering
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR94033959U
Other languages
Korean (ko)
Inventor
Jong-Hee Kim
Original Assignee
Ssangyong Cement Ind Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ssangyong Cement Ind Co filed Critical Ssangyong Cement Ind Co
Priority to KR94033959U priority Critical patent/KR0111321Y1/en
Application granted granted Critical
Publication of KR0111321Y1 publication Critical patent/KR0111321Y1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

KR94033959U 1994-12-14 1994-12-14 Shield for a sputtering target Expired - Lifetime KR0111321Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR94033959U KR0111321Y1 (en) 1994-12-14 1994-12-14 Shield for a sputtering target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR94033959U KR0111321Y1 (en) 1994-12-14 1994-12-14 Shield for a sputtering target

Publications (1)

Publication Number Publication Date
KR0111321Y1 true KR0111321Y1 (en) 1997-12-22

Family

ID=19401267

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94033959U Expired - Lifetime KR0111321Y1 (en) 1994-12-14 1994-12-14 Shield for a sputtering target

Country Status (1)

Country Link
KR (1) KR0111321Y1 (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee