JPWO2016035628A1 - Vibration device - Google Patents

Abstract

Provided is a vibration device that can generate a sufficiently large vibration, is not easily damaged, and has a simple configuration. The vibration device (10) includes a vibration plate (18), a connection film (12, 13) in which an end portion is coupled to the vibration plate (18), and the vibration plate (18) is in a state in which bending stress is generated. Piezoelectric ceramics connected to the diaphragm (18) through the connection film (12, 13) and vibrating in the direction in which the connection film (12, 13) receives tensile stress from the diaphragm (18) (11).

Description

  The present invention relates to a vibration device that generates vibration.

  In recent years, various types of vibration devices that generate vibration using a piezoelectric material have been developed. For example, in a touch sensor type keyboard or the like, a tactile presentation device that provides tactile feedback by transmitting vibrations when a user touches a key has been proposed.

  For example, Patent Literature 1 describes a configuration of a tactile sense presentation device in which a piezoelectric bimorph element having a configuration in which piezoelectric ceramics and a rigid plate are bonded together is connected to a part of a touch sensor panel. In the configuration of Patent Literature 1, when a user touches the touch sensor panel, an AC signal is applied to the piezoelectric bimorph element, and the piezoelectric bimorph element is vibrated so as to bend in the thickness direction. Then, by transmitting this vibration to the user's finger via the touch sensor panel, tactile feedback is given to the user.

JP 2005-303937 A

  In the tactile sense presentation device described in Patent Document 1, the size and vibration amount of the piezoelectric bimorph element are small, and the vibration of the piezoelectric bimorph element is transmitted to the user via the touch sensor panel. I couldn't make it bigger.

  Therefore, it is conceivable that the touch sensor panel itself is vibrated greatly by using a bimorph structure or a unimorph structure in which piezoelectric ceramics are directly attached to the touch sensor panel. However, it has been difficult to construct a piezoelectric ceramic with a large area and a thin area with the same area as the touch sensor panel. For this reason, only piezoelectric ceramics having a smaller area than the touch sensor panel can be attached to the touch sensor panel, and it is difficult to vibrate the portion of the touch sensor panel where the piezoelectric ceramics are not attached. Therefore, in order to vibrate the touch sensor panel over a wide area, it is necessary to attach a large number of piezoelectric ceramics to the substantially entire surface of the touch sensor panel and vibrate, and the tactile sense presentation device needs to have a complicated configuration. Furthermore, since the piezoelectric ceramic is brittle and easily damaged by an impact load, it is difficult to prevent the piezoelectric ceramic from being damaged in the configuration in which the piezoelectric ceramic is directly attached to the touch sensor panel.

  Moreover, it is also conceivable to use an organic piezoelectric film that can be configured to be large and thin with the same area as the touch sensor panel instead of the piezoelectric ceramic. However, since the piezoelectric constant of organic piezoelectric film is significantly smaller than that of piezoelectric ceramics, the tactile feedback given to the user should be increased even if the organic piezoelectric film is directly attached to the touch sensor panel to form a bimorph structure or a unimorph structure. It was difficult.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a vibration device that can generate a sufficiently large vibration, is not easily damaged, and has a simple configuration.

  The vibration device according to the present invention is connected to the vibration plate, a connection film in which an end portion is connected to the vibration plate, and the vibration plate is in a state in which bending stress is generated, and the vibration plate is connected to the vibration plate through the connection film A piezoelectric ceramic that vibrates along a direction in which the connection film receives a tensile force from the diaphragm.

  In this configuration, the expansion and contraction of the piezoelectric ceramic is transmitted to both ends of the diaphragm to change the bending stress, whereby the vibration of the diaphragm can be amplified, and the diaphragm can be vibrated over a wide area. Piezoelectric ceramics have a large piezoelectric constant, and even if the piezoelectric ceramic is configured with a smaller area than the diaphragm, the diaphragm can be vibrated with a sufficient amount of vibration. Therefore, when this vibration device is used as a tactile sensation presentation device, a sufficiently large tactile feedback can be more reliably given to a user who touches the diaphragm with a finger or the like.

  The piezoelectric ceramics preferably has a plate shape having one main surface facing the diaphragm and the other main surface facing the one main surface. With this configuration, one main surface of the piezoelectric ceramic can be covered with a diaphragm to protect it from contact with the outside, and the piezoelectric ceramic can be made difficult to break.

  In addition, it is preferable that the vibration device further includes a protective plate facing the surface of the piezoelectric ceramic in a direction orthogonal to a direction in which the connection film receives a tensile force with a slight space therebetween. With this configuration, the piezoelectric ceramic can be protected from contact with the outside or the diaphragm, and the piezoelectric ceramic can be further prevented from being damaged.

  In addition, the vibration device may include a first protective plate that faces the one main surface of the piezoelectric ceramic with a slight space therebetween. With this configuration, the piezoelectric ceramic can be protected from contact with the diaphragm, and the piezoelectric ceramic can be further prevented from being damaged.

  At the same time, it is preferable that the vibration device includes a second protective plate that faces the other main surface of the piezoelectric ceramic with a slight space therebetween. With this configuration, the piezoelectric ceramic can be protected from contact with the outside, and the piezoelectric ceramic can be further prevented from being damaged.

  Moreover, it is preferable that the said protective plate is provided with the 1st connection part connected with the center part of the said piezoelectric ceramic in the direction where the said connection film receives a tensile force. With this configuration, it is possible to connect the protective plate to the piezoelectric ceramic while preventing the first connecting portion from inhibiting the expansion and contraction of the piezoelectric ceramic.

  Moreover, it is preferable that the said protective plate is provided with the 2nd connection part connected near the place used as the vibration node of the said diaphragm. With this configuration, it is possible to connect the protective plate to the diaphragm while preventing the second coupling portion from inhibiting the bending vibration of the diaphragm.

  According to the present invention, by vibrating the piezoelectric ceramics connected to the diaphragm via the connection film, a sufficiently large vibration can be generated, and the piezoelectric ceramics can be hardly damaged.

1 is an external perspective view of a vibration device according to a first embodiment. It is a side view of the vibration device according to the first embodiment. It is an external appearance perspective view of the vibration apparatus which concerns on 2nd Embodiment. It is a side view of the vibration apparatus which concerns on 2nd Embodiment. It is a side view of the vibration device concerning the 1st modification. It is a side view of the vibration device concerning the 2nd modification. It is a side view of the vibration device concerning the 3rd modification.

  Hereinafter, an embodiment in which the vibration device of the present invention is configured as a tactile sense presentation device that transmits vibration as tactile feedback to a user will be described. Note that the vibration device of the present invention is not limited to a tactile sense presentation device as long as it is configured to generate vibration by piezoelectric ceramics. First, the tactile sense presentation device 10 according to the first embodiment will be described. FIG. 1 is an external perspective view of the tactile sense presentation device 10. FIG. 2 is a side view of the tactile sense presentation device 10. In FIG. 2, the curved state of the diaphragm is exaggerated for the sake of explanation. Actually, the diaphragm is held with a small amount of bending so as to be substantially parallel to the piezoelectric ceramic. .

  The tactile sense presentation device 10 includes a piezoelectric ceramic 11, connection films 12 and 13, protective plates 14 and 15, connecting portions 16 and 17, a vibration plate 18, a touch panel 19, and a control unit 21 (see FIG. 2). And a drive unit 22 (see FIG. 2). Here, the tactile sense presentation device 10 is configured as a touch-type keyboard. For this reason, the tactile sense presentation device 10 is configured to be thin in the thickness direction and to be a rectangle having a short side direction and a long side direction when viewed in plan from the thickness direction. And the tactile sense presentation apparatus 10 is comprised so that the installation surface of the tactile sense presentation apparatus 10 may be contacted by the both ends of a transversal direction.

  The piezoelectric ceramic 11 has a flat plate shape and has piezoelectricity that causes vibration in the in-plane direction. Here, the piezoelectric ceramic 11 is caused to vibrate at least in the short direction of the tactile sense presentation device 10. Although not shown in FIGS. 1 and 2, electrodes formed of a conductive material are provided on both main surfaces of the piezoelectric ceramic 11 so that a driving voltage can be applied to the piezoelectric ceramic 11. ing. The piezoelectric ceramic 11 has a larger piezoelectric constant than other piezoelectric materials such as an organic piezoelectric film, and a sufficient amount of vibration can be obtained even if the piezoelectric ceramic 11 has a smaller area than the diaphragm 18. The piezoelectric ceramics 11 may be configured in a rectangular shape having the same direction as the tactile sense presentation device 10 in the short direction, the long direction, and the thickness direction, or in the form of a strip having the short direction in the tactile sense presentation device 10 as the long direction. A plurality of the tactile sense presentation devices 10 may be arranged side by side in the longitudinal direction.

  Here, the protective plate 14 is provided on the other main surface (bottom surface) side of the piezoelectric ceramic 11, and the protective plate 15 is provided on the one main surface (top surface) side of the piezoelectric ceramic 11. The protection plates 14 and 15 each have a rectangular flat plate shape in plan view, and have the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction. And the protection plates 14 and 15 are made to oppose the piezoelectric ceramic 11 in the thickness direction of the tactile sense presentation apparatus 10 so that a space | interval may be provided between the piezoelectric ceramic 11. Thereby, one main surface (top surface) of the piezoelectric ceramic 11 is protected by the protection plate 14, and the other main surface (bottom surface) of the piezoelectric ceramic 11 is protected by the protection plate 15. Therefore, it is possible to prevent the impact load from acting directly on the piezoelectric ceramic 11 from the outside or the impact load from acting indirectly through the diaphragm 18.

  Further, a connecting portion 16 is provided between the protective plate 14 and the piezoelectric ceramic 11, and a connecting portion 17 is provided between the protective plate 15 and the piezoelectric ceramic 11. The connecting portions 16 and 17 are elongated shapes extending in the longitudinal direction in plan view, or a plurality of columnar members arranged in the longitudinal direction, and the space between the protective plates 14 and 15 and the piezoelectric ceramics 11. They are connected to each other in the center in the short direction. In this way, by connecting the connecting portions 16 and 17 to the central portion in the short direction of the piezoelectric ceramic 11, the protection plates 14 and 15 are connected to the piezoelectric ceramic 11 without substantially inhibiting vibration of the piezoelectric ceramic 11. be able to.

  Each of the connection films 12 and 13 has a flat film shape. Here, the connection films 12 and 13 have the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction, respectively. These connection films 12 and 13 are made of, for example, a resin film made of PET or the like, or a metal foil such as stainless steel.

  The connection films 12 and 13 are arranged on the one main surface (top surface) side of the piezoelectric ceramic 11. The connection film 12 has one end (front side) in the short direction attached to the other (back side) end of the piezoelectric ceramic 11 by a predetermined length. The connection film 13 is attached to one (front side) end of the piezoelectric ceramic 11 by a predetermined length on the other side (back side) in the short direction.

  In the case where the connection films 12 and 13 are made of metal foil, it is preferable that the electrodes of the piezoelectric ceramic 11 and the connection films 12 and 13 are electrically insulated. Alternatively, at least one of the connection films 12 and 13 made of metal foil may be used as an electrode for applying a driving voltage to the piezoelectric ceramic 11. Furthermore, the connection film 12 and the connection film 13 made of metal foil may be connected to different main surfaces of the piezoelectric ceramic 11, and each may be used as an electrode for applying a driving voltage to the piezoelectric ceramic 11. When the connection film 12 or the connection film 13 is used as an electrode for applying a driving voltage, the diaphragm 18 is made of a non-conductive material or the connection film 12 is made of the diaphragm 18 made of a conductive material. , 13 may be bonded with a non-conductive adhesive so that the connection film 12 and the connection film 13 are not directly connected to each other.

  The diaphragm 18 is provided on one main surface (top surface) side of the piezoelectric ceramic 11 and the connection films 12 and 13. Here, the diaphragm 18 has the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction. The diaphragm 18 can be made of, for example, acrylic resin PMMA. Moreover, the diaphragm 18 can also be comprised with other materials, such as a metal plate, PET, a polycarbonate (PC), a glass epoxy resin, glass, for example.

  The diaphragm 18 is bent in such a manner that the central portion in the short direction is convex on the one main surface (top surface) side and concave on the other main surface (bottom surface) side. The piezoelectric ceramics 11 are connected via connecting films 12 and 13 between both ends in the short direction in FIG. Specifically, the diaphragm 18 has one end (front side) of the connection film 13 pasted to one end (front side) in the short direction and the other end (rear side) in the short direction. In addition, the other (back side) end of the connection film 12 is pasted by a predetermined length. Accordingly, the diaphragm 18 is held in a state where the diaphragm 18 is bent in a bow shape due to a bending stress from the piezoelectric ceramic 11 and the connection films 12 and 13.

  Therefore, the diaphragm 18 has a central portion in the short direction that is lifted from the installation surface, and a lower space is provided between the central portion in the short direction and the installation surface. The piezoelectric ceramic 11 is supported in a hollow state by the connection films 12 and 13 in this lower space. Also by this, it is possible to prevent the impact load from acting directly on the piezoelectric ceramic 11 from the outside and the impact load from acting indirectly through the diaphragm 18. Therefore, it is possible to make it difficult to damage the piezoelectric ceramic 11.

  A touch panel 19 is attached to one main surface (top surface) of the diaphragm 18. The touch panel 19 has a rectangular flat plate shape in plan view, and has the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction. The touch panel 19 is exposed on one main surface (top surface) of the tactile presentation device 10, and a plurality of touch detection units 20 are attached to the one main surface (top surface). Each of the plurality of touch detection units 20 is arranged at a position corresponding to the key arrangement, and has a function of detecting a user's touch operation. Each touch detection unit 20 can be configured using various methods such as a membrane method, a capacitance method, and a piezoelectric film method.

  The control unit 21 is electrically connected to each of the plurality of touch detection units 20. The drive unit 22 is electrically connected to the piezoelectric ceramic 11. The control unit 21 and the drive unit 22 are also electrically connected. When the control unit 21 detects that the user's finger or the like is in contact with the touch detection unit 20, it outputs a detection signal to the drive unit 22. When the detection signal is input from the control unit 21, the drive unit 22 applies a drive signal having a frequency near the structural resonance frequency of the diaphragm 18 to the piezoelectric ceramic 11. The frequency of the drive signal may not be near the structural resonance frequency of the diaphragm 18.

  That is, when a user's finger or the like contacts the touch detection unit 20, a drive signal is applied to the piezoelectric ceramic 11. Thereby, as illustrated by an arrow in FIG. 2, the piezoelectric ceramic 11 is vibrated along the short direction of the tactile presentation device 10. When the piezoelectric ceramic 11 extends in the short direction of the tactile presentation device 10, the connection films 12 and 13 are pulled toward the vibration plate 18 due to the bending stress of the vibration plate 18. Move in the direction. Further, when the piezoelectric ceramic 11 is contracted in the short direction of the tactile sense presentation device 10, the connection films 12 and 13 move so as to be attracted to the piezoelectric ceramic 11. Therefore, a force acts on both ends of the diaphragm 18 in the short direction via the connection films 12 and 13, and the bending stress of the diaphragm 18 varies. For this reason, the amount of deflection of the diaphragm 18 changes, and the vibration of the piezoelectric ceramic 11 is amplified and transmitted to the central portion of the diaphragm 18, and the diaphragm 18 vibrates in the thickness direction over a wide range.

  As described above, in the tactile sense presentation device 10, vibration in the thickness direction of the diaphragm 18 can be transmitted to the finger of the user who touches the touch panel 19 to give tactile feedback to the user. Since the vibration of the piezoelectric ceramic 11 having a large piezoelectric constant is amplified and transmitted to the center of the diaphragm 18 and the diaphragm 18 vibrates in the thickness direction over a wide range, a large tactile feedback can be more reliably given to the user. it can. Then, the piezoelectric ceramic 11 is supported in a hollow space in the lower space of the diaphragm 18, and the protective plates 14 and 15 that are opposed to each other are provided on both main surfaces of the piezoelectric ceramic 11. It can be protected and made difficult to break.

  Next, a tactile sense presentation device 30 according to a second embodiment of the present invention will be described. FIG. 3 is an external perspective view of the tactile sense presentation device 30. FIG. 4 is a side view of the tactile sense presentation device 30. In FIG. 4, the curved state of the diaphragm is exaggerated for the sake of explanation. Actually, the diaphragm is held with a small amount of bending so as to be substantially parallel to the piezoelectric ceramic. .

  The tactile sense presentation device 30 includes a piezoelectric ceramic 31, connection films 32 and 33, a protection plate 34, a coupling unit 40, a vibration plate 35, a touch panel 36, a control unit 38 (see FIG. 4), and a drive unit 39. (See FIG. 4). The tactile sense presentation device 30 here is also configured as a touch-type keyboard. The tactile sense presentation device 30 is configured to contact the installation surface of the tactile sense presentation device 30 with a protective plate 34 having a configuration different from that of the first embodiment.

  The piezoelectric ceramic 31 is flat and vibrates at least in the short direction of the tactile sense presentation device 30. The connection film 32 has one end (front side) in the lateral direction attached to the other end (back side) of the main surface (top surface) side of the piezoelectric ceramic 31 by a predetermined length. In addition, the connection film 33 is attached to one (front side) end of the other main surface (bottom surface) side of the piezoelectric ceramic 31 by a predetermined length on the other (back side) end in the short side direction.

  Here, each of the connection films 32 and 33 is composed of one unit film that does not have piezoelectricity. However, each of the connection films 32 and 33 is composed of two unit films that are bonded together. You may connect with the piezoelectric ceramic 11 so that both the main surfaces of the ceramic 11 may be inserted | pinched.

  The diaphragm 35 is provided on one main surface (top surface) side of the piezoelectric ceramic 31 and the connection films 32 and 33, and the connection films 32 and 33 are interposed between both ends of the other main surface (bottom surface) in the short direction. The piezoelectric ceramics 31 are connected.

  The protective plate 34 has a flat plate shape, is provided on the other main surface (bottom surface) side of the piezoelectric ceramic 31 and the connection films 32 and 33, and the thickness direction of the tactile sense presentation device 30 is set so as to be spaced from the piezoelectric ceramic 31. It faces the piezoelectric ceramic 31. The protection plate 34 has a flat plate shape and is arranged on the other main surface (bottom surface) side of the piezoelectric ceramic 31 so as to be spaced from the piezoelectric ceramic 31. The connecting portion 40 is connected at one end (upper end) to a position where the vibration plate 35 becomes a bending vibration node (near both ends in the short direction of the vibrating plate 35), and is connected to the protection plate 34 at the other end (lower end). ). Thereby, the connecting portion 40 connects the vibration plate 35 and the protection plate 34.

  Even in such a configuration, since both main surfaces of the piezoelectric ceramic 31 are covered with the vibration plate 35 and the protection plate 34, an impact load acts directly on the piezoelectric ceramic 31 from the outside, or the vibration plate 35 and the protection plate 34. It is possible to prevent an impact load from acting indirectly through the. Therefore, it is possible to make it difficult to damage the piezoelectric ceramic 31.

  A touch panel 36 is attached to one main surface (top surface) of the diaphragm 35. The touch panel 36 includes a plurality of touch detection units 37 on one main surface (top surface). The control unit 38 is electrically connected to each of the plurality of touch detection units 37. The drive unit 39 is electrically connected to the piezoelectric ceramic 31. The control unit 38 and the drive unit 39 are also electrically connected.

  Also in the tactile sense presentation device 30, when a user's finger or the like contacts the touch detection unit 37, a drive signal is applied to the piezoelectric ceramic 31. Then, as illustrated by an arrow in FIG. 4, vibration occurs along the short direction of the tactile presentation device 30 in the piezoelectric ceramic 31. As a result, force acts on both end portions (connecting portions) of the diaphragm 35 in the short direction via the connection films 32 and 33, and the bending stress of the diaphragm 35 varies. For this reason, the amount of bending of the diaphragm 35 changes, and the diaphragm 35 vibrates in the thickness direction over a wide range.

  Therefore, this tactile sensation presentation apparatus 30 can also reliably give a large tactile feedback to the user by transmitting vibration in the thickness direction of the diaphragm 35 to the finger of the user who touches the touch panel 36. In the haptic presentation device 30 according to the second embodiment, the piezoelectric ceramic 31 is supported in a hollow space in the hollow space between the vibration plate 35 and the protective plate 34, and the main surfaces of the piezoelectric ceramic 31 are spaced from each other. Since the protective plate 34 and the vibration plate 35 face each other in this state, the piezoelectric ceramic 31 is more protected from an impact load than the first embodiment, and can be further prevented from being damaged.

  The vibration device of the present invention can also be configured as shown in this embodiment. In addition, you may make it add the structure of the protective plate shown in 1st Embodiment further to the tactile sense presentation apparatus 30 shown in this embodiment. That is, the protective plate 14 and the connecting portion 16, the protective plate 15, and the connecting portion 17 shown in the first embodiment are additionally provided in the hollow space sandwiched between the protective plate 34 and the vibration plate 35. It may be. Moreover, it is preferable to comprise the connection films 32 and 33 shown by this embodiment with a flexible printed circuit board. When the connection films 32 and 33 are formed of a flexible printed circuit board, electrode patterns to be connected to the piezoelectric ceramics 31 can be formed on the connection films 32 and 33, and the circuit arrangement positions of the control unit 38 and the drive unit 39, and The degree of freedom for the connection structure with the piezoelectric ceramic 31 is improved. In addition, it is possible to form circuits of the control unit 38 and the driving unit 39 on the flexible printed circuit board that constitutes the connection films 32 and 33, and space saving of the tactile sense presentation device 30 can be achieved.

  Next, a tactile sense presentation device 40 according to a first modification of the present invention will be described. FIG. 5 is a side view of the tactile sense presentation device 40. The tactile sensation presentation device 40 has almost the same configuration as that of the first embodiment, but omits a protective plate that covers the one main surface (top surface) side of the piezoelectric ceramic 11 provided in the first embodiment. It was the composition that was. Even if the tactile sense presentation device 40 is configured as described above, the one main surface (top surface) side of the piezoelectric ceramic 11 is covered with the diaphragm 18, so that one main surface (top surface) of the piezoelectric ceramic 11 is externally connected to the outside. It is possible to prevent the impact load from acting directly. Therefore, the piezoelectric ceramic 11 can be hardly damaged.

  Next, a tactile sense presentation device 50 according to a second modification of the present invention will be described. FIG. 6 is a side view of the tactile sense presentation device 50. The tactile sense presentation device 50 has a configuration almost similar to the configuration according to the first embodiment, but includes a single connection film 51, and both ends of the connection film 51 are coupled to both ends of the diaphragm 18. The entire surface of the piezoelectric ceramic 11 is attached to the central portion of the connection film 51 in the short direction. When the tactile sense presentation device 50 is configured as described above, the piezoelectric ceramic 11 and the connection film 51 are deformed into an arcuate shape due to the restraint of the piezoelectric ceramic 11. Thereby, both ends of the diaphragm 18 can be moved similarly to the above-described embodiment, and tactile feedback can be given to the user. In addition, since one main surface (top surface) of the piezoelectric ceramic 11 is covered with the diaphragm 18 and the connection film 51, an impact load acts directly on the one main surface (top surface) of the piezoelectric ceramic 11 from the outside. Can be prevented. Therefore, the piezoelectric ceramic 11 can be hardly damaged.

  Next, a tactile presentation device 60 according to a third modification of the present invention will be described. FIG. 7 is a side view of the tactile sense presentation device 60. The tactile sensation presentation device 60 has a configuration that is almost the same as the configuration according to the first embodiment, except that the two protective plates that cover both sides of the piezoelectric ceramic 11 provided in the first embodiment are omitted. Even if the tactile sense presentation device 60 is configured as described above, the piezoelectric ceramic 11 is covered with the vibration plate 18 on one side (top surface) side of the piezoelectric ceramic 11 and is supported in a hollow state. It can be made difficult to break.

  As described above, the vibration device according to the present invention can be implemented. In addition, if it is in the range of the structure described in the claim, the vibration apparatus of this invention can also be implemented with other various forms. For example, the diaphragm may be formed in a curved shape in advance so as to be flat as a whole in a state where it is connected to the connection film and the piezoelectric ceramic. Further, the specific configuration of the vibration device is not limited to the keyboard, and may be other devices that transmit tactile feedback to the touch operation, such as a display device having a touch panel and an operation panel having a touch sensor. . Moreover, the above-mentioned diaphragm can also be used as a vibrating member such as a speaker, and the present invention can also be implemented in other electronic devices that generate vibration such as an acoustic device.

10, 30, 40, 50, 60 ... tactile sense presentation device 11, 31 ... piezoelectric ceramics 12, 13, 32, 33, 51 ... connection films 14, 15, 34 ... protective plates 16, 17 ... connecting portions 18, 35 ... vibration Plates 19, 36 ... touch panel 20, 37 ... touch detection unit 21, 38 ... control unit 22, 39 ... drive unit

Claims (7)

A diaphragm,
A connecting film in which an end portion is coupled to the diaphragm, and the diaphragm is in a state in which bending stress is generated,
Piezoelectric ceramics that vibrates along a direction in which the connection film receives a tensile force from the diaphragm, coupled to the diaphragm via the connection film;
A vibration device comprising: The piezoelectric ceramic has one main surface facing the diaphragm and the other main surface facing the one main surface.
The vibration device according to claim 1. A protective plate facing the surface of the piezoelectric ceramic in a direction perpendicular to the direction in which the connection film receives a tensile force, with a space therebetween;
The vibration device according to claim 1 or 2. A first protection plate facing the main surface of the piezoelectric ceramic with a space therebetween;
The vibration device according to claim 2. A second protective plate facing the other main surface of the piezoelectric ceramic with a space therebetween;
The vibration device according to claim 2 or 4. The protective plate includes a first connecting portion that connects to a central portion of the piezoelectric ceramic in a direction in which the connecting film receives a tensile force.
The vibration device according to any one of claims 3 to 5.   7. The vibration device according to claim 3, wherein the protection plate includes a second connecting portion that is connected to a position that is a node of vibration in the vibration plate.

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