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JPS6486002A - Fine displacement meter - Google Patents

Fine displacement meter

Info

Publication number
JPS6486002A
JPS6486002A JP24273187A JP24273187A JPS6486002A JP S6486002 A JPS6486002 A JP S6486002A JP 24273187 A JP24273187 A JP 24273187A JP 24273187 A JP24273187 A JP 24273187A JP S6486002 A JPS6486002 A JP S6486002A
Authority
JP
Japan
Prior art keywords
tunnel current
electrodes
conducting
displacement
tunnel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24273187A
Other languages
Japanese (ja)
Inventor
Norio Fujimaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP24273187A priority Critical patent/JPS6486002A/en
Publication of JPS6486002A publication Critical patent/JPS6486002A/en
Pending legal-status Critical Current

Links

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE:To achieve higher resolutions, by a method wherein two electrodes are made of a conducting low-dimension material to let a tunnel current flow between laminar conducting paths of the electrodes so that the tunnel current changes steeply with respect to a displacement between the electrodes. CONSTITUTION:First and second electrodes 12 and 14 are made of a conducting low-dimension material and conducting paths 12A and 14A thereof are arranged facing to be parallel with each other. An electrode gap (tunnel distance) is set constant while an inter-electrode voltage set constant so that a tunnel current 16 flows between conducting paths 12A and 14A of the electrodes. Then, when an object 13 to be measured, namely, the second electrode 14 moves by a displacement DELTAx, the tunnel current reduces quickly from the max. value thereof as the direction of the tunnel current shifts from the same plane or straight line with a less degree of overlap in effusion. Thus, measuring the tunnel current enables measurement of a corresponding displacement with high resolutions.
JP24273187A 1987-09-29 1987-09-29 Fine displacement meter Pending JPS6486002A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24273187A JPS6486002A (en) 1987-09-29 1987-09-29 Fine displacement meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24273187A JPS6486002A (en) 1987-09-29 1987-09-29 Fine displacement meter

Publications (1)

Publication Number Publication Date
JPS6486002A true JPS6486002A (en) 1989-03-30

Family

ID=17093410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24273187A Pending JPS6486002A (en) 1987-09-29 1987-09-29 Fine displacement meter

Country Status (1)

Country Link
JP (1) JPS6486002A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0361932A2 (en) * 1988-09-30 1990-04-04 Canon Kabushiki Kaisha Scanning tunnel-current-detecting device and method
JP2010060562A (en) * 1998-09-07 2010-03-18 Quantum Precision Instruments Asia Pty Ltd Measurements using tunnelling current between elongate conductors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0361932A2 (en) * 1988-09-30 1990-04-04 Canon Kabushiki Kaisha Scanning tunnel-current-detecting device and method
JP2010060562A (en) * 1998-09-07 2010-03-18 Quantum Precision Instruments Asia Pty Ltd Measurements using tunnelling current between elongate conductors

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