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JPS648150A - Conveying device - Google Patents

Conveying device

Info

Publication number
JPS648150A
JPS648150A JP62162836A JP16283687A JPS648150A JP S648150 A JPS648150 A JP S648150A JP 62162836 A JP62162836 A JP 62162836A JP 16283687 A JP16283687 A JP 16283687A JP S648150 A JPS648150 A JP S648150A
Authority
JP
Japan
Prior art keywords
parts
stationary
leg
leg parts
cycles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62162836A
Other languages
Japanese (ja)
Inventor
Yasuo Kita
Jiro Hida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP62162836A priority Critical patent/JPS648150A/en
Publication of JPS648150A publication Critical patent/JPS648150A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00—Feeding articles separated from piles; Feeding articles to machines
    • B65H5/008—Feeding articles separated from piles; Feeding articles to machines using vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Reciprocating Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To make it possible to use a conveying device suitably for conveying a plate-like material such as, for example, semiconductor wafers or the like by arranging a plurality of moving elements each having a head part adapted to move up and low, and back and forth in association with the respective leg part, and by conveying an article thereon. CONSTITUTION:Drive shafts 4 5 are driven by a drive device so that leg parts B are made to be stationary at first while leg parts A are moved upward by a predetermined distance, and then the lag parts A are made to be stationary while the leg parts B are moved upward by the same distance. Next, the leg parts B are made to be stationary while the leg parts A are moved downward by the same distance, and then the left parts A are made to be stationary while the leg parts B are moved downward by the same distance. Thus, through cycles P, Q, R and S, the operation is returned to the original condition before the first cycle, and accordingly, head parts C depict a sector-like sequence locus as shown. Further, there are provided stationary support rods G, G..., whose tops comes to the same height as that of the head parts C upon completion of the cycle P or R. If a wafer U is supported by the head parts C during the cycles Q and P while it is supported by the stationary supports rods G during the cycles S, P, and wafer may be moved by one stroke in the direction Y by the motion of the one cycle.
JP62162836A 1987-06-30 1987-06-30 Conveying device Pending JPS648150A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62162836A JPS648150A (en) 1987-06-30 1987-06-30 Conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62162836A JPS648150A (en) 1987-06-30 1987-06-30 Conveying device

Publications (1)

Publication Number Publication Date
JPS648150A true JPS648150A (en) 1989-01-12

Family

ID=15762170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62162836A Pending JPS648150A (en) 1987-06-30 1987-06-30 Conveying device

Country Status (1)

Country Link
JP (1) JPS648150A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949223A (en) * 1988-06-30 1990-08-14 Matsushita Electronics Corporation Electronic component encapsulated in a package and electronic apparatus using thereof
JPH0373735A (en) * 1989-03-20 1991-03-28 Teru Hayashi Recording medium transporting device and vibration element used in this device
US5467975A (en) * 1994-09-30 1995-11-21 Xerox Corporation Apparatus and method for moving a substrate
JP2008141899A (en) * 2006-12-05 2008-06-19 Duplo Seiko Corp Drive control method for actuator and conveyance control method therewith
JP2008141898A (en) * 2006-12-05 2008-06-19 Duplo Seiko Corp Actuator and conveyance device
TWI603419B (en) * 2012-06-28 2017-10-21 Seiko Epson Corp Processor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949223A (en) * 1988-06-30 1990-08-14 Matsushita Electronics Corporation Electronic component encapsulated in a package and electronic apparatus using thereof
JPH0373735A (en) * 1989-03-20 1991-03-28 Teru Hayashi Recording medium transporting device and vibration element used in this device
US5467975A (en) * 1994-09-30 1995-11-21 Xerox Corporation Apparatus and method for moving a substrate
JP2008141899A (en) * 2006-12-05 2008-06-19 Duplo Seiko Corp Drive control method for actuator and conveyance control method therewith
JP2008141898A (en) * 2006-12-05 2008-06-19 Duplo Seiko Corp Actuator and conveyance device
TWI603419B (en) * 2012-06-28 2017-10-21 Seiko Epson Corp Processor

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