JPS6474717A - Formation of thin film - Google Patents

Abstract

PURPOSE:To prevent coming-off of a film stuck to a window and generation of inferior products so as to reduce time for maintaining a device, by using a window for leading light into a reaction chamber in order to hold temperature of the window unchanged at the time of forming a film and at the time of taking out a substrate after forming the film so as to form a thin film. CONSTITUTION:A substrate 1 for forming a film is placed on a substrate holder 2 so as to control temperature by means of a substrate heater. The substrate 1 and the substrate holder 2 are placed inside a reaction chamber 3. Formation of the film is so performed by emitting ultraviolet rays by an ultraviolet ray lamp for leading light into the reaction chamber 3 through a transmission window 6 as to irradiate gas flowing inside the reaction chamber 3. The film 9 stuck to the surface on the side of the reaction chamber of the ultraviolet ray transmission window 6 changes its temperature in company with switching-on and switching-off of the substrate heater 4 and the ultraviolet-ray lamp 5. In order to check its change, the window 6 is heated with an infrared ray lamp 8 so as to control for always holding fixed temperature. A shutter 7 prevents the substrate 1 from being heated by radiation heat from the ultraviolet ray transmission window 6 at the time of keeping the substrate temperature low. Thereby, several times of film formation and continued carrying-in and carrying- out can be performed without generating coming-off of the film.