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JPS6471099A - Plasma device - Google Patents

Plasma device

Info

Publication number
JPS6471099A
JPS6471099A JP62225227A JP22522787A JPS6471099A JP S6471099 A JPS6471099 A JP S6471099A JP 62225227 A JP62225227 A JP 62225227A JP 22522787 A JP22522787 A JP 22522787A JP S6471099 A JPS6471099 A JP S6471099A
Authority
JP
Japan
Prior art keywords
microwave
generated
laser
microwaves
plasmas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62225227A
Other languages
Japanese (ja)
Other versions
JPH07105537B2 (en
Inventor
Tadashi Yanagi
Kenji Yoshizawa
Masakazu Taki
Junichi Nishimae
Yoshihiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62225227A priority Critical patent/JPH07105537B2/en
Publication of JPS6471099A publication Critical patent/JPS6471099A/en
Publication of JPH07105537B2 publication Critical patent/JPH07105537B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

PURPOSE:To make it possible to generate various kinds of plasmas in accordance of the frequencies of microwaves by constituting a microwave oscillator which oscillates microwaves in a microwave circuit, using a power transistor in a microwave range. CONSTITUTION:A microwave generated in a microwave oscillator 4 is united into a laser head part 3 through a wave introduction tube 5, a horn wave introduction tube 6 and a microwave uniting window 7. This laser head part 3 is made in ridge-cavity shape and the microwaves converge on and near the ridges 31, 32 and intense microwave electromagnetic field is generated. Accordingly, laser gas charged in discharge space 36 is discharged and broken and plasma is generated and a laser medium is excited. Then, if the oscillation frequency of the microwave is properly selected by adjusting the microwave oscillator 4, various kinds of plasmas can be generated according to the frequency. And laser oscillation light can be obtained by properly selecting discharge conditions as well as cooling discharge plasma by flowing cooling water to a cooling path 37.
JP62225227A 1987-09-10 1987-09-10 Plasma equipment Expired - Fee Related JPH07105537B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62225227A JPH07105537B2 (en) 1987-09-10 1987-09-10 Plasma equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62225227A JPH07105537B2 (en) 1987-09-10 1987-09-10 Plasma equipment

Publications (2)

Publication Number Publication Date
JPS6471099A true JPS6471099A (en) 1989-03-16
JPH07105537B2 JPH07105537B2 (en) 1995-11-13

Family

ID=16825979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62225227A Expired - Fee Related JPH07105537B2 (en) 1987-09-10 1987-09-10 Plasma equipment

Country Status (1)

Country Link
JP (1) JPH07105537B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5156025A (en) * 1990-10-09 1992-10-20 Zanussi Elettrodomestici S.P.A. Control apparatus for a laundry washing and/or drying machine
JP2012506116A (en) * 2008-10-17 2012-03-08 セントレ・ナショナル・デ・ラ・レシェルシェ・サイエンティフィーク Low power gas plasma source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5156025A (en) * 1990-10-09 1992-10-20 Zanussi Elettrodomestici S.P.A. Control apparatus for a laundry washing and/or drying machine
JP2012506116A (en) * 2008-10-17 2012-03-08 セントレ・ナショナル・デ・ラ・レシェルシェ・サイエンティフィーク Low power gas plasma source

Also Published As

Publication number Publication date
JPH07105537B2 (en) 1995-11-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees