JPS6469064A - Manufacture of oxide superconducting wiring - Google Patents
Manufacture of oxide superconducting wiringInfo
- Publication number
- JPS6469064A JPS6469064A JP62227636A JP22763687A JPS6469064A JP S6469064 A JPS6469064 A JP S6469064A JP 62227636 A JP62227636 A JP 62227636A JP 22763687 A JP22763687 A JP 22763687A JP S6469064 A JPS6469064 A JP S6469064A
- Authority
- JP
- Japan
- Prior art keywords
- oxide superconducting
- diffusion layer
- wiring
- superconducting film
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000012212 insulator Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000001459 lithography Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 238000001020 plasma etching Methods 0.000 abstract 1
- 238000003746 solid phase reaction Methods 0.000 abstract 1
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53285—Conductive materials containing superconducting materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To unnecessitate direct patterning for forming a wiring, and enable flattening the wiring, by turning selectively an oxide superconducting film on a diffusion layer into insulator by applying solid phase reaction between the diffusion layer and the oxide superconducting film. CONSTITUTION:On a substrate 11, a diffusion layer composed of silicon dioxide (SiO2) and the like is stuck, which is worked by lithography process using an inverting mask of a wiring and reactive ion etching, and a diffusion layer pat tern 12 is formed. Then on the whole surface of the substrate 11, an oxide superconducting film 13 having a composition approximate to stoichiometric composition YBa2Cu3O7 is stuck. The sample is subjected to heat treatment at 850-1000 deg.C in oxygen flow for about several hours, the oxide superconducting film 13 is crystallized, and simultaneously the oxide superconducting film on the diffusion layer pattern 12 is turned into insulator by mutual diffusion. There by, forming an oxide superconducting wiring 15 surrounded by a region 14 turned into insulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62227636A JPS6469064A (en) | 1987-09-10 | 1987-09-10 | Manufacture of oxide superconducting wiring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62227636A JPS6469064A (en) | 1987-09-10 | 1987-09-10 | Manufacture of oxide superconducting wiring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6469064A true JPS6469064A (en) | 1989-03-15 |
Family
ID=16863995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62227636A Pending JPS6469064A (en) | 1987-09-10 | 1987-09-10 | Manufacture of oxide superconducting wiring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6469064A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0612114A2 (en) * | 1993-02-15 | 1994-08-24 | Sumitomo Electric Industries, Ltd. | Method for forming a patterned oxide superconductor thin film |
| EP0671764A3 (en) * | 1990-10-31 | 1995-10-11 | Sumitomo Electric Industries |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60239074A (en) * | 1984-05-14 | 1985-11-27 | Fujitsu Ltd | Manufacture of josephson integrated circuit |
| JPS63291485A (en) * | 1987-05-25 | 1988-11-29 | Fujikura Ltd | Manufacture of oxide superconducting circuit |
-
1987
- 1987-09-10 JP JP62227636A patent/JPS6469064A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60239074A (en) * | 1984-05-14 | 1985-11-27 | Fujitsu Ltd | Manufacture of josephson integrated circuit |
| JPS63291485A (en) * | 1987-05-25 | 1988-11-29 | Fujikura Ltd | Manufacture of oxide superconducting circuit |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0671764A3 (en) * | 1990-10-31 | 1995-10-11 | Sumitomo Electric Industries | |
| EP0612114A2 (en) * | 1993-02-15 | 1994-08-24 | Sumitomo Electric Industries, Ltd. | Method for forming a patterned oxide superconductor thin film |
| EP0612114A3 (en) * | 1993-02-15 | 1995-11-29 | Sumitomo Electric Industries | Method for forming a patterned oxide superconductor thin film. |
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