JPS6465092A - Formation of thin diamond film - Google Patents
Formation of thin diamond filmInfo
- Publication number
- JPS6465092A JPS6465092A JP22073587A JP22073587A JPS6465092A JP S6465092 A JPS6465092 A JP S6465092A JP 22073587 A JP22073587 A JP 22073587A JP 22073587 A JP22073587 A JP 22073587A JP S6465092 A JPS6465092 A JP S6465092A
- Authority
- JP
- Japan
- Prior art keywords
- base body
- target
- diamond film
- thin diamond
- tic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To form a good-quality thin diamond film with good reproducibility by previously forming a metal carbide on the surface of a base body at the time of forming the thin diamond film by a vapor growth method on the surface of the base body. CONSTITUTION:Ar is introduced from an introducing port 19 into an ion source 11 and the inside of a vacuum chamber 15 is evacuated and is maintained under a required pressure. Electric discharge is generated in the source 11 to accelerate ions to prescribed energy. These ions are then taken out. An ion beam 12 advances rectilinearly so that the beam is projected to a target 13 mixture composed of Ti and carbon to sputter the target 13, by which the surface of the base body 14 is coated with TiC. The target 13 is thereafter changed to carbon which is so set as to be paralleled with the ion beam 12. The high- density diamond is thus formed on the base body 14 formed with TiC. The base body 14 is kept at a room temp. in this case and the diamond is efficiently formed at room temp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22073587A JPS6465092A (en) | 1987-09-03 | 1987-09-03 | Formation of thin diamond film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22073587A JPS6465092A (en) | 1987-09-03 | 1987-09-03 | Formation of thin diamond film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6465092A true JPS6465092A (en) | 1989-03-10 |
Family
ID=16755706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22073587A Pending JPS6465092A (en) | 1987-09-03 | 1987-09-03 | Formation of thin diamond film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6465092A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0397697A (en) * | 1989-05-31 | 1991-04-23 | De Beers Ind Diamond Div Ltd | Production of diamond or diamond-like film |
| WO1992005951A1 (en) * | 1990-09-27 | 1992-04-16 | Diamonex, Incorporated | Abrasion wear resistant coated substrate product |
| WO1992006843A1 (en) * | 1990-10-18 | 1992-04-30 | Diamonex, Incorporated | Abrasion wear resistant polymeric substrate product |
| US5455081A (en) * | 1990-09-25 | 1995-10-03 | Nippon Steel Corporation | Process for coating diamond-like carbon film and coated thin strip |
| US6899828B2 (en) * | 1999-05-10 | 2005-05-31 | Nanyang Technological University | Composite coatings |
-
1987
- 1987-09-03 JP JP22073587A patent/JPS6465092A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0397697A (en) * | 1989-05-31 | 1991-04-23 | De Beers Ind Diamond Div Ltd | Production of diamond or diamond-like film |
| US5455081A (en) * | 1990-09-25 | 1995-10-03 | Nippon Steel Corporation | Process for coating diamond-like carbon film and coated thin strip |
| WO1992005951A1 (en) * | 1990-09-27 | 1992-04-16 | Diamonex, Incorporated | Abrasion wear resistant coated substrate product |
| WO1992006843A1 (en) * | 1990-10-18 | 1992-04-30 | Diamonex, Incorporated | Abrasion wear resistant polymeric substrate product |
| US6899828B2 (en) * | 1999-05-10 | 2005-05-31 | Nanyang Technological University | Composite coatings |
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