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JPS6459745A - Liquid metal ion source - Google Patents

Liquid metal ion source

Info

Publication number
JPS6459745A
JPS6459745A JP62215453A JP21545387A JPS6459745A JP S6459745 A JPS6459745 A JP S6459745A JP 62215453 A JP62215453 A JP 62215453A JP 21545387 A JP21545387 A JP 21545387A JP S6459745 A JPS6459745 A JP S6459745A
Authority
JP
Japan
Prior art keywords
liquid metal
lmis
emitter
heater
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62215453A
Other languages
Japanese (ja)
Inventor
Hisashi Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP62215453A priority Critical patent/JPS6459745A/en
Priority to US07/227,255 priority patent/US4892752A/en
Priority to DE3855897T priority patent/DE3855897T2/en
Priority to EP88307442A priority patent/EP0303486B1/en
Priority to KR1019880010320A priority patent/KR920005348B1/en
Publication of JPS6459745A publication Critical patent/JPS6459745A/en
Priority to US07/371,976 priority patent/US4946706A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To extend the lifetime of a liquid metal ion source and enable the stable supply of ion current by using a metal having a high melting point such as W, Mo and Ta with the surface thereof nitrided as the heater and emitter of the source. CONSTITUTION:A metal having a high melting point such as W, Mo and Ta with the surface thereof nitrided is used as a heater 1 and an emitter 2 for a liquid metal ion source LMIS. The LMIS is first heated and cleaned to remove water and oil adhering to the heater 1 and the emitter 2. Then, the LMIS is placed in a vacuum vessel and N2 is introduced therein until the predetermined degree of vacuum is attained, and temperature is raised, thereby conducting heat treatment. As a result, the surface of the heater 1 and emitter 2 of the LMIS or, for example, the surface of W is nitrided and the membrane of an alloy W2N having extremely low reaction with a metal is formed thereon. The lifetime of the surface, therefore, can be extended. Also, wettability with the liquid metal can be maintained, thereby enabling the stable supply of ion current.
JP62215453A 1987-08-12 1987-08-31 Liquid metal ion source Pending JPS6459745A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62215453A JPS6459745A (en) 1987-08-31 1987-08-31 Liquid metal ion source
US07/227,255 US4892752A (en) 1987-08-12 1988-08-02 Method of ion implantation
DE3855897T DE3855897T2 (en) 1987-08-12 1988-08-11 Ion implantation method
EP88307442A EP0303486B1 (en) 1987-08-12 1988-08-11 Method of ion implantation
KR1019880010320A KR920005348B1 (en) 1987-08-12 1988-08-12 Ion implantation method
US07/371,976 US4946706A (en) 1987-08-12 1989-06-27 Method of ion implantation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62215453A JPS6459745A (en) 1987-08-31 1987-08-31 Liquid metal ion source

Publications (1)

Publication Number Publication Date
JPS6459745A true JPS6459745A (en) 1989-03-07

Family

ID=16672617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62215453A Pending JPS6459745A (en) 1987-08-12 1987-08-31 Liquid metal ion source

Country Status (1)

Country Link
JP (1) JPS6459745A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132632A (en) * 1981-02-09 1982-08-17 Hitachi Ltd Ion source
JPS6059623A (en) * 1983-09-10 1985-04-06 Anelva Corp liquid metal ion source

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132632A (en) * 1981-02-09 1982-08-17 Hitachi Ltd Ion source
JPS6059623A (en) * 1983-09-10 1985-04-06 Anelva Corp liquid metal ion source

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