[go: up one dir, main page]

JPS6457777A - Excimer laser - Google Patents

Excimer laser

Info

Publication number
JPS6457777A
JPS6457777A JP62214397A JP21439787A JPS6457777A JP S6457777 A JPS6457777 A JP S6457777A JP 62214397 A JP62214397 A JP 62214397A JP 21439787 A JP21439787 A JP 21439787A JP S6457777 A JPS6457777 A JP S6457777A
Authority
JP
Japan
Prior art keywords
wavelength
parasitic oscillation
exciting
power
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62214397A
Other languages
Japanese (ja)
Inventor
Junichi Fujimoto
Osamu Wakabayashi
Masahiko Kowaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP62214397A priority Critical patent/JPS6457777A/en
Publication of JPS6457777A publication Critical patent/JPS6457777A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To control an exciting intensity, to perform a wavelength control and the exciting intensity by independent systems and to stably control laser power and wavelength by generating a parasitic oscillation light on an optical axis inclined at a predetermined angle from an excimer laser light narrowed in its band. CONSTITUTION:A rear mirror 6a for generating a parasitic oscillation is arranged on one end on an optical axis inclined at a predetermined angle with respect to a laser optical axis, and a front mirror 6b and a photodiode 7 for detecting the power of the parasitic oscillation light are arranged on the opposite end. An output controller 10 controls to feed back the exciting voltages of exciting electrodes 14a, 14b supplied from a power source 12 to a discharger 13 so that the power detected value P1 of the input parasitic oscillation light becomes constant. A wavelength controller 11 standardizes the central wavelength l of the narrow band excimer laser light and central power detected value P2, and controls the transmitting wavelengths of etalons 4, 5 through a driver 14.
JP62214397A 1987-08-28 1987-08-28 Excimer laser Pending JPS6457777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62214397A JPS6457777A (en) 1987-08-28 1987-08-28 Excimer laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62214397A JPS6457777A (en) 1987-08-28 1987-08-28 Excimer laser

Publications (1)

Publication Number Publication Date
JPS6457777A true JPS6457777A (en) 1989-03-06

Family

ID=16655110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62214397A Pending JPS6457777A (en) 1987-08-28 1987-08-28 Excimer laser

Country Status (1)

Country Link
JP (1) JPS6457777A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5707777A (en) * 1991-10-01 1998-01-13 Fuji Photo Film Co., Ltd. Light-sensitive composition
WO2008149829A1 (en) 2007-05-30 2008-12-11 Sumitomo Chemical Company, Limited Organic electroluminescent device and display using the device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5707777A (en) * 1991-10-01 1998-01-13 Fuji Photo Film Co., Ltd. Light-sensitive composition
WO2008149829A1 (en) 2007-05-30 2008-12-11 Sumitomo Chemical Company, Limited Organic electroluminescent device and display using the device

Similar Documents

Publication Publication Date Title
EP0926789A3 (en) A laser module allowing simultaneous wavelength and power control
EP0798825A3 (en) Ultrashort optical pulse laser apparatus
US4998043A (en) LED stabilizing light source device
EP0833190A3 (en) Continuously tunable multi wavelength laser
EP0917262A3 (en) Wavelength selectable laser source
JPS566492A (en) Light amplifier
JPS6457777A (en) Excimer laser
JPS6482527A (en) Exposure device
US5025449A (en) Optical pumping-type solid-state laser apparatus with a semiconductor laser device
JPS5737893A (en) Semiconductor laser
JPS6453589A (en) Wavelength controller for excimer laser
JPS6457773A (en) Wavelength controller for laser
JPS6422086A (en) Control equipment for laser wavelength
JPS6457776A (en) Wavelength controller for laser
CA2102270A1 (en) Wavelength Switching Light Source
JPS6467990A (en) Wavelength controller for excimer laser
US4953169A (en) Gas laser frequency stabilization arrangement and method
JPS6464279A (en) Laser equipment
JPS6448481A (en) Semiconductor laser modulation control system
JPS55117586A (en) Laser working machine
JPH02285694A (en) Dye laser
KR100248519B1 (en) Laser Output Pulse Energy Stabilizer for Queued Pulsed Solid State Lasers Using Acousto-optic Modulators
JPH0722676A (en) Pulse yag laser device
JPH0416031B2 (en)
ES2069617T3 (en) POWER SUPPLY AND LASER DRIVING DEVICE FOR FIBER OPTIC CONNECTION BETWEEN A SUBSCRIBER AND A TELECOMMUNICATION CENTER.