JPS6454747A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6454747A JPS6454747A JP21157387A JP21157387A JPS6454747A JP S6454747 A JPS6454747 A JP S6454747A JP 21157387 A JP21157387 A JP 21157387A JP 21157387 A JP21157387 A JP 21157387A JP S6454747 A JPS6454747 A JP S6454747A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- contact
- poly
- brought
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To obtain an ohmic contact, which does not depend upon the conductivity type of a first layer, by forming a wiring in the laminated structure of first and second conductive layers and connecting only the second layer to an impurity layer. CONSTITUTION:Poly Si 23 is applied onto an SiO2 film 22 on a P-type Si substrate 21, and P is introduced and an N type is formed. A resist mask 24 is executed, and an N<+> layer 26 is shaped through ion implantation. The mask 24 is removed, and the silicide layer 27 of a high-melting-point metal such as W is formed onto the whole surface. The N<+> layer 26 and the W silicide layer 27 are brought into contact directly at that time, and the poly Si layer 23 is brought into contact with the N<+> layer 26 through the layer 27. Accordingly, an excellent ohmic contact can be shaped regardless of the conductivity types of the first conductive layer 23 and the impurity layer 26.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21157387A JPS6454747A (en) | 1987-08-26 | 1987-08-26 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21157387A JPS6454747A (en) | 1987-08-26 | 1987-08-26 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6454747A true JPS6454747A (en) | 1989-03-02 |
Family
ID=16608009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21157387A Pending JPS6454747A (en) | 1987-08-26 | 1987-08-26 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6454747A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63237547A (en) * | 1987-03-26 | 1988-10-04 | Seiko Instr & Electronics Ltd | Manufacture of semiconductor device |
-
1987
- 1987-08-26 JP JP21157387A patent/JPS6454747A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63237547A (en) * | 1987-03-26 | 1988-10-04 | Seiko Instr & Electronics Ltd | Manufacture of semiconductor device |
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