JPS6450496A - Hybrid substrate - Google Patents
Hybrid substrateInfo
- Publication number
- JPS6450496A JPS6450496A JP20680887A JP20680887A JPS6450496A JP S6450496 A JPS6450496 A JP S6450496A JP 20680887 A JP20680887 A JP 20680887A JP 20680887 A JP20680887 A JP 20680887A JP S6450496 A JPS6450496 A JP S6450496A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- grain size
- polycrystal
- thermal conductivity
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
Abstract
PURPOSE:To flatten the surface and thermal conductivity of a substrate by varying the grain size of the polycrystal of different type of material from that of the substrate deposited on a ceramic substrate in the thickness direction of the substrate, and forming two or more polycrystalline layers. CONSTITUTION:The polycrystal of a lowermost layer 1 formed on a ceramic substrate 1 has small grain size of 0.5mum or less, and voids of the surface of the ceramic substrate are buried and the distortion due to the difference of linear expansion coefficients of different types of materials are alleviated. A second layer 3 has grain size or 2mum or more with less grain boundaries to hold high thermal conductivity. A third layer 4 has small grain size of 0.5mum to improve the flatness of the substrate surface. Thus, since a hybrid substrate varies the grain sizes of the polycrystal in the direction of the thickness of film, its surface is flat and its thermal conductivity is improved.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62206808A JP2559757B2 (en) | 1987-08-20 | 1987-08-20 | Hybrid board |
| DE3851735T DE3851735T2 (en) | 1987-08-20 | 1988-08-19 | Hybrid substrate. |
| EP88307734A EP0304337B1 (en) | 1987-08-20 | 1988-08-19 | Hybrid substrate |
| AU21460/88A AU621831B2 (en) | 1987-08-20 | 1988-08-22 | Ceramic base substrate wiyh a deposited multi-layer structure of a different material |
| US07/742,189 US5134018A (en) | 1987-08-20 | 1991-08-02 | Hybrid substrate |
| US07/884,178 US5232766A (en) | 1987-08-20 | 1992-05-18 | Hybrid substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62206808A JP2559757B2 (en) | 1987-08-20 | 1987-08-20 | Hybrid board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6450496A true JPS6450496A (en) | 1989-02-27 |
| JP2559757B2 JP2559757B2 (en) | 1996-12-04 |
Family
ID=16529431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62206808A Expired - Fee Related JP2559757B2 (en) | 1987-08-20 | 1987-08-20 | Hybrid board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2559757B2 (en) |
-
1987
- 1987-08-20 JP JP62206808A patent/JP2559757B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2559757B2 (en) | 1996-12-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |