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JPS6444440A - Method for applying resist on cylindrical body - Google Patents

Method for applying resist on cylindrical body

Info

Publication number
JPS6444440A
JPS6444440A JP20063887A JP20063887A JPS6444440A JP S6444440 A JPS6444440 A JP S6444440A JP 20063887 A JP20063887 A JP 20063887A JP 20063887 A JP20063887 A JP 20063887A JP S6444440 A JPS6444440 A JP S6444440A
Authority
JP
Japan
Prior art keywords
cylindrical body
distance
resist
needle
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20063887A
Other languages
Japanese (ja)
Inventor
Kenji Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP20063887A priority Critical patent/JPS6444440A/en
Publication of JPS6444440A publication Critical patent/JPS6444440A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Abstract

PURPOSE:To improve the dimensional accuracy of the coated film of the resist by positioning the cylindrical body by inserting a needle body therein, and then discharging a very small amount of the resist in the neighboring of the cylindrical body while rotating said body by bring it into contact with a rubber belt. CONSTITUTION:The needle body 22 is inserted into the hollow part of the cylindrical body 1, and an arm 27 is lowered by operating an air cylinder 28, thereby bringing the cylindrical body 1 into contact with the rubber belt 24. Then, a pulley 25a is rotated in a direction of (b) by rotating a motor 26 whereby the belt 24 is moved, and the cylindrical body 1 is pressed to the needle body 22 to rotate said body. Subsequently, for example, the top 10 of a pipe with a very small diameter is installed at the position apart from the center line of the cylindrical body 1 by a distance (l1) and also from the peripheral surface of said body by the distance (l2), and then, the very small amount of the resist solution is discharged on the surface of the cylindrical body to form a strip body 42, and then is spreaded to the both sides of said body 42. The distance (l2) and (l1) which control the height of the strip body 42 are adjusted suitably by the resist solution, and the distance (l3) between the end surface 32 of a support 23 and the needle body 22 is adjusted with high accuracy.
JP20063887A 1987-08-11 1987-08-11 Method for applying resist on cylindrical body Pending JPS6444440A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20063887A JPS6444440A (en) 1987-08-11 1987-08-11 Method for applying resist on cylindrical body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20063887A JPS6444440A (en) 1987-08-11 1987-08-11 Method for applying resist on cylindrical body

Publications (1)

Publication Number Publication Date
JPS6444440A true JPS6444440A (en) 1989-02-16

Family

ID=16427718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20063887A Pending JPS6444440A (en) 1987-08-11 1987-08-11 Method for applying resist on cylindrical body

Country Status (1)

Country Link
JP (1) JPS6444440A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02273576A (en) * 1989-04-14 1990-11-08 Canon Inc Rotary type coating film formation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02273576A (en) * 1989-04-14 1990-11-08 Canon Inc Rotary type coating film formation

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