JPS6444440A - Method for applying resist on cylindrical body - Google Patents
Method for applying resist on cylindrical bodyInfo
- Publication number
- JPS6444440A JPS6444440A JP20063887A JP20063887A JPS6444440A JP S6444440 A JPS6444440 A JP S6444440A JP 20063887 A JP20063887 A JP 20063887A JP 20063887 A JP20063887 A JP 20063887A JP S6444440 A JPS6444440 A JP S6444440A
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- distance
- resist
- needle
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007599 discharging Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
PURPOSE:To improve the dimensional accuracy of the coated film of the resist by positioning the cylindrical body by inserting a needle body therein, and then discharging a very small amount of the resist in the neighboring of the cylindrical body while rotating said body by bring it into contact with a rubber belt. CONSTITUTION:The needle body 22 is inserted into the hollow part of the cylindrical body 1, and an arm 27 is lowered by operating an air cylinder 28, thereby bringing the cylindrical body 1 into contact with the rubber belt 24. Then, a pulley 25a is rotated in a direction of (b) by rotating a motor 26 whereby the belt 24 is moved, and the cylindrical body 1 is pressed to the needle body 22 to rotate said body. Subsequently, for example, the top 10 of a pipe with a very small diameter is installed at the position apart from the center line of the cylindrical body 1 by a distance (l1) and also from the peripheral surface of said body by the distance (l2), and then, the very small amount of the resist solution is discharged on the surface of the cylindrical body to form a strip body 42, and then is spreaded to the both sides of said body 42. The distance (l2) and (l1) which control the height of the strip body 42 are adjusted suitably by the resist solution, and the distance (l3) between the end surface 32 of a support 23 and the needle body 22 is adjusted with high accuracy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20063887A JPS6444440A (en) | 1987-08-11 | 1987-08-11 | Method for applying resist on cylindrical body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20063887A JPS6444440A (en) | 1987-08-11 | 1987-08-11 | Method for applying resist on cylindrical body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6444440A true JPS6444440A (en) | 1989-02-16 |
Family
ID=16427718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20063887A Pending JPS6444440A (en) | 1987-08-11 | 1987-08-11 | Method for applying resist on cylindrical body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6444440A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02273576A (en) * | 1989-04-14 | 1990-11-08 | Canon Inc | Rotary type coating film formation |
-
1987
- 1987-08-11 JP JP20063887A patent/JPS6444440A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02273576A (en) * | 1989-04-14 | 1990-11-08 | Canon Inc | Rotary type coating film formation |
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