JPS644091Y2 - - Google Patents
Info
- Publication number
- JPS644091Y2 JPS644091Y2 JP7179881U JP7179881U JPS644091Y2 JP S644091 Y2 JPS644091 Y2 JP S644091Y2 JP 7179881 U JP7179881 U JP 7179881U JP 7179881 U JP7179881 U JP 7179881U JP S644091 Y2 JPS644091 Y2 JP S644091Y2
- Authority
- JP
- Japan
- Prior art keywords
- movable part
- mechanical vibrator
- coil pattern
- contraction
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Optical Transform (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7179881U JPS644091Y2 (fr) | 1981-05-18 | 1981-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7179881U JPS644091Y2 (fr) | 1981-05-18 | 1981-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57183515U JPS57183515U (fr) | 1982-11-20 |
| JPS644091Y2 true JPS644091Y2 (fr) | 1989-02-02 |
Family
ID=29867588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7179881U Expired JPS644091Y2 (fr) | 1981-05-18 | 1981-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS644091Y2 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4776779B2 (ja) * | 1998-09-02 | 2011-09-21 | カイロス・インク | 捩り撓みヒンジで連結されて相対的に回転する微細加工部材 |
| US6315423B1 (en) * | 1999-07-13 | 2001-11-13 | Input/Output, Inc. | Micro machined mirror |
| EP1586933A4 (fr) * | 2002-11-26 | 2006-02-22 | Brother Ind Ltd | Dispositif de balayage lumineux et dispositif de formation d'image |
| JP4581847B2 (ja) * | 2005-05-27 | 2010-11-17 | セイコーエプソン株式会社 | アクチュエータ |
| JP2011027973A (ja) * | 2009-07-24 | 2011-02-10 | Fujitsu Ltd | マイクロ素子 |
-
1981
- 1981-05-18 JP JP7179881U patent/JPS644091Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57183515U (fr) | 1982-11-20 |
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