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JPS644016A - Furnace tube - Google Patents

Furnace tube

Info

Publication number
JPS644016A
JPS644016A JP15938987A JP15938987A JPS644016A JP S644016 A JPS644016 A JP S644016A JP 15938987 A JP15938987 A JP 15938987A JP 15938987 A JP15938987 A JP 15938987A JP S644016 A JPS644016 A JP S644016A
Authority
JP
Japan
Prior art keywords
boat
opening
air
inside diameter
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15938987A
Other languages
Japanese (ja)
Inventor
Hitoshi Teshigahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15938987A priority Critical patent/JPS644016A/en
Publication of JPS644016A publication Critical patent/JPS644016A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent a lower part of a wafer loaded into a boat from being oxidized due to a creeping action of the air by a method wherein an inside diameter at least on the lower side of an opening on a handling side is shaped to be big. CONSTITUTION:At a core cylinder 1 an inside diameter of an opening on a handling side 2 is shaped to be gradually big toward the opening while its center is maintained on an axis identical to the center of the inside diameter of a uniformly heating zone 3. By this setup, even when a boat 5 is inserted and extracted, a creeping part 7 of the air is limited to a lower part of the boat 5; it is possible to prevent a wafer 6 from being oxidized due to a creeping action of the air. Because the inside diameter at least on the lower side of the opening on the handling side is shaped to be big in this manner, it is possible to prevent the wafer loaded into the boat from being oxidized due to the creeping action of the air.
JP15938987A 1987-06-25 1987-06-25 Furnace tube Pending JPS644016A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15938987A JPS644016A (en) 1987-06-25 1987-06-25 Furnace tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15938987A JPS644016A (en) 1987-06-25 1987-06-25 Furnace tube

Publications (1)

Publication Number Publication Date
JPS644016A true JPS644016A (en) 1989-01-09

Family

ID=15692716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15938987A Pending JPS644016A (en) 1987-06-25 1987-06-25 Furnace tube

Country Status (1)

Country Link
JP (1) JPS644016A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5189315A (en) * 1991-02-18 1993-02-23 Nec Corp. High-speed flip flop circuit with master latching circuit free from influence of slave latching circuit
US5239206A (en) * 1990-03-06 1993-08-24 Advanced Micro Devices, Inc. Synchronous circuit with clock skew compensating function and circuits utilizing same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5239206A (en) * 1990-03-06 1993-08-24 Advanced Micro Devices, Inc. Synchronous circuit with clock skew compensating function and circuits utilizing same
US5189315A (en) * 1991-02-18 1993-02-23 Nec Corp. High-speed flip flop circuit with master latching circuit free from influence of slave latching circuit

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