JPS6437498A - Single crystal pulling-up apparatus - Google Patents
Single crystal pulling-up apparatusInfo
- Publication number
- JPS6437498A JPS6437498A JP19350187A JP19350187A JPS6437498A JP S6437498 A JPS6437498 A JP S6437498A JP 19350187 A JP19350187 A JP 19350187A JP 19350187 A JP19350187 A JP 19350187A JP S6437498 A JPS6437498 A JP S6437498A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- crucible
- magnet
- convection control
- coils
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To observe distribution state of constitutional element in the arbitrary cross section in a crucible in real time, by attaching a coil forming a magnetic field for convection control into tilted magnetic field to a magnet applying the magnetic field for convection control arranged around a crucible. CONSTITUTION:A superconducting magnet 7 consisting of one couple of saddle- shaped coils 7A and 7A applying horizontal magnetic field Ho for convection control is counter-arranged in the symmetrical position to the axis of the cru cible 1 around the crucible 1 storing a melt compound 3 therein and simultane ously plural sheets of coils 8a-8n for gradually changing flux density of horizon tal magnetic field Ho applied from the magnet 7 in the vertical direction and forming a proper tilted magnetic field is attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19350187A JPS6437498A (en) | 1987-07-31 | 1987-07-31 | Single crystal pulling-up apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19350187A JPS6437498A (en) | 1987-07-31 | 1987-07-31 | Single crystal pulling-up apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437498A true JPS6437498A (en) | 1989-02-08 |
Family
ID=16309099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19350187A Pending JPS6437498A (en) | 1987-07-31 | 1987-07-31 | Single crystal pulling-up apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437498A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113046833A (en) * | 2019-12-27 | 2021-06-29 | 上海新昇半导体科技有限公司 | Semiconductor crystal growth device |
| US12188153B2 (en) | 2020-03-17 | 2025-01-07 | Shin-Etsu Handotai Co., Ltd. | Single-crystal pulling apparatus with saddle-shaped superconducting coils and single-crystal pulling method |
-
1987
- 1987-07-31 JP JP19350187A patent/JPS6437498A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113046833A (en) * | 2019-12-27 | 2021-06-29 | 上海新昇半导体科技有限公司 | Semiconductor crystal growth device |
| US12188153B2 (en) | 2020-03-17 | 2025-01-07 | Shin-Etsu Handotai Co., Ltd. | Single-crystal pulling apparatus with saddle-shaped superconducting coils and single-crystal pulling method |
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