JPS6434532U - - Google Patents
Info
- Publication number
- JPS6434532U JPS6434532U JP12972787U JP12972787U JPS6434532U JP S6434532 U JPS6434532 U JP S6434532U JP 12972787 U JP12972787 U JP 12972787U JP 12972787 U JP12972787 U JP 12972787U JP S6434532 U JPS6434532 U JP S6434532U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive element
- pingrid
- housing
- type package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の一実施例に係る圧力センサの
縦断面図、第２図は他の実施例を示す縦断面図で
ある。
１：感圧素子、２：台座、３：金線、４：ピン
グリツド型パツケージ、６：パツド、７：リード
ピン、７：受圧口、９：収納部。
FIG. 1 is a longitudinal sectional view of a pressure sensor according to one embodiment of the present invention, and FIG. 2 is a longitudinal sectional view showing another embodiment. 1: Pressure sensitive element, 2: Pedestal, 3: Gold wire, 4: Pin grid type package, 6: Pad, 7: Lead pin, 7: Pressure receiving port, 9: Storage section.
Claims (1)
型の感圧素子と、この感圧素子を搭載するピング
リツド型パツケージとを備え、該ピングリツド型
パツケージは、上記感圧素子挿入用の収納部と、
該収納部内で上記感圧素子を接合するための台座
と、上記感圧素子と同軸上に位置し、かつ上記収
納部と連通する受圧口と、パツドを介して上記感
圧素子と接続する多数のリードピンとを備えるこ
とを特徴とする圧力センサ。 A silicon diaphragm type pressure sensitive element having a piezoresistive element, and a pingrid type package in which the pressure sensitive element is mounted, the pingrid type package including a storage part for inserting the pressure sensitive element,
a pedestal for joining the pressure-sensitive element within the housing; a pressure-receiving port located coaxially with the pressure-sensitive element and communicating with the housing; and a plurality of pedestals connected to the pressure-sensitive element via pads. A pressure sensor comprising a lead pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12972787U JPS6434532U (en) | 1987-08-26 | 1987-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12972787U JPS6434532U (en) | 1987-08-26 | 1987-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6434532U true JPS6434532U (en) | 1989-03-02 |
Family
ID=31384270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12972787U Pending JPS6434532U (en) | 1987-08-26 | 1987-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6434532U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
| JPS6056245B2 (en) * | 1977-05-19 | 1985-12-09 | トヨタ自動車株式会社 | Piston cooling system in multi-cylinder engines |
| JPS6433B2 (en) * | 1984-02-01 | 1989-01-05 | Isao Morya |
-
1987
- 1987-08-26 JP JP12972787U patent/JPS6434532U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6056245B2 (en) * | 1977-05-19 | 1985-12-09 | トヨタ自動車株式会社 | Piston cooling system in multi-cylinder engines |
| JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
| JPS6433B2 (en) * | 1984-02-01 | 1989-01-05 | Isao Morya |
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