JPS6432630A - Microwave plasma treater - Google Patents
Microwave plasma treaterInfo
- Publication number
- JPS6432630A JPS6432630A JP18755387A JP18755387A JPS6432630A JP S6432630 A JPS6432630 A JP S6432630A JP 18755387 A JP18755387 A JP 18755387A JP 18755387 A JP18755387 A JP 18755387A JP S6432630 A JPS6432630 A JP S6432630A
- Authority
- JP
- Japan
- Prior art keywords
- microwaves
- plasma
- circularly polarized
- polarized wave
- discharge tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000644 propagated effect Effects 0.000 abstract 3
- 230000004907 flux Effects 0.000 abstract 1
- 230000003993 interaction Effects 0.000 abstract 1
- 238000009832 plasma treatment Methods 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To increase the speed of plasma treatment by using a linearly polarized wave-circularly polarized wave converter having high efficiency as one part of a microwave plasma treater. CONSTITUTION:Microwaves having 2.45GHz are oscillated from a magnetron 1, are converted into the microwaves of linearly polarized waves formed through a rectangular waveguide 3 having an inside diameter of 120X120mm or circularly polarized waves by approximately 100% by a linearly polarized wave- circularly polarized wave converter 5, and are propagated through a circular waveguide 6 and a microwave introducing window in the top section of a discharge tube 7 made of quartz and enter the discharge tube. Microwaves propagated through the discharge tube 7 to which a magnetic field is applied generate electron cyclotron resonance (ECR) by interaction with the magnetic field, and plasma is generated. There is only circularly polarized waves in the clockwise direction in microwaves propagated in an ECR section and plasma in a region having magnetic flux density higher than the conditions of ECR, thus increasing the density of plasma with the elevation of the circularly polarized wave density of microwaves introduced to the discharge tube 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18755387A JPS6432630A (en) | 1987-07-29 | 1987-07-29 | Microwave plasma treater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18755387A JPS6432630A (en) | 1987-07-29 | 1987-07-29 | Microwave plasma treater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6432630A true JPS6432630A (en) | 1989-02-02 |
Family
ID=16208093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18755387A Pending JPS6432630A (en) | 1987-07-29 | 1987-07-29 | Microwave plasma treater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6432630A (en) |
-
1987
- 1987-07-29 JP JP18755387A patent/JPS6432630A/en active Pending
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