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JPS6429694A - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
JPS6429694A
JPS6429694A JP18341187A JP18341187A JPS6429694A JP S6429694 A JPS6429694 A JP S6429694A JP 18341187 A JP18341187 A JP 18341187A JP 18341187 A JP18341187 A JP 18341187A JP S6429694 A JPS6429694 A JP S6429694A
Authority
JP
Japan
Prior art keywords
dynamic pressure
impellers
thrust
impeller
end faces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18341187A
Other languages
Japanese (ja)
Inventor
Noriyuki Osada
Keiji Yokoi
Toshiya Kanamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP18341187A priority Critical patent/JPS6429694A/en
Publication of JPS6429694A publication Critical patent/JPS6429694A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F04D29/0513—Axial thrust balancing hydrostatic; hydrodynamic thrust bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

PURPOSE:To enable the operation, in always and respectively stable conditions, of all impellers by supporting each stage impeller with spiral groove radial and thrust bearings supplied with gas for generating dynamic pressure. CONSTITUTION:Plural stages of turbo-impellers 19, 20 and vortex pump impellers 21 to 24 are supported independently every impeller group to each other and rotatably in casing elements 3 to 6 through radial dynamic pressure bearings formed by spiral grooves 47 to 51 provided respectively on a shaft 18. Between respective both end faces, perpendicular to the shaft, of each impeller group and the side face of a cap 60 fixed against the element 3 to 6 respectively facing to the both end faces in axial direction, thrust dynamic pressure bearings are also provided, which are formed by thrust collars 61 to 70 made of seramic provided with spiral grooves respectively. Respective stage impeller groups thereby can take an optinal rotating speed respectively and a stable operation becomes possible without allowing a motor to continuously run under an abnormal overload.
JP18341187A 1987-07-24 1987-07-24 Vacuum pump Pending JPS6429694A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18341187A JPS6429694A (en) 1987-07-24 1987-07-24 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18341187A JPS6429694A (en) 1987-07-24 1987-07-24 Vacuum pump

Publications (1)

Publication Number Publication Date
JPS6429694A true JPS6429694A (en) 1989-01-31

Family

ID=16135310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18341187A Pending JPS6429694A (en) 1987-07-24 1987-07-24 Vacuum pump

Country Status (1)

Country Link
JP (1) JPS6429694A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2433012B1 (en) * 2009-05-20 2015-11-04 Edwards Limited Side-channel pump with axial gas bearing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2433012B1 (en) * 2009-05-20 2015-11-04 Edwards Limited Side-channel pump with axial gas bearing

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