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JPS6428974A - Piezoelectric pressure sensitive element and manufacture thereof - Google Patents

Piezoelectric pressure sensitive element and manufacture thereof

Info

Publication number
JPS6428974A
JPS6428974A JP18498787A JP18498787A JPS6428974A JP S6428974 A JPS6428974 A JP S6428974A JP 18498787 A JP18498787 A JP 18498787A JP 18498787 A JP18498787 A JP 18498787A JP S6428974 A JPS6428974 A JP S6428974A
Authority
JP
Japan
Prior art keywords
pressure
sensitive element
pressure sensitive
dipolar
orientated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18498787A
Other languages
Japanese (ja)
Inventor
Katsumi Yano
Motoyasu Nakanishi
Kunihiko Miyoshi
Tomoaki Futakuchi
Yoshihisa Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cubic Eng Kk
KIYUUBITSUKU ENG KK
TOYAMA PREF GOV
Toyama Prefecture
Tonen Chemical Corp
Original Assignee
Cubic Eng Kk
KIYUUBITSUKU ENG KK
TOYAMA PREF GOV
Tonen Sekiyu Kagaku KK
Toyama Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cubic Eng Kk, KIYUUBITSUKU ENG KK, TOYAMA PREF GOV, Tonen Sekiyu Kagaku KK, Toyama Prefecture filed Critical Cubic Eng Kk
Priority to JP18498787A priority Critical patent/JPS6428974A/en
Publication of JPS6428974A publication Critical patent/JPS6428974A/en
Pending legal-status Critical Current

Links

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE:To enable absorption and relaxation of impact force applied from outside and to make a pressure detectible with high sensitivity, by dispersing ferroelectric ceramics powder, which is orientated in a dipolar state, in specific silicone resin. CONSTITUTION:A piezo electric type pressure sensitive element is formed by dispersing ferroelectric ceramics powder, which is orientated on a dipolar state, in silicone resin which is obtained by bridging the following substances: direct- chained polydimethyl siloxane with vinyl groups on both its ends, and polyhydrodiene siloxane with Si-H groups of at least two or more per one molecule. Accordingly impact force applied to this element from outside can be absorbed and relaxed, and besides a pressure can be detected with high sensitivity. This device is available in use for detection of gripping force at a manipulator part in a robot or for detection of retaining pressure in a hydraulic device or the like.
JP18498787A 1987-07-24 1987-07-24 Piezoelectric pressure sensitive element and manufacture thereof Pending JPS6428974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18498787A JPS6428974A (en) 1987-07-24 1987-07-24 Piezoelectric pressure sensitive element and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18498787A JPS6428974A (en) 1987-07-24 1987-07-24 Piezoelectric pressure sensitive element and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS6428974A true JPS6428974A (en) 1989-01-31

Family

ID=16162813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18498787A Pending JPS6428974A (en) 1987-07-24 1987-07-24 Piezoelectric pressure sensitive element and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS6428974A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002185054A (en) * 2000-12-18 2002-06-28 Honda Motor Co Ltd Piezoelectric elastomer composite material and its manufacturing method
KR100479857B1 (en) * 2001-12-28 2005-03-30 제일모직주식회사 Silicon resin composition for packaging semiconductor
JP2009076760A (en) * 2007-09-21 2009-04-09 Denso Corp Multilayer piezoelectric element and method for manufacturing the same
WO2019051217A1 (en) * 2017-09-07 2019-03-14 Texas Instruments Incorporated Pressure sensing using quantum molecular rotational state transitions
CN109470397A (en) * 2017-09-07 2019-03-15 德克萨斯仪器股份有限公司 The pressure measurement of electromagnetic signal output based on chamber
US10424523B2 (en) 2017-09-07 2019-09-24 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with buried ground plane
US10498001B2 (en) 2017-08-21 2019-12-03 Texas Instruments Incorporated Launch structures for a hermetically sealed cavity
US10493722B2 (en) 2017-09-07 2019-12-03 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with dual wafer bonding
US10544039B2 (en) 2017-09-08 2020-01-28 Texas Instruments Incorporated Methods for depositing a measured amount of a species in a sealed cavity
US10549986B2 (en) 2017-09-07 2020-02-04 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell
US10913654B2 (en) 2017-09-06 2021-02-09 Texas Instruments Incorporated Packaging a sealed cavity in an electronic device
WO2022019286A1 (en) * 2020-07-21 2022-01-27 パナソニックＩｐマネジメント株式会社 Shock absorbing sheet
WO2022158091A1 (en) * 2021-01-21 2022-07-28 株式会社村田製作所 Piezoelectric oscillator and manufacturing method of piezoelectric oscillator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890489A (en) * 1972-03-02 1973-11-26
JPS54120900A (en) * 1978-03-10 1979-09-19 Toshiba Corp Production method of piezoelectric macromolecule compound
JPS54157297A (en) * 1978-06-01 1979-12-12 Ngk Spark Plug Co Piezo high polymer compound material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890489A (en) * 1972-03-02 1973-11-26
JPS54120900A (en) * 1978-03-10 1979-09-19 Toshiba Corp Production method of piezoelectric macromolecule compound
JPS54157297A (en) * 1978-06-01 1979-12-12 Ngk Spark Plug Co Piezo high polymer compound material

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002185054A (en) * 2000-12-18 2002-06-28 Honda Motor Co Ltd Piezoelectric elastomer composite material and its manufacturing method
KR100479857B1 (en) * 2001-12-28 2005-03-30 제일모직주식회사 Silicon resin composition for packaging semiconductor
JP2009076760A (en) * 2007-09-21 2009-04-09 Denso Corp Multilayer piezoelectric element and method for manufacturing the same
US10498001B2 (en) 2017-08-21 2019-12-03 Texas Instruments Incorporated Launch structures for a hermetically sealed cavity
US10913654B2 (en) 2017-09-06 2021-02-09 Texas Instruments Incorporated Packaging a sealed cavity in an electronic device
US10444102B2 (en) 2017-09-07 2019-10-15 Texas Instruments Incorporated Pressure measurement based on electromagnetic signal output of a cavity
US10424523B2 (en) 2017-09-07 2019-09-24 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with buried ground plane
CN109470397A (en) * 2017-09-07 2019-03-15 德克萨斯仪器股份有限公司 The pressure measurement of electromagnetic signal output based on chamber
US10493722B2 (en) 2017-09-07 2019-12-03 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with dual wafer bonding
US10551265B2 (en) 2017-09-07 2020-02-04 Texas Instruments Incorporated Pressure sensing using quantum molecular rotational state transitions
US10549986B2 (en) 2017-09-07 2020-02-04 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell
WO2019051217A1 (en) * 2017-09-07 2019-03-14 Texas Instruments Incorporated Pressure sensing using quantum molecular rotational state transitions
US10544039B2 (en) 2017-09-08 2020-01-28 Texas Instruments Incorporated Methods for depositing a measured amount of a species in a sealed cavity
WO2022019286A1 (en) * 2020-07-21 2022-01-27 パナソニックＩｐマネジメント株式会社 Shock absorbing sheet
WO2022158091A1 (en) * 2021-01-21 2022-07-28 株式会社村田製作所 Piezoelectric oscillator and manufacturing method of piezoelectric oscillator

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