JPS6418726U - - Google Patents
Info
- Publication number
- JPS6418726U JPS6418726U JP11320587U JP11320587U JPS6418726U JP S6418726 U JPS6418726 U JP S6418726U JP 11320587 U JP11320587 U JP 11320587U JP 11320587 U JP11320587 U JP 11320587U JP S6418726 U JPS6418726 U JP S6418726U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support rods
- grooveless
- semicircle
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
Description
第１図１〜３は本考案の実施例を説明する成長
装置用ウエハキヤリアの平面図、側面図および正
面図、第２図１〜３は従来の成長装置用ウエハキ
ヤリアの平面図、側面図および正面図、第３図１
，２はそれぞれ冷却後のウエハの割れと欠けの状
態を示す図、第４図１〜３は従来のウエハキヤリ
アを用いた場合に対する、下側の溝内の成長状況
を説明する断面図、第５図１，２は本考案ウエハ
キヤリアを用いた場合に対する、下側の溝内の成
長状況を説明する断面図である。
図において、１，２は端面支持部材、３Ａ，３
Ｂ，３Ｃ，３Ｄは溝を有する支持棒、４Ａ，４Ｂ
，……はウエハ、５Ａ，５Ｂは溝のない支持棒、
６は成長膜である。
1 to 3 are a plan view, a side view, and a front view of a wafer carrier for a growth apparatus explaining an embodiment of the present invention, and FIGS. 2 1 to 3 are a plan view and a side view of a conventional wafer carrier for a growth apparatus. and front view, Figure 3 1
, 2 are diagrams showing the state of cracks and chips in the wafer after cooling, respectively; FIGS. 4, 1 to 3 are cross-sectional diagrams illustrating the state of growth in the lower groove when a conventional wafer carrier is used; 5. FIGS. 1 and 2 are cross-sectional views illustrating the growth situation in the lower groove when the wafer carrier of the present invention is used. In the figure, 1 and 2 are end support members, 3A, 3
B, 3C, 3D are support rods with grooves, 4A, 4B
, ... are wafers, 5A and 5B are support rods without grooves,
6 is a grown film.
Claims (1)
支持棒が該溝を内側にして半円周上に配置され、
かつ該半円周上の離れた２箇所に溝のない支持棒
が配置されてなり、 ウエハを装填した際にウエハの周縁が該溝のな
い支持棒により支持され、該溝の底面に接触しな
いようにしたことを特徴とする成長装置用ウエハ
キヤリア。[Claims for Utility Model Registration] Three or more support rods having grooves into which the periphery of the wafer fits are arranged on a semicircle with the grooves inside,
and grooveless support rods are arranged at two separate locations on the semicircle, and when a wafer is loaded, the peripheral edge of the wafer is supported by the grooveless support rods and does not come into contact with the bottom of the groove. A wafer carrier for a growth device, which is characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987113205U JPH0648825Y2 (en) | 1987-07-23 | 1987-07-23 | Wafer carrier for growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987113205U JPH0648825Y2 (en) | 1987-07-23 | 1987-07-23 | Wafer carrier for growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418726U true JPS6418726U (en) | 1989-01-30 |
| JPH0648825Y2 JPH0648825Y2 (en) | 1994-12-12 |
Family
ID=31352832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987113205U Expired - Lifetime JPH0648825Y2 (en) | 1987-07-23 | 1987-07-23 | Wafer carrier for growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648825Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0447023U (en) * | 1990-08-28 | 1992-04-21 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5164867A (en) * | 1974-12-03 | 1976-06-04 | Tokyo Shibaura Electric Co | Handotaisochino seizosochi |
-
1987
- 1987-07-23 JP JP1987113205U patent/JPH0648825Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5164867A (en) * | 1974-12-03 | 1976-06-04 | Tokyo Shibaura Electric Co | Handotaisochino seizosochi |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0447023U (en) * | 1990-08-28 | 1992-04-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648825Y2 (en) | 1994-12-12 |
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