JPS6418143A - Photosensitive resin composition - Google Patents
Photosensitive resin compositionInfo
- Publication number
- JPS6418143A JPS6418143A JP17394587A JP17394587A JPS6418143A JP S6418143 A JPS6418143 A JP S6418143A JP 17394587 A JP17394587 A JP 17394587A JP 17394587 A JP17394587 A JP 17394587A JP S6418143 A JPS6418143 A JP S6418143A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- compd
- titled
- photosensitive resin
- high polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 title abstract 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 abstract 4
- 239000000203 mixture Substances 0.000 abstract 4
- 229920000642 polymer Polymers 0.000 abstract 3
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
Abstract
PURPOSE:To obtain the titled positive type photosensitive resin composition which is not sensitive to heat load, and does not accompany the generation of an unuseful gas such as N2 gas, etc., by incorporating a specified anthracene compd. and an alkaline soluble high polymer in the titled composition. CONSTITUTION:The titled composition contains the anthracene compd. shown by formulas I and/or II, and the alkaline soluble high polymer. In formulas I and II, R is alkyl group. The titled composition remarkably reduces a dissolving speed for a weak alkaline developer before exposing, and remarkably increases said speed after exposing by incorporating the compd. shown by formula I and/or II in the alkaline soluble high polymer. And, at the time of exposing the titled composition, the excellent positive type image having less tendency for generating out of focus and a pinhole is obtd. without generating any gas. Thus, the positive type photosensitive resin which has the excellent stability against heat, and does not generate nay gas caused by photo irradiation, and has the excellent durability against an etching solution, and enables to an alkaline development, is obtd.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62173945A JP2582578B2 (en) | 1987-07-14 | 1987-07-14 | Photosensitive resin composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62173945A JP2582578B2 (en) | 1987-07-14 | 1987-07-14 | Photosensitive resin composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418143A true JPS6418143A (en) | 1989-01-20 |
| JP2582578B2 JP2582578B2 (en) | 1997-02-19 |
Family
ID=15969978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62173945A Expired - Lifetime JP2582578B2 (en) | 1987-07-14 | 1987-07-14 | Photosensitive resin composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2582578B2 (en) |
Cited By (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5237059A (en) * | 1991-03-22 | 1993-08-17 | Fuji Photo Film Co., Ltd. | Compounds capable of generating an acid by light irradiation |
| JPH07134410A (en) * | 1993-06-25 | 1995-05-23 | Nec Corp | Resist material |
| US5583900A (en) * | 1993-03-18 | 1996-12-10 | Hitachi, Ltd. | Structural member having superior resistance to neutron irradiation embrittlement, austenitic steel for use in same, and use thereof |
| EP0747768A2 (en) | 1995-06-05 | 1996-12-11 | Fuji Photo Film Co., Ltd. | Chemically amplified positive resist composition |
| WO2000010056A1 (en) * | 1998-08-14 | 2000-02-24 | Shipley Company, L.L.C. | Photoacid generators and photoresists comprising same |
| US6541178B2 (en) | 1999-12-29 | 2003-04-01 | Samsung Electronics Co., Ltd. | Ion-type photoacid generator containing naphthol and photosensitive polyimide composition prepared by using the same |
| EP1615073A1 (en) | 2004-07-06 | 2006-01-11 | Fuji Photo Film Co., Ltd. | Photosensitive composition and image recording method using the same |
| EP1619023A2 (en) | 2004-07-20 | 2006-01-25 | Fuji Photo Film Co., Ltd. | Image forming material |
| EP1662318A1 (en) | 1999-03-09 | 2006-05-31 | Fuji Photo Film Co., Ltd. | 1,3-dihydro-1-oxo-2H-indene derivative |
| EP1700890A2 (en) | 2005-03-08 | 2006-09-13 | Fuji Photo Film Co., Ltd. | Ink composition, inkjet recording method, printed material, method of producing planographic printing plate, and planographic printing plate |
| EP1701213A2 (en) | 2005-03-08 | 2006-09-13 | Fuji Photo Film Co., Ltd. | Photosensitive composition |
| EP1757635A1 (en) | 2005-08-23 | 2007-02-28 | Fuji Photo Film Co., Ltd. | Curable modified oxetane compound and ink composition comprising it |
| EP1762599A1 (en) | 2005-09-07 | 2007-03-14 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, process for producing lithographic plate, and lithographic printing plate |
| EP1829684A1 (en) | 2006-03-03 | 2007-09-05 | FUJIFILM Corporation | Curable composition, ink composition, inkjet-recording method, and planographic printing plate |
| EP1952982A1 (en) | 2007-02-02 | 2008-08-06 | FUJIFILM Corporation | Radiation-curable polymerizable composition, ink composition, inkjet recording method, printed material, planographic printing plate, and method for forming planographic printing plate |
| EP1952998A2 (en) | 2007-02-01 | 2008-08-06 | FUJIFILM Corporation | Ink-jet recording device |
| EP1955858A1 (en) | 2007-02-06 | 2008-08-13 | FUJIFILM Corporation | Undercoat solution, ink-jet recording method and ink-jet recording device |
| EP1955850A2 (en) | 2007-02-07 | 2008-08-13 | FUJIFILM Corporation | Ink-jet head maintenance device, ink-jet recording device and ink-jet head maintenance method |
| EP1964894A2 (en) | 2007-02-27 | 2008-09-03 | FUJIFILM Corporation | Ink composition, inkjetrecording method, printed material, method for producing planographic printing plate, and planographic printing plate |
| EP1964893A1 (en) | 2007-02-26 | 2008-09-03 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, and ink set |
| EP1975211A1 (en) | 2007-03-30 | 2008-10-01 | FUJIFILM Corporation | Ink composition and image recording method and image recorded matter using same |
| EP1975213A1 (en) | 2006-07-03 | 2008-10-01 | FUJIFILM Corporation | Ink composition, injet recording method, printed material, and process for producing lithographic printing plate |
| EP1975160A1 (en) | 2007-03-30 | 2008-10-01 | Fujifilm Corporation | Polymerizable compound, polymer, ink composition, printed articles and inkjet recording method |
| EP1975212A2 (en) | 2007-03-30 | 2008-10-01 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, planographic printing plate, and method for forming planographic printing plate |
| EP1988136A1 (en) | 2007-03-01 | 2008-11-05 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, method for producing planographic printing plate, and planographic printing plate |
| EP2042570A1 (en) | 2007-09-27 | 2009-04-01 | FUJIFILM Corporation | Photo-curable composition including polymerizable compound, polymerization initiator, and dye |
| EP2042572A1 (en) | 2007-09-28 | 2009-04-01 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, and process for producing molded printed material |
| EP2042243A2 (en) | 2007-09-28 | 2009-04-01 | FUJIFILM Corporation | Coater and ink-jet recording device using the same |
| EP2042335A2 (en) | 2007-09-28 | 2009-04-01 | FUJIFILM Corporation | Inkjet recording method |
| EP2065449A2 (en) | 2007-11-29 | 2009-06-03 | FUJIFILM Corporation | Ink composition for inkjet recording, inkjet recording method, and printed material |
| EP2088176A1 (en) | 2008-02-07 | 2009-08-12 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, and molded printed material |
| EP2093265A1 (en) | 2008-02-25 | 2009-08-26 | FUJIFILM Corporation | Inkjet ink composition, and inkjet recording method and printed material employing same |
| EP2100925A2 (en) | 2008-03-11 | 2009-09-16 | FUJIFILM Corporation | Pigment composition, ink composition, printed article, inkjet recording method and polyallylamine derivative |
| EP2105478A1 (en) | 2008-03-26 | 2009-09-30 | FUJIFILM Corporation | Inkjet recording method and inkjet recording system |
| EP2130881A1 (en) | 2008-06-02 | 2009-12-09 | FUJIFILM Corporation | Pigment dispersion and ink composition using the same |
| EP2169022A1 (en) | 2008-09-29 | 2010-03-31 | Fujifilm Corporation | Ink composition and inkjet recording method |
| EP2169018A2 (en) | 2008-09-26 | 2010-03-31 | Fujifilm Corporation | Ink composition and inkjet recording method |
| EP2169021A1 (en) | 2008-09-25 | 2010-03-31 | Fujifilm Corporation | Ink composition, inkjet recording method, and printed material |
| EP2216377A1 (en) | 2009-02-09 | 2010-08-11 | FUJIFILM Corporation | Ink composition, and inkjet recording method |
| EP2216378A1 (en) | 2009-02-05 | 2010-08-11 | Fujifilm Corporation | Nonaqueous ink, image-recording method, image-recording apparatus and recorded article |
| EP2230285A1 (en) | 2009-03-19 | 2010-09-22 | Fujifilm Corporation | Ink composition, inkjet recording method, printed material, and process for producing molded printed material |
| EP2230284A1 (en) | 2009-03-17 | 2010-09-22 | Fujifilm Corporation | Ink composition and inkjet recording method |
| EP2236570A2 (en) | 2009-03-31 | 2010-10-06 | Fujifilm Corporation | Ink composition, ink composition for inkjet recording, inkjet recording method, and printed article obtained by inkjet recording method |
| EP2298841A1 (en) | 2009-09-18 | 2011-03-23 | FUJIFILM Corporation | Ink composition, and inkjet recording method |
| EP2311918A1 (en) | 2009-09-29 | 2011-04-20 | FUJIFILM Corporation | Ink composition, and inkjet recording method |
| EP2477073A1 (en) | 2002-02-13 | 2012-07-18 | Fujifilm Corporation | Resist composition for electron beam, EUV or X-ray |
| EP2644664A1 (en) | 2012-03-29 | 2013-10-02 | Fujifilm Corporation | Actinic radiation-curing type ink composition, inkjet recording method, decorative sheet, decorative sheet molded product, process for producing in-mold molded article, and in-mold molded article |
| WO2014136923A1 (en) | 2013-03-07 | 2014-09-12 | 富士フイルム株式会社 | Inkjet ink composition, inkjet recording method, printed matter and method of producing formed printed matter |
| WO2015008777A1 (en) | 2013-07-16 | 2015-01-22 | 株式会社カネカ | Active energy-ray-curable resin composition for coating organic or inorganic substrate |
| EP2842763A2 (en) | 2013-08-30 | 2015-03-04 | Fujifilm Corporation | Image formation method, decorative sheet, decorative sheet molding, process for producing in-mold molded product, in-mold molded product, and ink set |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613141A (en) * | 1984-06-15 | 1986-01-09 | Toshiba Corp | Photosensitive composition |
-
1987
- 1987-07-14 JP JP62173945A patent/JP2582578B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613141A (en) * | 1984-06-15 | 1986-01-09 | Toshiba Corp | Photosensitive composition |
Cited By (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5237059A (en) * | 1991-03-22 | 1993-08-17 | Fuji Photo Film Co., Ltd. | Compounds capable of generating an acid by light irradiation |
| US5583900A (en) * | 1993-03-18 | 1996-12-10 | Hitachi, Ltd. | Structural member having superior resistance to neutron irradiation embrittlement, austenitic steel for use in same, and use thereof |
| JPH07134410A (en) * | 1993-06-25 | 1995-05-23 | Nec Corp | Resist material |
| EP0747768A2 (en) | 1995-06-05 | 1996-12-11 | Fuji Photo Film Co., Ltd. | Chemically amplified positive resist composition |
| WO2000010056A1 (en) * | 1998-08-14 | 2000-02-24 | Shipley Company, L.L.C. | Photoacid generators and photoresists comprising same |
| US6458506B2 (en) | 1998-08-14 | 2002-10-01 | Shipley Company, Llc | Photoacid generators and photoresists comprising same |
| EP1662318A1 (en) | 1999-03-09 | 2006-05-31 | Fuji Photo Film Co., Ltd. | 1,3-dihydro-1-oxo-2H-indene derivative |
| US6541178B2 (en) | 1999-12-29 | 2003-04-01 | Samsung Electronics Co., Ltd. | Ion-type photoacid generator containing naphthol and photosensitive polyimide composition prepared by using the same |
| EP2477073A1 (en) | 2002-02-13 | 2012-07-18 | Fujifilm Corporation | Resist composition for electron beam, EUV or X-ray |
| EP1615073A1 (en) | 2004-07-06 | 2006-01-11 | Fuji Photo Film Co., Ltd. | Photosensitive composition and image recording method using the same |
| EP1619023A2 (en) | 2004-07-20 | 2006-01-25 | Fuji Photo Film Co., Ltd. | Image forming material |
| EP1700890A2 (en) | 2005-03-08 | 2006-09-13 | Fuji Photo Film Co., Ltd. | Ink composition, inkjet recording method, printed material, method of producing planographic printing plate, and planographic printing plate |
| EP1701213A2 (en) | 2005-03-08 | 2006-09-13 | Fuji Photo Film Co., Ltd. | Photosensitive composition |
| EP1757635A1 (en) | 2005-08-23 | 2007-02-28 | Fuji Photo Film Co., Ltd. | Curable modified oxetane compound and ink composition comprising it |
| EP1762599A1 (en) | 2005-09-07 | 2007-03-14 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, process for producing lithographic plate, and lithographic printing plate |
| EP1829684A1 (en) | 2006-03-03 | 2007-09-05 | FUJIFILM Corporation | Curable composition, ink composition, inkjet-recording method, and planographic printing plate |
| EP1975213A1 (en) | 2006-07-03 | 2008-10-01 | FUJIFILM Corporation | Ink composition, injet recording method, printed material, and process for producing lithographic printing plate |
| EP1952998A2 (en) | 2007-02-01 | 2008-08-06 | FUJIFILM Corporation | Ink-jet recording device |
| EP1952982A1 (en) | 2007-02-02 | 2008-08-06 | FUJIFILM Corporation | Radiation-curable polymerizable composition, ink composition, inkjet recording method, printed material, planographic printing plate, and method for forming planographic printing plate |
| EP1955858A1 (en) | 2007-02-06 | 2008-08-13 | FUJIFILM Corporation | Undercoat solution, ink-jet recording method and ink-jet recording device |
| EP1955850A2 (en) | 2007-02-07 | 2008-08-13 | FUJIFILM Corporation | Ink-jet head maintenance device, ink-jet recording device and ink-jet head maintenance method |
| EP1964893A1 (en) | 2007-02-26 | 2008-09-03 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, and ink set |
| EP1964894A2 (en) | 2007-02-27 | 2008-09-03 | FUJIFILM Corporation | Ink composition, inkjetrecording method, printed material, method for producing planographic printing plate, and planographic printing plate |
| EP1988136A1 (en) | 2007-03-01 | 2008-11-05 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, method for producing planographic printing plate, and planographic printing plate |
| EP1975160A1 (en) | 2007-03-30 | 2008-10-01 | Fujifilm Corporation | Polymerizable compound, polymer, ink composition, printed articles and inkjet recording method |
| EP1975211A1 (en) | 2007-03-30 | 2008-10-01 | FUJIFILM Corporation | Ink composition and image recording method and image recorded matter using same |
| EP1975212A2 (en) | 2007-03-30 | 2008-10-01 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, planographic printing plate, and method for forming planographic printing plate |
| EP2042570A1 (en) | 2007-09-27 | 2009-04-01 | FUJIFILM Corporation | Photo-curable composition including polymerizable compound, polymerization initiator, and dye |
| EP2042572A1 (en) | 2007-09-28 | 2009-04-01 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, and process for producing molded printed material |
| EP2042243A2 (en) | 2007-09-28 | 2009-04-01 | FUJIFILM Corporation | Coater and ink-jet recording device using the same |
| EP2042335A2 (en) | 2007-09-28 | 2009-04-01 | FUJIFILM Corporation | Inkjet recording method |
| EP2065449A2 (en) | 2007-11-29 | 2009-06-03 | FUJIFILM Corporation | Ink composition for inkjet recording, inkjet recording method, and printed material |
| EP2088176A1 (en) | 2008-02-07 | 2009-08-12 | FUJIFILM Corporation | Ink composition, inkjet recording method, printed material, and molded printed material |
| EP2093265A1 (en) | 2008-02-25 | 2009-08-26 | FUJIFILM Corporation | Inkjet ink composition, and inkjet recording method and printed material employing same |
| EP2100925A2 (en) | 2008-03-11 | 2009-09-16 | FUJIFILM Corporation | Pigment composition, ink composition, printed article, inkjet recording method and polyallylamine derivative |
| EP2105478A1 (en) | 2008-03-26 | 2009-09-30 | FUJIFILM Corporation | Inkjet recording method and inkjet recording system |
| EP2130881A1 (en) | 2008-06-02 | 2009-12-09 | FUJIFILM Corporation | Pigment dispersion and ink composition using the same |
| EP2169021A1 (en) | 2008-09-25 | 2010-03-31 | Fujifilm Corporation | Ink composition, inkjet recording method, and printed material |
| EP2169018A2 (en) | 2008-09-26 | 2010-03-31 | Fujifilm Corporation | Ink composition and inkjet recording method |
| EP2169022A1 (en) | 2008-09-29 | 2010-03-31 | Fujifilm Corporation | Ink composition and inkjet recording method |
| EP2216378A1 (en) | 2009-02-05 | 2010-08-11 | Fujifilm Corporation | Nonaqueous ink, image-recording method, image-recording apparatus and recorded article |
| EP2216377A1 (en) | 2009-02-09 | 2010-08-11 | FUJIFILM Corporation | Ink composition, and inkjet recording method |
| EP2230284A1 (en) | 2009-03-17 | 2010-09-22 | Fujifilm Corporation | Ink composition and inkjet recording method |
| EP2230285A1 (en) | 2009-03-19 | 2010-09-22 | Fujifilm Corporation | Ink composition, inkjet recording method, printed material, and process for producing molded printed material |
| EP2236570A2 (en) | 2009-03-31 | 2010-10-06 | Fujifilm Corporation | Ink composition, ink composition for inkjet recording, inkjet recording method, and printed article obtained by inkjet recording method |
| EP2298841A1 (en) | 2009-09-18 | 2011-03-23 | FUJIFILM Corporation | Ink composition, and inkjet recording method |
| EP2311918A1 (en) | 2009-09-29 | 2011-04-20 | FUJIFILM Corporation | Ink composition, and inkjet recording method |
| EP2644664A1 (en) | 2012-03-29 | 2013-10-02 | Fujifilm Corporation | Actinic radiation-curing type ink composition, inkjet recording method, decorative sheet, decorative sheet molded product, process for producing in-mold molded article, and in-mold molded article |
| WO2014136923A1 (en) | 2013-03-07 | 2014-09-12 | 富士フイルム株式会社 | Inkjet ink composition, inkjet recording method, printed matter and method of producing formed printed matter |
| WO2015008777A1 (en) | 2013-07-16 | 2015-01-22 | 株式会社カネカ | Active energy-ray-curable resin composition for coating organic or inorganic substrate |
| EP2842763A2 (en) | 2013-08-30 | 2015-03-04 | Fujifilm Corporation | Image formation method, decorative sheet, decorative sheet molding, process for producing in-mold molded product, in-mold molded product, and ink set |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2582578B2 (en) | 1997-02-19 |
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