JPS6418036A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPS6418036A JPS6418036A JP17629787A JP17629787A JPS6418036A JP S6418036 A JPS6418036 A JP S6418036A JP 17629787 A JP17629787 A JP 17629787A JP 17629787 A JP17629787 A JP 17629787A JP S6418036 A JPS6418036 A JP S6418036A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- gas
- change
- transmitted
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To enable the measurement accurately and without causing a change in characteristic regardless of any foreign matter contained in a gas to be measured, by providing a filter comprising a porous fluororesin material in a path for the gas to be measured. CONSTITUTION:A sensor device 35 is mounted with a thread section 31 to be opened for a gas to be measured. A pressure to be transmitted to a silicon chip 1 of a sensor body 21 is transmitted through a pipe 15 by way of a filter 27 of a filter unit 26 provided on a path 36. Receiving a change in pressure, a gauge resistance varies as formed on a diaphragm section of the silicon chip 1. Then, the change in resistance value is turned to a change in voltage to be transmitted to a HIC 33 on a second substrate 32 through a connection line 24. An electrical signal is amplified to a desired value while the effect of an ambient temperature on an output is corrected to output a correct output voltage corresponding to the pressure through a lead out line 1. This enables accurate measurement regardless of any foreign matter contained in the gas being measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17629787A JPS6418036A (en) | 1987-07-14 | 1987-07-14 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17629787A JPS6418036A (en) | 1987-07-14 | 1987-07-14 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418036A true JPS6418036A (en) | 1989-01-20 |
Family
ID=16011121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17629787A Pending JPS6418036A (en) | 1987-07-14 | 1987-07-14 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418036A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04136844U (en) * | 1991-06-14 | 1992-12-21 | 日新電機株式会社 | Compressed air operated switchgear |
| JP2001165799A (en) * | 1999-10-28 | 2001-06-22 | Motorola Inc | Component of physical sensor |
| CN104964787A (en) * | 2015-07-08 | 2015-10-07 | 无锡隆盛科技股份有限公司 | Novel intake pressure sensor |
-
1987
- 1987-07-14 JP JP17629787A patent/JPS6418036A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04136844U (en) * | 1991-06-14 | 1992-12-21 | 日新電機株式会社 | Compressed air operated switchgear |
| JP2001165799A (en) * | 1999-10-28 | 2001-06-22 | Motorola Inc | Component of physical sensor |
| CN104964787A (en) * | 2015-07-08 | 2015-10-07 | 无锡隆盛科技股份有限公司 | Novel intake pressure sensor |
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