JPS6414916A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6414916A JPS6414916A JP62171830A JP17183087A JPS6414916A JP S6414916 A JPS6414916 A JP S6414916A JP 62171830 A JP62171830 A JP 62171830A JP 17183087 A JP17183087 A JP 17183087A JP S6414916 A JPS6414916 A JP S6414916A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- mask
- film
- type impurity
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To perform a patterning necessary to define a P-type semiconductor region and an N-type semiconductor region by once by implanting a P-type impurity to a semiconductor layer, oxidizing a surface, and implanting an N-type impurity to the semiconductor layer with the oxide part of the semiconductor layer surface as a mask. CONSTITUTION:A crystalline silicon layer 3 is formed on the oxide film 2 of a silicon semiconductor substrate 1, an anti-oxidation layer 4 made of Si3N4 to become an anti-oxidation mask layer is formed thereon, coated with a photoresist film 5, exposed and developed. with the film 5 as a mask the layer 4 is etched to form an anti-oxidation mask layer 4a. With the layer 4a as a mask a P-type impurity is implanted into the layer 3. The surface of the layer 4 is thermally oxidized to form an oxide film 6. The layer 4a is removed, with the film 6 as a mask an N-type impurity, such as arsenic As is implanted to the layer 3, and the film 6 is removed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62171830A JPS6414916A (en) | 1987-07-09 | 1987-07-09 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62171830A JPS6414916A (en) | 1987-07-09 | 1987-07-09 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6414916A true JPS6414916A (en) | 1989-01-19 |
Family
ID=15930533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62171830A Pending JPS6414916A (en) | 1987-07-09 | 1987-07-09 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6414916A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003090314A (en) * | 2001-09-19 | 2003-03-28 | Aisin Seiki Co Ltd | Clip |
| JP2005172238A (en) * | 2003-12-11 | 2005-06-30 | Newfrey Llc | Fastener |
| US8371960B2 (en) | 2007-10-29 | 2013-02-12 | Bridgestone Sports Co., Ltd. | Multi-piece solid golf ball |
| US8827838B2 (en) | 2007-10-29 | 2014-09-09 | Bridgestone Sports Co., Ltd. | Multi-piece solid golf ball |
-
1987
- 1987-07-09 JP JP62171830A patent/JPS6414916A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003090314A (en) * | 2001-09-19 | 2003-03-28 | Aisin Seiki Co Ltd | Clip |
| JP2005172238A (en) * | 2003-12-11 | 2005-06-30 | Newfrey Llc | Fastener |
| US8371960B2 (en) | 2007-10-29 | 2013-02-12 | Bridgestone Sports Co., Ltd. | Multi-piece solid golf ball |
| US8827838B2 (en) | 2007-10-29 | 2014-09-09 | Bridgestone Sports Co., Ltd. | Multi-piece solid golf ball |
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