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JPS6412428A - Manufacture of superconducting film - Google Patents

Manufacture of superconducting film

Info

Publication number
JPS6412428A
JPS6412428A JP62168994A JP16899487A JPS6412428A JP S6412428 A JPS6412428 A JP S6412428A JP 62168994 A JP62168994 A JP 62168994A JP 16899487 A JP16899487 A JP 16899487A JP S6412428 A JPS6412428 A JP S6412428A
Authority
JP
Japan
Prior art keywords
film
oxygen
manufacture
heat
material film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62168994A
Other languages
Japanese (ja)
Inventor
Hideki Yakida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62168994A priority Critical patent/JPS6412428A/en
Publication of JPS6412428A publication Critical patent/JPS6412428A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To improve the controllability and reproductivity of manufacture as well as uniformity of superconductivity by performing the introduction of oxygen into a superconductor raw material film only with the ion implantation and by heat-treating in a non-oxidizing gas atmosphere. CONSTITUTION:A mixture of yttrium, barium and copper is formed into a material film 102 on a silicon substrate 101 with a sputtering process in which oxygen is shut off. Oxygen ion 103 is then implanted while keeping the temperature of the substrate constant. Further depositing a silicon nitride film 104 on the film 102, heat-treatment is performed in a mixed gas atmosphere of nitrogen and hydrogen. This causes the oxygen implanted to combine with the film 102. The film 102 further crystallizes through the heat treatment temperature and forms a superconductive film 105 of a uniform composition. The controllability and reproductivity in the manufacture can be improved in this way by performing the introduction of oxygen into the material film only with the ion implantation process, thereby controlling the amount of the oxygen.
JP62168994A 1987-07-07 1987-07-07 Manufacture of superconducting film Pending JPS6412428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62168994A JPS6412428A (en) 1987-07-07 1987-07-07 Manufacture of superconducting film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62168994A JPS6412428A (en) 1987-07-07 1987-07-07 Manufacture of superconducting film

Publications (1)

Publication Number Publication Date
JPS6412428A true JPS6412428A (en) 1989-01-17

Family

ID=15878380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62168994A Pending JPS6412428A (en) 1987-07-07 1987-07-07 Manufacture of superconducting film

Country Status (1)

Country Link
JP (1) JPS6412428A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01126205A (en) * 1987-07-06 1989-05-18 Sumitomo Electric Ind Ltd Superconducting thin film and its formation
JPH02248301A (en) * 1989-03-20 1990-10-04 Teijin Ltd Production of oxide superconductor
JPH06212422A (en) * 1991-03-07 1994-08-02 Natl Res Inst For Metals Method for reforming high temperature superconducting oxide thin film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01126205A (en) * 1987-07-06 1989-05-18 Sumitomo Electric Ind Ltd Superconducting thin film and its formation
JPH02248301A (en) * 1989-03-20 1990-10-04 Teijin Ltd Production of oxide superconductor
JPH06212422A (en) * 1991-03-07 1994-08-02 Natl Res Inst For Metals Method for reforming high temperature superconducting oxide thin film

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