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JPS6394658U - - Google Patents

Info

Publication number
JPS6394658U
JPS6394658U JP1986189644U JP18964486U JPS6394658U JP S6394658 U JPS6394658 U JP S6394658U JP 1986189644 U JP1986189644 U JP 1986189644U JP 18964486 U JP18964486 U JP 18964486U JP S6394658 U JPS6394658 U JP S6394658U
Authority
JP
Japan
Prior art keywords
grinding
polishing
workpiece
rotated
holding member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986189644U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986189644U priority Critical patent/JPS6394658U/ja
Publication of JPS6394658U publication Critical patent/JPS6394658U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の実施例の研磨装置の斜視図、
第2図は装置の断面図、第3図は加工物の保持部
の断面図。 1は装置のベース本体、2は研磨プレート、9
,14は回転駆動モータ、10は加工物、12は
保持部材、26は研磨液タンク、28は研磨液、
30は制御装置。
FIG. 1 is a perspective view of a polishing device according to an embodiment of the present invention;
FIG. 2 is a sectional view of the device, and FIG. 3 is a sectional view of the workpiece holding section. 1 is the base body of the device, 2 is the polishing plate, 9
, 14 is a rotary drive motor, 10 is a workpiece, 12 is a holding member, 26 is a polishing liquid tank, 28 is a polishing liquid,
30 is a control device.

Claims (1)

【実用新案登録請求の範囲】 (1) 研削・研磨部材を加工液を満たした液槽中
に回転し、前記研削・研磨部材上に保持部材によ
つて加工物を保持させ、前記加工物を回転手段に
よつて回転するとともにバランス手段によつて無
負荷又は軽負荷状態にバランスさせるようにした
ことを特徴とする研削・研磨装置。 (2) 前記保持部材の前記研削・研磨部材の回転
方向に向かう面は傾斜面を設けていることを特徴
とする実用新案登録請求の範囲第(1)項記載の研
削・研磨装置。
[Claims for Utility Model Registration] (1) A grinding/polishing member is rotated in a liquid tank filled with processing fluid, a workpiece is held on the grinding/polishing member by a holding member, and the workpiece is A grinding/polishing device characterized in that it is rotated by a rotation means and balanced to a no-load or light-load state by a balance means. (2) The grinding/polishing apparatus according to claim (1), wherein a surface of the holding member facing the rotational direction of the grinding/polishing member is provided with an inclined surface.
JP1986189644U 1986-12-09 1986-12-09 Pending JPS6394658U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986189644U JPS6394658U (en) 1986-12-09 1986-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986189644U JPS6394658U (en) 1986-12-09 1986-12-09

Publications (1)

Publication Number Publication Date
JPS6394658U true JPS6394658U (en) 1988-06-18

Family

ID=31142131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986189644U Pending JPS6394658U (en) 1986-12-09 1986-12-09

Country Status (1)

Country Link
JP (1) JPS6394658U (en)

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