JPS6394658U - - Google Patents
Info
- Publication number
- JPS6394658U JPS6394658U JP1986189644U JP18964486U JPS6394658U JP S6394658 U JPS6394658 U JP S6394658U JP 1986189644 U JP1986189644 U JP 1986189644U JP 18964486 U JP18964486 U JP 18964486U JP S6394658 U JPS6394658 U JP S6394658U
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- polishing
- workpiece
- rotated
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第1図は本考案の実施例の研磨装置の斜視図、
第2図は装置の断面図、第3図は加工物の保持部
の断面図。
1は装置のベース本体、2は研磨プレート、9
,14は回転駆動モータ、10は加工物、12は
保持部材、26は研磨液タンク、28は研磨液、
30は制御装置。
FIG. 1 is a perspective view of a polishing device according to an embodiment of the present invention;
FIG. 2 is a sectional view of the device, and FIG. 3 is a sectional view of the workpiece holding section. 1 is the base body of the device, 2 is the polishing plate, 9
, 14 is a rotary drive motor, 10 is a workpiece, 12 is a holding member, 26 is a polishing liquid tank, 28 is a polishing liquid,
30 is a control device.
Claims (1)
に回転し、前記研削・研磨部材上に保持部材によ
つて加工物を保持させ、前記加工物を回転手段に
よつて回転するとともにバランス手段によつて無
負荷又は軽負荷状態にバランスさせるようにした
ことを特徴とする研削・研磨装置。 (2) 前記保持部材の前記研削・研磨部材の回転
方向に向かう面は傾斜面を設けていることを特徴
とする実用新案登録請求の範囲第(1)項記載の研
削・研磨装置。[Claims for Utility Model Registration] (1) A grinding/polishing member is rotated in a liquid tank filled with processing fluid, a workpiece is held on the grinding/polishing member by a holding member, and the workpiece is A grinding/polishing device characterized in that it is rotated by a rotation means and balanced to a no-load or light-load state by a balance means. (2) The grinding/polishing apparatus according to claim (1), wherein a surface of the holding member facing the rotational direction of the grinding/polishing member is provided with an inclined surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986189644U JPS6394658U (en) | 1986-12-09 | 1986-12-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986189644U JPS6394658U (en) | 1986-12-09 | 1986-12-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6394658U true JPS6394658U (en) | 1988-06-18 |
Family
ID=31142131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986189644U Pending JPS6394658U (en) | 1986-12-09 | 1986-12-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6394658U (en) |
-
1986
- 1986-12-09 JP JP1986189644U patent/JPS6394658U/ja active Pending
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