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JPS6353510A - Optical system for focus detection - Google Patents

Optical system for focus detection

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Publication number
JPS6353510A
JPS6353510A JP19856886A JP19856886A JPS6353510A JP S6353510 A JPS6353510 A JP S6353510A JP 19856886 A JP19856886 A JP 19856886A JP 19856886 A JP19856886 A JP 19856886A JP S6353510 A JPS6353510 A JP S6353510A
Authority
JP
Japan
Prior art keywords
light
luminous flux
light beam
receiving element
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19856886A
Other languages
Japanese (ja)
Inventor
Hiroaki Nakauchi
中内 宏彰
Shinichi Mori
森 真一
Keijirou Sakamoto
坂本 圭治朗
Akiyoshi Hamada
濱田 明佳
Kazuyuki Yoshida
和行 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Minolta Co Ltd
Original Assignee
Minolta Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minolta Co Ltd filed Critical Minolta Co Ltd
Priority to JP19856886A priority Critical patent/JPS6353510A/en
Publication of JPS6353510A publication Critical patent/JPS6353510A/en
Pending legal-status Critical Current

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  • Focusing (AREA)
  • Variable Magnification In Projection-Type Copying Machines (AREA)
  • Automatic Focus Adjustment (AREA)

Abstract

PURPOSE:To detect the focal point of an image forming lens through simple comparison and operation, by providing a beam splitter and band-pass filter and obtaining divided luminous fluxes as a visible light detecting luminous flux and near infrared or near ultraviolet ray detecting luminous flux. CONSTITUTION:The luminous flux 32e transmitted through the splitting plane 34a of a beam splitter 34 is a near infrared flux having a wavelength range of 700-800mm and the other luminous fluxes reflected by the plane 34a have wavelength ranges of <=700mm which are lower than visible light. Therefore, the luminous flux 32e is condensed to a light receiving element 36 as a detecting luminous flux and the luminous flux 32b of the luminous flux 32c which is passed through a band-pass filter 38 and has a peak wavelength band of 550mm is condensed to another light receiving element 35 as a detecting luminous flux. Therefore, the output of the element 35 shows a peak value at the focusing time and the output of the element 36 shows a peak value at the time of front focus. Both contrasts becomes lower at the time of rear focus. When the output relation between each light receiving element 35 and 36 is compared and operated with a microcomputer, focusing states can be judged whether a focused state is proper, front focus, or rear focus.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は結像レンズによる結像状態を結像光束から得た
異なった波長帯域の2つの検出光束の結像状態の違いと
して受光素子上で観察し、焦点を検出するのに用いる光
学系に関するもので、マイクロリーグやマイクロリーダ
プリンタ等の投影機器や、通常のカメラあるいはビデオ
カメラと云った撮影機器に利用される。
Detailed Description of the Invention (Industrial Field of Application) The present invention detects the image formation state by an imaging lens on a light receiving element as a difference in the image formation state of two detection light beams of different wavelength bands obtained from an imaging light beam. It relates to an optical system used for observation and detecting focus, and is used in projection equipment such as micro leagues and micro reader printers, and photographic equipment such as ordinary cameras and video cameras.

(従来の技術) 従来この種型式の焦点検出装置としては、結像面との等
価面に結像した像をセパレートレンズにより受光素子上
2箇所に結像させて、結像状態の違いをコントラスト波
形の位相差として得るようにしたもの(従来例1)、ま
たセパレートレンズの代りに振動格子とリレーレンズと
の組合せを用いてティキングレンズを経た両側光束を受
光素子上に結像させて、結像状態の違いを結像位置の違
いとして得るもの(従来例2)、また別のものとして生
物顕微鏡で見られるような写真接眼レンズからの光束を
光軸を境にしてチョッパにより交互に遮ぎることで受光
素子上の結像状態を変化させ結像状態の違いを位相差と
して得るもの(従来例3)、さらにティキングレンズか
らの光束をハーフミラ−を用いながらフィルム等価面と
その前後に設けた受光素子にそれぞれ分光結像させ、結
像状態の違いを各受光素子への結像コントラストの違い
として得るもの(従来例4)等が光束分割方式のものと
して知られている。他の方法としてビデオカメラ用とし
て知られているものに撮像素子から得られる画像情報を
フィルタにより特定周波数を抽出して合焦時にピークを
なす波形を得、そのピークを走査検出するもの〈従来例
5)、また撮影レンズの最後の1枚を圧電素子に挟み、
電圧を変化させ素子の振動を起し、それに伴うレンズの
往復微動によって合焦状態によるコントラストの違いを
振動波形の大小の違いとして得、コントラスト波形のピ
ークに対応する最小振動波形を走査によって得るもの(
従来例6)もある。
(Prior art) Conventionally, this type of focus detection device uses a separate lens to form an image on a plane equivalent to the image plane at two locations on the light receiving element, and then uses contrast to detect differences in the image formation state. This is obtained as a waveform phase difference (Conventional Example 1), and a combination of a vibrating grating and a relay lens is used instead of a separate lens to image the beams from both sides that have passed through a ticking lens on a light receiving element. The difference in the formation status is obtained as the difference in the imaging position (Example 2), and the light bundle from the photographic eyepiece lens, which can be seen with a biological microscope as another one, is alternately blocked by a chopper. By changing the image formation state on the light receiving element and obtaining the difference in the image formation state as a phase difference (conventional example 3), the light beam from the ticking lens is transferred to the film equivalent surface and before and after it using a half mirror. A light beam splitting method is known in which spectral images are formed on each of the provided light receiving elements, and the difference in the imaging state is obtained as a difference in the contrast of the image formed on each light receiving element (Conventional Example 4). Another method known for use in video cameras is to use a filter to extract a specific frequency from the image information obtained from the image sensor to obtain a waveform that has a peak at the time of focusing, and then scan and detect the peak (conventional example) 5) Also, sandwich the last piece of the photographic lens between piezoelectric elements,
A method in which the voltage is changed to cause the element to vibrate, and the accompanying slight reciprocating movement of the lens is used to obtain the difference in contrast depending on the focusing state as a difference in the size of the vibration waveform, and the minimum vibration waveform corresponding to the peak of the contrast waveform is obtained by scanning. (
There is also a conventional example 6).

従来例1から4のように、結像レンズによる合焦状態の
違いをその結像光束からコントラストの違いや位相差の
違いを持った複数の光束を得るのに、結像光束を同一の
光学的条件で取扱う上で結像距離や位置に光学的手法に
よって差を持たせるもので、光学系が複雑になり勝ちで
あるし、位相差検出のための演算は複雑である。また従
来例5.6のものは光学系は複雑化しないが、コントラ
スト波形の合焦に対応するピークを結像レンズをフォー
カス操作しての走査によって検出しなければならないの
で、合焦状態を得るのに時間が掛かる。
As in Conventional Examples 1 to 4, in order to obtain a plurality of light beams with different contrasts and phase differences from the image-forming light beam, the focusing state of the image-forming lens is different. When dealing with optical conditions, the imaging distance and position are made to differ depending on the optical method, which tends to complicate the optical system and complicate calculations for phase difference detection. In addition, although the optical system of conventional examples 5 and 6 is not complicated, the peak corresponding to the focus of the contrast waveform must be detected by scanning by focusing the imaging lens, so that the in-focus state can be obtained. It takes time.

そこで結像レンズを経た結像光束から、異なった波長帯
域の検出光束を取出し、各検出光束の縦色収差による結
像状態の違いを受光素子によりコントラストの違いとし
て観察し、焦点を検出することが考えられる。
Therefore, detection light beams in different wavelength bands are extracted from the imaging light beam that has passed through the imaging lens, and the difference in the imaging state due to longitudinal chromatic aberration of each detection light beam is observed as a difference in contrast using a light receiving element to detect the focus. Conceivable.

これによって、焦点検出のだめの2光束の取出しと、比
較、演算とが一応簡単な手段で迅速に行えることとなる
As a result, extraction of the two light beams for focus detection, comparison, and calculation can be quickly performed using simple means.

〈発明が解決しようとする問題点) ところが、充分な焦点検出のために結像状態の差つまり
縦色収差の大きい2つの検出光束を異なった光路で得る
には難があり、装置が?!雑化し易く小さな機器には採
用し難い。
(Problems to be Solved by the Invention) However, it is difficult to obtain two detection beams with different imaging states, that is, large longitudinal chromatic aberrations, using different optical paths for sufficient focus detection. ! This method tends to become complicated and is difficult to apply to small devices.

(問題点を解決するための手段) 本発明は前記のような問題点を解決するために、結像光
束を透過光束と反射光束とに分割する光束分割面を有す
るビームスプリッタと、所定光束中所定波長帯域を透過
させるバンドパスフィルタとを備え、それらの協働で前
記分割光束を可視光検出光束と近赤外ないし近紫外光検
出光束として得るようにしたことを特徴とするものであ
る。
(Means for Solving the Problems) In order to solve the above-mentioned problems, the present invention provides a beam splitter having a beam splitting surface that splits an imaging light beam into a transmitted light beam and a reflected light beam, and The present invention is characterized in that it includes a bandpass filter that transmits a predetermined wavelength band, and by their cooperation, the divided light flux is obtained as a visible light detection light flux and a near-infrared or near-ultraviolet light detection light flux.

く作 用) 結像光束がビームスプリッタの光束分割面に達すると、
光束分割面の分割特性によって反射光束と分割光束とに
分割してそれぞれに異なった光路をとらせることができ
る。
When the imaging beam reaches the beam splitting surface of the beam splitter,
Depending on the splitting characteristics of the beam splitting surface, it is possible to divide the reflected beam into a reflected beam and a split beam, allowing each beam to take a different optical path.

この異なった光路をとる各波長帯域の透過光束および反
射光束は、結像光束ないしは分割後の光束に対し働かせ
るバンドパスフィルタによって、所定の可視光および近
赤外ないし近紫外光とされ、互いに大きな縦色収差を示
すとともに、可視光は結像光束と同じ結像特性を示し、
近赤外ないし近紫外光の結像状態との違いから、それぞ
れの受光素子上でのコントラストの簡単な比較、演算で
結像レンズの焦点を検出させることができる。
The transmitted and reflected light beams of each wavelength band that take these different optical paths are converted into visible light and near-infrared to near-ultraviolet light by a bandpass filter that works on the imaging light beam or the divided light beam, and are In addition to exhibiting longitudinal chromatic aberration, visible light exhibits the same imaging characteristics as the imaging light flux,
Due to the difference between the imaging state of near-infrared or near-ultraviolet light, the focus of the imaging lens can be detected by simple comparison and calculation of the contrast on each light-receiving element.

(実施例) 第1図に示す本発明の実施例について説明する。(Example) An embodiment of the present invention shown in FIG. 1 will be described.

本実施例はマイクロリーグやマイクロリーグプリンタ等
(以下マイクロリーグ等と云う)に適用する場合を示し
ている。投影レンズ31を経た結像光束32をハーフミ
ラ−33によってオートフォーカス用の結像光束32a
と実用光束32bとに分けている。実用光束32bはス
クリーン等への投影光路等とされる。
This embodiment shows a case where it is applied to a micro league, a micro league printer, etc. (hereinafter referred to as a micro league, etc.). The imaging light beam 32 that has passed through the projection lens 31 is transformed into an imaging light beam 32a for autofocus by a half mirror 33.
and a practical luminous flux 32b. The practical light beam 32b is used as a projection light path onto a screen or the like.

結像光束32aはビームスプリッタ34を通し互いに9
0度異なった光路に向く光束32c 、32eに分割さ
せる。各光束32c 、32eの光路上には、結像光束
32の結像レンズ31による結像面との等傷位置に受光
素子35.36を設けである。
The imaging light beams 32a pass through the beam splitter 34 and are separated from each other by 9
The light beams are split into light beams 32c and 32e directed to optical paths that differ by 0 degrees. On the optical path of each of the light beams 32c and 32e, light receiving elements 35 and 36 are provided at positions where the imaging light beam 32 and the imaging surface formed by the imaging lens 31 are equally damaged.

なお、光源はハロゲンランプを使用しているため、熱影
響防止の必要から投影レンズ31の前にコールドフィル
タ37を置き、800 mm以下の波長は透過させ、そ
れ以上つまり赤外の波長は反射させている。このコール
ドフィルタ37の波長透過特性を第2図に示している。
Since a halogen lamp is used as the light source, a cold filter 37 is placed in front of the projection lens 31 to prevent heat effects, so that wavelengths of 800 mm or less are transmitted, and wavelengths longer than that, that is, infrared wavelengths, are reflected. ing. The wavelength transmission characteristics of this cold filter 37 are shown in FIG.

次に結像光束32aを光束32c 、32eに分割する
ビームスプリンタ340分割面34aには700 重s
以下の波長域は反射させ、以上の波長域は透過させるコ
ーティングを施してあり、第3図に示す分光、反射率特
性を持つようにしである。これによって分割面34aを
透過する光束32eは波長域が700〜800 m劇の
近赤外域、他の反射する光束32cは700 +n以下
の可視光以下の波長域となる。
Next, a beam splinter 340 splits the imaging light beam 32a into light beams 32c and 32e, and the dividing surface 34a has a beam of 700
It is coated to reflect the following wavelength ranges and to transmit the above wavelength ranges, so that it has the spectral and reflectance characteristics shown in Fig. 3. As a result, the light beam 32e that passes through the dividing surface 34a has a wavelength range of near infrared light ranging from 700 to 800 m, and the other reflected light flux 32c has a wavelength range below visible light of 700 +n.

さらに反射光束32cの光路途中には可視光のピーク波
長帯域である550 龍前後の波長帯域を透過させるバ
ンドパスフィルタ38を設けである以上の結果、受光素
子36には第4図に斜線部Aで示す70ON〜8001
111の波長帯域の光束32eが検出光束として集光さ
れ、受光素子35には光束32cのうちバンドパスフィ
ルタ38を経た第4図に斜線部Bで示す550鶴ピーク
波長域の光束32dが検出光束として集光される。
Furthermore, a bandpass filter 38 is provided in the optical path of the reflected light beam 32c to transmit a wavelength band around 550 nm, which is the peak wavelength band of visible light. 70ON~8001 indicated by
A light beam 32e in the 111 wavelength band is collected as a detection light beam, and a light beam 32d in the 550 Tsuru peak wavelength range, which is shown by the shaded area B in FIG. The light is focused as

ここで検出光束32dは、結像光束32のうちの可視光
のピーク波長をなし結像光束32と同じ合焦特性を示す
もので、結像光束32の合焦時、光束32dも受光素子
35上に第5図での光束32dlとして合焦状態で集光
される。また前ビン状態では光束32d2、後ビン状態
では光束32d3となる。
Here, the detection light beam 32d has the peak wavelength of visible light in the imaging light beam 32 and exhibits the same focusing characteristics as the imaging light beam 32. When the imaging light beam 32 is focused, the light beam 32d also passes through the light receiving element 35. The light is condensed upward in a focused state as a luminous flux 32dl in FIG. Further, in the front bin state, the luminous flux is 32d2, and in the rear bin state, the luminous flux is 32d3.

それらに対応した受光素子35の出力は第6図の通りで
、合焦時コントラスト波形32dll 、前ビン時コン
トラスト波形32d1□、後ビン時コントラスト波形3
2d + sとなる。
The corresponding outputs of the light-receiving element 35 are as shown in FIG.
2d + s.

これに対し検出光束32eは、光束32dの合焦の程度
を判定するための参照光束として利用するもので、光束
32dよりも波長が長い関係上、結像光束32の合焦時
第7図の光束32e、としてやや後ビン状態で受光素子
36上に集光される。また前ビン状態に対応して光束3
2e2として受光素子36に対し合焦状態となる。後ビ
ン状態に対応して光束32e、として受光素子36に対
し強後ビン状態となる。それらに対応した受光素子36
の出力は第8図に示す通りで、合焦時コントラスト波形
32ell s前ビン時コントラスト波形32e1□、
後ビン時コントラスト波形32e I 3となる。
On the other hand, the detection light beam 32e is used as a reference light beam to judge the degree of focus of the light beam 32d, and because it has a longer wavelength than the light beam 32d, when the imaging light beam 32 is focused, The light beam 32e is focused on the light receiving element 36 in a slightly backward bin state. In addition, luminous flux 3 corresponds to the front bin state.
2e2, the light receiving element 36 is brought into focus. Corresponding to the rear bin state, the light beam 32e enters a strong rear bin state with respect to the light receiving element 36. Light receiving element 36 corresponding to them
The outputs are as shown in FIG.
The contrast waveform at the rear bin becomes 32e I 3.

したがって、合焦時は受光素子35の出力がピーク値を
示し、前ビン時は受光素子36の出力がピーク値を示す
。又後ビンの場合はどちらのコントラストも低くなる。
Therefore, the output of the light receiving element 35 shows a peak value when in focus, and the output of the light receiving element 36 shows a peak value during the front bin. Also, in the case of the rear bin, both contrasts are low.

このような各受光素子35.36の出力関係をマイコン
によって比較演算することで、合焦か、前ピンか、後ビ
ンかを判断することができる。
By comparing and calculating the output relationship of each of the light receiving elements 35 and 36 using a microcomputer, it is possible to determine whether the object is in focus, front focus, or rear focus.

なお、第1図に示すビームスプリッタ34から各受光素
子35.36までをユニット39として扱えば、マイク
ロリーグ等以外の小型光学機器用焦点検出装置として使
いやすいものとなる。
Note that if the beam splitter 34 to each light receiving element 35 and 36 shown in FIG. 1 are treated as a unit 39, it will be easy to use as a focus detection device for small optical equipment other than Microleague or the like.

また、前記本発明の実施例では、近赤外と可視との各光
束の結像状態を比較することにより焦点検出を行ってい
るが、近紫外と可視との各光束の結像状態を比較するこ
とにより焦点検出してもよく、第9図、第10図にその
一例を示しである。これを説明するとビームスプリッタ
34の分割面34aは整色コートしない単なるハーフミ
ラ−とされて結像光学32aを反射光束32cと透過光
束32fとに分割し、透過光束32fを第10図に示す
ような透過率特性を持ったバンドパスフィルター40に
通すことで近紫外検出光束32gを得て受光素子36に
結像させるようにしであるこれにより可視光束検出光束
32dと近紫外検出光束32gとの波長の違いによる結
像状態の違いを受光素子35.36上に得、それらの比
較によって焦点検出を行えるようにしである。近紫外検
出光束はビームスブリフタ34の分割面34aの整色コ
ートあるいはそれとバンドパスフィルタとの組合せでも
得られる。
In addition, in the embodiment of the present invention, focus detection is performed by comparing the imaging states of each of the near-infrared and visible light fluxes, but the imaging states of the near-ultraviolet and visible light fluxes are compared. The focus may be detected by doing this, an example of which is shown in FIGS. 9 and 10. To explain this, the dividing surface 34a of the beam splitter 34 is a simple half mirror without color coating, and it divides the imaging optical system 32a into a reflected light beam 32c and a transmitted light beam 32f, and the transmitted light beam 32f is divided into a reflected light beam 32c and a transmitted light beam 32f, as shown in FIG. The near-ultraviolet detection light beam 32g is obtained by passing it through a band-pass filter 40 having transmittance characteristics, and is imaged on the light-receiving element 36. As a result, the wavelengths of the visible light detection light beam 32d and the near-ultraviolet detection light beam 32g are changed. The difference in image formation state due to the difference is obtained on the light receiving elements 35 and 36, and focus detection can be performed by comparing them. The near-ultraviolet detection light flux can also be obtained by a color-coating coating on the splitting surface 34a of the beam subrifter 34 or a combination thereof with a band-pass filter.

(発明の効果) 本発明によれば、合焦の程度を検出するための異なった
波長帯域の2つの検出光束を、分割面による透過光束と
反射光束とに光分離れた光路で、しかも所定光束中の所
定波長帯域を透過させるバンドパスフィルタとの協働に
より波長が光分離れた可視光と近赤外ないし近紫外光と
して得るものであるから、構造が簡単なうえ精度よい焦
点検出を行わせることができる。また、可視光は結像レ
ンズによる結像光束と同じ結像特性を示し、近赤外ない
し近紫外光との結像状態のより一層単純な比較、演算で
焦点を検出させることができ、焦点検出処理速度も向上
させ得る。
(Effects of the Invention) According to the present invention, two detection light beams of different wavelength bands for detecting the degree of focus are separated into a transmitted light beam and a reflected light beam by a splitting surface, and in a predetermined optical path. By collaborating with a bandpass filter that transmits a predetermined wavelength band in the light beam, visible light and near-infrared or near-ultraviolet light are separated in wavelength, so the structure is simple and accurate focus detection is possible. You can make it happen. In addition, visible light exhibits the same imaging characteristics as the imaging light flux from an imaging lens, and the focus can be detected by simpler comparison and calculation of the imaging state with near-infrared or near-ultraviolet light. Detection processing speed may also be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の側面図、第2図はコールド
フィルタの反射率特性を示すグラフ、第3図はビームス
プリッタ分割面での反射率を示すグラフ、第4図は第1
図の各受光素子に集光される波長帯域を示すグラフ、第
5図は短波長側光束の受光素子上結像状態を示す側面図
、第6図は第5図の各結像状態に対応した受光素子のコ
ントラスト出力波形を示すグラフ、第7図は長波長側光
束の受光素子上結像状態を示す側面図、第8図は第7図
の各結像状態に対応した受光素子のコントラスト出力波
形を示すグラフ、第9図は別の実施例を示す側面図、第
10図は第9図のバンドパスフィルタの反射率特性を示
すグラフである。
Fig. 1 is a side view of one embodiment of the present invention, Fig. 2 is a graph showing the reflectance characteristics of the cold filter, Fig. 3 is a graph showing the reflectance at the beam splitter splitting plane, and Fig. 4 is the graph showing the reflectance characteristics of the cold filter.
A graph showing the wavelength band focused on each light receiving element in the figure, Figure 5 is a side view showing the imaging state of the short wavelength side light beam on the light receiving element, and Figure 6 corresponds to each imaging state in Figure 5. Figure 7 is a side view showing the imaging state of the long wavelength side light beam on the light receiving element, and Figure 8 is the contrast of the light receiving element corresponding to each imaging state in Figure 7. FIG. 9 is a graph showing the output waveform, FIG. 9 is a side view showing another embodiment, and FIG. 10 is a graph showing the reflectance characteristics of the bandpass filter shown in FIG.

Claims (1)

【特許請求の範囲】[Claims] (1)結像光束を透過光束と反射光束とに分割する光束
分割面を有するビームスプリッタと、所定光束中所定波
長帯域を透過させるバンドパスフィルタとを備え、それ
らの協働で前記分割光束を可視光検出光束と近赤外ない
し近紫外光検出光束として得るようにしたことを特徴と
する焦点検出用光学系。
(1) A beam splitter having a beam splitting surface that divides the imaging light beam into a transmitted light beam and a reflected light beam, and a bandpass filter that transmits a predetermined wavelength band in a predetermined light beam, and by their cooperation, the divided light beam is 1. An optical system for focus detection, characterized in that a visible light detection light flux and a near-infrared or near-ultraviolet light detection light flux are obtained.
JP19856886A 1986-08-25 1986-08-25 Optical system for focus detection Pending JPS6353510A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19856886A JPS6353510A (en) 1986-08-25 1986-08-25 Optical system for focus detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19856886A JPS6353510A (en) 1986-08-25 1986-08-25 Optical system for focus detection

Publications (1)

Publication Number Publication Date
JPS6353510A true JPS6353510A (en) 1988-03-07

Family

ID=16393343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19856886A Pending JPS6353510A (en) 1986-08-25 1986-08-25 Optical system for focus detection

Country Status (1)

Country Link
JP (1) JPS6353510A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010230776A (en) * 2009-03-26 2010-10-14 Olympus Corp Focus position control apparatus and camera
JP2023072077A (en) * 2018-03-14 2023-05-23 ナノトロニクス イメージング インコーポレイテッド Microscope Autofocus System, Apparatus, and Method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010230776A (en) * 2009-03-26 2010-10-14 Olympus Corp Focus position control apparatus and camera
US8427570B2 (en) 2009-03-26 2013-04-23 Olympus Corporation Focus position control apparatus and camera
JP2023072077A (en) * 2018-03-14 2023-05-23 ナノトロニクス イメージング インコーポレイテッド Microscope Autofocus System, Apparatus, and Method

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