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JPS6348606A - magnetic head - Google Patents

magnetic head

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Publication number
JPS6348606A
JPS6348606A JP19172486A JP19172486A JPS6348606A JP S6348606 A JPS6348606 A JP S6348606A JP 19172486 A JP19172486 A JP 19172486A JP 19172486 A JP19172486 A JP 19172486A JP S6348606 A JPS6348606 A JP S6348606A
Authority
JP
Japan
Prior art keywords
ferromagnetic alloy
thin film
substrate
head
multilayer thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19172486A
Other languages
Japanese (ja)
Other versions
JPH065568B2 (en
Inventor
Hikoyata Abe
阿部 彦彌太
Kazutoshi Muto
一利 武藤
Naoto Hayashi
直人 林
Tameoki Shirai
白井 爲興
Hiromichi Shibatani
柴谷 弘道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Broadcasting Corp
Original Assignee
Nippon Hoso Kyokai NHK
Japan Broadcasting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Hoso Kyokai NHK, Japan Broadcasting Corp filed Critical Nippon Hoso Kyokai NHK
Priority to JP19172486A priority Critical patent/JPH065568B2/en
Publication of JPS6348606A publication Critical patent/JPS6348606A/en
Publication of JPH065568B2 publication Critical patent/JPH065568B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野) 本発明は、磁気記録再生の電磁変換器すなわち磁気ヘッ
ドに係わり、特に、広帯域記録再生を行うVTR用の薄
膜形ビデオヘッドに関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electromagnetic transducer, that is, a magnetic head, for magnetic recording and reproduction, and particularly to a thin film video head for a VTR that performs broadband recording and reproduction.

C従来の技術) 従来、強磁性合金多層14.膜形ヘットは、熱膨張係数
が強1iFl性合金とは;よ一致する非磁性の金属ある
いはセラミックの基板に、強磁[生金金薄膜と電気的絶
縁膜とを交互にスパックリングあるいは蒸着等の手段に
より付着させて多層膜を構成し、これをコア材料として
使用していた。また、同種の基板を当て仮として用いサ
ントウィッチ構造としていた。これらの強6n性合金多
層薄膜形ヘッドは例えば以下の文献に記載されている。
C) Prior art) Conventionally, ferromagnetic alloy multilayer 14. Film type heads are made by depositing ferromagnetic [raw gold thin films and electrically insulating films alternately by sputtering or vapor deposition, etc. A multilayer film was formed by depositing the multilayer film, which was used as the core material. In addition, the same type of substrate was used as a temporary structure to create a sandwich structure. These strong 6n alloy multilayer thin film heads are described, for example, in the following documents.

柴谷ほか「スパッタリングによる磁性合金膜の製作とそ
の狭トラツクビデオヘッドへの応用」電子通信学会論文
誌57C−9(p3”5〕(昭49)、用野はか「メタ
ルテープ用センダストビデオヘント」テレビジョン学会
全国大会予稿8−3 (p197)  (昭56)、照
性ほか「スパッタアモルファスビデオヘッド」電子通信
学会総合全国大会予稿239 (Ill−241)  
(昭59)、斉藤はかr Fe−Al−5i合金スパッ
タ膜ビデオヘッド」日本応用磁気学会学術講演会概要集
29P八−2(p288)   (昭60) 。
Shibatani et al. “Manufacturing of magnetic alloy film by sputtering and its application to narrow track video head” Journal of the Institute of Electronics and Communication Engineers 57C-9 (p3”5) (1972), Haka Yono “Sendust video head for metal tape” Proceedings of the National Conference of the Society of Television Engineers 8-3 (p197) (1982), Illustrated et al. "Sputter Amorphous Video Head" Proceedings of the National Conference of the Institute of Electronics and Communication Engineers 239 (Ill-241)
(1982), H. Saito, "Fe-Al-5i alloy sputtered film video head," Japan Society of Applied Magnetics, Academic Conference Abstracts, 29P8-2 (p288) (1980).

このような磁気ヘッドの構成では、 ■ コア主磁路は強磁性合金多層薄膜のみで構成され、
その断面幅は膜厚と同じとなり極めて狭い。また、生産
技術上、後ギャップ部の突き合わせ工程でずれを生じる
と、さらに狭く断続的となって磁束伝達効率が低下する
。第4図はその様子を示したもので、図において、lは
基板、 1′は当て基板、 2は強磁性合金多層膜部、
3は後ギャップである。基板l、当て基板ビは非磁性材
料なので、後ギャップ部で膜のずれを生ずると、その分
だけ磁束伝達効率が低下する。
In the configuration of such a magnetic head, ■ The core main magnetic path is composed only of a multilayer thin film of ferromagnetic alloy,
Its cross-sectional width is the same as the film thickness and is extremely narrow. Furthermore, in terms of production technology, if a misalignment occurs in the butting process of the rear gap, the gap becomes even narrower and intermittent, reducing the magnetic flux transmission efficiency. Figure 4 shows the situation. In the figure, l is the substrate, 1' is the backing substrate, 2 is the ferromagnetic alloy multilayer film part,
3 is the rear gap. Since the substrate 1 and the backing substrate BI are made of non-magnetic materials, if the films are misaligned at the rear gap portion, the magnetic flux transmission efficiency will be reduced by that amount.

■ 強磁性合金多層@膜と両基板は、異種材料であるた
め、磁気テープと摺動した時、摩耗特性の違いから偏摩
耗(摩耗差による段差)を生じる。
■ Since the ferromagnetic alloy multilayer film and both substrates are different materials, when they slide against the magnetic tape, uneven wear occurs due to differences in wear characteristics (steps due to differences in wear).

一般に基板1.1′には高硬度耐摩耗材料が使用される
ため、第5図に示すように主6n路を構成する強磁性合
金多層簿膜2には凹み2Aを生じ、磁気テープ4との間
隔が大きくなってスペース損失を増大せしめると同時に
、接触が不安定となる。
Generally, since a high hardness and wear-resistant material is used for the substrate 1.1', a depression 2A is formed in the ferromagnetic alloy multilayer film 2 constituting the main 6n path as shown in FIG. The distance between them increases, increasing space loss and at the same time making the contact unstable.

■ また、この強磁性合金多層薄膜と薄膜付着用基板と
は異種材料であるため、厳密には熱膨張係数などの物理
特性は一致せず、スパッタリングや蒸着等の工程中での
付着強度が弱い。さらに機械加工、ギャップ成形溶着、
熱処理あるいはヘッド製造工程中でのハンドリングによ
り、薄膜にクラックや欠は等の損傷を与える場合が多く
、はなはだしくは薄膜の欠損、脱落を生じる。
■ Also, since this ferromagnetic alloy multilayer thin film and the substrate for thin film attachment are different materials, strictly speaking, their physical properties such as coefficient of thermal expansion do not match, and the adhesion strength during processes such as sputtering and vapor deposition is weak. . Furthermore, machining, gap forming welding,
Heat treatment or handling during the head manufacturing process often causes damage such as cracks and chips to the thin film, and even causes the thin film to break or fall off.

という性能上と生産技術上の問題があった。There were problems in terms of performance and production technology.

(発明が解決しようとする問題点) 本発明は上述した従来の欠点、すなわち後ギャップ部の
ずれによる磁束伝達効率の低下、ヘッドの偏摩耗による
スペース損失の増大と接触の不安定および強磁性合金多
層膜の基板への付着強度の弱さなどを解決し、記録再生
特性、特に感度が向上しかつ生産性にすぐれた磁気ヘッ
ドを提供することを目的とする。
(Problems to be Solved by the Invention) The present invention solves the above-mentioned conventional drawbacks, namely, a decrease in magnetic flux transmission efficiency due to misalignment of the rear gap, an increase in space loss due to uneven wear of the head, unstable contact, and ferromagnetic alloys. The object of the present invention is to provide a magnetic head that solves problems such as the weak adhesion strength of a multilayer film to a substrate, improves recording and reproducing characteristics, especially sensitivity, and has excellent productivity.

〔問題点を解決するための手段〕[Means for solving problems]

このような目的を達成するために、本発明の磁気ヘッド
は強磁性合金多層薄膜をコア材料とする磁気ヘットにお
いて、基板を強磁性合金多層薄膜作成用強磁性合金母材
、もしくは強磁性合金母材と同一もしくはほぼ同じ摩耗
特性および熱膨張係数を有する強磁性合金により形成し
たことを特徴とする。
In order to achieve such an object, the magnetic head of the present invention uses a ferromagnetic alloy multilayer thin film as a core material, in which the substrate is a ferromagnetic alloy base material for forming a ferromagnetic alloy multilayer thin film, or a ferromagnetic alloy base material. It is characterized by being made of a ferromagnetic alloy that has the same or almost the same wear characteristics and coefficient of thermal expansion as the material.

(作 用) 本発明によればコア主磁路は、強bTi性合金多層薄膜
とその基板として用いる強磁性合金からなっているので
、その断面幅を大きくすることができる。また後ギャッ
プ部の突き合わせ工程でのずれがあっても、主磁路幅が
広いので断続にならず、磁束伝達能率は低下しない。ま
た強磁性合金多層薄膜と両基板は、同一あるいは類似の
材料であるため、磁気テープと摺動した時、摩耗特性は
同じとなり偏摩耗を生じない。したがって、強磁性合金
多層薄膜には凹みを発生することはなく、スペース損失
のないすなわちヘッドとテープの接触の良い状態で動作
する。さらに熱膨張係数などの物理特性はほぼ一致し、
スパッタリングや蒸着等の工程中での付着強度が強い。
(Function) According to the present invention, since the core main magnetic path is made of a strong bTi alloy multilayer thin film and a ferromagnetic alloy used as its substrate, its cross-sectional width can be increased. Furthermore, even if there is a misalignment in the butting process of the rear gap portion, since the width of the main magnetic path is wide, there will be no discontinuity, and the magnetic flux transmission efficiency will not deteriorate. Furthermore, since the ferromagnetic alloy multilayer thin film and both substrates are made of the same or similar materials, when they slide against the magnetic tape, their abrasion characteristics are the same and uneven wear does not occur. Therefore, no dents occur in the ferromagnetic alloy multilayer thin film, and the head and tape operate with no space loss, ie, with good contact between the head and the tape. Furthermore, the physical properties such as the coefficient of thermal expansion are almost the same,
Strong adhesion strength during processes such as sputtering and vapor deposition.

したがって、ヘット製造工程中で損傷を受けることが少
ない。
Therefore, it is less likely to be damaged during the head manufacturing process.

(実施例) 以下に、本発明の実施例を図面により説明する。(Example) Embodiments of the present invention will be described below with reference to the drawings.

第1の実施例の斜視図を第1図に示す。強磁性合金多層
薄膜付着用基板11およびサンドウィッチ構造とするた
めの当て基板11′は、基板11にスパッタリングある
いは蒸着等により付着さnてコア主磁路を構成する強磁
性合金多層薄膜12の母材(同一材料)、またはこれと
組成が近く熱膨張係数および摩耗特性がほぼ一致する類
似の強磁性合金、からなり、通常の磁気ヘットと同様に
、ギャップ13、巻線窓14をもち、コア15の両側部
に巻線16を施した構造である。この場合、トラック幅
しは強磁性合金多層薄膜X2の膜厚と両基板11、11
′の厚さを加えた寸法である。このような磁気へラドコ
アは、例えば厚さ50μmに切断研摩したセンダスト板
あるいはセンダスト急冷薄帯を基(反11とし、その上
に厚さ工ないし5μmのセンダストと厚さ0.2μm程
度の5i02を交互に繰返してスパッタリングまたは蒸
着し、基板11と同じ当て基板11’によりサンドウィ
ッチ構造にすることに、よって得゛られる。センダスト
多層膜の層数はトラック幅に合わせて定める。基板と多
層膜における合金組成は同一であることが望ましいが、
多少ずれても差支えない。基板および多層膜l1fi性
合金として、例えは非晶質Co−4r−Nb合金を使用
することもできる。
A perspective view of the first embodiment is shown in FIG. The substrate 11 for attaching a ferromagnetic alloy multilayer thin film and the backing substrate 11' for forming a sandwich structure are the base materials of the ferromagnetic alloy multilayer thin film 12 that is attached to the substrate 11 by sputtering, vapor deposition, etc. and forms the core main magnetic path. (same material), or a similar ferromagnetic alloy with a similar composition and nearly identical thermal expansion coefficient and wear characteristics, and has a gap 13, a winding window 14, and a core 15 like a normal magnetic head. It has a structure in which windings 16 are provided on both sides. In this case, the track width is determined by the thickness of the ferromagnetic alloy multilayer thin film X2 and both substrates 11, 11.
′ thickness is added to the dimension. Such a magnetic helad core is based on, for example, a Sendust plate cut and polished to a thickness of 50 μm or a Sendust quenched ribbon (reverse 11, and on top of that, Sendust with a thickness of 5 μm or 5 μm and 5i02 with a thickness of about 0.2 μm). It is obtained by repeating sputtering or vapor deposition alternately and forming a sandwich structure using the same backing substrate 11' as the substrate 11.The number of layers of the Sendust multilayer film is determined according to the track width.The alloy of the substrate and the multilayer film It is desirable that the composition be the same, but
It doesn't matter if it's a little off. For example, an amorphous Co-4r-Nb alloy can be used as the substrate and the multilayer I1fi alloy.

第2図に本発明の第2の実施例の斜視図を、第3図にそ
の上面図を示す。木実施例は高密度記録用ヘットの場合
で、第1の実施例の両基板11.11’のギャップ近傍
のみを両側から削り込んで凹部17を設け、トラック幅
tを狭くしたものである。この凹部にはガラス等を充填
してもよい。凹部17における基板11、lX′の厚さ
は薄い程よい。
FIG. 2 shows a perspective view of a second embodiment of the invention, and FIG. 3 shows a top view thereof. The wooden embodiment is a case of a high-density recording head, in which only the vicinity of the gap between the substrates 11 and 11' of the first embodiment is cut from both sides to provide a recess 17, thereby narrowing the track width t. This recess may be filled with glass or the like. The thinner the substrate 11, lX' is in the recess 17, the better.

次にこのヘッドの動作を説明する。巻線16に電流を流
すと、コア15に6n東が発生し、ギヤ・ンブ13まで
伝達され、この先端部で洩れ磁界を生じて媒体を磁化(
記録)する。また逆に媒体からの洩れ磁束をギャップ1
3で収集し、コア15て伝達されて、巻線16が感応し
て(再生)電圧か生じる。
Next, the operation of this head will be explained. When a current is passed through the winding 16, a 6n east is generated in the core 15 and is transmitted to the gear ring 13, which generates a leakage magnetic field at the tip and magnetizes the medium (
Record. Conversely, the leakage magnetic flux from the medium is calculated by the gap 1
3, is transmitted to the core 15, and the winding 16 senses it, producing a (regenerative) voltage.

(発明の効果〕 以上説明したように本発明のヘッド構成とすることによ
り、■ コア主6n路は、強磁性合金多層薄膜とその基
板として用いる強I+u性合金、からなり、その断面幅
を大きくすることができる。また後ギャップ部の突き合
わせ工程でのずれがあっても、主電路幅が広いので断続
にならず、磁束伝達能率は低下しない。
(Effects of the Invention) As explained above, by adopting the head configuration of the present invention, (1) the core main 6n path is made of a ferromagnetic alloy multilayer thin film and a ferro-I+U alloy used as its substrate, and its cross-sectional width can be increased; Furthermore, even if there is a misalignment in the butting process of the rear gap portion, since the width of the main circuit is wide, there will be no interruption, and the magnetic flux transmission efficiency will not decrease.

■ 強磁性合金多層薄膜と両基板iよ、同一あるいは類
似の材料であるため、磁気テープと慴動した時、摩耗特
性は同じとなり1遍摩耗を生じない。したがって、強磁
性合金多層薄膜には凹みを発生することはなく、スペー
ス損失のないすなわちへ・ントとテープの接触の良い状
態で動作する。
■ Since the ferromagnetic alloy multilayer thin film and both substrates are made of the same or similar materials, when they move with the magnetic tape, their abrasion characteristics are the same and no wear occurs even once. Therefore, no dents occur in the ferromagnetic alloy multilayer thin film, and the device operates with no space loss, that is, with good contact between the head and the tape.

■ また、この強磁性合金多層薄膜と強磁性合金多層薄
膜付着用基板とは、同一あるいは類似の材料であるため
、熱膨張係数などの物理特性はほぼ一致し、スパッタリ
ングや蒸着等の工程中での付着強度が強い。したがって
、ヘット製造工程中で損傷を受けることが少ない。
■ Also, since this ferromagnetic alloy multilayer thin film and the substrate for ferromagnetic alloy multilayer thin film deposition are made of the same or similar materials, their physical properties such as thermal expansion coefficients are almost the same, and during processes such as sputtering and vapor deposition, Strong adhesion strength. Therefore, it is less likely to be damaged during the head manufacturing process.

以上のような性能上および生産技術上における従来の薄
膜形ヘッドでの欠点を排除して、記録再生特性とくに感
度の向上と生産性の向上とを実現することかできる。
By eliminating the above-mentioned drawbacks of conventional thin-film heads in terms of performance and production technology, it is possible to improve recording and reproducing characteristics, particularly sensitivity, and productivity.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の積層形ヘットの一実施例を示す斜視図
、 第2図および第3図はそれぞれ第2の実施例(高密度記
録用)を示す斜視図および上面図、第4図は従来の積層
形ヘッドにおける後ギャップ部のずれによる断続6B路
の説明図。 第5図は従来の積層形l\ラッドおける(扁摩耗による
スペース損失増大を説明する断面図である。 1.11・・・基板、 1’、11′・・・当て基板、 2.12・・・強磁性合金多層薄膜、 3.13・・・ギャップ、 14・・・巻線窓、 15・・・コア、 16・・・巻線。
FIG. 1 is a perspective view showing one embodiment of the laminated head of the present invention, FIGS. 2 and 3 are a perspective view and a top view showing the second embodiment (for high-density recording), and FIG. 4 FIG. 2 is an explanatory diagram of an interrupted 6B path due to displacement of the rear gap portion in a conventional laminated head. Fig. 5 is a sectional view illustrating the increase in space loss due to flattening wear in a conventional laminated type l\rad. ...Ferromagnetic alloy multilayer thin film, 3.13...gap, 14...winding window, 15...core, 16...winding.

Claims (1)

【特許請求の範囲】[Claims] 強磁性合金多層薄膜をコア材料とする磁気ヘッドにおい
て、基板を前記強磁性合金多層薄膜作成用強磁性合金母
材、もしくは前記強磁性合金母材と同一もしくはほぼ同
じ摩耗特性および熱膨張係数を有する強磁性合金により
形成したことを特徴とする磁気ヘッド。
In a magnetic head having a ferromagnetic alloy multilayer thin film as a core material, the substrate is a ferromagnetic alloy base material for forming the ferromagnetic alloy multilayer thin film, or has the same or almost the same wear characteristics and thermal expansion coefficient as the ferromagnetic alloy base material. A magnetic head characterized by being formed from a ferromagnetic alloy.
JP19172486A 1986-08-18 1986-08-18 Magnetic head Expired - Lifetime JPH065568B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19172486A JPH065568B2 (en) 1986-08-18 1986-08-18 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19172486A JPH065568B2 (en) 1986-08-18 1986-08-18 Magnetic head

Publications (2)

Publication Number Publication Date
JPS6348606A true JPS6348606A (en) 1988-03-01
JPH065568B2 JPH065568B2 (en) 1994-01-19

Family

ID=16279431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19172486A Expired - Lifetime JPH065568B2 (en) 1986-08-18 1986-08-18 Magnetic head

Country Status (1)

Country Link
JP (1) JPH065568B2 (en)

Also Published As

Publication number Publication date
JPH065568B2 (en) 1994-01-19

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