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JPS6347333B2 - - Google Patents

Info

Publication number
JPS6347333B2
JPS6347333B2 JP57201209A JP20120982A JPS6347333B2 JP S6347333 B2 JPS6347333 B2 JP S6347333B2 JP 57201209 A JP57201209 A JP 57201209A JP 20120982 A JP20120982 A JP 20120982A JP S6347333 B2 JPS6347333 B2 JP S6347333B2
Authority
JP
Japan
Prior art keywords
thin film
polyimide resin
integrated circuit
resin film
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57201209A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5992584A (ja
Inventor
Mikio Hirano
Junji Shigeta
Ushio Kawabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57201209A priority Critical patent/JPS5992584A/ja
Publication of JPS5992584A publication Critical patent/JPS5992584A/ja
Publication of JPS6347333B2 publication Critical patent/JPS6347333B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP57201209A 1982-11-18 1982-11-18 超電導薄膜機能集積回路素子の電気信号特性試験装置 Granted JPS5992584A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57201209A JPS5992584A (ja) 1982-11-18 1982-11-18 超電導薄膜機能集積回路素子の電気信号特性試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57201209A JPS5992584A (ja) 1982-11-18 1982-11-18 超電導薄膜機能集積回路素子の電気信号特性試験装置

Publications (2)

Publication Number Publication Date
JPS5992584A JPS5992584A (ja) 1984-05-28
JPS6347333B2 true JPS6347333B2 (fr) 1988-09-21

Family

ID=16437154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57201209A Granted JPS5992584A (ja) 1982-11-18 1982-11-18 超電導薄膜機能集積回路素子の電気信号特性試験装置

Country Status (1)

Country Link
JP (1) JPS5992584A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62190737A (ja) * 1986-02-17 1987-08-20 Fujitsu Ltd 低温用オ−トプロ−バ−
JPS63122233A (ja) * 1986-11-12 1988-05-26 Nec Corp 半導体集積回路の測定装置
JPH0810234B2 (ja) * 1987-02-24 1996-01-31 東京エレクトロン株式会社 検査装置
JP3147450B2 (ja) * 1991-12-26 2001-03-19 株式会社日立製作所 超電導磁石並びに磁気浮上輸送体
KR100461875B1 (ko) * 2002-06-17 2004-12-14 고려제강 주식회사 리노-핀을 이용한 고온초전도 코팅 선재의 특성 측정 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353266A (en) * 1976-10-26 1978-05-15 Seiko Epson Corp Probe card
GB2020827B (en) * 1978-05-15 1982-10-20 Gen Instrument Corp Measurement of electrical characteristics of in-process semiconductor devices
JPS5599734A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Pattern-sheet for characteristic test of semiconductor element

Also Published As

Publication number Publication date
JPS5992584A (ja) 1984-05-28

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