JPS6339942U - - Google Patents
Info
- Publication number
- JPS6339942U JPS6339942U JP13452586U JP13452586U JPS6339942U JP S6339942 U JPS6339942 U JP S6339942U JP 13452586 U JP13452586 U JP 13452586U JP 13452586 U JP13452586 U JP 13452586U JP S6339942 U JPS6339942 U JP S6339942U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mass sensor
- conveys
- absence
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Control Of Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
Description
図はこの考案の一実施例を示す概略図で、第１
図は平面図、第２図は第１図の側面図である。
１：搬送機構、２：搬送路（ベルト）、８：質
量センサー、Ｗ：基板。
The figure is a schematic diagram showing one embodiment of this invention.
The figure is a plan view, and FIG. 2 is a side view of FIG. 1. 1: Transport mechanism, 2: Transport path (belt), 8: Mass sensor, W: Substrate.
Claims (1)
を搭載する搬送路を、質量センサーにより支持し
、この質量センサーの出力をもつて前記基板の有
無を検出することを特徴とする基板検出装置。 A substrate detection device characterized in that at least a conveyance path on which the substrate is mounted in a conveyance mechanism that conveys the substrate is supported by a mass sensor, and the presence or absence of the substrate is detected using the output of the mass sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13452586U JPS6339942U (en) | 1986-09-01 | 1986-09-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13452586U JPS6339942U (en) | 1986-09-01 | 1986-09-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6339942U true JPS6339942U (en) | 1988-03-15 |
Family
ID=31035844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13452586U Pending JPS6339942U (en) | 1986-09-01 | 1986-09-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339942U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021504969A (en) * | 2017-11-30 | 2021-02-15 | チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッドＣｈｉｎａ Ｔｒｉｕｍｐｈ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｅｎｇｉｎｅｅｒｉｎｇ Ｃｏ．，Ｌｔｄ． | A method for determining the position of a substrate in a closed chamber and a device for performing this method. |
-
1986
- 1986-09-01 JP JP13452586U patent/JPS6339942U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021504969A (en) * | 2017-11-30 | 2021-02-15 | チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッドＣｈｉｎａ Ｔｒｉｕｍｐｈ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｅｎｇｉｎｅｅｒｉｎｇ Ｃｏ．，Ｌｔｄ． | A method for determining the position of a substrate in a closed chamber and a device for performing this method. |