JPS6335343Y2 - - Google Patents

Description

[Detailed description of the invention] [Purpose of the invention] (Field of industrial application) The present invention relates to an organic solvent vapor precision drying device.

(Prior art) As shown in FIG. 2, a conventional device of this type has a heating coil 3 in an organic solvent solution 2 filled in a steam drying tank 1.
The heating coil 3 is connected to the circulation pipe 4, the heat medium oil is heated by the heater 5 installed in the middle of the circulation pipe 4, and the heated heat medium oil is circulated by the pump 6. Oil is supplied to evaporate the organic solvent 2. A heating coil 7 connected to the circulation pipe 4 is provided in the center of the steam drying tank 1 to raise the temperature of the organic solvent vapor above the boiling point, and a condensing coil 8 is provided above the heating coil 7 to increase the temperature of the organic solvent vapor above the boiling point. The organic solvent vapor is cooled and liquefied by flowing cooling water, and returned to the receiving tank through the receiving gutter 9 to prevent leakage of the solvent vapor to the outside.

Further, an inclined saucer 10 is provided below the heating coil 7.
is provided, the material to be dried 11 is placed on this tray 10, and the material to be dried 11 is dried with organic solvent vapor,
The solvent condensed by the material to be dried 11 and the liquid brought in from the previous process of the material to be dried are received in a saucer 10, and the drained liquid is sent to a drain tank (not shown).

(Problems to be solved by the invention) In the conventional apparatus, organic solvent vapor is applied to the material to be dried 11 from below, the material to be dried 11 is heated from below, and the top is heated slowly, and the organic solvent is heated by heat exchange. Solvent vapor condenses and liquefies, but if drying occurs from the bottom, drying sag occurs when the solvent condenses at the top and flows to the dry bottom.

[Structure of the idea]

(Means for Solving the Problems) The organic solvent vapor precision drying apparatus of the present invention is an inventive system in which a heating medium is flowed into the center of a vapor drying tank 1 filled with an organic solvent liquid 2 and heated to generate organic solvent vapor. A heating coil 7 is provided, a condensing coil 8 for flowing cooling water is provided above the heating coil 7, and a cover 12 which also serves as a saucer for storing the material to be dried 11 is provided inside the heating coil 7.

(Function) In the present invention, the organic solvent liquid 2 is heated to generate organic solvent vapor, the temperature of the organic solvent vapor is raised to above the boiling point by the heating coil 7, and the organic solvent vapor flows into the interior from above the saucer-cum-cover 12. The material to be dried 11 is sequentially dried from the top downward, and the vapor condenses and the liquefied solvent drips down, dirt from the top is sequentially flowed downward, and is discharged to the outside from the saucer-cum-cover 12.

(Example) An example of the present invention will be explained based on FIG.
A saucer-cum-cover 12 having a sufficient depth to store the material to be dried 11 is provided inside the heating coil 7, and a discharge pipe 13 is provided on the saucer-cum-cover 12 to discharge the liquid to the outside. There is.

Since the other parts are the same as those of the conventional example, the same reference numerals are given and the explanation will be omitted.

The present embodiment is constructed as described above, and the organic solvent liquid 2 is heated by the heat medium oil heated to a high temperature by the heater 5 flowing into the heating coil 3 to generate organic solvent vapor. Then, the temperature of the rising organic solvent vapor is raised to a temperature higher than the boiling point by a heating coil 7 through which heat transfer oil flows. This high-temperature steam has a specific gravity heavier than air and has the property of flowing to a place with a lower temperature and condensing, so it flows into the tray-cum-cover 12 and sequentially dries the material to be dried 11 from the top downward. The steam condenses and flows down through heat exchange, the solvent drips downward, and the dirt from above is sequentially flowed downward and discharged to the outside through the discharge pipe 13.

Further, the rising steam is condensed and liquefied by a condensing coil 8 through which cooling water is flowing, received by a receiving gutter 9, and returned to the tank.

[Effect of idea]

In the present invention, the object to be dried 11 is dried sequentially from the top to the bottom, contrary to the conventional method, so that the condensed and liquefied solvent drips downward, and the dirt from the top gradually flows downward, so that dry stains are eliminated. Does not occur.

In addition, since the organic solvent that has become a vapor is heated and becomes a high-temperature vapor before it hits the object to be dried, it is effective for drying silicon wafers, thin glass, etc., which have a small heat capacity.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of an embodiment of an organic solvent vapor precision drying apparatus according to the present invention, and FIG. 2 is a sectional view of a conventional apparatus. In the figure, 1 is a steam drying tank, 2 is an organic solvent liquid, and 7 is a steam drying tank.
8 is a heating coil, 8 is a condensing coil, 11 is an object to be dried, and 12 is a cover that also serves as a saucer.

Claims (1)

[Scope of utility model registration request] A steam drying tank 1 filled with an organic solvent liquid 2 and heated to generate organic solvent vapor is provided with a heating coil 7 through which a heating medium flows in the center, and a condensing coil 8 through which cooling water flows in the upper part of the steam drying tank 1. An organic solvent vapor precision drying apparatus characterized in that a cover 12 which also serves as a saucer for storing an object to be dried 11 is provided inside a container 7.