JPS63318269A - Method for producing extremely thin blade grinding wheel with hub - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a method for manufacturing an ultra-thin hub-equipped grindstone used for cutting and dividing semiconductor elements, ultra-precision grooving of magnetic heads, etc.

"Prior Art" FIG. 5 is a sectional view showing an example of this type of ultra-thin hub-equipped grindstone.

This grinding wheel consists of a thin annular abrasive grain layer 1 made of superabrasive grains dispersed in a metal plating phase, and an annular aluminum plate having a smaller diameter than the abrasive grain layer 1 bonded to one surface of the abrasive grain layer I. made hub 2
It consists of

Such a grindstone with a hub was developed for the purpose of enabling automatic attachment to a grindstone drive device, and usually the fixed portion 2A on the other side of the hub 2 is automatically attached by a grindstone attachment mechanism. It is used by chucking it and inserting it into the spindle of the grindstone drive device.

When manufacturing the above-mentioned whetstones, the following method has conventionally been generally adopted.

First, as shown in FIG. 6, an aluminum hub 2 having a flange portion 2B of a constant thickness on the outer periphery of one end surface is prepared, and an abrasive layer is formed. Masking is applied to the other parts, leaving only the part where it should be formed. Next, this is set in a plating device, and while a metal plating phase such as Ni or Co is precipitated on the end face on the flange portion 2B side, superabrasive grains are dispersed therein to form an abrasive grain layer 1.

Next, the hub 2 is taken out, the abrasive grain layer 1 and the flange portion 2B are ground on the outer periphery, and then both end surfaces of the grindstone prototype are held between masking jigs.

In this state, the entire hub 2 is immersed in an alkaline etching solution that does not act on the abrasive grain layer 1, and the entire outer periphery of the hub 2 is dissolved as shown by the two-dot chain line in FIG. 7, and the flange portion 2B is removed. The cutting edge portion IA of the grain layer 1 is exposed. Then, perform the final finishing process to obtain an ultra-thin whetstone with a hub.

"Problem to be solved by the invention" By the way, in the above-mentioned grindstone manufacturing method, the cutting edge part IA
When exposing the hub fixed part 2A, the hub fixed part 2A is also melted at the same time, so it is inevitable that slight variations in the melting IT in the fixed part 2A will occur due to subtle changes in the etching conditions.

For this reason, a dimensional error occurs in the diameter of the fixed part 2A,
There has been a problem in that chucking by the grindstone mounting mechanism tends to be incomplete, and that the rotational balance deteriorates due to a decrease in mounting accuracy, which greatly affects grinding accuracy and sometimes causes automatic mounting to fail.

"Means for Solving the Problems" The present invention has been made to solve the above problems, in which one end has a larger diameter than the other end, and the end on the other end is the fixed part. An abrasive grain layer made of superabrasive grains dispersed in a metal plating phase is electrodeposited on the one end of the annular hub, and then only the outer peripheral portion of the hub on the abrasive grain layer side is melted. The cutting edge portion of the abrasive grain layer is exposed, thereby preventing dimensional errors caused by melting from occurring in the fixed portion of the hub.

"Example" Hereinafter, an example of a method for manufacturing an ultra-thin blade grindstone with a hub according to the present invention will be explained in order of steps with reference to the drawings.

FIG. 1 is a sectional view of a plating apparatus used when electrodepositing the abrasive grain layer 11 on the hub 10, in which reference numeral 20 is a plating tank, 21 is a mask jig for masking the hub 10,
22 is an anode. Note that the hub lO used in this example is made of amphoteric metal such as aluminum, similar to conventional products.
The shape is slightly different, the width of the flange part 10A formed on the outer periphery of the - side is wider than that of the conventional product, and the fixed part l
The OB has already been molded to final product dimensions.

The mask jig 21 has a resin mask upper plate 2 in the middle part.
3 is fixed to a metal shaft 24, a resin bottomed cylindrical lower mask body 25 that is slidably passed through the lower end of this shaft 24, and this mask lower body 25 is locked to the shaft 24. The portion of the shaft body 24 exposed outside the jig is insulated with paint or the like. Then, after inserting the hub lO into the shaft body 24 with the flange portion +OA facing upward, the mask lower body 25 is further inserted and tightened with the screw 26, thereby attaching the O ring attached to the lower surface of the mask upper plate 23. 27 and the O-ring 28 fixed to the upper end surface of the mask lower body 25 are pressed against the hub IO, and the abrasive grain layer of the hub IO is removed. By exposing only the part that should be formed,
All others are liquid-tightly shielded.

Now, in order to perform plating with the above equipment, plating costs $1!2.
Add superabrasive grains to the plating solution M in the plating solution M and stir it with a stirring device, connect the shaft body 24 of the jig 21 equipped with the hub IO to the cathode of the power supply, and create a gap between the hub IO and the anode plate 22. energize. Then, the superabrasive grains are dispersed while precipitating the metal plating phase at the end of the hub 10 to form an abrasive grain layer 11 with a predetermined thickness (about several tens to 100 microns).

Next, the hub 10 is taken out, and after the abrasive layer 11 and the flange portion 10A are ground on the outer periphery, the hub 10 is mounted on an etching jig 30 shown in FIG. Like the jig described above, this jig 30 includes a shaft body 32 to which a mask upper plate 31 is fixed, a mask lower body 33 that is slidably attached to the lower end of the shaft body 32.
The shaft body 32 is provided with an abrasive grain layer 1.
1 formed thereon and the mask lower body 33 and tighten the screw 34, the mask lower body 33 is urged upward by the elastic packing 35 attached to the screw 34, and the O-ring 36 on the lower surface of the mask upper plate 31 is inserted. and the O-ring 37 on the upper end surface of the mask lower body 33 sandwich the same part of the flange part 10A from above and below, and the cutting edge part (
Only the outer periphery where llA) is to be formed is exposed, and the other parts of the grindstone prototype are liquid-tightly shielded.

Next, in this state, jig 3 is placed in alkaline etching liquid E.
0 and dissolve only the outer periphery of the flange portion 10A. Once the thickness of the flange portion 10A has been etched, the grindstone is removed from the etching solution E, and the cutting edge portion IIA of the thus obtained grindstone is lightly etched and dressed. get.

In the above grindstone manufacturing method, the flange part + O
When melting A, the fixed part 10B of the hub lO is shielded by the mask jig 30 and is not melted, so that the dimensional accuracy of the fixed part 10B is maintained at the same high accuracy during machining. Therefore, in the grindstone manufactured by this method, chucking will not be incomplete when installed by the automatic installation mechanism, preventing deterioration of rotational balance due to eccentricity, etc., and improving grinding accuracy. can.

In addition, according to this method, during manufacturing, the thin flange part + O
Since it is only necessary to dissolve the outer periphery of the hub, less etching solution is required compared to the conventional method (see Figure 7), which requires etching the entire outer periphery of the hub, which increases manufacturing efficiency. can.

Furthermore, in the grindstone manufactured by this method, the cutting edge part 11A of the abrasive grain layer 11 is reinforced by the remaining flange part 10A as shown in FIG. , for example, as shown in Fig. 4, the work material W
Hub 1 is also used when cutting into deep recesses.
0 has the advantage that it is difficult to interfere with the workpiece W.

In addition, in the above example, a hub IO with a constant thickness and a wide flange part + OA was used, but the shape of the hub is not limited to this. It may have a shape such as

"Effects of the Invention" As explained above, in the method of manufacturing an ultra-thin blade grindstone with a hub of the present invention, the fixed part of the hub is not melted during the etching work of the flange part, so the dimensional accuracy of this fixed part is The high precision during machining is maintained. Therefore, according to this method, it is possible to manufacture a grindstone that can prevent incomplete chucking during installation by the automatic installation mechanism, prevent deterioration of rotational balance due to eccentricity, etc., and improve grinding accuracy. It is possible.

[Brief explanation of the drawing]

Fig. 1 is a sectional view of a plating device used in an embodiment of the method for producing an ultra-thin blade grindstone with a hub according to the present invention, Fig. 2 is a sectional view of an etching device used in the same method, and Fig. 3 is the same. A cross-sectional view showing an ultra-thin blade grindstone with a hub manufactured by the method,
FIG. 4 is a sectional view showing the effect of the same grindstone during grinding. Further, FIG. 5 is a cross-sectional view of a conventional ultra-thin blade grindstone with a hub, and FIGS. 6 and 7 are cross-sectional views for explaining the manufacturing process of the conventional product. IO... hub, 10A... flange part, 10B... fixed part, II... abrasive layer, 20... plating bath, 21... mask jig (during plating), 22...・Anode plate, 30...mask jig (for etching).

Claims (1)

[Claims] Abrasive grains formed by dispersing superabrasive grains in a metal plating phase on the one end surface of an annular hub whose one end surface has a larger diameter than the other end surface and whose end on the other end surface side is a fixed part. A method for producing an ultra-thin blade grindstone with a hub, which comprises electrodepositing a layer in a thin annular shape, and then melting only the outer peripheral portion of the hub on the abrasive layer side to expose the cutting edge of the abrasive layer.