JPS63298578A - Image display device for surface analysis - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a so-called mapping device that displays a component distribution in a minute area on the surface of a solid sample as a color image.

(Prior art) This type of mapping device is usually used in combination with an electron beam microanalyzer, and it generates X-ray signals emitted from the sample surface by two-dimensional scanning of the sample surface with an electron beam.
This system captures electronic signals and displays them in color according to component or concentration. Color coding divides the level of the output signal at each pixel on the CRT screen into multiple levels and assigns an appropriate color to each level.If color coding is done optimally, the composition distribution on the sample surface can be clearly displayed. be able to.

(The interlayer point that the invention seeks to solve) However, in the past, in order to find the optimal color scheme, the signal level of the sample image was first classified using a fixed color scheme, a color image was displayed, and the colors were separated by trial and error by visual inspection. Since the level value for the two types of elements was changed, it was not easy to set this level value to the best value for color-coding the component elements, and it took a lot of time to adjust. be displayed in the same color,
Or 1! There is a drawback that it is easy to mistakenly classify - class elements into two colors.

(Means for Solving the Problems) In order to achieve the above object, an image display device for surface analysis according to the present invention has a frame memory I that stores one screen worth of signal data collected by an electron beam microanalyzer.
a first arithmetic unit 2 that creates a histogram A of data level versus number of pixels using the signal data; a histogram memory 3 that stores the histogram data; and a smoothing process for the histogram data to remove the valleys. Part B,,B,
.

..., a level value storage section 5 that stores level values L+, Lt, ... corresponding to the valleys, and a plurality of level ranges divided by the level values. a color conversion circuit 6 for colorizing the signal read out from the frame memory I by associating different colors with each other; and a color CRT for displaying a surface image of the sample using the color conversion output.
7.

(Function) According to the above configuration, in the intensity histogram of the mapping data, one peak corresponds to one type of phase on the sample surface, and the valleys B1 . Bt
By automatically detecting ,..., it is possible to accurately match a single color to the area between the two valleys, so a different color can be matched to each phase on the sample surface. This not only prevents unnatural color separation such as dividing one phase into two colors or matching one color across two phases as described above, but also eliminates the need for visual adjustment. The time required for measurement can also be shortened.

(Embodiment) FIG. 1 shows an embodiment of the device of the present invention, in which one screen worth of signal data collected by an electron beam microanalyzer and A/D converted is temporarily stored in a frame memory l, and The arithmetic unit 2 of 1 reads out this signal data, creates a histogram A of data level versus number of pixels as shown in FIG. 2, and stores this histogram data in a histogram memory 3. The second arithmetic unit 4 is composed of a smoothing circuit 41 and a valley detection circuit 42, and the smoothing circuit 41 performs smoothing processing using a moving average method on the histogram data read out from the histogram memory 3. The histogram A is smoothed to limit the number of valleys B, , B, .
・ is detected, and the level values L+, Ly corresponding to the valleys BI, Bz, . . . are detected.

... is stored in the level value storage section 5. The color conversion circuit 6 includes a color information buffer section 61 that stores color information to be used for image display in advance as an RGB signal;
It is composed of a data set section 62 for setting data in a VLT (video lookup table) 63 by referring to level values and color information, and a VLT 63 for colorizing the signal read from the frame memory 1. A color image of the sample surface is displayed on the color CRT 7 by the output of the color conversion circuit 6.

By applying appropriate arithmetic processing to the histogram of mapping data obtained by scanning the sample surface in this way,
Since the valleys of the level distribution of the mapping data can be automatically detected, the optimal color distribution for displaying the surface image of the sample for each component can be instantly and reliably obtained.

(Effects of the Invention) As described above, the present invention creates a histogram of data level versus number of pixels using scanning data of a sample surface collected by an electron beam microanalyzer, and smooths the histogram data. By detecting the level values corresponding to the valleys and assigning different colors to multiple level ranges divided by these level values,
Since it is designed to allocate the colors of the image signal, it is possible to accurately match a single color to each peak corresponding to each phase of the sample, making it easy to obtain the optimum color scheme, and also to make visual inspection easier. This has the advantage that the time required for measurement can be significantly shortened since no adjustment is required.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing one embodiment of the device of the present invention, and FIG.
The figure is an explanatory diagram of the same operation as above. A...Histogram, B1-B4...Tanibe, L, ~L
4...Level value.

Claims (1)

[Claims] (1) A frame memory that stores one screen worth of signal data collected by the electron beam microanalyzer, a first calculation unit that uses the signal data to create a histogram of data level versus number of pixels, and the histogram data. a histogram memory that stores the histogram data; a second calculation unit that performs smoothing processing on the histogram data to detect valleys thereof;
a level value storage unit that stores a level value corresponding to the valley; and a color that colorizes the signal read from the frame memory by associating different colors with a plurality of level ranges divided by the level value. An image display device for surface analysis comprising a conversion circuit and a color CRT that displays a surface image of a sample using the color conversion output.