JPS63277983A - Wiegand effect element and magnetic sensor - Google Patents

Abstract

PURPOSE:To attain size reduction by laminating two magnetic layers which form a Wiegand effect element, a magnetic layer which has coercive force different from the coercive force of both magnetic layers, and an electric coil. CONSTITUTION:Plural 1st connectors parts 2 are formed on a substrate 1 and a 1st insulating layer 3 is formed thereupon. A 1st magnetic layer 4 is formed thereupon and then a 2nd magnetic layer 5 which has the coercive force different from that of the 1st magnetic layer 4 is formed. Further, a 3rd magnetic layer 6 which is the same as the 1st magnetic layer 4 is formed covering the 2nd magnetic layer 5 and an insulating layer 7 is formed thereupon covering those magnetic layers. Then a conductor part 8 is so formed as to connect end parts of mutually adjacent conductor parts 2 which are not close to each other electrically, thus forming the Wiegand effect element formed of the magnetic layers 4-6 and the electric coil 9.

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Field of Industrial Application) The present invention relates to a Wiegand effect element and a magnetic sensor using the Wiegand effect element.

(Prior Art) Conventionally, various magnetic sensors using Wiegand effect elements have been proposed for magnetic detection, such as those disclosed in Japanese Patent Application Laid-open No. 58-43502, Japanese Patent Application Laid-Open No. 58-148978R, and the like. In general, Wiegand wire, which is called Wiegand effect element, is made of a magnetic material such as Picaloy or Vernloy, which has small crystal anisotropy and a large magnetostriction constant, and after repeatedly applying tension and torsional stress to the wire to leave compressive stress, It is made by hardening the parts. A magnetic sensor is then created by winding an electric coil around this Wiegand wire.

(Problem to be solved by the invention) However, since a magnetic sensor using this type of Wiegand wire requires a large number of windings,
There was a problem that the winding wire was easily broken as well as becoming thicker and larger. Furthermore, as mentioned above, Wiegand wires are made by repeatedly applying tension and torsional stress to magnetic wires to harden the outer periphery, and not only is it extremely troublesome to manufacture, but the Wiegand wires themselves are large. .

A first object of the invention is to provide a compact and highly accurate Wiegand effect element using a simple method in order to solve the above-mentioned problems.

A second object of the invention is to provide a magnetic sensor that has fewer failures and can be made smaller.

Structure of the Invention (Means for Solving Problems) In order to achieve the above-mentioned object, the first invention provides two magnetic layers laminated on a substrate with a coercive force different from that of both magnetic layers. A magnetic layer with #? The gist of this is a Wiegand effect element coated with an i-layer.

The second invention comprises a substrate having a plurality of first conductor layers formed at intervals on the upper surface thereof, and two magnetic layers formed by 114 m crossing over each of the first conductor layers. A Wiegand effect element is formed between the two magnetic layers and a magnetic layer having a coercive force different from that of the two magnetic layers, and each first conductor layer formed on the upper surface of the substrate. Its gist is a magnetic sensor in which a plurality of second conductor layers are formed at intervals on a Wiegand effect element and constitute an electric coil that is electrically connected and winds the same Wiegand effect element f. It is something.

(Function) In the first invention, since the Wiegand effect element is formed in a layered structure, the element itself becomes thin.

In the second aspect of the invention, the magnetic sensor has a Wiegand effect element formed in a layered structure, and an electric coil that winds this Wiegand effect element is also formed in a layered structure, so that the magnetic sensor is thin as a whole.

(Example) An example embodying the present invention will be described below with reference to the drawings.

1(a)-(a) and FIG. 2(a)-(a) are diagrams showing the manufacturing process of a magnetic sensor, in which the entire upper surface of a substrate 1 made of glass or the like is coated by vapor deposition, sputtering, etc. After forming a conductor layer of several microns to 10 microns using a known thin film forming method, a plurality of first A conductor pattern is formed by arranging the conductor parts 2 in parallel to each other at equal intervals.

After forming the conductor pattern on the substrate 1, as shown in FIG. 1(b) and FIG. 113 is formed. This insulating layer 3 is made of electrically insulating material and has a thickness of several microns.
In this embodiment, polyamide is applied onto the conductor pattern and a polyimide insulating layer is formed using a method such as plasma polymerization.

Next, on the entire upper surface of the insulating layer 3,
) and as shown in FIGS. 2(C) and (d), the first magnetic! made of a magnetic material! 14, the first magnetic layer 4
A second magnetic layer 5 made of a magnetic material is formed in the longitudinal direction at the center of the upper surface. Subsequently, the second magnetic layer 5 is coated with the first magnetic layer 11.
4, a third magnetic layer 116 made of a magnetic material having the same component characteristics as the first magnetic layer 4 is coated with the third magnetic layer 116 shown in FIG.
As shown in e) and FIG. 2(e), the first and second magnetic layers are formed on the upper surfaces of the 4°5.

The first to third magnetic layers 4, 5.6 are formed with a thickness of several microns to 10 microns by a thin film forming method such as vapor deposition or sputtering, and are made of permalloy (an alloy of Ni and Fe). Alternatively, it is made of a magnetic material such as picalloy (an alloy of V, Go, and Fe). Further, the first and third magnetic layers 4.
6, the second magnetic layer 5 has different component characteristics, and the coercive force of the second magnetic FII 5 (in this example, 5 to 100
e) is the first. It is made of a magnetic material whose component characteristics are smaller than the coercive force of the third magnetic layer 4.6 (20 to 300 e in this embodiment).

Therefore, the magnetic layer consisting of the first to third magnetic layers 4 to 6 has a different coercive force between the center and the outer periphery, and has substantially the same structure as the conventional Wiegand wire and has the same effect. This means that a Wiegand effect element has been formed.

After the Wiegand effect element consisting of the first to third magnetic layers 4 to 6 is formed, as shown in FIG. 1(f) and FIG. A second insulator 117 having a thickness of several microns to 10 microns is formed using the same insulating material as the first insulating layer 3 and using the same method so as to cover the first insulating layer 3. Subsequently, as shown in FIG. 1(0), conductor parts adjacent to each other with respect to the plurality of first conductor parts 2 formed from the upper surface of the second insulating layer 7 to the lower surface of the first insulating wJ3. 2, a plurality of second conductor parts 8 having a thickness of several microns to 10 microns are made of the same conductive material as the first conductor part 2 and made using the same method so as to electrically connect the ends that are not adjacent to each other. form.

Therefore, the second conductor part 8 cooperates with the first conductor part 2 to cover the first to third magnetic layers 4 to 4 covered with the insulating WJ3.7.
An electric coil 9 is formed around which a Wiegand effect element consisting of 6 is wound.

As a result, the Wiegand effect element consisting of the first to third magnetic layers 4 to 6 has first and second conductor portions 2.8 on its outer periphery.
This means that a magnetic sensor is formed which has substantially the same configuration and the same effect as a conventional magnetic sensor in which an electric coil is wound around a Wiegand wire. Become. .

In this way, in this example, the Wiegand wire P, which is substantially the same as the conventional Wiegand wire, and the magnetic sensor using the Wiegand effect element are both formed of Fsm, so it is different from the conventional Wiegand wire and the Wiegand wire. It can be made much thinner and more compact than a magnetic sensor using magnetic sensors, and it can also be made flexible. Furthermore, since this magnetic sensor is manufactured by one molding process, it has high precision and reliability, and is easy to manufacture as there is no need to wind each coil as in conventional magnetic sensors.

Note that this invention is not limited to the above embodiments,
In the above embodiment, the substrate 1 was made of glass, but the point is that the substrate 1 may be made of a flexible material such as polyimide resin as long as a thin film Wiegand effect element and a magnetic sensor are formed thereon. It may also be implemented by using a more flexible Wiegand effect element and magnetic sensor.

Further, in the embodiment described above, the first to third magnetic layers 114 to 6 are made of magnetic materials such as permalloy or picalloy, but the point is that the coercive force of the second magnetic layer 115 is 1°, and the third magnetic layer 4.
The material of the magnetic body is not particularly limited as long as it has a component characteristic different from the coercive force of No. 6. In the above embodiment, since the first and third magnetic layers 4.6 were formed of a magnetic material such as permalloy or picalloy, the first and second insulating layers 3, 7 were formed, but the magnetic material itself The first and third oxides, such as ferrite, have insulating properties.
If used in the magnetic field 114.6 of the first and second insulation 13
．． 7 can be omitted, making manufacturing easier than in the previous embodiment.

Further, the materials of the first and second conductor portions 2.8 are not particularly limited, but may be any material that can form an electric coil, such as copper, silver, gold, or aluminum.

Effects of the Invention As detailed above, the present invention has the advantage that a Wiegand effect element and a magnetic sensor that are small, highly accurate, and have few failures can be manufactured by a simple method.

[Brief explanation of the drawing]

Figures 1 (a) to (9) are explanatory diagrams explaining the manufacturing process of a Wiegand effect element and a magnetic sensor embodying the present invention, and Figures 2 (a) to (9) similarly illustrate the lamination state in each process. FIG. In the figure, 1 is a substrate, 2 is a first conductor part, 3 is a first insulating layer, 4 is a first magnetic layer, 5 is a second magnetic layer, 6 is a third magnetic layer, and 7 is a first insulating layer. A second insulating layer, 8 a second conductor, and 9 an electric coil. Patent applicant Toyota Industries Corporation Shikiri
1) Hironobu Figure 1 (1m)) (f) (d) 11 No drawing Figure 2 (i)) (f) (C) (9) (d)

Claims (1)

[Claims] 1. A Wiegand effect element formed by laminating and covering two magnetic layers laminated on a substrate and having a coercive force different from that of both magnetic layers. 2. The Wiegand effect element according to claim 1, wherein the magnetic layer laminated and coated between two magnetic layers is a magnetic layer having component characteristics having a coercive force smaller than the coercive force of both magnetic layers. 3. On a substrate having a plurality of first conductor layers formed at intervals on its upper surface, two magnetic layers and their bimagnetic properties are laminated to cross over each of the first conductor layers. A Wiegand effect element is formed which is laminated and coated between the layers and has a coercive force different from that of the two magnetic layers, and is electrically connected to each of the first conductor layers formed on the upper surface of the substrate. A magnetic sensor comprising a Wiegand effect element and a plurality of second conductor layers formed at intervals on the Wiegand effect element and forming an electric coil connected to the Wiegand effect element. 4. The magnetic sensor according to claim 3, wherein the magnetic layer laminated and coated between two magnetic layers is a magnetic layer having component characteristics having a coercive force smaller than the coercive force of both magnetic layers.