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JPS63208262A - Semiconductor mounting body - Google Patents

Semiconductor mounting body

Info

Publication number
JPS63208262A
JPS63208262A JP4163687A JP4163687A JPS63208262A JP S63208262 A JPS63208262 A JP S63208262A JP 4163687 A JP4163687 A JP 4163687A JP 4163687 A JP4163687 A JP 4163687A JP S63208262 A JPS63208262 A JP S63208262A
Authority
JP
Japan
Prior art keywords
circuit board
semiconductor elements
semiconductor
wiring
series
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4163687A
Other languages
Japanese (ja)
Inventor
Nobuo Iwase
岩瀬 暢男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP4163687A priority Critical patent/JPS63208262A/en
Publication of JPS63208262A publication Critical patent/JPS63208262A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To mount switching semiconductor elements with good reliability under the state suitable for high frequency operation, large current operation and high breakdown strength, by electrically connecting the semiconductor elements, wiring parts on a base post and conductor parts on a circuit board one another, and making the interconnecting distances shortest when the semiconductor elements are connected in series and in parallel. CONSTITUTION:A polygonal base post 13 comprising a material characterized by electrical insulation and high thermal conductivity is fixed to a circuit board 11 having conductor paths 12. Semiconductor elements 16 are mounted on wiring parts 14, which are provided on the side surfaces of the base post 13. The semiconductor elements 16, the wiring parts 14 on the base post 13 and the conductor paths 12 on the circuit board 11 are electrically connected to one another. Therefore, the connecting length becomes short when the parts are connected in series and in parallel in the inside. A large current can be made to flow. Breakdown strength is high. The series and parallel circuits can be readily realized. A semiconductor module, which can perform high frequency operation and has excellent heat radiating property, can be obtained.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、半導体装体に関し、特に多角柱状の基柱を用
いて高速、高電力、高電圧スイッチング半導体素子を立
体的にマウントした構造の半導体モジュールに係わる。
[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a semiconductor package, and in particular, the present invention relates to a semiconductor package, and in particular, to three-dimensionally fabricate a high-speed, high-power, and high-voltage switching semiconductor element using a polygonal columnar base pillar. This relates to a semiconductor module with a structure mounted on a semiconductor module.

(従来の技術) 最近、ロボット、工作機械、インバータエアコン、各種
制御機械等の高速でのスイッチングが要求される機器の
増加に伴い、スイッチング半導体素子は高速化、複合化
が求められている。更に、機器の高性能化のために高出
力化、高電圧化が同様に求められている。
(Prior Art) Recently, with the increase in the number of devices that require high-speed switching, such as robots, machine tools, inverter air conditioners, and various control machines, switching semiconductor elements are required to be faster and more complex. Furthermore, in order to improve the performance of equipment, higher output and higher voltage are similarly required.

このような要望に対する従来の代表的な半導体モジュー
ルとしては、第2図に示す構造のものが知られている。
As a typical conventional semiconductor module that meets such demands, one having the structure shown in FIG. 2 is known.

即ち、図中の1はアルミニウム、銅等の熱伝導性の高い
金属板であり、この金属板lの上には電気絶縁性のセラ
ミック等からなる回路基板2が接合されている。この回
路基板2には、半導体素子のマウント部3a、3b、導
体路4a、 4b、4cが形成され、該マウント部3a
、 3bにはスイッチング半導体索子5as 5bがマ
ウントされている。これら素子5as 5bは、ボンデ
ィングワイヤ6を介して前記導体路4a〜4cに夫々接
続されている。また、前記マウント部3a、3bは夫々
独立に端子7a、 7bに接続され、半導体モジュール
の外部において前記半導体素子5as 5bが直列又は
並列に接続して使用されるようになっている。かかる構
成にするこによって、実質的に耐圧を高める、取扱い電
力を高める等の作用がなされる。また、スイッチング半
導体素子5a、5bで発生した熱は、回路基板2を通し
て金属板1に伝達され、外気に放熱される。
That is, numeral 1 in the figure is a highly thermally conductive metal plate such as aluminum or copper, and a circuit board 2 made of electrically insulating ceramic or the like is bonded onto this metal plate 1. On this circuit board 2, mounting parts 3a, 3b for semiconductor elements, conductor paths 4a, 4b, 4c are formed, and the mounting parts 3a, 3b, 4c are formed.
, 3b are mounted with switching semiconductor cables 5as 5b. These elements 5as and 5b are connected to the conductor paths 4a to 4c via bonding wires 6, respectively. Further, the mount portions 3a and 3b are independently connected to terminals 7a and 7b, respectively, so that the semiconductor elements 5as and 5b are connected in series or in parallel and used outside the semiconductor module. By adopting such a configuration, effects such as substantially increasing the withstand voltage and increasing the handling power can be achieved. Further, the heat generated by the switching semiconductor elements 5a and 5b is transmitted to the metal plate 1 through the circuit board 2, and is radiated to the outside air.

しかしながら、上述した第2図図示の平板構造の半導体
モジュールでは導体路4a〜4Cが長くなり、しかも端
子7a、 7bの長さだけでなく、更に端子7a。
However, in the above-described flat plate structure semiconductor module shown in FIG.

7hからの先で半導体素子5a、 5bの直列又は11
1列接続を行なうため、その・結線長も長くなる。その
結果、導体路や端子によるインダクタンスが大きくなり
、高速動作を阻害する問題があった。また、モジュール
自体で直列、並列接続を行なう場合においても平面的な
配置であるため、アノード、カソードの接続が立体的に
なり、その結果結線が複雑となって組立てが困難となる
。こうしたことは、一つのモジュールに実装される半導
体素子数が多くなればなるほど困難さが増加し、例えば
3相用等では実現だけでなく、高周波化にも限界をもた
らす。特に、前述した高電圧化、高速動作化の要求に応
えられないという問題があった。
After 7h, semiconductor elements 5a and 5b are connected in series or 11
Since a single row connection is performed, the connection length is also long. As a result, inductance due to conductor paths and terminals becomes large, which poses a problem of impeding high-speed operation. Furthermore, even when the modules themselves are connected in series or in parallel, the arrangement is planar, so the connections between the anode and cathode become three-dimensional, which results in complicated wiring connections and difficulty in assembly. This problem becomes more difficult as the number of semiconductor elements mounted on one module increases, and this poses a limit not only to implementation in three-phase applications, but also to higher frequencies. In particular, there was a problem that the above-mentioned demands for higher voltage and faster operation could not be met.

(発明が解決しようとする問題点) 本発明は、上記従来の問題点を解決するためになされた
もので、高速、高電力、高電圧に適したスイッチング半
導体装した半導体装体(半導体モジュール)を提供しよ
うとするものである。
(Problems to be Solved by the Invention) The present invention has been made to solve the above-mentioned conventional problems, and provides a semiconductor package (semiconductor module) equipped with a switching semiconductor suitable for high speed, high power, and high voltage. This is what we are trying to provide.

[発明の構成コ (問題点を解決するための手段) 本発明は、導体路を有する回路基板と、この回路基板に
固定された電気絶縁性、高熱伝導性の材料からなる多角
柱状の基柱と、この基柱の各側面に夫々1つ以上設けら
れた配線部と、この基柱の各配線部に夫々マウントされ
た半導体素子とを具備し、前記半導体素子、基柱の配線
部及び回路基板の導体路を相互に電気的に接続したこと
を特徴とする半導体装体である。
[Structure of the Invention (Means for Solving Problems)] The present invention provides a circuit board having conductor paths, and a polygonal column base made of an electrically insulating and highly thermally conductive material fixed to the circuit board. and at least one wiring section provided on each side of the base pillar, and a semiconductor element mounted on each wiring part of the base pillar, and the semiconductor element, the wiring part of the base pillar, and the circuit. This is a semiconductor device characterized in that conductor paths on a substrate are electrically connected to each other.

(作用) 本発明によれば、導体路を有する回路基板に電気絶縁性
、高熱伝導性の材料からなる多角柱状の基柱を固定し、
この基柱の側面に設けられた配線部に半導体素子をマウ
ントし、前記半導体素子、基柱の配線部及び回路基板の
導体路を相互に電気的に接続することによって、内部で
直並列する場合における接続長が短くなって大電流を流
すことができ、かつ耐圧も高(、しかも直並列回路の実
現が容易で、更に高周波動作が可能で良好な放熱性を有
する半導体モジュールを得ることができる。
(Function) According to the present invention, a polygonal columnar base made of an electrically insulating and highly thermally conductive material is fixed to a circuit board having conductor paths,
When a semiconductor element is mounted on a wiring part provided on the side surface of this base pillar, and the semiconductor element, the wiring part of the base pillar, and the conductor path of the circuit board are electrically connected to each other, they are connected in series and parallel internally. It is possible to obtain a semiconductor module that has a short connection length, allows a large current to flow, and has a high withstand voltage (and is also easy to implement in series-parallel circuits, is capable of high-frequency operation, and has good heat dissipation). .

(発明の実施例) 以下、本発明の実施例を第1図を参照して詳細に説明す
る。
(Embodiments of the Invention) Hereinafter, embodiments of the present invention will be described in detail with reference to FIG.

図中の11は、例えばアルミニウム板の両面にAノ20
3が被覆され、これらAノ203Ili上に例えば厚さ
50μmの導体路12を有する回路基板である。この回
路基板11には、電気絶縁性、高熱伝導性の材料、例え
ば窒化アルミニウム(A、i’N)からなる四角柱状の
基柱13が該基板11を貫通して固定されている。この
基柱13の基板11表面から突出した部分の4側面には
、夫々例えば厚さ200μmの無酸素銅からなる4個の
配線部14.〜141 B  (14[1〜1416は
図示せず)が合計16個設けられている。なお、回路基
板11裏面側に突出した基柱13部分の4側面にも同様
な配線部が設けられているが、図示していない。また、
前記基柱13の各側面に設けられた4個の配線部の中で
例えば右側の2個の配線部143 、144.147.
14.、(141□、14s 2.14t s 、14
1a )の右側辺には、隣の側面に伸びる導体帯15が
一体的に形成されている。前記各配線部14□〜141
6には半導体素子16がマウントされている。前記配線
部143.144.14y 、14a、(lb 1.1
412.14s s、141e )の導体帯15は隣の
配線部141.142.14s 、14s、(14g 
、14m 、 1413.141 m )にマウントさ
れた半導体素子18表面の電極にボンディングされてい
る。更に、前記配線部 141〜14、 、のうち例え
ば配線部144、(1412)上にマウントされた半導
体素子16表面の電極は導線17を介して前記回路基板
11の導体路12に接続されて、前記導体帯15との結
線と共に前記半導体素子16を直並列している。前記回
路基板11には、外部端子18が接続されている。そし
て、前記基柱13の下面には冷却用ヒートシンク19が
設けられている。
11 in the figure is, for example, A-20 on both sides of an aluminum plate.
This is a circuit board having conductor paths 12 having a thickness of, for example, 50 μm on these A-nos 203Ili. A rectangular columnar base 13 made of an electrically insulating and highly thermally conductive material such as aluminum nitride (A, i'N) is fixed to the circuit board 11 so as to penetrate through the circuit board 11 . On the four side surfaces of the portion of the base pillar 13 that protrudes from the surface of the substrate 11, four wiring portions 14. ~141B (14 [1 to 1416 are not shown) are provided in total, 16 pieces. Note that similar wiring portions are provided on the four side surfaces of the portion of the base pillar 13 that protrudes toward the back side of the circuit board 11, but these are not shown. Also,
Among the four wiring sections provided on each side of the base pillar 13, for example, the two wiring sections on the right side are 143, 144, 147.
14. , (141□, 14s 2.14t s , 14
1a), a conductor band 15 extending to the adjacent side is integrally formed. Each of the wiring sections 14□ to 141
6 has a semiconductor element 16 mounted thereon. The wiring portions 143.144.14y, 14a, (lb 1.1
412.14s, 141e) is connected to the adjacent wiring section 141.142.14s, 14s, (14g
, 14 m , 1413.141 m ). Further, among the wiring parts 141 to 14, for example, the electrodes on the surface of the semiconductor element 16 mounted on the wiring part 144 (1412) are connected to the conductor path 12 of the circuit board 11 via a conductive wire 17, The semiconductor elements 16 are connected in series and parallel with the conductor band 15. External terminals 18 are connected to the circuit board 11 . A cooling heat sink 19 is provided on the lower surface of the base column 13.

このような構成によれば、回路基板11の導体路12及
び基柱13の配線部141〜1416により半導体素子
16に対して三次元的な配線構造がとられ、かつそれら
半導体素子1B、導体路12及び配線部141〜141
6を所定の配線部に一体化された導体帯15と導線17
により相互に結線しているため、各半導体素子16はア
ノード、カソード、ゲート等の直並列結線距離を最短に
できる。その結果、高周波動作、大電流動作、高耐圧に
適した半導体モジュールを実現できる。また、基柱13
は電気絶縁性で高熱伝導性のA、ll’Nから形成され
ているため、この基柱13の各配線部14.〜1416
にマウントされた半導体素子16で発生した熱は基柱1
3に良好に伝達されて該基柱13の下面に設けたヒート
シンク19により外部に効果的に放熱できる。その結果
、基柱13への高密度実装による半導体素子1Bの熱破
壊を防止できる。
According to such a configuration, a three-dimensional wiring structure is provided for the semiconductor element 16 by the conductor path 12 of the circuit board 11 and the wiring parts 141 to 1416 of the base pillar 13, and the semiconductor element 1B and the conductor path 12 and wiring parts 141 to 141
A conductor band 15 and a conductor wire 17 are integrated into a predetermined wiring section.
Since the semiconductor elements 16 are interconnected by wires, the series-parallel connection distance of the anode, cathode, gate, etc. of each semiconductor element 16 can be minimized. As a result, a semiconductor module suitable for high frequency operation, large current operation, and high withstand voltage can be realized. In addition, base pillar 13
are made of electrically insulating and highly thermally conductive A, ll'N, each wiring portion 14. of this base pillar 13. ~1416
The heat generated by the semiconductor element 16 mounted on the base pillar 1
The heat is well transmitted to the base column 13 and can be effectively radiated to the outside by the heat sink 19 provided on the lower surface of the base column 13. As a result, thermal damage to the semiconductor element 1B due to high-density mounting on the base pillar 13 can be prevented.

なお、上記実施例では基柱の下面にヒー トンンクを設
けた構造にしたが、基柱の」二面にもヒートシンクを設
けてもよい。また、基柱を回路基板を貫通して固定した
が、該基柱を回路基板表面に単に固定した構造にしても
よい。
In the above embodiment, a heat sink is provided on the lower surface of the base column, but a heat sink may also be provided on the two sides of the base column. Moreover, although the base pillar is fixed by penetrating the circuit board, the base pillar may be simply fixed to the surface of the circuit board.

上記実施例では、基柱として四角柱状のものを用いたが
、これに限定されない。例えば三角柱状、五角柱状、六
角柱状の基柱を用いてもよい。
In the above embodiment, a rectangular column is used as the base column, but the base column is not limited to this. For example, a triangular, pentagonal, or hexagonal base pillar may be used.

上記実施例では、基柱の表面に配線部のみ設けた構造に
したが、該基柱の表層にビアフィルや内部配線を形成し
、半導体素子がマウントされた配線部の一部をこれらビ
アフィルや内部配線を通して相互に結線したり、回路基
板の導体路と結線するようにしてもよい。このような構
成にすれば、半導体素子、基柱の配線部、回路基板の導
体路の相互結線距離をより一層短くできる。
In the above embodiment, only the wiring part is provided on the surface of the base pillar, but via fills and internal wiring are formed on the surface layer of the base pillar, and a part of the wiring part on which the semiconductor element is mounted is covered with these via fills and internal wiring. They may be connected to each other through wiring or to a conductor path on a circuit board. With this configuration, the interconnection distance between the semiconductor element, the wiring portion of the base pillar, and the conductor path of the circuit board can be further shortened.

[発明の効果] 以上詳述した如く、本発明によれば内部で半導体素子を
直並列接続する際の結線距離を最短にでき、かつ直並列
回路の実現が容易で、更に良好な放熱性を有し、ひいて
は高周波動作、大電流動作、高耐圧に適した状態でスイ
ッチング半導体素子を信頼性よく実装した構造の半導体
モジュールを提供できる。
[Effects of the Invention] As detailed above, according to the present invention, it is possible to minimize the wiring distance when connecting semiconductor elements internally in series and parallel, to easily realize a series-parallel circuit, and to achieve better heat dissipation. Therefore, it is possible to provide a semiconductor module having a structure in which a switching semiconductor element is reliably mounted in a state suitable for high frequency operation, large current operation, and high withstand voltage.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す半導体モジュールの斜
視図、第2図は従来の半導体モジュールを示す断面図で
ある。 11・・・回路基板、12・・・導体路、13・・・基
柱、141〜14+ s  (14e〜1416は図示
せず)・・・配線部、15・・・導体帯、1G・・・半
導体素子、17・・・導線、18・・・外部端子、19
・・・冷却用ヒートシンク。 出願人代理人 弁理士  鈴江武彦 第2図
FIG. 1 is a perspective view of a semiconductor module showing an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional semiconductor module. DESCRIPTION OF SYMBOLS 11... Circuit board, 12... Conductor path, 13... Base column, 141-14+s (14e-1416 are not shown)... Wiring part, 15... Conductor band, 1G...・Semiconductor element, 17...Conducting wire, 18...External terminal, 19
...cooling heat sink. Applicant's agent Patent attorney Takehiko Suzue Figure 2

Claims (2)

【特許請求の範囲】[Claims] (1)、導体路を有する回路基板と、この回路基板に固
定された電気絶縁性、高熱伝導性の材料からなる多角柱
状の基柱と、この基柱の各側面に夫々1つ以上設けられ
た配線部と、この基柱の各配線部に夫々マウントされた
半導体素子とを具備し、前記半導体素子、基柱の配線部
及び回路基板の導体路を相互に電気的に接続したことを
特徴とする半導体実装体。
(1) A circuit board having a conductor path, a polygonal pillar made of an electrically insulating and highly thermally conductive material fixed to the circuit board, and one or more pillars provided on each side of the base pillar. and a semiconductor element mounted on each wiring part of the base pillar, and the semiconductor element, the wiring part of the base pillar, and the conductor path of the circuit board are electrically connected to each other. Semiconductor mounted body.
(2)、基柱の上面又は下面に放熱構造を付与させたこ
とを特徴とする特許請求の範囲第1項記載の半導体実装
体。
(2) A semiconductor package according to claim 1, characterized in that a heat dissipation structure is provided on the upper or lower surface of the base pillar.
JP4163687A 1987-02-25 1987-02-25 Semiconductor mounting body Pending JPS63208262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4163687A JPS63208262A (en) 1987-02-25 1987-02-25 Semiconductor mounting body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4163687A JPS63208262A (en) 1987-02-25 1987-02-25 Semiconductor mounting body

Publications (1)

Publication Number Publication Date
JPS63208262A true JPS63208262A (en) 1988-08-29

Family

ID=12613814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4163687A Pending JPS63208262A (en) 1987-02-25 1987-02-25 Semiconductor mounting body

Country Status (1)

Country Link
JP (1) JPS63208262A (en)

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