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JPS63175457A - semiconductor equipment - Google Patents

semiconductor equipment

Info

Publication number
JPS63175457A
JPS63175457A JP62005966A JP596687A JPS63175457A JP S63175457 A JPS63175457 A JP S63175457A JP 62005966 A JP62005966 A JP 62005966A JP 596687 A JP596687 A JP 596687A JP S63175457 A JPS63175457 A JP S63175457A
Authority
JP
Japan
Prior art keywords
semiconductor device
thickness
pellet
film
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62005966A
Other languages
Japanese (ja)
Inventor
Hajime Sato
佐藤 始
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62005966A priority Critical patent/JPS63175457A/en
Publication of JPS63175457A publication Critical patent/JPS63175457A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • H01L23/49506Lead-frames or other flat leads characterised by the die pad an insulative substrate being used as a diepad, e.g. ceramic, plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、レジンモールド型半導体装置に関し、特に、
薄型面付パッケージの信頼性の向上をはかることができ
る技術に適用して有効な技術に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a resin molded semiconductor device, and in particular,
The present invention relates to a technique that is effective when applied to a technique that can improve the reliability of thin surface-mounted packages.

〔従来技術〕[Prior art]

従来のメモリ用大型ペレットを塔載したレジンモールド
型半導体装置や面付レジンモールド型半導体装置は、第
2図に示すように、タブ2の上にペレット1が塔載され
、このペレット1の電極(パッド)とリード3の内部リ
ード部3Aとがワイヤ4で電気的に接続された後、レジ
ンでモールドされてパッケージ5としたものである。I
Cリードフレームについては1例えば、電子材料198
6年6月号、P、137〜P、142に記載がある。
In conventional resin molded semiconductor devices and surface-mounted resin molded semiconductor devices in which large pellets for memory are mounted, a pellet 1 is mounted on a tab 2, and the electrodes of this pellet 1 are mounted on a tab 2, as shown in FIG. After the (pad) and the internal lead portion 3A of the lead 3 are electrically connected with the wire 4, the package 5 is molded with resin. I
1 for C lead frames, e.g. electronic materials 198
It is described in the June 6th issue, P, 137-P, 142.

【発明が解決しようとする問題点〕[Problem that the invention attempts to solve]

しかしながら、前記従来のレジンモールド型半導体装置
では、300ミル(ail)のパッケージに。
However, the conventional resin molded semiconductor device has a 300 mil (ail) package.

例えば、メモリ主力製品である4メガDRAM(Dyn
amic Random Access Memory
)の大型ペレット1を納める場合、タブ2が大きくなる
ため内部り−ド部3Aの引き回わしが不可能となる。
For example, 4 mega DRAM (Dyn
amic Random Access Memory
) When storing large pellets 1, the tab 2 becomes large, making it impossible to route the internal lead portion 3A.

また、例えば、面付レジンモールド型半導体装置の半田
リフロ一時における熱ストレスの影響によるパッケージ
クラック発生防止は、レジンモールドの厚さを厚くする
ことにより対応することができるが、近年、半導体装置
の薄型指向が強くなって来ているため、第2図に示すよ
うに、タブ2の下面とパッケージ5の裏面5Aまでの厚
さAが薄くなり、レジンクラックが発生するという問題
点を発明者が見い出した。
Furthermore, for example, prevention of package cracks caused by thermal stress during solder reflow of surface-mounted resin molded semiconductor devices can be prevented by increasing the thickness of the resin mold. As the directionality has become stronger, the inventor discovered that the thickness A between the bottom surface of the tab 2 and the back surface 5A of the package 5 becomes thinner as shown in FIG. 2, causing resin cracks. Ta.

本発明の目的は、レジンモールド型半導体装置。The object of the present invention is to provide a resin mold type semiconductor device.

特に大型ペレットを搭載する半導体装置であっても、そ
のパッケージのレジンのクラック発生を防止することが
できる技術を提供することにある。
In particular, it is an object of the present invention to provide a technique that can prevent cracks in the resin of a package of a semiconductor device mounted with a large pellet.

本発明の前記ならびにその他の目的と新規な特徴は、本
明細書の記述及び添付図面によって明らかになるであろ
う。
The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

〔問題点を解決するための手段〕[Means for solving problems]

本願において開示される発明のうち1代表的なものの概
要を簡単に説明すれば、下記のとおりである。
A brief overview of one typical invention disclosed in this application is as follows.

すなわち、タブなしレジンモールド型半導体装置であっ
て、リードの内部リード部及びペレットをフィルムで支
持したものである。
That is, it is a tabless resin molded semiconductor device in which the internal lead portions and pellets of the leads are supported by a film.

〔作用〕[Effect]

前記した手段によれば、タブをなくして、リードの内部
リード部及びペレットを薄いフィルムで支持したので、
タブの厚さから薄いフィルムの厚さを差引いた厚さだけ
ペレットから下のレジンモールドの厚さを厚くすること
ができるので、例えば1面付レジンモールド型半導体装
置の半田リフロ一時における熱ストレスの影響によるパ
ッケージクラックの発生を防止することができる。
According to the above-mentioned means, since the tab is eliminated and the internal lead part of the lead and the pellet are supported by a thin film,
Since the thickness of the resin mold below the pellet can be increased by the thickness of the tab minus the thickness of the thin film, it is possible to increase the thickness of the resin mold below the pellet by the thickness of the tab. It is possible to prevent package cracks from occurring due to the impact.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を図面を用いて具体的に説明す
る。
Hereinafter, one embodiment of the present invention will be specifically described using the drawings.

なお、実施例を説明するための全回において、同一機能
を有するものは同一符号を付け、その繰り返しの説明は
省略する。
Note that throughout the description of the embodiments, parts having the same functions are given the same reference numerals, and repeated explanations thereof will be omitted.

第1図は1本発明の一実施例のレジンモールド型半導体
装置の概略構成を示す断面図である。
FIG. 1 is a sectional view showing the schematic structure of a resin molded semiconductor device according to an embodiment of the present invention.

本実施例のレジンモールド型半導体装置は、第11iW
に示すように、厚さ25〜50μ厘の耐熱性フィルム1
0の上にリード3の内部リード部3Aが熱圧着又は接着
剤で接着され、その後前記フィルム10上にペレット1
が塔載され、このペレット1の電極(パッド)とリード
3の内部リード部3Aとがワイヤ4で電気的に接続され
た後、レジンでモールドされてパッケージ5としたもの
である。
The resin molded semiconductor device of this example has the 11th iW
As shown in the figure, a heat-resistant film 1 with a thickness of 25 to 50 μm
The internal lead portion 3A of the lead 3 is bonded onto the film 10 by thermocompression bonding or adhesive, and then the pellet 1 is bonded onto the film 10.
The electrode (pad) of the pellet 1 and the internal lead portion 3A of the lead 3 are electrically connected with a wire 4, and then molded with resin to form a package 5.

前記耐熱性フィルム10の材料としては1例えばポリイ
ミド樹脂が用いられる。
As the material for the heat-resistant film 10, for example, polyimide resin is used.

このようにタブをなくして、リード8の内部リード部3
A及びペレット1を薄いフィルム10で支持したので、
タブの厚さから薄いフィルムの厚さを差引いた厚さだけ
ペレットエから下のレジンモールドの厚さを厚くするこ
とができるので1例えば1面付レジンモールド型半導体
装置の半田リフロ一時における熱ストレスの影響による
パッケージクラックの発生を防止することができる。
In this way, without the tab, the internal lead part 3 of lead 8
Since A and pellet 1 were supported by thin film 10,
Since the thickness of the resin mold below the pellet can be increased by the thickness of the tab minus the thickness of the thin film, it is possible to reduce heat stress during solder reflow of a one-sided resin mold type semiconductor device, for example. It is possible to prevent package cracks from occurring due to the impact.

これによりパッケージ5の全厚さを従来通りにしても、
ペレット1から下のレジンモールドの厚さマージンがと
れ、信頼性を確保することができる。
As a result, even if the total thickness of package 5 is kept the same as before,
A thickness margin of the resin mold below the pellet 1 can be provided, and reliability can be ensured.

また、タブを用いていないので、内部リード部3Aの引
き回わしが可能となる。
Furthermore, since no tabs are used, the internal lead portion 3A can be routed.

以上、本発明を実施例にもとづき具体的に説明したが、
本発明は、前記実施例に限定されるものではなく、その
要旨を逸脱しない範囲において種々変更可能であること
は言うまでもない。
The present invention has been specifically explained above based on examples, but
It goes without saying that the present invention is not limited to the embodiments described above, and can be modified in various ways without departing from the spirit thereof.

〔発明の効果〕 本願において開示される発明のうち代表的なものによっ
て得られる効果を簡単に説明すれば、下記のとおりであ
る。
[Effects of the Invention] The effects obtained by typical inventions disclosed in this application are briefly explained below.

タブなしレジンモールド型半導体装置であって、リード
の内部リード部及びペレットを薄いフィルムで支持した
ので、タブの厚さから薄いフィルムの厚さを差引いた厚
さだけペレットから下のレジンモールドの厚さを厚くす
ることができるので、例えば、面付レジンモールド型半
導体装置の半田リフロ一時における熱ストレスの影響に
よるパッケージクラックの発生を防止することができる
This is a resin mold type semiconductor device without a tab, and the inner lead part of the lead and the pellet are supported by a thin film, so the thickness of the resin mold below the pellet is equal to the thickness of the tab minus the thickness of the thin film. Since the thickness can be increased, for example, it is possible to prevent package cracks from occurring due to the influence of thermal stress during solder reflow of a surface-mounted resin molded semiconductor device.

これによりパッケージの全厚さを従来通りにしても、ペ
レットから下のレジンモールドの厚さマージンがとれ、
信頼性を確保することができる。
As a result, even if the total thickness of the package remains the same as before, there is still a margin for the thickness of the resin mold below the pellet.
Reliability can be ensured.

また、タブを用いないので、内部リード部3Aの引き回
わしが可能となる。
Furthermore, since no tabs are used, the internal lead portion 3A can be routed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は1本発明の一実施例のレジンモールド型半導体
装置の概略構成を示す断面図、第2図は、従来のレジン
モールド型半導体装置の問題点を説明するための図であ
る。 図中、■・・・ペレット、3・・・リード、3A・・・
内部リード部、4・・・ワイヤ、5・・・パッケージ、
10・・・耐熱性フィルムである。 第  1  図 第  2  図 /θ−冊1k・)すフイルム
FIG. 1 is a sectional view showing a schematic configuration of a resin molded semiconductor device according to an embodiment of the present invention, and FIG. 2 is a diagram for explaining problems with a conventional resin molded semiconductor device. In the figure, ■...pellet, 3...lead, 3A...
Internal lead part, 4... wire, 5... package,
10... Heat resistant film. Figure 1 Figure 2 / θ-book 1k・) film

Claims (1)

【特許請求の範囲】 1、タブなしレジンモールド型半導体装置であって、内
部リード及びペレットをフィルムで支持したことを特徴
とする半導体装置。 2、前記フィルムが耐熱性であることを特徴とする特許
請求の範囲第1項に記載の半導体装置。 3、前記耐熱性フィルムは、ポリイミド樹脂からなるこ
とを特許請求の範囲第1項又は第2項に記載の半導体装
置。 4、前記フィルムの厚さが0.025mm〜0.050
mmであることを特徴とする特許請求の範囲第1項乃至
第3項の各項に記載の半導体装置。 5、前記半導体装置は、面付型半導体装置であることを
特徴とする特許請求の範囲第1項乃至第4項の各項に記
載の半導体装置。
[Scope of Claims] 1. A resin molded semiconductor device without tabs, characterized in that an internal lead and a pellet are supported by a film. 2. The semiconductor device according to claim 1, wherein the film is heat resistant. 3. The semiconductor device according to claim 1 or 2, wherein the heat-resistant film is made of polyimide resin. 4. The thickness of the film is 0.025 mm to 0.050 mm.
The semiconductor device according to any one of claims 1 to 3, characterized in that the diameter is mm. 5. The semiconductor device according to any one of claims 1 to 4, wherein the semiconductor device is a surface-mounted semiconductor device.
JP62005966A 1987-01-16 1987-01-16 semiconductor equipment Pending JPS63175457A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62005966A JPS63175457A (en) 1987-01-16 1987-01-16 semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62005966A JPS63175457A (en) 1987-01-16 1987-01-16 semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS63175457A true JPS63175457A (en) 1988-07-19

Family

ID=11625614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62005966A Pending JPS63175457A (en) 1987-01-16 1987-01-16 semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS63175457A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0433695A3 (en) * 1989-12-22 1991-10-02 Texas Instruments Incorporated Integrated circuit device and method to prevent cracking during surface mount
US5895969A (en) * 1992-05-25 1999-04-20 Hitachi, Ltd. And Hitachi Vlsi Engineering Corp. Thin type semiconductor device, module structure using the device and method of mounting the device on board
CN102655133A (en) * 2011-03-04 2012-09-05 三星半导体(中国)研究开发有限公司 Chip packaging component and manufacturing method for same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0433695A3 (en) * 1989-12-22 1991-10-02 Texas Instruments Incorporated Integrated circuit device and method to prevent cracking during surface mount
US5895969A (en) * 1992-05-25 1999-04-20 Hitachi, Ltd. And Hitachi Vlsi Engineering Corp. Thin type semiconductor device, module structure using the device and method of mounting the device on board
CN102655133A (en) * 2011-03-04 2012-09-05 三星半导体(中国)研究开发有限公司 Chip packaging component and manufacturing method for same

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