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JPS63164254A - semiconductor equipment - Google Patents

semiconductor equipment

Info

Publication number
JPS63164254A
JPS63164254A JP30845386A JP30845386A JPS63164254A JP S63164254 A JPS63164254 A JP S63164254A JP 30845386 A JP30845386 A JP 30845386A JP 30845386 A JP30845386 A JP 30845386A JP S63164254 A JPS63164254 A JP S63164254A
Authority
JP
Japan
Prior art keywords
tab
shape
pellet
stress
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30845386A
Other languages
Japanese (ja)
Inventor
Izumi Tezuka
手塚 泉
Kazuo Shimizu
一男 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP30845386A priority Critical patent/JPS63164254A/en
Publication of JPS63164254A publication Critical patent/JPS63164254A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch

Landscapes

  • Die Bonding (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To prevent the deterioration in moisture resistance in a resin sealed type package, by forming a tab, which is the pellet mount in such a shape that its planar shape does not have corner parts. CONSTITUTION:In an electronic device 1 having a resin sealed type package 14, the planar shape of a tab 8, on which a pellet 12 is mounted, is formed in a shape without corner parts. For example, the tab 8 is formed in an approximately full-circular flat shape. Corner edges are not provided at the circumference. The group of the tips of inner leads 4 is arranged in a circular ring shape so that the tips are closely located to the circumference of the tab 8. Thus the concentration of stress yielded with thermal stress at the corner parts of the tab can be prevented. Therefore separation of the tab starting at the corner parts can be prevented. As a result, the deterioration in moisture resistance can be prevented.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体装置、特に、樹脂封止型パッケージに
おける耐湿性低下防止技術に関し、例えば、ミニ・スク
エア・パフケージ(以下、MSPICという。)を備え
ている半導体集積回路装置(IC)に利用して有効な技
術に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a technology for preventing moisture resistance deterioration in semiconductor devices, particularly in resin-sealed packages, such as mini square puff cages (hereinafter referred to as MSPIC). The present invention relates to a technique effective for use in a semiconductor integrated circuit device (IC) equipped with a semiconductor integrated circuit device (IC).

〔従来の技術〕[Conventional technology]

高密度実装を実現するための面付実装タイプの半導体集
積回路装置として、ペレットがボンディングされたタブ
の周囲にリードが四方に配設されているとともに、アウ
タリードが略垂直下向きに屈曲されている樹脂封止型パ
ッケージを備えているMSPICがある。
As a surface-mount type semiconductor integrated circuit device to achieve high-density mounting, leads are arranged on all sides around a tab to which a pellet is bonded, and the outer lead is bent almost vertically downward. There are MSPICs that have sealed packages.

なお、MSPIGを述べである例としては、日経マグロ
ウヒル社発行[別面マイクロデバイセズNo、2J昭和
59年6月11日発行 P148〜P159、がある。
An example of MSPIG mentioned above is published by Nikkei McGraw-Hill [Separate page Micro Devices No. 2J, June 11, 1980, P148-P159].

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、このようなMSPICにおいては、ペレットを
形成しているシリコン、リードフレームを形成している
4270イや胴、およびパッケージを形成している4M
脂についての熱膨張係数が大きく異なるため、MSII
Cが温度サイクル試験、熱鏝i撃試験等を受けた時、パ
ッケージとリードフレームとの接着界面に81がれが生
じ、タブの裏面におけるコーナ部を起点とするクラック
から水分が侵入し、その結果、耐湿性が低下するという
問題点がある。
However, in such an MSPIC, silicon forming the pellet, 4270I forming the lead frame, the body, and 4M forming the package.
MSII
When C was subjected to temperature cycle tests, hot hammer tests, etc., 81 peeling occurred at the adhesive interface between the package and lead frame, and moisture entered through cracks starting from the corners on the back of the tab, resulting in As a result, there is a problem that moisture resistance is reduced.

本発明の目的は、樹脂封止型パッケージにおける耐湿性
の低下を防止することができる半導体装置を提供するこ
とにある。
An object of the present invention is to provide a semiconductor device that can prevent deterioration in moisture resistance in a resin-sealed package.

本発明の前記ならびにその他の目的と新規な特徴は、本
明細書の記述および添付図面から明らかになるであろう
The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

〔問題点を解決するための手段〕[Means for solving problems]

本願において開示される発明のうち代表的なものの概要
を説明すれば、次の通りである。
An overview of typical inventions disclosed in this application is as follows.

すなわち、パッケージに樹脂封止されるペレットの取付
部であるタブをその平面形状が角形部を有しない形状に
なるように形成したものである。
That is, the tab, which is the attachment part for the pellet resin-sealed in the package, is formed so that its planar shape does not have a square part.

〔作用〕[Effect]

前記した手段によれば、温度サイクル試験等による熱で
タブが熱膨張しても、タブには鋭い角形部がないため、
それに伴う機械的応力の集中は解消ないしは小さく抑制
される。つまり、熱膨張によりパッケージ内部に応力が
発生したとしても、タブの外周に接しているパッケージ
部分に応力が集中する現象が回避されることになる。そ
の結果、この応力集中によってパッケージに発生する剥
離は防止されることになる。
According to the above-mentioned means, even if the tab expands due to heat caused by a temperature cycle test, etc., the tab does not have a sharp corner, so
The concentration of mechanical stress associated with this is eliminated or suppressed to a small level. In other words, even if stress is generated inside the package due to thermal expansion, the phenomenon of concentration of stress on the portion of the package that is in contact with the outer periphery of the tab can be avoided. As a result, peeling of the package caused by this stress concentration is prevented.

〔実施例1〕 第1図は本発明の一実施例であるMSI”ICの製造途
中を示す平面図、第2図はその拡大部分断面図である。
[Embodiment 1] FIG. 1 is a plan view showing an MSI"IC in the process of being manufactured as an embodiment of the present invention, and FIG. 2 is an enlarged partial sectional view thereof.

本実施例において、MSPICIはリードフレーム2を
備えており、リードフレーム2はパッケージング以前に
は第1図に示されているように構成されている。すなわ
ち、リードフレーム2は中心点部に略真円形の空所3が
残るように略放射形状に配設されている複数本のインナ
リード4と、各インナリード4にそれぞれ一体的に連設
されて四方に十字形状に配されている複数本のアウタリ
ード5と、隣り合うアウタリード5.5間に架設されて
いるダム6と、アウタリード5群に連設されている略正
方形の外枠7と、空所3に配されて、その平面形状がこ
れよりも若干小さめの略真円形の平盤形状に形成されて
いるタブ8と、ダム6の2箇所からそれぞれ突設されて
タブ8を吊持しているタブ吊りリード9とを備えている
In this embodiment, the MSPICI includes a lead frame 2, which is configured as shown in FIG. 1 before packaging. That is, the lead frame 2 has a plurality of inner leads 4 arranged in a substantially radial shape so that a substantially perfect circular space 3 remains at the center point, and each inner lead 4 is integrally connected to the inner leads 4. A plurality of outer leads 5 arranged in a cross shape on all sides, a dam 6 constructed between adjacent outer leads 5.5, a substantially square outer frame 7 connected to the group of outer leads 5, A tab 8 is arranged in the empty space 3 and is formed into a substantially perfect circular flat plate shape whose planar shape is slightly smaller than this, and a dam 6 is protruded from two places to suspend the tab 8. It is equipped with a tab hanging lead 9.

タブ8は略汽円形の平板形状に形成されており、その外
周にはエツジのついたコーナ部が存在しないようになっ
ている。リードフレーム2は打ち抜きプレス加工により
形成される。そこで、例えば、タブ8を打ち抜くプレス
金型の刃を真円形に形成しておくことにより、真円形の
タブ8は打ち抜き加工と同時に形成される。また、タブ
8が亘円形形状に形成されているため、インナリード4
の先端群はタブ8の外周に近接するように円形環状に配
設されている。
The tab 8 is formed into a substantially circular flat plate shape, and has no edged corners on its outer periphery. The lead frame 2 is formed by punching and pressing. Therefore, for example, by forming the blade of a press die for punching out the tab 8 into a perfect circle, the perfect circular tab 8 can be formed at the same time as the punching process. In addition, since the tab 8 is formed in a circular shape, the inner lead 4
The tips of the tab 8 are arranged in a circular ring shape close to the outer periphery of the tab 8.

タブ8上には集積回路を作り込まれたペレット12が適
当な手段によりボンディングされており、ペレット12
の電極パッドには各インナリード4との間にワイヤ13
がそれぞれボンディングされている。ペレット12の集
積回路は電極パッド、ワイヤ13、インナリード4およ
びアウタリード5を介して電気的に外部に引き出される
ようになっている。
A pellet 12 on which an integrated circuit is built is bonded onto the tab 8 by appropriate means.
A wire 13 is connected between the electrode pad and each inner lead 4.
are each bonded. The integrated circuit of the pellet 12 is electrically drawn out to the outside via electrode pads, wires 13, inner leads 4, and outer leads 5.

そして、このMSPICIは樹脂を用いてトランスファ
成形法等により略正方形の平盤形状に一体成形されたパ
ッケージ14を備えており、このパッケージ14により
前記リードフレーム2の一部、ペレット12、ワイヤ1
3およびタブ8が非気密封止されている。すなわち、タ
ブ8等以外のアウタリード5群はパッケージ14の4側
面からそれぞれ突出され、そして、アウタリード5群は
パッケージ14の外部において略垂直下方向に屈曲され
ている。ちなみに、パッケージ14の成形後、前記外枠
7および隣接するアウタリード5.5間のダム6は切り
落とされる。
This MSPICI is equipped with a package 14 that is integrally molded into a substantially square flat plate shape using a resin using a transfer molding method.
3 and tab 8 are non-hermetically sealed. That is, the five groups of outer leads other than the tabs 8 and the like protrude from each of the four side surfaces of the package 14, and the five groups of outer leads are bent substantially vertically downward on the outside of the package 14. Incidentally, after the package 14 is molded, the outer frame 7 and the dam 6 between the adjacent outer leads 5.5 are cut off.

次に作用を説明する。Next, the action will be explained.

前記構成にかかるMSPICは出荷前に抜き取り検査を
実施される。抜き取り検査としては温度サイクル試験や
熱1#1撃試験を含む環境試験が大晦される。このよう
な環境試験または実使用時に熱ストレスが前記MSPI
Cに加えられた場合、購成材料の熱膨張係数差によりバ
フケージ14の内部に応力が発生する。
The MSPIC having the above configuration is subjected to a sampling inspection before being shipped. Environmental tests including temperature cycle tests and thermal 1#1 impact tests will be carried out on New Year's Eve as sampling inspections. When thermal stress occurs during such environmental tests or actual use, the MSPI
C, stress is generated inside the buff cage 14 due to the difference in thermal expansion coefficient of the purchased materials.

ところで、タブの平面形状が正四角形形状に形成されて
いる場合、そのコーナ部は鋭い直角になるため、パッケ
ージの内部応力はタブのコーナ部付近に集中する。そし
て、置市なる熱ストレスによる繰り返し応力により、タ
ブとパッケージまたはタブとペレットとの界面に剥離が
発生するという問題点があることが、本発明者によって
明らかにされた。
By the way, when the planar shape of the tab is a regular square, the corner portions are sharp right angles, so that the internal stress of the package is concentrated near the corner portions of the tab. The inventor of the present invention has revealed that there is a problem in that peeling occurs at the interface between the tab and the package or the tab and the pellet due to repeated stress due to thermal stress caused by aging.

MSPICにおいてこのような剥離が発生ずると、パッ
ケージが小型でかつ薄いため、耐湿性が急激に低下する
ことになる。
If such peeling occurs in the MSPIC, the moisture resistance will drop sharply because the package is small and thin.

しかし、本実施例においては、タブ8はその平面形状が
略真円形形状に形成されているため、タブ8とパッケー
ジ14、またはタブ8とペレット12との間に剥離が発
生することはない、すなわち、タブ8が熱膨張した場合
、タブ8が真円形形状に形成されていることにより、そ
の熱膨張の伸びは四方六方に分散されるため、前記集中
応力は解消されることになる。その結果、熱ストレスに
よる繰り返し応力が作用しても、タブとパッケージまた
はタブとペレットとの界面に剥離が発生する現象は防止
されることになる。
However, in this embodiment, since the tab 8 has a substantially perfect circular planar shape, peeling does not occur between the tab 8 and the package 14 or between the tab 8 and the pellet 12. That is, when the tab 8 thermally expands, since the tab 8 is formed into a perfect circular shape, the elongation of the thermal expansion is dispersed in all directions, so that the concentrated stress is eliminated. As a result, even if repeated stress due to thermal stress acts, the phenomenon of peeling occurring at the interface between the tab and the package or the tab and the pellet can be prevented.

1r1記実施例によれば次の効果が得られる。According to the embodiment 1r1, the following effects can be obtained.

(11タブをその平面形状が略真円形形状になるように
形成することにより、熱ストレスに伴い発生する応力が
タブのコーナ部に集中するのを防止することができるた
め、タブのコーナ部を起点とする!All 離の発生を
防止することができ、その結果、耐湿性の低下を防止す
ることができる。
(By forming the tab 11 so that its planar shape is approximately a perfect circle, it is possible to prevent the stress generated due to thermal stress from concentrating on the corner of the tab. It is possible to prevent the occurrence of !All separation from the starting point, and as a result, it is possible to prevent a decrease in moisture resistance.

(2)  前記(1)により、剥離の発生を防止するこ
とができるので、薄型でかつ小型パッケージからなる半
導体装置の集積密度および実装密度の高度化を実現させ
ることができる。
(2) According to the above (1), since the occurrence of peeling can be prevented, it is possible to realize a higher integration density and packaging density of a semiconductor device having a thin and small package.

(3)略真円形タブの形成は、半導体装置の製造工程下
におけるリードフレームの打ち抜きプレス加工時に同時
成形することができるため、作業性の低下を抑制するこ
とができる。
(3) Since the substantially perfect circular tab can be formed at the same time as the lead frame is punched and pressed during the manufacturing process of the semiconductor device, it is possible to suppress a decrease in work efficiency.

(4)  タブを略真円形形状に形成することにより、
インナリードの先端群を円形環状に配設することができ
るため、ワイヤボンディングの長さを短くかつ互いに略
等しくさせることができるため、ボンダビリティ−を高
めることができる。
(4) By forming the tab into a substantially perfect circular shape,
Since the tip groups of the inner leads can be arranged in a circular ring shape, the wire bonding lengths can be shortened and made substantially equal to each other, so that bondability can be improved.

〔実施例2〕 第3図は本発明の実施例2を示すもので、第1図に相当
する平面図である。
[Embodiment 2] FIG. 3 shows a second embodiment of the present invention, and is a plan view corresponding to FIG. 1.

本実施例2が前記実施例1と異なる点は、タブ8Aが略
正方形形状に形成されているとともに、そのコーナ部に
弯曲部10が比較的大きい曲率をもって形成されている
点にあり、コーナ部にエツジがなく応力鎖中が回避され
るため、その作用および効果は前記実施例1と略同様に
なる。
The second embodiment differs from the first embodiment in that the tab 8A is formed into a substantially square shape, and the curved portion 10 is formed at the corner portion with a relatively large curvature. Since there are no edges and stress chains are avoided, the action and effect are substantially the same as in the first embodiment.

以上本発明者によってなされた発明を実施例に基づき具
体的に説明したが、本発明は前記実施例に限定されるも
のではな(、その要旨を逸脱しない範囲で種々変更可焼
であることはいうまでもない。
Although the invention made by the present inventor has been specifically explained based on Examples, the present invention is not limited to the above Examples (although it is possible to make various changes without departing from the gist of the invention). Needless to say.

例えば、タブの平面形状は真円形形状に形成するに限ら
ず、楕円形形状に形成してもよい。
For example, the planar shape of the tab is not limited to a perfect circular shape, but may be formed into an elliptical shape.

また、ペレットに集中する応力を分散するには、ペレッ
トの端部に面取り部を形成することが望ましい。
Further, in order to disperse stress concentrated on the pellet, it is desirable to form a chamfered portion at the end of the pellet.

以上の説明では主として本発明者によってなされた発明
をその背景となった利用分野である樹脂封止型のMSP
ICに通用した場合について説明したが、それに限定さ
れるものではなく、その他の樹脂封止型のパフケージを
備えたIC等の電子装置全般に通用することができる。
The above explanation will mainly focus on the field of application of the invention made by the present inventor, which is the resin-sealed MSP.
Although the description has been given of a case where the present invention is applicable to an IC, the present invention is not limited thereto, and can be applied to any other electronic device such as an IC equipped with a resin-sealed puff cage.

〔発明の効果〕〔Effect of the invention〕

本願において開示される発明のうち代表的なものによっ
て得られる効果を簡単に説明すれば、次の通りである。
A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

ペレット取付部であるタブをその平面形状が角部を有し
ない形状になるように形成することにより、熟ストレス
によって樹脂封止パッケージの内部に発生する応力がタ
ブのコーナ部に集中するのを防止することができるため
、該コーナ部を起点とする剥離現象の発生を防止するこ
とができる。
By forming the tab, which is the pellet attachment part, so that its planar shape has no corners, stress generated inside the resin-sealed package due to ripening stress is prevented from concentrating on the corners of the tab. Therefore, it is possible to prevent the occurrence of a peeling phenomenon starting from the corner portion.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例であるMSPICの製造途中
を示す平面図、 第2図はその縦断面図、 第3図は実施例2を示すもので、第1図に相当する平面
図である。 ■・・・MSI”’IC(半導体装置)、2・・・リー
ドフレーム、3・・・空所、4・・・インナリード、5
・・・アウタリード、6・・・ダム、7・・・外枠、8
.8A・・・タブ、9・・・タブ吊りリード、10・・
・弯曲部、12・・・ペレット、I3・・・ボンディン
グワイヤ、14・・・パッケージ。
FIG. 1 is a plan view showing an MSPIC in the process of manufacturing which is an embodiment of the present invention, FIG. 2 is a vertical cross-sectional view thereof, and FIG. 3 is a plan view corresponding to FIG. 1 showing Embodiment 2. It is. ■...MSI"'IC (semiconductor device), 2... Lead frame, 3... Blank space, 4... Inner lead, 5
...Outer lead, 6...Dam, 7...Outer frame, 8
.. 8A...Tab, 9...Tab hanging lead, 10...
- Curved portion, 12... Pellet, I3... Bonding wire, 14... Package.

Claims (1)

【特許請求の範囲】 1、樹脂封止型パッケージを備えている電子装置であっ
て、ペレットを搭載するタブがその平面形状を非角形形
状に形成されていることを特徴とする半導体装置。 2、タブが、その平面形状を円形形状に形成されている
ことを特徴とする特許請求の範囲第1項記載の半導体装
置。 3、タブが、そのコーナ部に弯曲部を形成されているこ
とを特徴とする特許請求の範囲第1項記載の半導体装置
[Scope of Claims] 1. A semiconductor device that is an electronic device equipped with a resin-sealed package, characterized in that a tab on which a pellet is mounted has a non-square planar shape. 2. The semiconductor device according to claim 1, wherein the tab has a circular planar shape. 3. The semiconductor device according to claim 1, wherein the tab has a curved portion formed at a corner thereof.
JP30845386A 1986-12-26 1986-12-26 semiconductor equipment Pending JPS63164254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30845386A JPS63164254A (en) 1986-12-26 1986-12-26 semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30845386A JPS63164254A (en) 1986-12-26 1986-12-26 semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS63164254A true JPS63164254A (en) 1988-07-07

Family

ID=17981205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30845386A Pending JPS63164254A (en) 1986-12-26 1986-12-26 semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS63164254A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04142767A (en) * 1990-10-03 1992-05-15 Nec Corp Lead frame for semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04142767A (en) * 1990-10-03 1992-05-15 Nec Corp Lead frame for semiconductor

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