JPS63161827A - Magnetic aluminum - Google Patents

Abstract

PURPOSE:To reduce discharged gas from a magnetic material into a vacuum and to decrease the weight of an apparatus by conducting compression thermal molding of magnetic powder so as to surround the powder with aluminum powder. CONSTITUTION:Magnetic powder 15 is so compression thermal molded as to surround it with aluminum powder 16 to form magnetic aluminum 17. A vacuum magnetic levitation conveyor body 21 is levitated from a base 24 by permanent magnets 22, 25 produced by magnetizing the powder 15 of the aluminum 17 and electromagnets 23, 26 to hold a suitable space from a rail 20. It is moved along the rail 20 by means of alternating magnetic fields of a permanent magnet 19 and an electromagnet 18 in a direction B or C. In this case, a leakage magnetic field can be shielded by a magnetic shield cover 27. Thus, discharged gas from the powder can be reduced, and the weight of an apparatus can be decreased.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to magnetic aluminum which is used as a magnetic material by being magnetically shielded or magnetized in a vacuum atmosphere.

2. Description of the Related Art In recent years, as semiconductors have become more highly integrated, efforts have been made to reduce as much as possible the dust generated from drive equipment in vacuum. Among these, magnetic bearings are attracting attention as non-contact bearings, and magnetic aluminum is used to shield leakage magnetic fields and as magnets for actuators that utilize electromagnetic field action in vacuum. Aluminum is expected to be widely used in the future as it is a base material that emits less gas and is also lightweight.

An example of the above-mentioned conventional magnetic aluminum and its application will be described below with reference to the drawings.

FIG. 6 is a structural diagram of conventional magnetic aluminum, and FIG. 7 is a sectional view of a vacuum motor using conventional magnetic aluminum. In Figure 6, 1 is magnetic powder, 2 is aluminum,
3 is an end face. In FIG. 7, 4 is a motor rotating shaft made of aluminum alloy, 6 is a casing also made of aluminum alloy, 6 is a rear cover made of aluminum alloy, 7 is a bearing that supports the motor rotating shaft 4 in the casing 5 and the rear cover 6, and 8 is a motor A motor rotor is press-fitted into the rotating shaft 4 and is made of magnetic aluminum 9, which magnetizes and polarizes the magnetic powder 1. 10 is a motor stator that is press-fitted into the casing 5 and is coaxially arranged with the motor rotor 8. 11 is the motor rotating shaft 4. A tachogenerator rotor 12 is made of magnetic aluminum 12 which is press-fitted coaxially with the motor rotor 8 and has magnetic powder 1 magnetized and polarized, 13 is a tachogenerator stator which is press-fitted into the casing 5 coaxially with the tachogenerator rotor 11, and 14 is magnetized. This magnetic shielding plate is made of non-magnetic aluminum and is sandwiched between the tachogenerator rotor 11 and the motor rotating shaft 4.

The function and operation of the magnetic aluminum constructed as described above and the vacuum motor using the same will be explained below with reference to FIGS. 6 and 7. In FIG. 6, by using magnetized or unmagnetized magnetic powder 1, it can be used as a magnet or a magnetic shield. Next, in FIG. 7, by exciting the motor stator 1Q, the motor rotation shaft 4 into which the motor rotor 8, which is made of magnetized magnetic aluminum 9, is press-fitted, rotates, and the tachogenerator rotor 11 also rotates accordingly. An electromotive force is generated in the stator 13. At this time, the magnetic shielding plate 14 prevents the magnetic field from the motor side from leaking to the tachogenerator side.

Problems to be Solved by the Invention However, in the above configuration, the magnetic powder 1 is placed on the end surface 3.
Since the magnetic powder 1 is exposed, gas is released into the vacuum, making it particularly unsuitable for use in an ultra-high vacuum atmosphere.

In view of the above-mentioned problems, the present invention provides magnetic aluminum in which gas is not released from magnetic powder in vacuum.

Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic aluminum of the first aspect of the present invention is obtained by compressing and heat-molding magnetic powder in such a manner that it is surrounded by aluminum powder.

The magnetic aluminum according to the second aspect of the present invention is obtained by applying an aluminum coating to a conventional aluminum surface.

Effect The effect of the first invention and the second invention of the present invention is that since the magnetic powder is not exposed on the end face, the amount of gas emitted from the magnetic powder into the vacuum can be suppressed to a low level.

EXAMPLE Hereinafter, a magnetic aluminum according to an embodiment of the present invention and an application example using the same will be described with reference to the drawings.

Fig. 1 is a structural diagram of magnetic aluminum in the first embodiment of the present invention, Fig. 2 is a perspective view of a vacuum magnetic levitation conveyance device which is an application example thereof, and Fig. 3 is a cross-sectional view taken along arrow A in Fig. 2. It is. In FIG. 1, 16 is magnetic powder, 16 is aluminum, and 17 is an end face.

In FIGS. 2 and 3, 18 and 19 are magnetic aluminum magnetized with the electromagnet and magnetic powder 15 of the linear motor provided in the aluminum alloy track 2o and the aluminum alloy vacuum magnetic levitation transfer device main body 21. Permanent magnets 22 and 23 are magnetic aluminum permanent magnets and electromagnets that magnetize the magnetic powder 15 of the magnetic bearing provided on the aluminum alloy base 24 to which the vacuum magnetic levitation transfer device body 21 and the orbit 2° are fixed. , 25 and 26 are magnetic aluminum permanent magnets and electromagnets that have magnetized magnetic powder 16 of a magnetic bearing provided in the orbit 20 and the vacuum magnetic levitation device main body 21. 27 is unmagnetized magnetic aluminum, and the main body 21 of the magnetic levitation conveyance device surrounds the permanent magnets 19, 22° 26 and the electromagnets 18, 23, and 26 to be excited.
28 is a sample to be transported. The function and operation of the magnetic aluminum and vacuum magnetic levitation conveyance device constructed as described above will be explained with reference to FIGS. 1, 2, and 3.

First, in FIG. 1, the magnetic powder 15 is surrounded by aluminum 16 and is not exposed at the end face 17, thereby reducing the amount of gas released into the vacuum.

In FIGS. 2 and 3, the vacuum magnetic levitation conveyance device main body 21 is levitated from the υ base 24 by a permanent magnet 22° 26 and electromagnets 23 and 26, which are magnetized with the magnetic aluminum magnetic powder 15 shown in FIG. Maintain proper space with orbit 2o. On the other hand, it moves in the B or C direction along the orbit 20 due to the alternating magnetic fields of the permanent magnet 19 and the electromagnet 18. At this time, the magnetic shielding cover 27 (c) blocks leakage magnetic fields from the permanent magnets 19, 22, 26 and the excited electromagnets 18, 23, 26 to areas other than the vacuum magnetic levitation transfer device main body 21.

As described above, according to the present invention, by compressing and heating the magnetic powder in a manner surrounding it with aluminum powder, it is possible to prevent the magnetic powder from being exposed to the end face and reduce gas released from the magnetic powder. By reducing the weight of the device, the load on the magnetic bearing and linear motor can be reduced.

A second embodiment of the present invention will be described below with reference to the drawings.

FIG. 4 is a structural diagram of magnetic aluminum in a second embodiment of the present invention, and FIG. 5 is a sectional view of a vacuum motor using magnetic aluminum of the present invention. In FIG. 4, 28 is a magnetic powder, 29 is aluminum, 3o is an aluminum coating, and 31 is an end face.

In FIG. 5, 32 is a motor rotating shaft made of aluminum alloy, 33 is a casing also made of aluminum alloy,
34 is a rear cover made of aluminum alloy, 36 is motor rotation: pH] 32 is inside the casing 33 and the rear cover 34
36 is a bearing supported within the motor rotation 111JI; 38 is a motor rotor made of magnetic aluminum 37 which is press-fitted into 32 and magnetized with magnetic powder 28 and arranged to be polarized; 38 is a motor rotor supported within the casing 3
A motor stator 39 is press-fitted into the motor rotor 3 and coaxially arranged with the motor rotor 36;
a tachogenerator rotor made of magnetic aluminum 40 which is press-fitted coaxially with 6 and has magnetic powder 28 magnetized and polarized;
41 is a casing 33 ((tacho generator rotor 39
The tachogenerator stator 42 press-fitted coaxially with the tachometer generator stator 42 is a magnetic shielding plate made of unmagnetized magnetic aluminum and sandwiched between the tachogenerator rotor 39 and the motor rotation @32.

The function and operation of the magnetic aluminum constructed as described above and the vacuum motor using the same will be explained below with reference to FIGS. 4 and 6.

In FIG. 4, the magnetic powder 28 is not exposed to the end face 31 due to the aluminum coating 30, so that gas released from the magnetic powder 28 into the vacuum can be reduced.

On the other hand, in FIG. 5, by exciting the motor stator 38, the motor rotation shaft 32 into which the motor rotor 36, which is made of magnetized magnetic aluminum 37, is press-fitted, rotates, and the tachogenerator rotor 39 also rotates accordingly. An electromotive force is generated in the tachogenerator stator 41. At this time, the magnetic shielding plate 42 prevents the magnetic field from the motor side from leaking to the tachogenerator side.

As described above, according to the present invention, by coating the conventional magnetic aluminum surface with aluminum, it is possible to reduce the gas released from the magnetic powder, and by precisely controlling the thickness of the aluminum coating, it is possible to Accuracy can be improved and exposure of magnetic particles can be completely prevented.

Effects of the Invention As described above, the first aspect of the present invention is that by compressing and heating the magnetic powder by surrounding it with aluminum powder, gas released from the magnetic powder into the vacuum can be reduced, while the device Not only can the weight be reduced, but since aluminum is the base material, the upper temperature limit during heating and degassing can be lowered to 150'C, which has great effects.

Furthermore, according to the second aspect of the present invention, by coating conventional magnetic aluminum with aluminum, it is possible to more reliably prevent exposure of magnetic particles, while improving part processing accuracy and facilitating processing operations. becomes.

[Brief explanation of the drawing]

FIG. 1 is a structural diagram of magnetic aluminum in the first embodiment of the present invention, FIG. 2 is a perspective view of a vacuum magnetic levitation conveyance device as an application example thereof, and FIG. 3 is a sectional view taken along arrow A in FIG. 2. Fig. 4 is a structural diagram of magnetic aluminum according to the second embodiment of the present invention, Fig. 5 is a sectional view of a vacuum motor as an application example thereof, Fig. 6 is a structural diagram of conventional magnetic aluminum, and Fig. 7 is a conventional FIG. 2 is a cross-sectional view of a vacuum motor using magnetic aluminum. 15... Magnetic powder, 16... Aluminum, 28... Magnetic powder, 29... Aluminum, 30... Aluminum material. Figure 1 +j-, Tsuchio or IE--al 4

Claims (2)

[Claims] (1) Magnetic aluminum characterized in that magnetic powder and aluminum powder are mixed and compressed and heated so as to be surrounded by aluminum powder. (2) Magnetic aluminum, which is made by mixing magnetic powder with aluminum powder and compression-heat-molding the mixture, and then covering the periphery of the magnetic aluminum with an aluminum material.