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JPS63155677A - Method for connecting tactile sense sensor and substrate - Google Patents

Method for connecting tactile sense sensor and substrate

Info

Publication number
JPS63155677A
JPS63155677A JP30118686A JP30118686A JPS63155677A JP S63155677 A JPS63155677 A JP S63155677A JP 30118686 A JP30118686 A JP 30118686A JP 30118686 A JP30118686 A JP 30118686A JP S63155677 A JPS63155677 A JP S63155677A
Authority
JP
Japan
Prior art keywords
substrate
electrode
electrodes
sensor
tactile sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30118686A
Other languages
Japanese (ja)
Inventor
Tsuneki Shinokura
篠倉 恒樹
Masayuki Yushina
油科 政行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP30118686A priority Critical patent/JPS63155677A/en
Publication of JPS63155677A publication Critical patent/JPS63155677A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]

Landscapes

  • Pressure Sensors (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PURPOSE:To join a substrate with a tactile sense sensor firmly by bonding a support leg part of its sensor, thereby inserting the leg part into a groove that is prepared at an upper layer part of an interconnection substrate. CONSTITUTION:Electrodes 8 like bumps are mounted at positions desired by a tactile sense sensor 3. A solder plating is performed by using a mask above an Ni base and the electrodes 8 consisting of solder bumps are formed. In such a case, the use of the mask allows a lower edge of the electrodes 8 to be correctly in parallel to a bonded face of both the tactile sense sensor 3 and a pressure receptive plate 2. Although the leg part 3A is inserted in a groove 6 where adhesives are coated, the electrodes 8 come in contact with the electrodes 5 prepared at a substrate 1 and not come in the groove 6.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は触覚センサを配線基板上に立体的に接続する方
法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for three-dimensionally connecting a tactile sensor to a wiring board.

[従来の技術] ロボットやマニプレータなどに使用されている従来の触
覚センサは、例えは導電シートのようにセンサ自体が平
坦に形成されており、単に押圧力しかし近年では、対象
物に対して人間の触覚に近い機能をもって、接触やすべ
りなどの情報か得られるようなセンサの開発が望まれ、
例えば3方向分力の検出が可能な触覚センサか検討され
ている。
[Prior Art] Conventional tactile sensors used in robots, manipulators, etc. are formed flat, such as conductive sheets. It is desired to develop a sensor that has a function similar to that of tactile sensation and can obtain information such as contact and slippage.
For example, tactile sensors that can detect force components in three directions are being considered.

このような触覚センサでは、センサの形態も平面的でな
く、基板に対して立体的な構造をもつものでな番づれば
ならず、特にこのようなセンサか配置される基板はセン
サの立体化に伴って配線密度の高いものとなり、しかも
センサの受注面に加わる外力に対して十分耐えることの
できる接続強度が保持されなけれはならない。そこてか
かる触覚センサを配線基板上にマトリックス状に配列さ
せることか考えられてきた。
In such a tactile sensor, the shape of the sensor is not planar, but must have a three-dimensional structure relative to the substrate, and in particular, the substrate on which such a sensor is placed is difficult to make the sensor three-dimensional. Accordingly, the wiring density must be high, and the connection strength must be maintained enough to withstand external forces applied to the order receiving surface of the sensor. Therefore, it has been considered to arrange such tactile sensors in a matrix on a wiring board.

しかしながら、上述のごとく立体的に構成したセンサを
従来の方法て、配線基板に平面的に接続したのでは、十
分な機械的強度か保たれず、電気的接続自体にも大きな
問題かあった。
However, when the three-dimensional sensor described above is connected two-dimensionally to a wiring board using the conventional method, sufficient mechanical strength cannot be maintained, and the electrical connection itself is also problematic.

第2図に触覚センサの配線基板への接続の状況上にめっ
きなどの方法て設りだ電極で、設計によって適宜の数が
定められる。5は配線基板にあらかしめ設けられた電極
て、電極4と電極5とが電気的に接続される。
As shown in FIG. 2, electrodes are provided by a method such as plating according to the connection of the tactile sensor to the wiring board, and an appropriate number is determined depending on the design. Reference numeral 5 denotes an electrode provided on the wiring board, and the electrode 4 and the electrode 5 are electrically connected to each other.

ここでは、触覚センサ2@に受圧板2を一枚接着して3
方向の力を検出する例を示す。
Here, one pressure-receiving plate 2 is glued to the tactile sensor 2@
An example of detecting directional force is shown.

複数の触覚センサ3上に接着された複数の受圧板2が同
一平面上にあることが望ましく、そのために、受圧板2
とセンサ3との位置関係たけてなを同一平面上に配置す
るには、この電極4と、配線基板上の電極5とを正確な
位置関係を保って接続しなければならない。
It is desirable that the plurality of pressure receiving plates 2 bonded on the plurality of tactile sensors 3 be on the same plane.
Positional relationship between the electrode 4 and the sensor 3 In order to arrange the electrodes on the same plane, this electrode 4 and the electrode 5 on the wiring board must be connected while maintaining an accurate positional relationship.

触覚センサ3を基板1上に載せて、電極4と電極5をは
んた付りなどによって接続する方法では、接続後の強度
を」−分に保つことができないの脚部3へのはめ合い状
況を示す斜視図であり、第4図はその断面図である。
In the method of mounting the tactile sensor 3 on the substrate 1 and connecting the electrodes 4 and 5 by soldering or the like, it is not possible to maintain the strength after connection to the leg 3. FIG. 4 is a perspective view showing the situation, and FIG. 4 is a sectional view thereof.

触覚センサ3を基板1に接合するには、第4図モ示ずよ
うに、基板1の7146に接着剤7を塗布しこのような
方法によって、センサ3と基板1は十分な強度で接合さ
れる。しかし、センサ3に設けた電極4は、Niなとの
めっきによる薄い層なので、第4図に示すように、電極
4も溝6内に入りこみ、しかも、接着剤7は液状なのて
、7146の底面6八を基板1の表面と平行に設けてお
いても、脚部3への下端を講6の底面6Δから一定の距
離に保つことは極めて困難であり、基板1の表面(すな
わち電極5の下面)と電極4の下端との距離aは、各触
覚センサごとに、また同一触覚センサ3の両端でも、異
なってしまう。
In order to bond the tactile sensor 3 to the substrate 1, as shown in FIG. Ru. However, since the electrode 4 provided on the sensor 3 is a thin layer of Ni plating, the electrode 4 also gets into the groove 6, as shown in FIG. Even if the bottom surface 68 is provided parallel to the surface of the substrate 1, it is extremely difficult to maintain the lower end of the leg portion 3 at a constant distance from the bottom surface 6Δ of the base 6. The distance a between the lower surface of the electrode 4 and the lower end of the electrode 4 differs for each tactile sensor or even for both ends of the same tactile sensor 3.

第5図はその扛下 説明するための触覚センサ3の電極
4側からみた側面図である。第5図に示すように、触覚
センサ3の一端におりる電極4の基板1の面からの高さ
bと、他端における高さCが異なってしまい、その結果
、センサ3上の受圧板2は、基板1と平行にならず、ま
た複数の受圧板を同一平面上に配列することはてきit
 くなる。
FIG. 5 is a side view of the tactile sensor 3 seen from the electrode 4 side for explaining its removal. As shown in FIG. 5, the height b of the electrode 4 at one end of the tactile sensor 3 from the surface of the substrate 1 is different from the height C at the other end, and as a result, the pressure receiving plate on the sensor 3 2 is not parallel to the substrate 1, and it is impossible to arrange multiple pressure receiving plates on the same plane.
It becomes.

[発明か解決しようとする問題点コ せが可能で、信頼性の高い接続状態の得られる触覚セン
サと基板の接続方法を提供することを目的とする。
[Problems to be Solved by the Invention] It is an object of the invention to provide a method for connecting a tactile sensor and a board that can be connected and that can provide a highly reliable connection state.

[問題点を解決するための手段] かかる目的を達成するために、本発明は、触覚センサに
ハンプ状N aを設け、基板に設けられている溝内に触
覚センサの脚部をバンブ状電極の位置まで挿入してハン
グ状電極を基板上に設けた電極と当接させ、脚部と基板
とを接着した後、テープ状フィルムに担持されたはんだ
を基板の電極と触角センサのハンプ状電極を設け、基板
に重ね合わせ、テープ状フィルムの上からはんたを加熱
溶融し、バンプ状電極と基板上の電極をはんだイ」けす
る。
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a tactile sensor with a hump-shaped Na, and a leg portion of the tactile sensor is placed in a groove provided in a substrate with a bump-shaped electrode. After inserting the hang-shaped electrode to the position shown in FIG. The bump-shaped electrodes and the electrodes on the substrate are soldered by heating and melting solder on the tape-shaped film.

[作 用] 本発明では、配線基板の上層部に設けた溝に触覚センサ
の脚部をはめて接着するのて、強固に接合され、かつ、
はめ合いの際センサに予め設けられたハンプ状電極かス
トッパーとして働くので、位置合わせのよいはめ合いか
実現し、しかもこのる。
[Function] In the present invention, the legs of the tactile sensor are fitted into the grooves provided in the upper layer of the wiring board and bonded, so that they are firmly joined, and
During fitting, the hump-shaped electrode provided in advance on the sensor acts as a stopper, so that a well-aligned fit can be achieved.

[実施例コ 以下に、図面を参照して本発明の詳細な説明する。[Example code] The present invention will be described in detail below with reference to the drawings.

第1図は、基板1の溝に触覚センサ3をはめ合わせた状
態を示す斜視図である。触覚センサ3の所望の位置にハ
ンプ状の電極8が設けられている。従来の電極4と同様
にして形成されたN1下地の上に、マスクを用いてはん
だめっきを行い、100〜150μm厚のはんたバンブ
からなる電極8を形成できる。この際、マスクの使用に
よって、電極8の下縁を触覚センサ3と受圧板2の接着
面に対して正確に平行にすることがでとる。
FIG. 1 is a perspective view showing the state in which the tactile sensor 3 is fitted into the groove of the substrate 1. A hump-shaped electrode 8 is provided at a desired position on the tactile sensor 3. Solder plating is performed using a mask on the N1 base formed in the same manner as the conventional electrode 4, so that the electrode 8 consisting of a solder bump having a thickness of 100 to 150 μm can be formed. At this time, by using a mask, it is possible to make the lower edge of the electrode 8 accurately parallel to the adhesive surface of the tactile sensor 3 and the pressure receiving plate 2.

第6図は溝6への脚部3へのはめ合い状況を示す断面図
である。脚部3Aは接着剤を塗布した溝6内に挿入され
るか、ハンプ状電極8は基板1に設けられた電極5と接
し、溝6内には入らない。先に述へたように、バンプ状
電極8の下縁ば、触覚セサ3のバンプ状電極8を設けた
側からみた側面図で、センサ3の一端におけるハンプ状
電極8の基板1表面からの高さbは、他端におりる高さ
Cと等しい。従って触覚センサ3上の受圧板2は基板1
と平行てありさらに複数の受圧板2は同一平面内に位置
する。
FIG. 6 is a sectional view showing how the leg portion 3 is fitted into the groove 6. The leg portion 3A is inserted into the groove 6 coated with adhesive, or the hump-shaped electrode 8 is in contact with the electrode 5 provided on the substrate 1 and does not enter the groove 6. As mentioned above, the lower edge of the bump-shaped electrode 8 is a side view of the tactile sensor 3 seen from the side where the bump-shaped electrode 8 is provided. The height b is equal to the height C below the other end. Therefore, the pressure receiving plate 2 on the tactile sensor 3 is the substrate 1
In addition, the plurality of pressure receiving plates 2 are located in the same plane.

次にこのようにして基板1に接合された触覚センサ3の
ハンプ状電極8と基板1上の電極5との接続について説
明する。
Next, the connection between the hump-shaped electrode 8 of the tactile sensor 3 bonded to the substrate 1 in this manner and the electrode 5 on the substrate 1 will be explained.

電極5およびバンプ状電極8の幅はともに数100μm
程度であり、通常のはんだごては使用できないので、レ
ーザはんた付性を採用する。しかし、レーザ照射によっ
て、バンプ状電極8を構成するはんたハンプを溶融して
も、電極5との良好な接続は得られない。
The width of the electrode 5 and the bump-shaped electrode 8 are both several hundred μm.
Since the soldering iron cannot be used, laser soldering is used. However, even if the solder hump constituting the bump-shaped electrode 8 is melted by laser irradiation, a good connection with the electrode 5 cannot be obtained.

そこで、第8図に示すように、両電極5,8にまたかっ
てポリイミド等の透明なテープ状フィルム9に、所定間
隔置いてあらかしめ銅(Cu)箔にる。
Therefore, as shown in FIG. 8, a transparent tape-like film 9 made of polyimide or the like is placed over both electrodes 5 and 8, and a preheated copper (Cu) foil is placed at a predetermined interval.

この状態の断面図を第9図に示す。しかして、透明なテ
ープ状フィルム9を通してはんたハンプ10に対しレー
ザビーム12を部分的に照射しつつ、レーザビーム12
を移動させると良好なはんだ付後のも、電極13と物の
接触に対する保設膜として、かつ電気的絶縁被膜として
もそのまま使用できるからである。このようにして、は
んだ付の完成した状況を第10図に示す。
A cross-sectional view of this state is shown in FIG. Thus, while partially irradiating the solder hump 10 with the laser beam 12 through the transparent tape-like film 9, the laser beam 12 is
This is because if the electrode 13 is moved, even after good soldering, it can be used as it is as a preservation film to prevent contact between the electrode 13 and an object, and also as an electrically insulating film. FIG. 10 shows the completed soldering process.

次に、本発明接続方法の他の実施例を説明する。Next, another embodiment of the connection method of the present invention will be described.

木実層側にあって幻、第12図および第13図に示すよ
うにテープ状のフィルム9に所定間隔置いてにより、帯
はんた14か溶融して両電極5および8か接続される。
As shown in FIGS. 12 and 13, solder strips 14 are melted on the tape-shaped film 9 at predetermined intervals to connect both electrodes 5 and 8. .

木実層側では、フィルム9の押えと同じに良好なはんた
付か得られるので便利である。
This is convenient because good solder adhesion can be obtained on the wood layer side in the same manner as with the film 9.

[発明の効果] 以上説明したように、本発明によれば、配線基板の上層
部に設けた溝に触覚センサの脚部をはめいが実現し、し
かも両電極との電気的接合部にテープ状フィルムに担持
されたはんたを溶融してはんたイ」けするのて、微細な
直角配線接続が可能となる。この接続方法ははんだと同
しに電極部の保護と絶縁とか可能となり強度と信頼性に
すぐれるので、触覚センサたけてなく、広く電子部品の
立体的実装に極めて有効てあり、工業的価値が大きい。
[Effects of the Invention] As explained above, according to the present invention, it is possible to fit the legs of the tactile sensor into the grooves provided in the upper layer of the wiring board, and to attach tape to the electrical joints with both electrodes. By melting and soldering the solder supported on the shaped film, fine right-angled wiring connections can be made. This connection method can protect and insulate the electrodes in the same way as soldering, and has excellent strength and reliability, so it is not only used for tactile sensors, but also extremely effective for the three-dimensional mounting of a wide range of electronic components, and has great industrial value. big.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例の斜視図、 第2図は触覚センサを説明する斜視図、第3図は触覚セ
ンサと基板の講のはめ合いを説明する斜視図、 第4図は従来の接続方法を説明する断面図、第5図はそ
の側面図、 第6図は本発明の接続方法を説明する断面図、第7図は
その側面図、 第8図は本発明における第1の実施例のはんだ付方法を
説明する斜視図、 付方法を説明する断面図、 第12図はその帯はんだ拡大平面図、 第13図はその断面図である。 1・・・基板、 2・・・受圧板、 3・・・触覚センサ 3A・・・脚部、 4.5・・・電極、 6・・・溝、 6A・・・底面、 7・・・接着剤、 8・・・バンプ状電極、 9・・・テープ状フィルム、 10・・・はんだバンブ、 11・・・配線パターン、 12・・・レーザ射出部、 13・・・はんた何夜の電極、 14・・・帯はんだ、 15・・・加熱固定治具。 ’Ju毬)DA   エズノよ11J質飯塚幸A】 2 貞弘山七ンサ乞り兇明すう4杵キ見図 U−す1才りだ′/すCブイ(の電半弁告pの摩斗イ見
菌第1O図 算2実方牧4タリのHんだl守あ)矢の区子訴ガ図第1
1図 辛7に/7璃挿乏ハ・ター〉劣仏災乎め7第12図 辛qにりず参芳赤バクーン虞乞友ぜ資酌図第13図
Fig. 1 is a perspective view of an embodiment of the present invention, Fig. 2 is a perspective view illustrating a tactile sensor, Fig. 3 is a perspective view illustrating how the tactile sensor and substrate fit together, and Fig. 4 is a perspective view of a conventional tactile sensor. 5 is a side view of the connection method; FIG. 6 is a sectional view of the connection method of the present invention; FIG. 7 is a side view of the connection method; FIG. 8 is a first embodiment of the present invention. FIG. 12 is an enlarged plan view of the band soldering, and FIG. 13 is a sectional view thereof. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Pressure receiving plate, 3... Tactile sensor 3A... Leg part, 4.5... Electrode, 6... Groove, 6A... Bottom surface, 7... Adhesive, 8... Bump-shaped electrode, 9... Tape-shaped film, 10... Solder bump, 11... Wiring pattern, 12... Laser emission part, 13... Soldering part electrode, 14...solder band, 15...heating fixing jig. 'Ju Mari) DA Ezuno yo 11J quality Yuki Iizuka A] 2 Teihiroyama Seven Nsa Begging 兇明su 4 Pestle Mizu U-su 1 year old' / Su C Bui (no Denhan Benpetsu p no Mato Imi Bacteria 1st O Illustration 2 Mikata Maki 4 Tari's Hndl Mamoru) Arrow Ward Child Appeal Fig. 1
Figure 1: 7 to 7 / 7 Lisho, poverty ha, ta〉Lower Buddha disaster, 7 Figure 12: Red Bakun, beggars and friends, give consideration to contributions Figure 13

Claims (1)

【特許請求の範囲】[Claims]  触覚センサにバンプ状電極を設け、基板に設けられて
いる溝内に前記触覚センサの脚部を前記バンプ状電極の
位置まで挿入して該バンプ状電極をら前記基板上に設け
た電極と当接させ、前記脚部と前記基板とを接着した後
、テープ状フィルムに担持されたはんだを前記基板の電
極と前記触角センサのバンプ状電極との接合部に重ね合
わせ、前記テープ状フィルムの上から前記はんだを加熱
溶融し、前記バンプ状電極と前記基板上の電極をはんだ
付けすることを特徴とする触覚センサと基板の接続方法
A bump-shaped electrode is provided on the tactile sensor, and the legs of the tactile sensor are inserted into the groove provided on the substrate up to the position of the bump-shaped electrode, and the bump-shaped electrode is brought into contact with the electrode provided on the substrate. After adhering the leg portions and the substrate, the solder carried on the tape-like film is superimposed on the joint between the electrode of the substrate and the bump-like electrode of the antenna sensor, and the solder is placed on the tape-like film. A method for connecting a tactile sensor and a substrate, comprising heating and melting the solder to solder the bump-shaped electrode and the electrode on the substrate.
JP30118686A 1986-12-19 1986-12-19 Method for connecting tactile sense sensor and substrate Pending JPS63155677A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30118686A JPS63155677A (en) 1986-12-19 1986-12-19 Method for connecting tactile sense sensor and substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30118686A JPS63155677A (en) 1986-12-19 1986-12-19 Method for connecting tactile sense sensor and substrate

Publications (1)

Publication Number Publication Date
JPS63155677A true JPS63155677A (en) 1988-06-28

Family

ID=17893806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30118686A Pending JPS63155677A (en) 1986-12-19 1986-12-19 Method for connecting tactile sense sensor and substrate

Country Status (1)

Country Link
JP (1) JPS63155677A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009516378A (en) * 2005-11-18 2009-04-16 パック テック−パッケージング テクノロジーズ ゲーエムベーハー Method for forming a contact structure between a microelectronic component and a carrier substrate, and an assembly unit formed by this method
JP2015072231A (en) * 2013-10-04 2015-04-16 セイコーエプソン株式会社 Sensor unit, manufacturing method of the same, electronic apparatus and moving body

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153172A (en) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd Sense of contact force sensor
JPS60154574A (en) * 1984-01-23 1985-08-14 Fuji Electric Corp Res & Dev Ltd Sense of pressure sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153172A (en) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd Sense of contact force sensor
JPS60154574A (en) * 1984-01-23 1985-08-14 Fuji Electric Corp Res & Dev Ltd Sense of pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009516378A (en) * 2005-11-18 2009-04-16 パック テック−パッケージング テクノロジーズ ゲーエムベーハー Method for forming a contact structure between a microelectronic component and a carrier substrate, and an assembly unit formed by this method
JP2015072231A (en) * 2013-10-04 2015-04-16 セイコーエプソン株式会社 Sensor unit, manufacturing method of the same, electronic apparatus and moving body

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