JPS63137337U

JPS63137337U -

Info

Publication number: JPS63137337U
Application number: JP3014587U
Authority: JP
Priority date: 1987-03-02
Filing date: 1987-03-02
Publication date: 1988-09-09

Description

[Brief explanation of the drawing]

第１図、第２図はこの考案の合成投影露光装置
の実施例を示し、第１図は正面図、第２図は縦断
側面図である。第３図、第４図はこの考案の合成
投影露光装置の他の実施例を示し、第３図は正面
図、第４図は縦断側面図である。１０……主原稿台ユニツト、１１，５１……主
原稿台、１２，５２……投影露光台、１３，５３
……主レンズ台、１４，５４……主レンズ、１５
，５５……ハーフミラー、２１，６１……副原稿
台、２３，６３……副レンズ台、２４，６４……
副レンズ、３０，７０……主原稿、３２，７２…
…感光材料、４０，８０……副原稿、４２，８２
……主透過原稿用光源、４３，４４，８３，８４
……主反射原稿用光源、４５，８５……副透過原
稿用光源、４６，４７，８６，８７……副透過原
稿用光源、４９……装置本体、５７……主投影機
構、５８……副投影機構、８９……支柱。 1 and 2 show an embodiment of the synthetic projection exposure apparatus of this invention, with FIG. 1 being a front view and FIG. 2 being a longitudinal sectional side view. 3 and 4 show other embodiments of the synthetic projection exposure apparatus of this invention, with FIG. 3 being a front view and FIG. 4 being a longitudinal sectional side view. 10...Main document table unit, 11,51...Main document table, 12,52...Projection exposure table, 13,53
...Main lens stand, 14, 54...Main lens, 15
, 55... Half mirror, 21, 61... Sub-document stand, 23, 63... Sub-lens stand, 24, 64...
Sub-lens, 30, 70...Main original, 32, 72...
...Photosensitive material, 40,80...Supplementary manuscript, 42,82
...Light source for main transparent original, 43, 44, 83, 84
...Main reflection light source for originals, 45, 85...Light source for sub-transmission originals, 46, 47, 86, 87...Light source for sub-transmission originals, 49...Device main body, 57...Main projection mechanism, 58... Sub-projection mechanism, 89...support.

Claims

[Claims for Utility Model Registration] (1) It has a main document table that holds a main document and is equipped with a light source for projecting an image of this document, and a main lens that is disposed in front of the main document table. a main projection mechanism; a sub-document stand that holds a sub-document and is equipped with a light source for projecting an image of the document;
A sub-projection mechanism having a sub-lens disposed in front of the sub-document table is arranged so that the optical axes of the lenses are orthogonal to each other, and a half mirror is placed at the intersection where the optical axes of the lenses intersect perpendicularly. It is arranged at an angle of 45 degrees with respect to either optical axis of the mechanism, and at a common imaging part of the projection image of the main projection mechanism and the projection image of the sub-projection mechanism projected by this half mirror. 1. A composite projection exposure apparatus, characterized in that a projection exposure table is disposed, and the projection images are compositely projected onto the projection exposure table, or a photosensitive material provided on the projection exposure table is subjected to composite exposure. (2) The composite projection exposure apparatus according to claim 1, wherein each of the projection mechanisms has a dimmable light source so that it can be used with either a reflective original or a transparent original.