JPS63134052A - Plasma treating device for sheet material - Google Patents

Abstract

PURPOSE:To enable a long continuous run, to increase the input power, and to increase the throughput of the title device by arranging plural rod electrodes constituting a second discharge electrode in parallel with each other on the peripheral surface of a virtual cylinder covering the surface of a drum-shaped first electrode. CONSTITUTION:The drum-shaped first discharge electrode 2 on the peripheral surface of which a sheet material A travels and the second discharge electrode 3 opposed to the electrode 2 are provided in a vacuum vessel 1. Plural rod electrodes constituting the second discharge electrode 3 are arranged in parallel with each other on the peripheral surface of the virtual cylinder covering the peripheral surface of the electrode 2, both ends of the electrode 3 are collected by a retaining member to form a basket-shaped structure, and both electrodes are retained in the vacuum vessel through an insulating material. As a result, local light emission and the generation of instantaneous abnormal electric discharge are reduced, discharge is stabilized, a long continuous run is made possible, the input power is increased, and the plasma treating device for a sheet material having a large throughput per device can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a plasma processing apparatus for a sheet-like material, and more specifically, a drum-shaped first discharge electrode and a first discharge electrode opposite to the first discharge electrode. A second discharge electrode is provided in a vacuum container, the inside of the vacuum container is maintained in a plasma atmosphere, and a sheet-like material is placed along the outer peripheral surface of the first discharge electrode between the first and second discharge electrodes. The present invention relates to an apparatus for low-temperature plasma processing.

[Conventional technology]

In recent years, plasma treatment has been used to chemically, physically, and mechanically treat sheet materials such as plastic films and fabrics.
It is attracting attention as a treatment method for improving optical or electrical properties or surface structure.

1. Adhesive properties of sheet materials can be improved by plasma treatment.
Improve friction properties, texture, gloss or color fastness,
Or antistatic 1 surface hardening and roughening.

It is known that it can prevent pro-ragging or deepen the color of dyed products.

By the way, a drum-shaped discharge electrode and a plurality of rod-shaped electrodes facing the drum-shaped discharge electrode are provided in a vacuum container, and a sheet-like material is placed in the drum-shaped discharge electrode 1! Along the outer peripheral surface of the electrode, the plurality of rod-shaped electrodes and the drum-shaped electrode [11!
A device for performing low-temperature plasma treatment on a sheet-like material by causing plasma discharge between the poles is disclosed in, for example, Japanese Patent Application Laid-Open No. 57-187.
37.57-195750゜57-195751. 6
It is publicly known from Publication No. 1-228028 and the like.

[Problem that the invention seeks to solve]

However, in conventional plasma processing of this type.

Not only the drum-shaped first discharge electrode but also the second rod-shaped discharge electrode facing the first discharge electrode.

It has a structure that penetrates one side wall of the vacuum container and supports it at one end. That is, regarding the second rod-shaped discharge electrode that is the object of the present invention, (1) the rod-shaped electrode is made to penetrate the vacuum container, and the seal from the outside air at the penetration part is made of an electrically insulating material. However, as the input to the rod-shaped electrode increases, localized light emission and instantaneous abnormal arc discharge occur in the seal area, making the discharge unstable. (2) The rod-shaped electrodes required for industrial equipment, for example, up to 2 meters in length, are extremely heavy and cannot be operated continuously. If it were to be supported at one end, its diameter would be large, and the insulator would have to be correspondingly large, making the entire device large and expensive. (81'! In order to increase the input power of the rod-shaped electrodes, the pitch should be reduced.) Even if we try to increase the number of rod-shaped electrodes, we cannot increase the number due to the aforementioned structure.

(4) Furthermore, the rod-shaped electrode is held at one end.

The unretained end sag over time.

It has drawbacks such as uneven quality of the product.

This invention was made in view of the above-mentioned conventional problems.
Plasma processing equipment for sheet materials with less occurrence of localized light emission and instantaneous abnormal arc discharge, stable discharge, long-term continuous operation, increased input power, and large processing capacity for equipment oil fc. The purpose is to provide.

[Means for solving problems]

' In order to achieve the above object, the sheet material plasma processing apparatus of the present invention includes a drum-shaped first discharge electrode along which the sheet material is placed along the outer peripheral surface, and a second discharge electrode opposite to the first discharge electrode. In a plasma processing apparatus for a sheet-like material in which a discharge electrode is provided inside a vacuum container, the second discharge electrode is arranged such that a plurality of rod electrodes constituting the second discharge electrode are arranged flat in parallel;
The first drum-shaped electrode has a cage-shaped structure in which its ends are held together by holding members so as to line up on the circumferential surface of a virtual cylinder that covers the circumferential surface of the first drum-shaped electrode, and the electrodes are held in a vacuum container at ℃ via an insulating material. Based on the runner-up, we also won the 21st place in the basket type! It is equipped with a cooling means through which a cooling medium passes through the poles.

[For production]

According to this invention, a plurality of rod electrodes are held together by a holding member and are held in a vacuum container, so that (1) there is no longer a structure in which the rod electrodes penetrate the vacuum container; , so local light emission at the penetration part,
(2) It has a structure in which multiple rod electrodes are held at both ends, which prevents the discharge from becoming unstable due to the occurrence of instantaneous abnormal arc discharges, and enables continuous operation with large electric power. Therefore, the diameter of the rod electrode can be made small, and the cost of manufacturing the device can be reduced accordingly. (8) The pitch of the rod electrodes can be reduced, the number of rod electrodes can be dramatically increased, and the input power from the rod electrodes can therefore be dramatically increased. (4) Since the rod electrode is fixed with holding members at both ends, its position does not change over time.

(5) The surface temperature of the rod electrode can be reduced by using a structure in which the cage-shaped discharge electrode or the rod electrode that constitutes the cage-shaped discharge electrode is cooled using a refrigerant. It is possible to keep the temperature constant and uniform, so there is no local temperature rise, that is, the sheet material being processed is not heated abnormally and its quality is not deteriorated, and it is stable for a long time. O that can perform low-temperature plasma processing [Examples] Examples of the present invention will be described below with reference to the drawings.

In FIG. 1 showing an embodiment of the present invention, a vacuum container 1 includes a drum-shaped drum electrode (first discharge electrode) 2, and a number of rod electrodes 3□, 3□ facing the drum electrode 2.
,...3n cage electrodes (second discharge electrodes) 3 are installed in parallel. A voltage is applied between these discharge electrodes 2 and 3 from an AC power source 4 via a transformer 5 and an electric circuit 6 that connects the surface discharge electrodes 2 and 3.

The vacuum container 1 is made of stainless steel and has an internal structure including a gas container 7 filled with plasma processing gas, an inlet pipe 8 thereof, and a vacuum exhaust device 9 and its exhaust pipe 10 for evacuating the inside of the vacuum container 1. It is kept filled with extremely low pressure plasma processing gas. An unwinding machine 11 and a winding machine 13 are installed on the left and right sides of the surface discharge electrode in this vacuum volume "?51," respectively. The winding machine 1
It is wound up in 3. Sheet-like material A of pickle and unwinding machine 11
is continuously subjected to low-temperature plasma treatment on a drum electrode 2 in a vacuum container 1 maintained in a plasma atmosphere, and then transferred to a winder 1.
It is wound up in 3.

In FIG. 2, the cylindrical portion 2c of the drum electrode 2 is fixed to a rotating shaft 15 via a flat insulating member 14. As shown in FIG.

The internal space 2d of the drum electrode 2 is connected to the internal space 1 of the vacuum container 1 by an insulating member 14, rubber rings 16, 17, etc.
a and completely sealed from the atmosphere.

The rotating shaft 15 is driven by a motor (not shown) provided outside the vacuum container 1, and has a penetrating portion 15a1 that penetrates the vacuum container 1 and a left end portion 15b.
It is pivotally supported in the vacuum container 1 via bearings 181L and 19& of bearing parts 18 and 19, respectively. In other words, the rotating shaft 15 passes through the drum electrode 2 and protrudes from the insulating members 14 and 14 forming both side walls of the drum electrode 2, and the mechanical seal 018b is pivotally supported at the protruding parts on both sides. Then, the bearing portion 18
The internal space 1a of the vacuum container 1 is sealed from the atmosphere.

The rotating shaft 15 is provided with a long hole 15g.
A pipe 15h is inserted into the pipe ish, and cooling passages 20 and 21 through which a cooling medium flows are provided inside and outside the pipe ish. A short pipe (piping material) 22 is made of an insulator such as rubber, and communicates the cooling passage 20.21 with the water jacket 2a.

In this embodiment, a slip ring 23 is provided inside the vacuum vessel 1, and this slip ring 23 is connected to a part of the side surface 2e of the drum electrode 2 via a conductive wire 24.

One of the electric circuits 6 is inserted into the vacuum vessel l via an introduction terminal 6a that insulates the true vessel 1 from the electric circuit 6, and rod electrodes 30, 32. . . . is connected to a squirrel cage electrode 3 consisting of 3n. That is, the vacuum container 1 is electrically insulated from the electric circuit 6 and is maintained in a grounded state. Note that the electric circuit 6 and the surface discharge electrodes 2.3 are kept ungrounded and strictly insulated from the vacuum vessel 1.

According to this embodiment, since the side surface of the drum electrode 2 is covered with the insulating member 14, unnecessary plasma discharge to the side surface 2e is prevented. 1. This prevents the temperature from rising in the vicinity of both side surfaces 2e of the drum electrode 20, so that the entire surface of the sheet-like material can be uniformly plasma-treated.

Since the water jacket 2a is connected to the cooling passage 20.21 via the short pipe 22 made of TFC and an insulator, the current flowing from the drum electrode 2 to the rotating shaft 15 through the cooling medium becomes small. In addition, since the drum electrode 2 is assembled in the atmosphere, the internal space 2d of the drum electrode 2 is filled with the atmosphere and is not a plasma atmosphere. Local light emission in the internal space 2d is reduced, and plasma discharge is stabilized.

A large number of rod electrodes 31.3□, . . . , 3n facing the drum electrode 2 (first discharge electrode) have both ends 3
a is fixed to a pair of support members 25, and this support member 25
is supported by the vacuum container via an insulator 28. FIG. 3 provides a rough explanation of the discharge electrode 3 (second discharge electrode) having a cage-shaped structure consisting of a large number of rod electrodes 31 h 32 *..., 3n. A large number of rod electrodes 3□, 3□, . . . , 3n are fixed by support members 251. ．． Support brackets 25□ and 26□, 26□
It is held in the vacuum container l via the insulator 28.

It is preferable that the pitches of the rod electrodes 31, 3□, . It is preferably three times or less the average outer diameter of the rod electrode.

Rod electrodes 30.3□, ......, anf: The support members 25□, 25□ arranged and fixed on the virtual cylindrical peripheral surface are:
It is also possible to make it possible to divide the assembly into two or more parts for reasons such as manufacturing or maintenance work.

27□ and 27□ in FIGS. 1 and 3 indicate a refrigerant supply port and a refrigerant discharge port, respectively. In other words, Figure 1 shows a diagram in which the entire squirrel cage electrode 3 can be cooled with a cooling medium, and the rod electrodes 30, 3 □, . . .
3n is provided with a coolant passage through which a cooling medium passes, and the supporting member 25 is attached to the rod electrode 31°3□, . . .
..., 3n is provided with a refrigerant passage for supplying and discharging refrigerant. Also, this refrigerant supply port 2
78.272 can be connected to the refrigerant supply and drain pipes through insulating short pipes (not shown) each made of an insulating material with a thickness of 30 mm or more.
The occurrence of local light emission and instantaneous abnormal arc discharge can be greatly reduced compared to the case where the insulating short brush is not used.

Figures 4 and 5 show a squirrel cage electrode 3 equipped with a cooling means.
FIG. 4 is a front view of the squirrel cage electrode 3, and FIG. 5 is a side view thereof.

In this embodiment, refrigerant passages 31a, 32a,
......, each rod electrode 31, 3□, with 3na provided.
...j 3n is welded and fixed in a cage shape so that its refrigerant passage follows the refrigerant passage of the support member provided with the refrigerant passages 25□a and 25□a, but they are not arranged in parallel. In such a way that the refrigerant passages of each rod electrode are connected in series,
A refrigerant passage in the support member is partitioned by a partition plate 29.

6 and 7 show a squirrel cage electrode 3 equipped with a cooling means.
FIG. 6 is a front view of the squirrel cage electrode, and FIG. 7 is a side view of the same. In this example, the partition plate 29 in the previous example is removed, and in this example, the refrigerant passage of one support member serves as a common inlet side cooling path for the refrigerant passage of each rod electrode. , the refrigerant passage of the other support member serves as a common exit side cooling passage of the refrigerant passages of the respective rod electrodes.

FIG. 8 is a diagram of yet another embodiment of the corner-shaped electrode 3 provided with cooling means, and corresponds to FIG. 7. FIG. 6 is a partially enlarged cross-sectional view of a connecting portion between the support member 25 and each of the three rod electrodes. In this embodiment, an orifice 3 is provided in the refrigerant passage 3xa of the rod electrode.
0, and the refrigerant sent from one side of the support member 25□ to each rod-shaped electrode is distributed and supplied to each rod electrode in a proportional manner.

That is, in this invention, the second discharge electrode consisting of a plurality of rod electrodes facing the drum-shaped first discharge electrode,
As explained in the previous embodiment, since the structure is such that the plurality of rod electrodes are held together by the support member, there is no structure in which the rod electrodes penetrate the vacuum container, and therefore the discharge in the case of the penetrating structure is eliminated. The disadvantage of instability can be fundamentally solved, and the diameter of the four-rod electrode can be made small, and the pitch can be made small. , because it can be placed around the drum-shaped first discharge electrode.

This makes it possible to perform plasma processing efficiently by applying large input power, and furthermore, by using a refrigerant to maintain the surface temperature of the cage-shaped electrode at a constant and uniform temperature, it can be extended to a longer period of time. This enables time-stable continuous processing, and the present invention greatly improves the practicality of an industrial plasma processing apparatus.

〔Effect of the invention〕

As explained above, according to the present invention, it is possible to prevent power wastage in a plasma processing apparatus for sheet-shaped materials that consumes a large amount of power, and also prevent abnormal arc discharge and stabilize discharge, so that the processing apparatus By increasing the input power, a large throughput of υ per device is obtained, that is, an industrial throughput is obtained, and continuous operation of the system becomes possible.

Although the explanation so far has been given with respect to the patch device shown in FIG. 1, this invention has the following advantages: 1. Unwinder 1 in Figure 1
1 and a winder 13 are arranged in a vacuum container 1 in which a drum electrode 2 and a squirrel cage electrode 3 are arranged. It is a hot theory that this also applies to equipment.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram showing an example of this explanation, FIG. 2 is a longitudinal sectional view of FIG. 1, FIG. 3 is a perspective view of a squirrel cage electrode, and FIG.
The figures are a partially cut-away front view of a squirrel cage electrode equipped with a cooling means, FIG. 5 is a partially cut-away side view, and FIG.
The figure is a partially cut-away front view of a squirrel cage electrode equipped with another cooling means, and FIG. 7 is a partially cut-away side view,
FIG. 8 is a partial sectional view of the squirrel cage electrode showing yet another cooling means. 1... Vacuum container, 1a... Internal space, 2... First
discharge electrode (drum electrode), 2a...cooling passage (water jacket), 2b...side wall part, 2C...cylindrical part, 2
d...inner space, 26...side surface, 3...second discharge electrode (rod electrode), 3a...refrigerant passage, 6...electric circuit, 7...gas supply source ( gas container), 14...
Insulating member, 15...Rotating shaft, 15L, 15b...Protrusion part (penetrating part, left end part), 20.21...Cooling passage,
22... Piping material (short pipe), 25... Supporting member, 2
5a... Refrigerant passage, 26... Refrigerant supply/discharge port, 27...
・Support bracket, 28... Insulator, 29... Refrigerant passage partition plate, 30... Refrigerant chair 1 A... Nto autumn item

Claims (1)

[Claims] 1. A drum-shaped first discharge electrode having a sheet-like material along its outer peripheral surface, and a second discharge electrode facing the first discharge electrode are provided inside a vacuum container. In the plasma processing apparatus for a sheet-like material, the second discharge electrode is arranged such that a plurality of rod electrodes constituting the second discharge electrode are arranged parallel to each other and on a virtual cylindrical circumferential surface that covers the circumferential surface of the first drum-shaped electrode. A plasma processing apparatus 2 for a sheet-like material having a cage-shaped structure, which is held together by holding members at both ends thereof and held in a vacuum container via an insulating material, as shown in FIG. The rod electrode has a refrigerant passage therein through which a cooling medium passes, and the support member constitutes a cooling path that sequentially connects the refrigerant passages of the rod electrode in series. In the plasma processing apparatus 3 for sheet-like material according to item 1, the rod electrodes constituting the cage structure have a refrigerant passage therein through which a cooling medium passes, and the support member is provided on each inlet side of the refrigerant passage of the rod electrode. and a cooling path connecting each outlet side in parallel.